| Patent | Date |
|---|
Semiconductor apparatus having stacked gates and method of manufacture thereof
Grant 11,444,082 - Smith , et al. September 13, 2 | 2022-09-13 |
Localized Stress Regions For Three-dimension Chiplet Formation
App 20220238328 - DEVILLIERS; Anton J. ; et al. | 2022-07-28 |
Localized Stress Regions For Three-dimension Chiplet Formation
App 20220238380 - DEVILLIERS; Anton J. ; et al. | 2022-07-28 |
Self-aligned contacts for 3D logic and memory
Grant 11,335,599 - Liebmann , et al. May 17, 2 | 2022-05-17 |
Method for planarization of spin-on and CVD-deposited organic films
Grant 11,335,566 - Fulford , et al. May 17, 2 | 2022-05-17 |
Substrate Holding Apparatus and Method for Shape Metrology
App 20220143786 - Kang; Hoyoung ; et al. | 2022-05-12 |
Method For Threshold Voltage Tuning Through Selective Deposition Of High-k Metal Gate (hkmg) Film Stacks
App 20220148924 - SMITH; Jeffrey ; et al. | 2022-05-12 |
Coaxial Contacts For 3d Logic And Memory
App 20220130864 - Liebmann; Lars ; et al. | 2022-04-28 |
Architecture Design And Processes For Manufacturing Monolithically Integrated 3d Cmos Logic And Memory
App 20220085012 - Liebmann; Lars ; et al. | 2022-03-17 |
Reverse contact and silicide process for three-dimensional logic devices
Grant 11,264,274 - Smith , et al. March 1, 2 | 2022-03-01 |
Method for threshold voltage tuning through selective deposition of high-K metal gate (HKMG) film stacks
Grant 11,264,289 - Smith , et al. March 1, 2 | 2022-03-01 |
Coaxial See-through Alignment Imaging System
App 20220050388 - DEVILLIERS; Anton J. ; et al. | 2022-02-17 |
Tunable Wavelength See-through Layer Stack
App 20220050385 - DEVILLIERS; Anton J. | 2022-02-17 |
Method For Producing Overlay Results With Absolute Reference For Semiconductor Manufacturing
App 20220050384 - DEVILLIERS; Anton J. | 2022-02-17 |
Formation Of Low-temperature And High-temperature In-situ Doped Source And Drain Epitaxy Using Selective Heating For Wrap-around Contact And Vertically Stacked Device Architectures
App 20220051905 - SMITH; Jeffrey ; et al. | 2022-02-17 |
Architecture For Monolithic 3d Integration Of Semiconductor Devices
App 20220052038 - LIEBMANN; Lars ; et al. | 2022-02-17 |
Method Of Pattern Alignment For Field Stitching
App 20220050393 - DEVILLIERS; Anton J. | 2022-02-17 |
Method For Producing Overlay Results With Absolute Reference For Semiconductor Manufacturing
App 20220051951 - DEVILLIERS; Anton J. | 2022-02-17 |
Coaxial See-through Inspection System
App 20220050386 - DEVILLIERS; Anton J. ; et al. | 2022-02-17 |
Substrate holding apparatus and method for shape metrology
Grant 11,247,309 - Kang , et al. February 15, 2 | 2022-02-15 |
Coaxial contacts for 3D logic and memory
Grant 11,251,200 - Liebmann , et al. February 15, 2 | 2022-02-15 |
Architecture design of monolithically integrated 3D CMOS logic and memory
Grant 11,217,583 - Liebmann , et al. January 4, 2 | 2022-01-04 |
Method To Form Narrow Slot Contacts
App 20210391180 - Murphy; Michael ; et al. | 2021-12-16 |
Architecture for monolithic 3D integration of semiconductor devices
Grant 11,201,148 - Liebmann , et al. December 14, 2 | 2021-12-14 |
Method for layer by layer growth of conformal films
Grant 11,201,051 - Grzeskowiak , et al. December 14, 2 | 2021-12-14 |
Method For Pattern Reduction Using A Staircase Spacer
App 20210366713 - FULFORD; Daniel ; et al. | 2021-11-25 |
Method For Pattern Reduction Using A Staircase Spacer
App 20210366714 - FULFORD; Daniel ; et al. | 2021-11-25 |
Backside Deposition Tuning Of Stress To Control Wafer Bow In Semiconductor Processing
App 20210366792 - FULFORD; Daniel ; et al. | 2021-11-25 |
Method For Die-level Unique Authentication And Serialization Of Semiconductor Devices Using Electrical And Optical Marking
App 20210351053 - FULFORD; H. Jim ; et al. | 2021-11-11 |
Power Distribution Network For 3d Logic And Memory
App 20210351132 - Liebmann; Lars ; et al. | 2021-11-11 |
High performance circuit applications using stacked 3D metal lines
Grant 11,171,208 - Fulford , et al. November 9, 2 | 2021-11-09 |
System and Method for Liquid Dispense and Coverage Control
App 20210339276 - VUKOVIC; Mirko ; et al. | 2021-11-04 |
Method for die-level unique authentication and serialization of semiconductor devices using electrical and optical marking
Grant 11,133,206 - Fulford , et al. September 28, 2 | 2021-09-28 |
Horizontal Programmable Conducting Bridges Between Conductive Lines
App 20210287980 - Fulford; H. Jim ; et al. | 2021-09-16 |
Power distribution network for 3D logic and memory
Grant 11,114,381 - Liebmann , et al. September 7, 2 | 2021-09-07 |
Method for patterning a substrate using a layer with multiple materials
Grant 11,107,682 - deVilliers August 31, 2 | 2021-08-31 |
Phase mixture temperature controlled hot plate
Grant 11,101,152 - deVilliers August 24, 2 | 2021-08-24 |
Horizontal programmable conducting bridges between conductive lines
Grant 11,069,616 - Fulford , et al. July 20, 2 | 2021-07-20 |
3d Complementary Metal Oxide Semiconductor (cmos) Device And Method Of Forming The Same
App 20210202481 - FULFORD; H. Jim ; et al. | 2021-07-01 |
Atmospheric plasma processing systems and methods for manufacture of microelectronic workpieces
Grant 11,049,700 - deVilliers , et al. June 29, 2 | 2021-06-29 |
High Performance Circuit Applications Using Stacked 3d Metal Lines
App 20210175327 - FULFORD; H. Jim ; et al. | 2021-06-10 |
System and method for temperature control in plasma processing system
Grant 10,998,244 - deVilliers May 4, 2 | 2021-05-04 |
Reverse Contact And Silicide Process For Three-dimensional Logic Devices
App 20210098306 - Smith; Jeffrey ; et al. | 2021-04-01 |
Three-dimensional semiconductor device including integrated circuit, transistors and transistor components and method of fabrication
Grant 10,964,706 - Smith , et al. March 30, 2 | 2021-03-30 |
Method Of Forming A Narrow Trench
App 20210088904 - DEVILLIERS; Anton J. ; et al. | 2021-03-25 |
System and method for fluid dispense and coverage control
Grant 10,946,411 - deVilliers March 16, 2 | 2021-03-16 |
Extension region for a semiconductor device
Grant 10,930,764 - Tapily , et al. February 23, 2 | 2021-02-23 |
Method for increasing pattern density on a wafer
Grant 10,923,363 - Das , et al. February 16, 2 | 2021-02-16 |
Method for Increasing Pattern Density on a Wafer
App 20210035815 - Das; Sanjana ; et al. | 2021-02-04 |
Semiconductor Apparatus Having Stacked Gates And Method Of Manufacture Thereof
App 20210028169 - Smith; Jeffrey ; et al. | 2021-01-28 |
Method For Tuning Stress Transitions Of Films On A Substrate
App 20210020435 - FULFORD; Daniel ; et al. | 2021-01-21 |
Method For Planarization Of Spin-on And Cvd-deposited Organic Films
App 20210020453 - FULFORD; Daniel ; et al. | 2021-01-21 |
Method For Threshold Voltage Tuning Through Selective Deposition Of High-k Metal Gate (hkmg) Film Stacks
App 20210013111 - SMITH; Jeffrey ; et al. | 2021-01-14 |
Self-aligned Contacts For 3d Logic And Memory
App 20200373203 - Liebmann; Lars ; et al. | 2020-11-26 |
Coaxial Contacts For 3d Logic And Memory
App 20200373330 - Liebmann; Lars ; et al. | 2020-11-26 |
Horizontal Programmable Conducting Bridges Between Conductive Lines
App 20200365507 - Fulford; H. Jim ; et al. | 2020-11-19 |
Multi-dimensional Vertical Switching Connections For Connecting Circuit Elements
App 20200365506 - Gardner; Mark I. ; et al. | 2020-11-19 |
Programmable Connection Segment And Method Of Forming The Same
App 20200365511 - Gardner; Mark I. ; et al. | 2020-11-19 |
Semiconductor apparatus having stacked gates and method of manufacture thereof
Grant 10,833,078 - Smith , et al. November 10, 2 | 2020-11-10 |
Location-specific tuning of stress to control bow to control overlay in semiconductor processing
Grant 10,811,265 - deVilliers October 20, 2 | 2020-10-20 |
Method For Die-level Unique Authentication And Serialization Of Semiconductor Devices Using Electrical And Optical Marking
App 20200328103 - FULFORD; H. Jim ; et al. | 2020-10-15 |
Method For Die-level Unique Authentication And Serialization Of Semiconductor Devices
App 20200328102 - SCHEPIS; Anthony ; et al. | 2020-10-15 |
Method of advanced contact hole pattering
Grant 10,734,229 - deVilliers , et al. | 2020-08-04 |
High-purity dispense unit
Grant 10,712,663 - deVilliers , et al. | 2020-07-14 |
Method For Layer By Layer Growth Of Conformal Films
App 20200152448 - GRZESKOWIAK; Jodi ; et al. | 2020-05-14 |
Method for patterning a substrate using extreme ultraviolet lithography
Grant 10,606,176 - deVilliers | 2020-03-31 |
Extension Region For A Semiconductor Device
App 20200098897 - Tapily; Kandabara ; et al. | 2020-03-26 |
Buried power rails
Grant 10,586,765 - Smith , et al. | 2020-03-10 |
Method And System For Prevention Of Metal Contamination By Using A Self-assembled Monolayer Coating
App 20200073244 - Kang; Hoyoung ; et al. | 2020-03-05 |
Method To Vertically Route A Logic Cell Incorporating Stacked Transistors In A Three Dimensional Logic Device
App 20200075574 - SMITH; Jeffrey ; et al. | 2020-03-05 |
Architecture Design And Processes For Manufacturing Monolithically Integrated 3d Cmos Logic And Memory
App 20200075592 - Liebmann; Lars ; et al. | 2020-03-05 |
Power Distribution Network For 3d Logic And Memory
App 20200075489 - Liebmann; Lars ; et al. | 2020-03-05 |
Method For Patterning A Substarate Using A Layer With Multiple Materials
App 20200066522 - deVilliers; Anton J. | 2020-02-27 |
Three-dimensional semiconductor device and method of fabrication
Grant 10,573,655 - Smith , et al. Feb | 2020-02-25 |
Location-specific Tuning Of Stress To Control Bow To Control Overlay In Semiconductor Processing
App 20200058509 - deVilliers; Anton J. | 2020-02-20 |
Critical dimension control by use of photo-sensitized chemicals or photo-sensitized chemically amplified resist
Grant 10,551,743 - Carcasi , et al. Fe | 2020-02-04 |
Extension region for a semiconductor device
Grant 10,529,830 - Tapily , et al. J | 2020-01-07 |
Semiconductor device structures
Grant 10,522,461 - Olson , et al. Dec | 2019-12-31 |
Critical dimension control by use of a photo agent
Grant 10,522,428 - deVilliers , et al. Dec | 2019-12-31 |
Location-specific tuning of stress to control bow to control overlay in semiconductor processing
Grant 10,475,657 - deVilliers Nov | 2019-11-12 |
Method for patterning a substrate using a layer with multiple materials
Grant 10,460,938 - deVilliers Oc | 2019-10-29 |
Three-dimensional Semiconductor Device Including Integrated Circuit, Transistors And Transistor Components And Method Of Fabrica
App 20190326301 - SMITH; Jeffrey ; et al. | 2019-10-24 |
Location-specific tuning of stress to control bow to control overlay in semiconductor processing
Grant 10,453,692 - deVilliers , et al. Oc | 2019-10-22 |
Location-specific tuning of stress to control bow to control overlay in semiconductor processing
Grant 10,431,468 - deVilliers , et al. O | 2019-10-01 |
Phase Mixture Temperature Controlled Hot Plate
App 20190287827 - deVilliers; Anton J. | 2019-09-19 |
Substrate Holding Apparatus and Method for Shape Metrology
App 20190283218 - Kang; Hoyoung ; et al. | 2019-09-19 |
System and Method for Tuning Thickness of Resist Films
App 20190287793 - deVilliers; Anton J. ; et al. | 2019-09-19 |
High-purity dispense system
Grant 10,403,501 - deVilliers , et al. Sep | 2019-09-03 |
Method for patterning a substrate using a layer with multiple materials
Grant 10,366,890 - deVilliers , et al. July 30, 2 | 2019-07-30 |
System and Method for Fluid Dispense and Coverage Control
App 20190217327 - deVilliers; Anton J. | 2019-07-18 |
System and Method for Fluid Dispense and Coverage Control
App 20190217325 - deVilliers; Anton J. | 2019-07-18 |
System and Method for Fluid Dispense and Coverage Control
App 20190217326 - deVilliers; Anton J. | 2019-07-18 |
System and Method for Fluid Dispense and Coverage Control
App 20190217328 - deVilliers; Anton J. | 2019-07-18 |
High-precision dispense system with meniscus control
Grant 10,354,872 - deVilliers , et al. July 16, 2 | 2019-07-16 |
Method of Advanced Contact Hole Patterning
App 20190214256 - deVilliers; Anton J. ; et al. | 2019-07-11 |
System and method for planarizing a substrate
Grant 10,338,466 - deVilliers | 2019-07-02 |
Method for patterning a substrate using a layer with multiple materials
Grant 10,332,744 - deVilliers , et al. | 2019-06-25 |
Semiconductor Apparatus Having Stacked Gates And Method Of Manufacture Thereof
App 20190172828 - SMITH; Jeffrey ; et al. | 2019-06-06 |
System And Method For Temperature Control In Plasma Processing System
App 20190051568 - DEVILLIERS; Anton J. | 2019-02-14 |
Critical Dimension Control By Use Of A Photo Agent
App 20190043765 - deVilliers; Anton J. ; et al. | 2019-02-07 |
Method And System For Forming Memory Fin Patterns
App 20190027481 - Kang; Hoyoung ; et al. | 2019-01-24 |
Buried Power Rails
App 20180374791 - SMITH; Jeffrey ; et al. | 2018-12-27 |
Semiconductor Device Structures
App 20180366406 - Olson; Adam L. ; et al. | 2018-12-20 |
Location-specific tuning of stress to control bow to control overlay in semiconductor processing
Grant 10,157,747 - deVilliers Dec | 2018-12-18 |
System and method for temperature control in plasma processing system
Grant 10,147,655 - deVilliers De | 2018-12-04 |
Method and system for forming memory fin patterns
Grant 10,115,726 - Kang , et al. October 30, 2 | 2018-10-30 |
Methods of forming etch masks for sub-resolution substrate patterning
Grant 10,103,032 - deVilliers October 16, 2 | 2018-10-16 |
Critical dimension control by use of a photo agent
Grant 10,096,528 - deVilliers , et al. October 9, 2 | 2018-10-09 |
Methods of sub-resolution substrate patterning
Grant 10,083,842 - deVilliers , et al. September 25, 2 | 2018-09-25 |
Methods of forming a mask for substrate patterning
Grant 10,061,199 - deVilliers August 28, 2 | 2018-08-28 |
Method and system for a spiral mixer
Grant 10,035,113 - Nasman , et al. July 31, 2 | 2018-07-31 |
Semiconductor device structures
Grant 10,032,719 - Olson , et al. July 24, 2 | 2018-07-24 |
Methods of forming etch masks for sub-resolution substrate patterning
Grant 10,020,196 - deVilliers July 10, 2 | 2018-07-10 |
Method for patterning incorporating misalignment error protection
Grant 9,989,846 - deVilliers , et al. June 5, 2 | 2018-06-05 |
Inline dispense capacitor system
Grant 9,987,655 - deVilliers , et al. June 5, 2 | 2018-06-05 |
System and method for shifting critical dimensions of patterned films
Grant 9,977,339 - deVilliers , et al. May 22, 2 | 2018-05-22 |
Methods of Sub-Resolution Substrate Patterning
App 20180138051 - deVilliers; Anton J. ; et al. | 2018-05-17 |
Atmospheric Plasma Processing Systems And Methods For Manufacture Of Microelectronic Workpieces
App 20180096827 - deVilliers; Anton J. ; et al. | 2018-04-05 |
Negative tone developer compatible photoresist composition and methods of use
Grant 9,921,478 - deVilliers March 20, 2 | 2018-03-20 |
Location-Specific Tuning of Stress to Control Bow to Control Overlay In Semiconductor Processing
App 20180068861 - deVilliers; Anton J. | 2018-03-08 |
Location-Specific Tuning of Stress to Control Bow to Control Overlay In Semiconductor Processing
App 20180068859 - deVilliers; Anton J. ; et al. | 2018-03-08 |
Location-Specific Tuning of Stress to Control Bow to Control Overlay In Semiconductor Processing
App 20180068860 - deVilliers; Anton J. ; et al. | 2018-03-08 |
Location-Specific Tuning of Stress to Control Bow to Control Overlay In Semiconductor Processing
App 20180067403 - deVilliers; Anton J. | 2018-03-08 |
High-Precision Dispense System With Meniscus Control
App 20180047563 - deVilliers; Anton J. ; et al. | 2018-02-15 |
High-Purity Dispense Unit
App 20180046082 - deVilliers; Anton J. ; et al. | 2018-02-15 |
High-Purity Dispense System
App 20180047562 - deVilliers; Anton J. ; et al. | 2018-02-15 |
Extension Region For A Semiconductor Device
App 20180047832 - TAPILY; Kandabara ; et al. | 2018-02-15 |
Self-alignment of metal and via using selective deposition
Grant 9,837,314 - Smith , et al. December 5, 2 | 2017-12-05 |
Method for Patterning a Substrate Using a Layer with Multiple Materials
App 20170338116 - deVilliers; Anton J. ; et al. | 2017-11-23 |
Method for correcting wafer bow from overlay
Grant 9,824,894 - deVilliers November 21, 2 | 2017-11-21 |
Critical Dimension Control By Use Of Photo-sensitized Chemicals Or Photo-sensitized Chemically Amplified Resist
App 20170329229 - Carcasi; Michael A. ; et al. | 2017-11-16 |
Critical Dimension Control By Use Of A Photo Agent
App 20170330806 - deVilliers; Anton J. ; et al. | 2017-11-16 |
Methods of forming etch masks for sub-resolution substrate patterning
Grant 9,818,611 - deVilliers November 14, 2 | 2017-11-14 |
Method for Patterning a Substrate Using a Layer with Multiple Materials
App 20170316939 - deVilliers; Anton J. ; et al. | 2017-11-02 |
Method for Patterning a Substrate Using a Layer with Multiple Materials
App 20170301552 - deVilliers; Anton J. | 2017-10-19 |
System and Method for Temperature Control in Plasma Processing System
App 20170278761 - deVilliers; Anton J. | 2017-09-28 |
Semiconductor Device Structures
App 20170263552 - Olson; Adam L. ; et al. | 2017-09-14 |
Direct current superposition freeze
Grant 9,760,008 - deVilliers September 12, 2 | 2017-09-12 |
Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate
Grant 9,741,580 - Sipani , et al. August 22, 2 | 2017-08-22 |
Substrate tuning system and method using optical projection
Grant 9,735,067 - deVilliers , et al. August 15, 2 | 2017-08-15 |
Self-Alignment of Metal and Via Using Selective Deposition
App 20170221760 - Smith; Jeffrey ; et al. | 2017-08-03 |
Method of patterning without dummy gates
Grant 9,721,793 - Smith , et al. August 1, 2 | 2017-08-01 |
Substrate backside texturing
Grant 9,711,419 - Fonseca , et al. July 18, 2 | 2017-07-18 |
Method of patterning incorporating overlay error protection
Grant 9,673,050 - deVilliers , et al. June 6, 2 | 2017-06-06 |
Semiconductor device structures
Grant 9,666,531 - Olson , et al. May 30, 2 | 2017-05-30 |
Methods of Forming Etch Masks for Sub-Resolution Substrate Patterning
App 20170148637 - deVilliers; Anton J. | 2017-05-25 |
Method for using post-processing methods for accelerating EUV lithography
Grant 9,653,319 - deVilliers , et al. May 16, 2 | 2017-05-16 |
Methods for treating a substrate by optical projection of a correction pattern based on a detected spatial heat signature of the substrate
Grant 9,646,898 - deVilliers , et al. May 9, 2 | 2017-05-09 |
Critical dimension control in photo-sensitized chemically-amplified resist
Grant 9,645,495 - deVilliers May 9, 2 | 2017-05-09 |
Method of forming a mask for substrate patterning
Grant 9,646,845 - deVilliers May 9, 2 | 2017-05-09 |
Substrate tuning system and method using optical projection
Grant 9,645,391 - deVilliers May 9, 2 | 2017-05-09 |
Method for uncovering underlying alignment patterns
Grant 9,620,383 - deVilliers April 11, 2 | 2017-04-11 |
Method for Patterning a Substrate Using Extreme Ultraviolet Lithography
App 20170090290 - deVilliers; Anton J. | 2017-03-30 |
Methods of Forming Etch Masks for Sub-Resolution Substrate Patterning
App 20170092496 - deVilliers; Anton J. | 2017-03-30 |
Methods of Forming Etch Masks for Sub-Resolution Substrate Patterning
App 20170092506 - deVilliers; Anton J. | 2017-03-30 |
Patterning a substrate using grafting polymer material
Grant 9,595,441 - deVilliers , et al. March 14, 2 | 2017-03-14 |
Methods for forming semiconductor devices and semiconductor device structures
Grant 9,583,381 - Khurana , et al. February 28, 2 | 2017-02-28 |
Method of Patterning Without Dummy Gates
App 20170040162 - Smith; Jeffrey ; et al. | 2017-02-09 |
Methods of Forming a Mask for Substrate Patterning
App 20160377982 - deVilliers; Anton J. | 2016-12-29 |
Inline Dispense Capacitor System
App 20160375459 - deVilliers; Anton J. ; et al. | 2016-12-29 |
Semiconductor Device Structures
App 20160307839 - Olson; Adam L. ; et al. | 2016-10-20 |
System and Method for Planarizing a Substrate
App 20160300726 - deVilliers; Anton J. | 2016-10-13 |
Method for creating contacts in semiconductor substrates
Grant 9,466,527 - deVilliers October 11, 2 | 2016-10-11 |
Method for patterning a substrate for planarization
Grant 9,437,447 - deVilliers September 6, 2 | 2016-09-06 |
Method for Patterning Incorporating Misalignment Error Protection
App 20160246172 - deVilliers; Anton J. ; et al. | 2016-08-25 |
Method for Patterning Using a Composite Pattern
App 20160246171 - deVilliers; Anton J. ; et al. | 2016-08-25 |
Method for patterning contact openings on a substrate
Grant 9,406,526 - deVilliers August 2, 2 | 2016-08-02 |
Self-aligned patterning using directed self-assembly of block copolymers
Grant 9,396,958 - Metz , et al. July 19, 2 | 2016-07-19 |
Methods of forming openings in semiconductor structures
Grant 9,396,996 - Olson , et al. July 19, 2 | 2016-07-19 |
Method for chemical polishing and planarization
Grant 9,378,974 - deVilliers June 28, 2 | 2016-06-28 |
Patterning a Substrate Using Grafting Polymer Material
App 20160181100 - deVilliers; Anton J. ; et al. | 2016-06-23 |
Method of Forming a Mask for Substrate Patterning
App 20160181115 - deVilliers; Anton J. | 2016-06-23 |
Substrate Tuning System and Method Using Optical Projection
App 20160147164 - deVilliers; Anton J. | 2016-05-26 |
Substrate Backside Texturing
App 20160141169 - Fonseca; Carlos A. ; et al. | 2016-05-19 |
Defect-less directed self-assembly
Grant 9,340,411 - deVilliers May 17, 2 | 2016-05-17 |
Method of Patterning Incorporating Overlay Error Protection
App 20160133464 - deVilliers; Anton J. ; et al. | 2016-05-12 |
Self-Aligned Patterning using Directed Self-Assembly of Block Copolymers
App 20160104628 - Metz; Andrew W. ; et al. | 2016-04-14 |
Methods for forming resist features and arrays of aligned, elongate resist features
Grant 9,291,907 - Jain , et al. March 22, 2 | 2016-03-22 |
Critical Dimension Control in Photo-Sensitized Chemically-Amplified Resist
App 20160048080 - deVilliers; Anton J. | 2016-02-18 |
Substrate Backside Texturing
App 20160043007 - Fonseca; Carlos A. ; et al. | 2016-02-11 |
Method for multiplying pattern density by crossing multiple patterned layers
Grant 9,240,329 - deVilliers January 19, 2 | 2016-01-19 |
Negative Tone Developer Compatible Photoresist Composition and Methods of Use
App 20160011516 - deVilliers; Anton J. | 2016-01-14 |
Method for Uncovering Underlying Alignment Patterns
App 20160013069 - deVilliers; Anton J. | 2016-01-14 |
Negative Tone Developer Compatible Photoresist Composition and Methods of Use
App 20160011507 - deVilliers; Anton J. | 2016-01-14 |
Methods Of Forming Openings In Semiconductor Structures
App 20150380307 - Olson; Adam L. ; et al. | 2015-12-31 |
Methods of forming a reversed pattern in a substrate, and related semiconductor device structures
Grant 9,209,039 - Jain , et al. December 8, 2 | 2015-12-08 |
Method For Patterning Contact Openings On A Substrate
App 20150294878 - deVilliers; Anton J. | 2015-10-15 |
Method for Correcting Wafer Bow from Overlay
App 20150294917 - deVilliers; Anton J. | 2015-10-15 |
Semiconductor device structures
Grant 9,142,504 - Olson , et al. September 22, 2 | 2015-09-22 |
Method for Creating Contacts in Semiconductor Substrates
App 20150243554 - deVilliers; Anton J. | 2015-08-27 |
Method For Multiplying Pattern Density By Crossing Multiple Patterned Layers
App 20150243518 - deVilliers; Anton J. | 2015-08-27 |
Method for Patterning a Substrate for Planarization
App 20150243519 - deVilliers; Anton J. | 2015-08-27 |
System and Method for Shifting Critical Dimensions of Patterned Films
App 20150212421 - deVilliers; Anton J. ; et al. | 2015-07-30 |
Defect-less Directed Self-Assembly
App 20150210812 - deVilliers; Anton J. | 2015-07-30 |
Systems and Methods for Generating Backside Substrate Texture Maps for Determining Adjustments for Front Side Patterning
App 20150211836 - deVilliers; Anton J. ; et al. | 2015-07-30 |
Active Filter Technology for Photoresist Dispense System
App 20150209707 - deVilliers; Anton J. | 2015-07-30 |
Substrate Mask Patterns, Methods Of Forming A Structure On A Substrate, Methods Of Forming A Square Lattice Pattern From An Oblique Lattice Pattern, And Methods Of Forming A Pattern On A Substrate
App 20150206760 - Sipani; Vishal ; et al. | 2015-07-23 |
Direct Current Superposition Freeze
App 20150160557 - deVilliers; Anton J. | 2015-06-11 |
Substrate Tuning System and Method Using Optical Projection
App 20150146178 - deVilliers; Anton J. ; et al. | 2015-05-28 |
Substrate Tuning System and Method Using Optical Projection
App 20150147827 - deVilliers; Anton J. ; et al. | 2015-05-28 |
Method for Chemical Polishing and Planarization
App 20150140825 - deVilliers; Anton J. | 2015-05-21 |
Method for Using Post-Processing Methods for Accelerating EUV Lithography
App 20150132965 - deVilliers; Anton J. ; et al. | 2015-05-14 |
Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Photolithography
App 20150015860 - Light; Scott L. ; et al. | 2015-01-15 |
Methods For Forming Sub-resolution Features In Semiconductor Devices
App 20140370684 - Khurana; Ranjan ; et al. | 2014-12-18 |
Semiconductor Device Structures
App 20140353803 - Olson; Adam L. ; et al. | 2014-12-04 |
Methods Of Forming A Reversed Pattern In A Substrate, And Related Semiconductor Device Structures
App 20140299971 - Jain; Kaveri ; et al. | 2014-10-09 |
Methods of forming a pattern on a substrate
Grant 8,846,517 - Sipani , et al. September 30, 2 | 2014-09-30 |
Methods of forming features in semiconductor device structures
Grant 8,815,752 - Olson , et al. August 26, 2 | 2014-08-26 |
Methods of forming a reversed pattern in a substrate
Grant 8,758,987 - Jain , et al. June 24, 2 | 2014-06-24 |
Methods Of Forming Features In Semiconductor Device Structures
App 20140145311 - Olson; Adam L. ; et al. | 2014-05-29 |
Methods of processing substrates
Grant 8,728,721 - Light , et al. May 20, 2 | 2014-05-20 |
Methods Of Forming A Pattern On A Substrate
App 20140127909 - Sipani; Vishal ; et al. | 2014-05-08 |
Methods of forming a pattern on a substrate
Grant 8,629,048 - Sipani , et al. January 14, 2 | 2014-01-14 |
Methods Of Forming A Pattern On A Substrate
App 20140011364 - Sipani; Vishal ; et al. | 2014-01-09 |
Methods For Forming Resist Features, Patterns In A Resist, And Arrays Of Aligned, Elongate Resist Features
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Semiconductor Constructions And Methods Of Forming Patterns
App 20130302981 - Millward; Dan ; et al. | 2013-11-14 |
Methods of forming a pattern on a substrate
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Imaging Devices, Methods Of Forming Same, And Methods Of Forming Semiconductor Device Structures
App 20130252142 - He; Yuan ; et al. | 2013-09-26 |
Methods of forming a patterned, silicon-enriched developable antireflective material and semiconductor device structures including the same
Grant 8,507,191 - Millward , et al. August 13, 2 | 2013-08-13 |
Methods of forming patterned masks
Grant 8,476,002 - Zhang , et al. July 2, 2 | 2013-07-02 |
Imaging devices, methods of forming same, and methods of forming semiconductor device structures
Grant 8,440,371 - He , et al. May 14, 2 | 2013-05-14 |
Methods Of Forming A Pattern On A Substrate
App 20120282778 - Light; Scott L. ; et al. | 2012-11-08 |
Imaging Devices, Methods Of Forming Same, And Methods Of Forming Semiconductor Device Structures
App 20120178026 - He; Yuan ; et al. | 2012-07-12 |
Methods Of Forming A Patterned, Silicon-enriched Developable Antireflective Material And Semiconductor Device Structures Including The Same
App 20120177891 - Millward; Dan B. ; et al. | 2012-07-12 |
Methods Of Forming Reversed Patterns In A Substrate And Semiconductor Structures Formed During Same
App 20110052883 - Jain; Kaveri ; et al. | 2011-03-03 |
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