| Patent | Date |
|---|
Metrology Device And Phase Modulator Apparatus Therefor
App 20220299751 - DEN BOEF; Arie Jeffrey ; et al. | 2022-09-22 |
On Chip Sensor For Wafer Overlay Measurement
App 20220283516 - SWILLAM; Mohamed ; et al. | 2022-09-08 |
Illumination And Detection Apparatus For A Metrology Apparatus
App 20220276180 - PANDEY; Nitesh ; et al. | 2022-09-01 |
Method And System For Determining Information About A Target Structure
App 20220276569 - DEN BOEF; Arie Jeffrey ; et al. | 2022-09-01 |
Metrology method, target and substrate
Grant 11,428,521 - Bhattacharyya , et al. August 30, 2 | 2022-08-30 |
Method and apparatus for illumination adjustment
Grant 11,429,029 - Van Der Schaar , et al. August 30, 2 | 2022-08-30 |
Metrology system and method for determining a characteristic of one or more structures on a substrate
Grant 11,415,900 - Tinnemans , et al. August 16, 2 | 2022-08-16 |
Metrology method, patterning device, apparatus and computer program
Grant 11,385,553 - Zhou , et al. July 12, 2 | 2022-07-12 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20220196393 - PELLEMANS; Henricus Petrus Maria ; et al. | 2022-06-23 |
Position sensor
Grant 11,333,985 - Goorden , et al. May 17, 2 | 2022-05-17 |
Metrology apparatus and a method of determining a characteristic of interest
Grant 11,327,410 - Den Boef , et al. May 10, 2 | 2022-05-10 |
Measuring a process parameter for a manufacturing process involving lithography
Grant 11,320,745 - Van Der Schaar , et al. May 3, 2 | 2022-05-03 |
Metrology Apparatus
App 20220121127 - PANDEY; Nitesh ; et al. | 2022-04-21 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 11,307,024 - Pellemans , et al. April 19, 2 | 2022-04-19 |
Method For Overlay Metrology And Apparatus Thereof
App 20220074875 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2022-03-10 |
Metrology Method
App 20220075276 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2022-03-10 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20220066330 - TSIATMAS; Anagnostis ; et al. | 2022-03-03 |
Metrology apparatus
Grant 11,262,661 - Pandey , et al. March 1, 2 | 2022-03-01 |
Metrology Method, Target And Substrate
App 20220057192 - BHATTACHARYYA; Kaustuve ; et al. | 2022-02-24 |
Metrology method, target and substrate
Grant 11,204,239 - Bhattacharyya , et al. December 21, 2 | 2021-12-21 |
Computational Wafer Inspection
App 20210357570 - FOUQUET; Christophe David ; et al. | 2021-11-18 |
Metrology Method And Apparatus Therefor
App 20210356873 - DEN BOEF; Arie Jeffrey ; et al. | 2021-11-18 |
Method of Determining a Characteristic of a Structure, and Metrology Apparatus
App 20210349403 - De Boer; Johannes Fitzgerald ; et al. | 2021-11-11 |
Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A Substrate
App 20210325174 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2021-10-21 |
Method and apparatus to determine a patterning process parameter
Grant 11,143,972 - Tsiatmas , et al. October 12, 2 | 2021-10-12 |
Method of determining a characteristic of a structure, and metrology apparatus
Grant 11,119,415 - De Boer , et al. September 14, 2 | 2021-09-14 |
Metrology recipe selection
Grant 11,106,142 - Bhattacharyya , et al. August 31, 2 | 2021-08-31 |
Method of measuring a parameter of a lithographic process, metrology apparatus
Grant 11,099,489 - Cramer , et al. August 24, 2 | 2021-08-24 |
Metrology Method, Patterning Device, Apparatus And Computer Program
App 20210255553 - ZHOU; Zili ; et al. | 2021-08-19 |
Method and apparatus for detecting substrate surface variations
Grant 11,092,902 - D'Achard Van Enschut , et al. August 17, 2 | 2021-08-17 |
Computational wafer inspection
Grant 11,080,459 - Fouquet , et al. August 3, 2 | 2021-08-03 |
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization
App 20210208083 - DEN BOEF; Arie Jeffrey ; et al. | 2021-07-08 |
Sensor, lithographic apparatus, and device manufacturing method
Grant 11,022,902 - Den Boef , et al. June 1, 2 | 2021-06-01 |
Source separation from metrology data
Grant 11,016,397 - Middlebrooks , et al. May 25, 2 | 2021-05-25 |
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
Grant 11,009,343 - Tinnemans , et al. May 18, 2 | 2021-05-18 |
Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured
Grant 10,996,571 - Socha , et al. May 4, 2 | 2021-05-04 |
Metrology method, patterning device, apparatus and computer program
Grant 10,996,570 - Zhou , et al. May 4, 2 | 2021-05-04 |
Position Sensor
App 20210124276 - Goorden; Sebastianus Adrianus ; et al. | 2021-04-29 |
Metrology Apparatus
App 20210123724 - VAN DAM; Marinus Johannes Maria ; et al. | 2021-04-29 |
Method and apparatus for measuring a parameter of interest using image plane detection techniques
Grant 10,983,445 - Pandey , et al. April 20, 2 | 2021-04-20 |
Recipe Selection Based On Inter-recipe Consistency
App 20210103227 - DEN BOEF; Arie Jeffrey ; et al. | 2021-04-08 |
Method and apparatus for angular-resolved spectroscopic lithography characterization
Grant 10,955,353 - Den Boef , et al. March 23, 2 | 2021-03-23 |
Sensor, Lithographic Apparatus, and Device Manufacturing Method
App 20210072647 - DEN BOEF; Arie Jeffrey ; et al. | 2021-03-11 |
Method And Apparatus For Illumination Adjustment
App 20210055663 - VAN DER SCHAAR; Maurits ; et al. | 2021-02-25 |
Recipe selection based on inter-recipe consistency
Grant 10,901,330 - Den Boef , et al. January 26, 2 | 2021-01-26 |
Metrology apparatus
Grant 10,895,452 - Van Dam , et al. January 19, 2 | 2021-01-19 |
Metrology Apparatus and a Method of Determining a Characteristic of Interest
App 20210003928 - Den Boef; Arie Jeffrey ; et al. | 2021-01-07 |
Metrology System and Method For Determining a Characteristic of one or More Structures on a Substrate
App 20210003924 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2021-01-07 |
Measuring a Process Parameter for a Manufacturing Process Involving Lithography
App 20200401054 - Van Der Schaar; Maurits ; et al. | 2020-12-24 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
Grant 10,859,923 - Sanguinetti , et al. December 8, 2 | 2020-12-08 |
Determination of stack difference and correction using stack difference
Grant 10,845,707 - Den Boef , et al. November 24, 2 | 2020-11-24 |
Metrology Method, Target And Substrate
App 20200348125 - BHATTACHARYYA; Kaustuve ; et al. | 2020-11-05 |
HHG source, inspection apparatus and method for performing a measurement
Grant 10,816,906 - Lin , et al. October 27, 2 | 2020-10-27 |
Metrology system and method for determining a characteristic of one or more structures on a substrate
Grant 10,816,909 - Tinnemans , et al. October 27, 2 | 2020-10-27 |
Metrology apparatus and a method of determining a characteristic of interest
Grant 10,809,632 - Den Boef , et al. October 20, 2 | 2020-10-20 |
Method of designing metrology targets, substrates having metrology targets, method of measuring overlay, and device manufacturing method
Grant 10,809,628 - Den Boef , et al. October 20, 2 | 2020-10-20 |
Metrology Method, Computer Product And System
App 20200301290 - DEN BOEF; Arie Jeffrey ; et al. | 2020-09-24 |
Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein
Grant 10,775,704 - Pandey , et al. Sept | 2020-09-15 |
Adjustment Of A Metrology Apparatus Or A Measurement Thereby Based On A Characteristic Of A Target Measured
App 20200249584 - Kind Code | 2020-08-06 |
Metrology method, target and substrate
Grant 10,718,604 - Bhattacharyya , et al. | 2020-07-21 |
Imprint lithography apparatus and method
Grant 10,712,678 - Kruijt-Stegeman , et al. | 2020-07-14 |
Metrology Recipe Selection
App 20200218166 - Bhattacharyya; Kaustuve ; et al. | 2020-07-09 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20200217648 - PELLEMANS; Henricus Petrus Maria ; et al. | 2020-07-09 |
Metrology Apparatus and a Method of Determining a Characteristic of Interest
App 20200218167 - DEN BOEF; Arie Jeffrey ; et al. | 2020-07-09 |
Computational Wafer Inspection
App 20200218849 - Fouquet; Christophe David ; et al. | 2020-07-09 |
Metrology method, computer product and system
Grant 10,698,322 - Den Boef , et al. | 2020-06-30 |
Source Separation From Metrology Data
App 20200192229 - MIDDLEBROOKS; Scott Anderson ; et al. | 2020-06-18 |
Method of Measuring a Parameter of a Lithographic Process, Metrology Apparatus
App 20200192231 - CRAMER; Hugo Augustinus Joseph ; et al. | 2020-06-18 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20200183290 - SANGUINETTI; Gonzalo Roberto ; et al. | 2020-06-11 |
Lithographic apparatus and device manufacturing method
Grant 10,678,139 - Lof , et al. | 2020-06-09 |
Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured
Grant 10,670,975 - Socha , et al. | 2020-06-02 |
Determining edge roughness parameters
Grant 10,634,490 - Jak , et al. | 2020-04-28 |
Correction using stack difference
Grant 10,635,004 - Jiang , et al. | 2020-04-28 |
Method and Apparatus for Detecting Substrate Surface Variations
App 20200124977 - D'ACHARD VAN ENSCHUT; Johannes Franciscus Martinus ; et al. | 2020-04-23 |
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology
App 20200124542 - Den Boef; Arie Jeffrey | 2020-04-23 |
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology
App 20200124543 - Den Boef; Arie Jeffrey | 2020-04-23 |
Metrology method and apparatus
Grant 10,620,550 - Jak , et al. | 2020-04-14 |
Metrology Method, Patterning Device, Apparatus and Computer Program
App 20200110342 - ZHOU; Zili ; et al. | 2020-04-09 |
Metrology Method, Computer Product And System
App 20200103762 - DEN BOEF; Arie Jeffrey ; et al. | 2020-04-02 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 10,591,283 - Pellemans , et al. | 2020-03-17 |
Alignment system
Grant 10,585,363 - Mathijssen , et al. | 2020-03-10 |
Metrology Apparatus
App 20200072599 - VAN DAM; Marinus Johannes Maria ; et al. | 2020-03-05 |
Computational wafer inspection
Grant 10,579,772 - Fouquet , et al. | 2020-03-03 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
Grant 10,564,552 - Sanguinetti , et al. Feb | 2020-02-18 |
Determination Of Stack Difference And Correction Using Stack Difference
App 20200012198 - DEN BOEF; Arie Jeffrey ; et al. | 2020-01-09 |
Metrology recipe selection
Grant 10,527,953 - Bhattacharyya , et al. J | 2020-01-07 |
Metrology method, computer product and system
Grant 10,527,949 - Den Boef , et al. J | 2020-01-07 |
Method and apparatus for processing a substrate in a lithographic apparatus
Grant 10,527,957 - Sanchez-Fabres Cobaleda , et al. J | 2020-01-07 |
Diffraction based overlay metrology tool and method of diffraction based overlay metrology
Grant 10,520,451 - Den Boef Dec | 2019-12-31 |
Metrology Apparatus
App 20190384184 - Pandey; Nitesh ; et al. | 2019-12-19 |
Method of measuring a parameter and apparatus
Grant 10,508,906 - Den Boef , et al. Dec | 2019-12-17 |
Determination of stack difference and correction using stack difference
Grant 10,481,499 - Den Boef , et al. Nov | 2019-11-19 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System, Device Manufacturing Method and Wavelength-Selective
App 20190346771 - PANDEY; Nitesh ; et al. | 2019-11-14 |
Metrology Method, Target And Substrate
App 20190346256 - BHATTACHARYYA; Kaustuve ; et al. | 2019-11-14 |
Lithographic apparatus and device manufacturing method
Grant 10,474,045 - Bijnen , et al. Nov | 2019-11-12 |
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
Grant 10,474,039 - Hinnen , et al. Nov | 2019-11-12 |
Metrology parameter determination and metrology recipe selection
Grant 10,451,978 - Bhattacharyya , et al. Oc | 2019-10-22 |
Method of Determining a Characteristic of a Structure, and Metrology Apparatus
App 20190310559 - DE BOER; Johannes Fitzgerald ; et al. | 2019-10-10 |
Method of measuring a target, substrate, metrology apparatus, and lithographic apparatus
Grant 10,408,754 - Moon , et al. Sept | 2019-09-10 |
Recipe Selection Based On Inter-recipe Consistency
App 20190271921 - Den Boef; Arie Jeffrey ; et al. | 2019-09-05 |
Determination Of Stack Difference And Correction Using Stack Difference
App 20190271915 - DEN BOEF; Arie Jeffrey ; et al. | 2019-09-05 |
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
App 20190265028 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2019-08-29 |
Inspection method, lithographic apparatus, mask and substrate
Grant 10,394,137 - Van Dommelen , et al. A | 2019-08-27 |
Lithographic apparatus
Grant 10,394,140 - Cox , et al. A | 2019-08-27 |
Topography measurement system
Grant 10,394,143 - Pandey , et al. A | 2019-08-27 |
Lithographic apparatus alignment sensor and method
Grant 10,386,735 - Mathijssen , et al. A | 2019-08-20 |
Metrology method, target and substrate
Grant 10,386,176 - Bhattacharyya , et al. A | 2019-08-20 |
Method And Apparatus For Measuring A Parameter Of Interest Using Image Plane Detection Techniques
App 20190250094 - PANDEY; Nitesh ; et al. | 2019-08-15 |
Lithographic Apparatus And Device Manufacturing Method
App 20190250518 - LOF; Joeri ; et al. | 2019-08-15 |
Metrology method, target and substrate
Grant 10,379,445 - Jak , et al. A | 2019-08-13 |
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
Grant 10,379,448 - Mathijssen , et al. A | 2019-08-13 |
Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein
Grant 10,365,565 - Pandey , et al. July 30, 2 | 2019-07-30 |
Determination of stack difference and correction using stack difference
Grant 10,345,709 - Den Boef , et al. July 9, 2 | 2019-07-09 |
Recipe selection based on inter-recipe consistency
Grant 10,338,484 - Den Boef , et al. | 2019-07-02 |
Lithographic Apparatus
App 20190187573 - COX; Hendrikus Herman Marie ; et al. | 2019-06-20 |
Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method
Grant 10,317,808 - Huisman , et al. | 2019-06-11 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20190155173 - Tsiatmas; Anagnostis ; et al. | 2019-05-23 |
Metrology Apparatus and a Method of Determining a Characteristic of Interest
App 20190137893 - DEN BOEF; Arie Jeffrey ; et al. | 2019-05-09 |
Inspection apparatus and method
Grant 10,274,370 - Den Boef | 2019-04-30 |
Asymmetry monitoring of a structure
Grant 10,268,124 - Den Boef | 2019-04-23 |
Metrology method and apparatus, computer program and lithographic system
Grant 10,261,427 - Zeng , et al. | 2019-04-16 |
Metrology System and Method For Determining a Characteristic of One or More Structures on a Substrate
App 20190107781 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2019-04-11 |
Metrology method, target and substrate
Grant 10,254,658 - Slotboom , et al. | 2019-04-09 |
Method of Measuring a Parameter and Apparatus
App 20190086201 - DEN BOEF; Arie Jeffrey ; et al. | 2019-03-21 |
HHG source, inspection apparatus and method for performing a measurement
Grant 10,234,771 - Lin , et al. | 2019-03-19 |
Metrology Method And Apparatus
App 20190072859 - JAK; Martin Jacobus Johan ; et al. | 2019-03-07 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20190056216 - PELLEMANS; Henricus Petrus Maria ; et al. | 2019-02-21 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 10,209,061 - Pellemans , et al. Feb | 2019-02-19 |
Position Sensing Arrangement And Lithographic Apparatus Including Such An Arrangement, Position Sensing Method And Device Manufacturing Method
App 20190049866 - HUISMAN; Simon Reinald ; et al. | 2019-02-14 |
Determination Of Stack Difference And Correction Using Stack Difference
App 20190025707 - DEN BOEF; Arie Jeffrey ; et al. | 2019-01-24 |
Measuring a Process Parameter for a Manufacturing Process Involving Lithography
App 20190018326 - Van Der Schaar; Maurits ; et al. | 2019-01-17 |
Lithographic apparatus and device manufacturing method
Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method
Grant 10,180,628 - Cramer , et al. Ja | 2019-01-15 |
Metrology Parameter Determination And Metrology Recipe Selection
App 20190004437 - Bhattacharyya; Kaustuve ; et al. | 2019-01-03 |
Method Of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20180373166 - SANGUINETTI; Gonzalo Roberto ; et al. | 2018-12-27 |
Adjustment Of A Metrology Apparatus Or A Measurement Thereby Based On A Characteristic Of A Target Measured
App 20180364591 - SOCHA; Robert John ; et al. | 2018-12-20 |
Polarization Tuning In Scatterometry
App 20180364590 - VAN DER SCHAAR; Maurits ; et al. | 2018-12-20 |
Determining Edge Roughness Parameters
App 20180364036 - JAK; Martin Jacobus Johan ; et al. | 2018-12-20 |
Computational Wafer Inspection
App 20180365369 - FOUQUET; Christophe David ; et al. | 2018-12-20 |
Method And Apparatus For Processing A Substrate In A Lithographic Apparatus
App 20180356742 - SANCHEZ-FABRES COBALEDA; Cayetano ; et al. | 2018-12-13 |
Metrology method and apparatus, lithographic apparatus, and device manufacturing method
Grant 10,139,277 - Den Boef Nov | 2018-11-27 |
Metrology method, target and substrate
Grant 10,133,188 - Jak , et al. November 20, 2 | 2018-11-20 |
Method of Designing Metrology Targets, Substrates Having Metrology Targets, Method of Measuring Overlay, and Device Manufacturing Method
App 20180329305 - DEN BOEF; Arie Jeffrey ; et al. | 2018-11-15 |
Metrology methods, metrology apparatus and device manufacturing method
Grant 10,101,671 - Quintanilha , et al. October 16, 2 | 2018-10-16 |
Asymmetry Monitoring Of A Structure
App 20180275524 - DEN BOEF; Arie Jeffrey | 2018-09-27 |
Topography Measurement System
App 20180267415 - PANDEY; Nitesh ; et al. | 2018-09-20 |
Determination of stack difference and correction using stack difference
Grant 10,078,268 - Den Boef , et al. September 18, 2 | 2018-09-18 |
Measuring a process parameter for a manufacturing process involving lithography
Grant 10,073,357 - Van Der Schaar , et al. September 11, 2 | 2018-09-11 |
Inspection Method, Lithographic Apparatus, Mask And Substrate
App 20180253018 - VAN DOMMELEN; Youri Johannes Laurentius Maria ; et al. | 2018-09-06 |
Lithographic apparatus and method for performing a measurement
Grant 10,067,068 - Den Boef , et al. September 4, 2 | 2018-09-04 |
Lithographic Apparatus Alignment Sensor and Method
App 20180246423 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2018-08-30 |
Methods And Apparatus For Predicting Performance Of A Measurement Method, Measurement Method And Apparatus
App 20180224753 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2018-08-09 |
Method, apparatus and substrates for lithographic metrology
Grant 10,042,268 - Smilde , et al. August 7, 2 | 2018-08-07 |
Method of designing metrology targets, substrates having metrology targets, method of measuring overlay, and device manufacturing method
Grant 10,025,199 - Den Boef , et al. July 17, 2 | 2018-07-17 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20180195857 - Pellemans; Henricus Petrus Maria ; et al. | 2018-07-12 |
Inspection method, lithographic apparatus, mask and substrate
Grant 10,001,711 - Van Dommelen , et al. June 19, 2 | 2018-06-19 |
Computational wafer inspection
Grant 9,990,462 - Fouquet , et al. June 5, 2 | 2018-06-05 |
Alignment System
App 20180149987 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2018-05-31 |
Metrology Method And Apparatus, Computer Program And Lithographic System
App 20180136570 - ZENG; Si-Han ; et al. | 2018-05-17 |
Position measurement with illumination profile having two diametrically opposed off-axis radiation
Grant 9,970,747 - Kreuzer , et al. May 15, 2 | 2018-05-15 |
Correction Using Stack Difference
App 20180129139 - JIANG; Aiqin ; et al. | 2018-05-10 |
Imprint lithography
Grant 9,958,774 - Den Boef , et al. May 1, 2 | 2018-05-01 |
Inspection method and apparatus and lithographic apparatus
Grant 9,952,518 - Den Boef April 24, 2 | 2018-04-24 |
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
Grant 9,939,742 - Tinnemans , et al. April 10, 2 | 2018-04-10 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 9,933,250 - Pellemans , et al. April 3, 2 | 2018-04-03 |
Metrology Recipe Selection
App 20180088470 - BHATTACHARYYA; Kaustuve ; et al. | 2018-03-29 |
Polarization independent interferometer
Grant 9,927,726 - Tinnemans , et al. March 27, 2 | 2018-03-27 |
Diffraction based overlay metrology tool and method of diffraction based overlay metrology
Grant 9,909,996 - Den Boef March 6, 2 | 2018-03-06 |
Method of Measuring a Target, Substrate, Metrology Apparatus, and Lithographic Apparatus
App 20180024054 - MOON; Euclid Eberle ; et al. | 2018-01-25 |
Metrology method and apparatus, computer program and lithographic system
Grant 9,869,940 - Zeng , et al. January 16, 2 | 2018-01-16 |
Alignment sensor and lithographic apparatus
Grant 9,857,703 - Mathijssen , et al. January 2, 2 | 2018-01-02 |
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology
App 20170350829 - DEN BOEF; Arie Jeffrey | 2017-12-07 |
Inspection method and apparatus, substrates for use therein and device manufacturing method
Grant 9,835,954 - Bogaart , et al. December 5, 2 | 2017-12-05 |
HHG Source, Inspection Apparatus and Method for Performing a Measurement
App 20170315456 - LIN; Nan ; et al. | 2017-11-02 |
Determination Of Stack Difference And Correction Using Stack Difference
App 20170307983 - DEN BOEF; Arie Jeffrey ; et al. | 2017-10-26 |
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
Grant 9,778,025 - Mathijssen , et al. October 3, 2 | 2017-10-03 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System, Device Manufacturing Method and Wavelength-Selective Filter for Use therein
App 20170242343 - PANDEY; Nitesh ; et al. | 2017-08-24 |
Alignment Sensor and Lithographic Apparatus
App 20170212434 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2017-07-27 |
Method and apparatus for determining an overlay error
Grant 9,704,810 - Den Boef July 11, 2 | 2017-07-11 |
Metrology Methods, Metrology Apparatus and Device Manufacturing Method
App 20170184981 - QUINTANILHA; Richard ; et al. | 2017-06-29 |
Lithographic Apparatus and Method for Performing a Measurement
App 20170184511 - DEN BOEF; Arie Jeffrey ; et al. | 2017-06-29 |
Metrology Method, Target And Substrate
App 20170184977 - JAK; Martin Jacobus Johan ; et al. | 2017-06-29 |
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method
App 20170176870 - HINNEN; Paul Christiaan ; et al. | 2017-06-22 |
Position Measurement with Illumination Profile having Regions Confined to Peripheral Portion of Pupil
App 20170160075 - KREUZER; Justin Lloyd ; et al. | 2017-06-08 |
Imprint lithography
Grant 9,658,528 - Kruijt-Stegeman , et al. May 23, 2 | 2017-05-23 |
Inspection apparatus, inspection method and manufacturing method
Grant 9,632,039 - Den Boef , et al. April 25, 2 | 2017-04-25 |
Imprint lithography
Grant 9,625,811 - Wuister , et al. April 18, 2 | 2017-04-18 |
Lithographic Apparatus And Device Manufacturing Method
App 20170102621 - LOF; Joeri ; et al. | 2017-04-13 |
Metrology Method, Target and Substrate
App 20170090302 - SLOTBOOM; DAAN MAURITS ; et al. | 2017-03-30 |
Position measurement with illumination profile having regions confined to peripheral portion of pupil
Grant 9,605,947 - Kreuzer , et al. March 28, 2 | 2017-03-28 |
Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
Grant 9,606,442 - Mathijssen , et al. March 28, 2 | 2017-03-28 |
Computational Wafer Inspection
App 20170046473 - FOUQUET; Christophe David ; et al. | 2017-02-16 |
Inspection Apparatus, Inspection Method and Manufacturing Method
App 20170031246 - DEN BOEF; Arie Jeffrey | 2017-02-02 |
Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method
Grant 9,551,939 - Mathijssen , et al. January 24, 2 | 2017-01-24 |
Alignment sensor, lithographic apparatus and alignment method
Grant 9,547,241 - Den Boef , et al. January 17, 2 | 2017-01-17 |
Imprint lithography
Grant 9,535,322 - Den Boef , et al. January 3, 2 | 2017-01-03 |
Imprint Lithography
App 20160377997 - DEN BOEF; Arie Jeffrey ; et al. | 2016-12-29 |
Recipe Selection Based On Inter-recipe Consistency
App 20160370717 - DEN BOEF; Arie Jeffrey ; et al. | 2016-12-22 |
Measuring a Process Parameter for a Manufacturing Process Involving Lithography
App 20160349627 - VAN DER SCHAAR; Maurits ; et al. | 2016-12-01 |
Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
Grant 9,506,743 - Den Boef , et al. November 29, 2 | 2016-11-29 |
Computational wafer inspection
Grant 9,507,907 - Fouquet , et al. November 29, 2 | 2016-11-29 |
Inspection method for lithography
Grant 9,494,872 - Bhattacharyya , et al. November 15, 2 | 2016-11-15 |
Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices
Grant 9,488,922 - Vainer , et al. November 8, 2 | 2016-11-08 |
Inspection Method and Apparatus and Lithographic Apparatus
App 20160320712 - DEN BOEF; Arie Jeffrey | 2016-11-03 |
Inspection Method, Lithographic Apparatus, Mask And Substrate
App 20160313656 - VAN DOMMELEN; Youri Johannes Laurentius Maria ; et al. | 2016-10-27 |
Metrology Method and Apparatus, Computer Program and Lithographic System
App 20160313654 - ZENG; Si-Han ; et al. | 2016-10-27 |
Method, Apparatus and Substrates for Lithographic Metrology
App 20160291481 - SMILDE; Hendrik Jan Hidde ; et al. | 2016-10-06 |
Polarization Independent Interferometer
App 20160223920 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2016-08-04 |
Imprint Lithography Apparatus And Method
App 20160195823 - KRUIJT-STEGEMAN; Yvonne Wendela ; et al. | 2016-07-07 |
Metrology Method, Computer Product And System
App 20160161863 - DEN BOEF; Arie Jeffrey ; et al. | 2016-06-09 |
Method Of Determining Critical-dimension-related Properties, Inspection Apparatus And Device Manufacturing Method
App 20160116849 - CRAMER; Hugo Augustinus Joseph ; et al. | 2016-04-28 |
Inspection Method and Apparatus, Substrates for use Therein and Device Manufacturing Method
App 20160097983 - BOGAART; Erik Willem ; et al. | 2016-04-07 |
Optical apparatus, method of scanning, lithographic apparatus and device manufacturing method
Grant 9,303,978 - Den Boef April 5, 2 | 2016-04-05 |
Alignment Sensor, Lithographic Apparatus And Alignment Method
App 20160077445 - DEN BOEF; Arie Jeffrey ; et al. | 2016-03-17 |
Level sensor arrangement in a lithographic apparatus for measuring multi-layer surfaces
Grant 9,279,657 - Mathijssen , et al. March 8, 2 | 2016-03-08 |
Inspection Apparatus, Inspection Method And Manufacturing Method
App 20160061750 - DEN BOEF; Arie Jeffrey ; et al. | 2016-03-03 |
Metrology Method, Target And Substrate
App 20160061589 - BHATTACHARYYA; Kaustuve ; et al. | 2016-03-03 |
Inspection apparatus and method for measuring a property of a substrate
Grant 9,235,141 - Van Der Schaar , et al. January 12, 2 | 2016-01-12 |
Inspection apparatus and method
Grant 9,222,834 - Den Boef December 29, 2 | 2015-12-29 |
Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 9,223,227 - Bhattacharyya , et al. December 29, 2 | 2015-12-29 |
Computational Wafer Inspection
App 20150356233 - FOUQUET; Christophe David ; et al. | 2015-12-10 |
Inspection Apparatus and Method
App 20150346609 - DEN BOEF; Arie Jeffrey | 2015-12-03 |
Method of Designing Metrology Targets, Substrates Having Metrology Targets, Method of Measuring Overlay, and Device Manufacturing Method
App 20150346605 - DEN BOEF; Arie Jeffrey ; et al. | 2015-12-03 |
Metrology Method and Apparatus, Lithographic Apparatus, and Device Manufacturing Method
App 20150308895 - Den Boef; Arie Jeffrey | 2015-10-29 |
Device manufacturing method and associated lithographic apparatus, inspection apparatus, and lithographic processing cell
Grant 9,163,935 - Den Boef , et al. October 20, 2 | 2015-10-20 |
Position Measuring Apparatus, Position Measuring Method, Lithographic Apparatus and Device Manufacturing Method
App 20150261097 - Mathijssen; Simon Gijsbert Josephus ; et al. | 2015-09-17 |
Object inspection systems and methods
Grant 9,122,178 - Ivanov , et al. September 1, 2 | 2015-09-01 |
Mark Position Measuring Apparatus And Method, Lithographic Apparatus And Device Manufacturing Method
App 20150234290 - Mathijssen; Simon Gijsbert Josephus ; et al. | 2015-08-20 |
Metrology method and apparatus, lithographic apparatus, and device manufacturing method
Grant 9,110,385 - Den Boef August 18, 2 | 2015-08-18 |
Method And Apparatus For Measuring Asymmetry Of A Microstructure, Position Measuring Method, Position Measuring Apparatus, Lithographic Apparatus And Device Manufacturing Method
App 20150227061 - Tinnemans; Patricius Aloysius Jacobus ; et al. | 2015-08-13 |
Position Measuring Apparatus, Position Measuring Method, Lithographic Apparatus And Device Manufacturing Method
App 20150219438 - Den Boef; Arie Jeffrey ; et al. | 2015-08-06 |
Inspection apparatus and method, lithographic apparatus and lithographic processing cell
Grant 9,081,302 - Den Boef , et al. July 14, 2 | 2015-07-14 |
Methods and scatterometers, lithographic systems, and lithographic processing cells
Grant 9,081,303 - Cramer , et al. July 14, 2 | 2015-07-14 |
Method And Apparatus For Measuring Asymmetry Of A Microstructure, Position Measuring Method, Position Measuring Apparatus, Lithographic Apparatus And Device Manufacturing Method
App 20150176979 - Mathijssen; Simon Gijsbert Josephus ; et al. | 2015-06-25 |
Imprint Lithography
App 20150145172 - Kruijt-Stegeman; Yvonne Wendela ; et al. | 2015-05-28 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20150131076 - PELLEMANS; Henricus Petrus Maria ; et al. | 2015-05-14 |
Position Measuring Method, Position Measuring Apparatus, Lithographic Apparatus and Device Manufacturing Method, Optical Element
App 20150109624 - Kreuzer; Justin Lloyd ; et al. | 2015-04-23 |
Methods and scatterometers, lithographic systems, and lithographic processing cells
Grant 8,994,944 - Cramer , et al. March 31, 2 | 2015-03-31 |
Method and apparatus for measuring line end shortening, substrate and patterning device
Grant 8,982,329 - Van Der Schaar , et al. March 17, 2 | 2015-03-17 |
Imprint lithography
Grant 8,968,630 - Kruijt-Stegeman , et al. March 3, 2 | 2015-03-03 |
Method and apparatus for determining an overlay error
Grant 8,908,147 - Den Boef , et al. December 9, 2 | 2014-12-09 |
Imprint lithography method
Grant 8,889,055 - Wuister , et al. November 18, 2 | 2014-11-18 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 8,885,150 - Pellemans , et al. November 11, 2 | 2014-11-11 |
Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus
Grant 8,868,387 - Den Boef , et al. October 21, 2 | 2014-10-21 |
Level sensor arrangement for lithographic apparatus and device manufacturing method
Grant 8,842,293 - Den Boef , et al. September 23, 2 | 2014-09-23 |
Tunable Wavelength Illumination System
App 20140253891 - DEN BOEF; Arie Jeffrey ; et al. | 2014-09-11 |
Inspection method for lithography
Grant 8,830,447 - Den Boef , et al. September 9, 2 | 2014-09-09 |
Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus
Grant 8,830,472 - Den Boef , et al. September 9, 2 | 2014-09-09 |
Inspection method and apparatus
Grant 8,830,455 - Den Boef , et al. September 9, 2 | 2014-09-09 |
Overlay measurement apparatus, lithographic apparatus and device manufacturing method using such overlay measurement apparatus
Grant 8,823,922 - Den Boef September 2, 2 | 2014-09-02 |
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology
App 20140192338 - DEN BOEF; Arie Jeffrey | 2014-07-10 |
Method of overlay measurement, lithographic apparatus, inspection apparatus, processing apparatus and lithographic processing cell
Grant 8,767,183 - Den Boef July 1, 2 | 2014-07-01 |
Method and apparatus for angular-resolved spectroscopic lithography characterization
Grant 8,760,662 - Den Boef , et al. June 24, 2 | 2014-06-24 |
Inspection method and apparatus
Grant 8,749,775 - Verstappen , et al. June 10, 2 | 2014-06-10 |
Imprint lithography method and apparatus
Grant 8,743,361 - Dijksman , et al. June 3, 2 | 2014-06-03 |
Methods and Apparatus for Inspection of Articles, EUV Lithography Reticles, Lithography Apparatus and Method of Manufacturing Devices
App 20140146297 - Vainer; Yuri ; et al. | 2014-05-29 |
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells
App 20140139814 - CRAMER; Hugo Augustinus Joseph ; et al. | 2014-05-22 |
Tunable wavelength illumination system
Grant 8,730,476 - Den Boef , et al. May 20, 2 | 2014-05-20 |
Level sensor, lithographic apparatus, and substrate surface positioning method
Grant 8,675,210 - Den Boef , et al. March 18, 2 | 2014-03-18 |
Diffraction based overlay metrology tool and method of diffraction based overlay metrology
Grant 8,670,118 - Den Boef March 11, 2 | 2014-03-11 |
Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method
Grant 8,593,646 - Den Boef , et al. November 26, 2 | 2013-11-26 |
Tunable Wavelength Illumination System
App 20130258316 - DEN BOEF; Arie Jeffrey ; et al. | 2013-10-03 |
Imprint lithography
Grant 8,529,823 - Den Boef , et al. September 10, 2 | 2013-09-10 |
Inspection Apparatus and Method
App 20130215404 - DEN BOEF; Arie Jeffrey | 2013-08-22 |
Tunable wavelength illumination system
Grant 8,508,736 - Den Boef , et al. August 13, 2 | 2013-08-13 |
Level Sensor Arrangement for Lithographic Apparatus, Lithographic Apparatus and Device Manufacturing Method
App 20130201486 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2013-08-08 |
Substrate measurement method and apparatus
Grant 8,497,976 - Corbeij , et al. July 30, 2 | 2013-07-30 |
Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection units
Grant 8,488,107 - Den Boef , et al. July 16, 2 | 2013-07-16 |
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology
App 20130155406 - DEN BOEF; Arie Jeffrey | 2013-06-20 |
Device Manufacturing Method and Associated Lithographic Apparatus, Inspection Apparatus, and Lithographic Processing Cell
App 20130148121 - DEN BOEF; Arie Jeffrey ; et al. | 2013-06-13 |
Imprint lithography
Grant 8,454,849 - Wuister , et al. June 4, 2 | 2013-06-04 |
Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate
Grant 8,411,287 - Smilde , et al. April 2, 2 | 2013-04-02 |
Level Sensor, Lithographic Apparatus, And Substrate Surface Positioning Method
App 20130077079 - DEN BOEF; Arie Jeffrey ; et al. | 2013-03-28 |
Method and Apparatus for Determining an Overlay Error
App 20130054186 - DEN BOEF; Arie Jeffrey | 2013-02-28 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 8,363,218 - Den Boef January 29, 2 | 2013-01-29 |
Lithographic apparatus and device manufacturing method involving a level sensor having a detection grating including three or more segments
Grant 8,351,024 - Den Boef January 8, 2 | 2013-01-08 |
Diffraction based overlay metrology tool and method
Grant 8,339,595 - Den Boef December 25, 2 | 2012-12-25 |
Imprint Lithography
App 20120313295 - Den Boef; Arie Jeffrey ; et al. | 2012-12-13 |
Imprint lithography
Grant 8,319,968 - Den Boef , et al. November 27, 2 | 2012-11-27 |
Holographic Mask Inspection System with Spatial Filter
App 20120281197 - Tharaldsen; Robert Albert ; et al. | 2012-11-08 |
Imprint Lithography
App 20120244319 - Wuister; Sander Frederik ; et al. | 2012-09-27 |
Lithographic apparatus and device manufacturing method using overlay measurement
Grant 8,264,686 - Den Boef , et al. September 11, 2 | 2012-09-11 |
Optical Apparatus, Method of Scanning, Lithographic Apparatus and Device Manufacturing Method
App 20120212718 - Den Boef; Arie Jeffrey | 2012-08-23 |
Measuring Method, Measuring Apparatus, Lithographic Apparatus and Device Manufacturing Method
App 20120212749 - DEN BOEF; Arie Jeffrey ; et al. | 2012-08-23 |
Imprint lithography
Grant 8,248,608 - Den Boef August 21, 2 | 2012-08-21 |
Inspection Apparatus and Method, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20120206703 - BHATTACHARYYA; Kaustuve ; et al. | 2012-08-16 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 8,189,195 - Den Boef , et al. May 29, 2 | 2012-05-29 |
Object Inspection Systems and Methods
App 20120127467 - Ivanov; Vitalii ; et al. | 2012-05-24 |
Metrology Apparatus, Lithography Apparatus and Method of Measuring a Property of a Substrate
App 20120092636 - Van Der Mast; Karel Diederick ; et al. | 2012-04-19 |
Lithographic apparatus and device manufacturing method
Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
Inspection Apparatus and Method, Lithographic Apparatus and Lithographic Processing Cell
App 20120075601 - DEN BOEF; Arie Jeffrey ; et al. | 2012-03-29 |
Inspection Method for Lithography
App 20120044472 - Den Boef; Arie Jeffrey ; et al. | 2012-02-23 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 8,120,001 - Den Boef , et al. February 21, 2 | 2012-02-21 |
Inspection Apparatus and Method, Lithographic Apparatus and Lithographic Processing Cell
App 20120033193 - VAN DER SCHAAR; Maurits ; et al. | 2012-02-09 |
Method of measurement, an inspection apparatus and a lithographic apparatus
Grant 8,111,398 - Van der Schaar , et al. February 7, 2 | 2012-02-07 |
Method and Apparatus for Determining an Overlay Error
App 20120013881 - Den Boef; Arie Jeffrey ; et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method
App 20120013879 - Den Boef; Arie Jeffrey ; et al. | 2012-01-19 |
Substrate used in a method and apparatus for angular-resolved spectroscopic lithography characterization
Grant 8,064,056 - Van Der Schaar , et al. November 22, 2 | 2011-11-22 |
Imprint Lithography Method And Apparatus
App 20110266706 - DIJKSMAN; Johan Frederik ; et al. | 2011-11-03 |
Angularly resolved scatterometer
Grant 8,031,337 - Den Boef October 4, 2 | 2011-10-04 |
Inspection Method For Lithography
App 20110229830 - Bhattacharyya; Kaustuve ; et al. | 2011-09-22 |
Imprint Lithography
App 20110226735 - Wuister; Sander Frederik ; et al. | 2011-09-22 |
Inspection Method and Apparatus, and Lithographic Apparatus
App 20110208342 - Den Boef; Arie Jeffrey ; et al. | 2011-08-25 |
Overlay Measurement Apparatus, Lithographic Apparatus and Device Manufacturing Method Using Such Overlay Measurement Apparatus
App 20110188020 - Den Boef; Arie Jeffrey | 2011-08-04 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20110128512 - Pellemans; Henricus Petrus Maria ; et al. | 2011-06-02 |
Substrate Used in a Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization
App 20110122496 - VAN DER SCHAAR; Maurits ; et al. | 2011-05-26 |
Method and Apparatus for Measuring Line End Shortening, Substrate and Patterning Device
App 20110109888 - Van Der Schaar; Maurits ; et al. | 2011-05-12 |
Imprint Lithography
App 20110095455 - KRUIJT-STEGEMAN; Yvonne Wendela ; et al. | 2011-04-28 |
Tunable Wavelength Illumination System
App 20110085726 - Den Boef; Arie Jeffrey ; et al. | 2011-04-14 |
Inspection Method and Apparatus
App 20110085162 - VERSTAPPEN; Leonardus Henricus Marie ; et al. | 2011-04-14 |
Imprint Lithography
App 20110076352 - DEN BOEF; Arie Jeffrey ; et al. | 2011-03-31 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 7,916,284 - Dusa , et al. March 29, 2 | 2011-03-29 |
Imprint Lithography Method And Apparatus
App 20110068510 - Wuister; Sander Frederik ; et al. | 2011-03-24 |
Metrology Method and Apparatus, Lithographic Apparatus, and Device Manufacturing Method
App 20110069292 - Den Boef; Arie Jeffrey | 2011-03-24 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 7,911,612 - Kiers , et al. March 22, 2 | 2011-03-22 |
Method and apparatus for angular-resolved spectroscopic lithography characterization
Grant 7,898,662 - Van Der Schaar , et al. March 1, 2 | 2011-03-01 |
Metrology Method and Apparatus, Lithographic Apparatus, Device Manufacturing Method and Substrate
App 20110043791 - Smilde; Hendrik Jan Hidde ; et al. | 2011-02-24 |
Inspection method and apparatus
App 20110043795 - Den Boef; Arie Jeffrey ; et al. | 2011-02-24 |
Method of Assessing a Model of a Substrate, an Inspection Apparatus and a Lithographic Apparatus
App 20110026032 - Den Boef; Arie Jeffrey ; et al. | 2011-02-03 |
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells
App 20110027704 - Cramer; Hugo Augustinus Joseph ; et al. | 2011-02-03 |
Angularly resolved scatterometer and inspection method
Grant 7,880,889 - Den Boef February 1, 2 | 2011-02-01 |
Marker structure and method for controlling alignment of layers of a multi-layered substrate
Grant 7,879,682 - Van Haren , et al. February 1, 2 | 2011-02-01 |
Imprint Lithography Apparatus and Method
App 20110001254 - Kruijt-Stegeman; Yvonne Wendela ; et al. | 2011-01-06 |
Diffraction Based Overlay Metrology Tool and Method
App 20100328655 - Den Boef; Arie Jeffrey | 2010-12-30 |
Method of Overlay Measurement, Lithographic Apparatus, Inspection Apparatus, Processing Apparatus and Lithographic Processing Cell
App 20100321654 - Den Boef; Arie Jeffrey | 2010-12-23 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 7,852,459 - Den Boef , et al. December 14, 2 | 2010-12-14 |
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly
Grant 7,834,975 - Burghoorn , et al. November 16, 2 | 2010-11-16 |
Method of Measurement, an Inspection Apparatus and a Lithographic Apparatus
App 20100277706 - Van der Schaar; Maurits ; et al. | 2010-11-04 |
Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement
Grant 7,821,650 - Van Der Schaar , et al. October 26, 2 | 2010-10-26 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20100265506 - DEN BOEF; Arie Jeffrey | 2010-10-21 |
Lithographic Apparatus And Device Manufacturing Method
App 20100231889 - DEN BOEF; Arie Jeffrey | 2010-09-16 |
Lithographic Apparatus And Device Manufacturing Method
App 20100231881 - DEN BOEF; Arie Jeffrey ; et al. | 2010-09-16 |
Level Sensor Arrangement For Lithographic Apparatus And Device Manufacturing Method
App 20100233600 - DEN BOEF; Arie Jeffrey ; et al. | 2010-09-16 |
Characterization of transmission losses in an optical system
Grant 7,791,724 - Den Boef , et al. September 7, 2 | 2010-09-07 |
Substrate Measurement Method And Apparatus
App 20100091258 - Corbeij; Wilhelmus Maria ; et al. | 2010-04-15 |
Imprint Lithography
App 20100065987 - DEN BOEF; Arie Jeffrey ; et al. | 2010-03-18 |
Marker Structure And Method For Controlling Alignment Of Layers Of A Multi-layered Substrate
App 20100068830 - VAN HAREN; Richard Johannes Franciscus ; et al. | 2010-03-18 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20090294635 - DEN BOEF; Arie Jeffrey ; et al. | 2009-12-03 |
Metrology Tool, System Comprising a Lithographic Apparatus and a Metrology Tool, and a Method for Determining a Parameter of a Substrate
App 20090296081 - PLUG; Reinder Teun ; et al. | 2009-12-03 |
Angularly Resolved Scatterometer and Inspection Method
App 20090273783 - DEN BOEF; Arie Jeffrey | 2009-11-05 |
Angularly Resolved Scatterometer
App 20090262366 - DEN BOEF; Arie Jeffrey | 2009-10-22 |
Lithographic Apparatus and Device Manufacturing Method Using Overlay Measurement
App 20090244538 - DEN BOEF; Arie Jeffrey ; et al. | 2009-10-01 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method for Determining A Parameter of a Target Pattern
App 20090135424 - Kiers; Antoine Gaston Marie ; et al. | 2009-05-28 |
Alignment Method and Apparatus, Lithographic Apparatus, Metrology Apparatus and Device Manufacturing Method
App 20090097008 - MOS; Everhardus Cornelis ; et al. | 2009-04-16 |
Method of Optimizing a Model, a Method of Measuring a Property, A Device Manufacturing Method, a Spectrometer and a Lithographic Apparatus
App 20090094005 - DEN BOEF; Arie Jeffrey ; et al. | 2009-04-09 |
Lithographic Apparatus and Device Manufacturing Method with Reduced Scribe Lane Usage for Substrate Measurement
App 20090027691 - Van Der Schaar; Maurits ; et al. | 2009-01-29 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
App 20080311344 - Marie Kiers; Antoine Gaston ; et al. | 2008-12-18 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
App 20080279442 - Den Boef; Arie Jeffrey ; et al. | 2008-11-13 |
Angularly resolved scatterometer and inspection method
App 20080259343 - Den Boef; Arie Jeffrey | 2008-10-23 |
Method of measuring asymmetry in a scatterometer, a method of measuring an overlay error in a substrate and a metrology apparatus
App 20080239318 - Den Boef; Arie Jeffrey ; et al. | 2008-10-02 |
Angularly resolved scatterometer, inspection method, lithographic apparatus, lithographic processing cell device manufacturing method and alignment sensor
App 20080239265 - Den Boef; Arie Jeffrey | 2008-10-02 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods
App 20080218767 - Mos; Everhardus Cornelis ; et al. | 2008-09-11 |
Method of inspection, a method of manufacturing, an inspection apparatus, a substrate, a mask, a lithography apparatus and a lithographic cell
App 20080212097 - Mos; Everhardus Cornelis ; et al. | 2008-09-04 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
App 20080186482 - Den Boef; Arie Jeffrey ; et al. | 2008-08-07 |
Method of measurement, an inspection apparatus and a lithographic apparatus
App 20080144036 - Schaar; Maurits Van Der ; et al. | 2008-06-19 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
App 20080128644 - Mos; Everhardus Cornelis ; et al. | 2008-06-05 |
Method and apparatus for angular-resolved spectroscopic lithography characterization
App 20070296973 - Kiers; Antoine Gaston Marie ; et al. | 2007-12-27 |
Method of characterising the transmission losses of an optical system
App 20070296960 - Den Boef; Arie Jeffrey ; et al. | 2007-12-27 |
Method and apparatus for angular-resolved spectroscopic lithography characterization
App 20070291269 - Van Der Schaar; Maurits ; et al. | 2007-12-20 |
| 