D'Ambra; Allen L.
Patent Applications and Registrations
Patent applications and USPTO patent grants for D'Ambra; Allen L..The latest application filed is for "carousel for ultrasonic cleaning and method of using thereof".
Company Profile
3.23.37
- D'Ambra; Allen L. - Burlingame CA
- D'Ambra; Allen L. - Burlinggame CA
- D'Ambra; Allen L. - Millbrae CA
Patent Activity
| Patent | Date |
|---|---|
| Carousel for ultrasonic cleaning and method of using thereof Grant 11,433,436 - Coughlin , et al. September 6, 2 | 2022-09-06 |
| Pad conditioner cleaning system Grant 11,370,083 - Gadgil , et al. June 28, 2 | 2022-06-28 |
| Carousel For Ultrasonic Cleaning And Method Of Using Thereof App 20220152666 - COUGHLIN; Michael J. ; et al. | 2022-05-19 |
| Clog detection in a multi-port fluid delivery system Grant 11,251,047 - Nangoy , et al. February 15, 2 | 2022-02-15 |
| Conditioner Disk For Use On Soft Or 3d Printed Pads During Cmp App 20210402563 - Gopalan; Periya ; et al. | 2021-12-30 |
| Pad Conditioner Cleaning System App 20210402561 - Gadgil; Shantanu Rajiv ; et al. | 2021-12-30 |
| Cleaning System For Polishing Liquid Delivery Arm App 20210402565 - Nangoy; Roy C. ; et al. | 2021-12-30 |
| Platen Shield Cleaning System App 20210394540 - Gadgil; Shantanu Rajiv ; et al. | 2021-12-23 |
| Maintenance Methods For Polishing Systems And Articles Related Thereto App 20210276144 - GADGIL; Shantanu Rajiv ; et al. | 2021-09-09 |
| Edge Ring Or Process Kit For Semiconductor Process Module App 20190348317 - D'AMBRA; Allen L. ; et al. | 2019-11-14 |
| Clog Detection In A Multi-port Fluid Delivery System App 20190148160 - NANGOY; Roy C. ; et al. | 2019-05-16 |
| Automatic Cleaning Machine For Cleaning Process Kits App 20190070639 - NANGOY; Roy C. ; et al. | 2019-03-07 |
| Edge Ring Or Process Kit For Semiconductor Process Module App 20180061696 - D'AMBRA; Allen L. ; et al. | 2018-03-01 |
| Disk-brush cleaner module with fluid jet Grant 9,646,859 - Chen , et al. May 9, 2 | 2017-05-09 |
| Multi-Platen Multi-Head Polishing Architecture App 20160101497 - David; Jeffrey Drue ; et al. | 2016-04-14 |
| Multi-platen multi-head polishing architecture Grant 9,227,293 - David , et al. January 5, 2 | 2016-01-05 |
| Methods and apparatus for pre-chemical mechanical planarization buffing module Grant 8,968,055 - Chen , et al. March 3, 2 | 2015-03-03 |
| Vapor Dryer Module With Reduced Particle Generation App 20150050105 - Zhang; Dan ; et al. | 2015-02-19 |
| Methods and apparatus for marangoni substrate drying using a vapor knife manifold Grant 8,869,422 - Velazquez , et al. October 28, 2 | 2014-10-28 |
| Apparatus and method for cleaning semiconductor substrate using pressurized fluid Grant 8,844,546 - Chen , et al. September 30, 2 | 2014-09-30 |
| Multi-Platen Multi-Head Polishing Architecture App 20140141695 - David; Jeffrey Drue ; et al. | 2014-05-22 |
| Polishing System with In-Sequence Sensor App 20140141696 - David; Jeffrey Drue ; et al. | 2014-05-22 |
| Methods And Apparatus For Marangoni Substrate Drying Using A Vapor Knife Manifold App 20130283634 - Velazquez; Edwin ; et al. | 2013-10-31 |
| Methods And Apparatus For Pre-chemical Mechanical Planarization Buffing Module App 20130288578 - Chen; Hui ; et al. | 2013-10-31 |
| Brush Box Module For Chemical Mechanical Polishing Cleaner App 20130111678 - Chen; Hui ; et al. | 2013-05-09 |
| High throughput chemical mechanical polishing system Grant 8,308,529 - D'Ambra , et al. November 13, 2 | 2012-11-13 |
| Polishing System Having A Track App 20120208438 - YILMAZ; ALPAY ; et al. | 2012-08-16 |
| Polishing system having a track Grant 8,172,643 - Yilmaz , et al. May 8, 2 | 2012-05-08 |
| Disk-brush Cleaner Module With Fluid Jet App 20110265816 - Chen; Hui ; et al. | 2011-11-03 |
| Platen exhaust for chemical mechanical polishing system Grant 7,988,535 - Chen , et al. August 2, 2 | 2011-08-02 |
| Brush box cleaner module with force control Grant 7,962,990 - Chen , et al. June 21, 2 | 2011-06-21 |
| Apparatus And Method For Cleaning Semiconductor Substrate Using Pressurized Fluid App 20100078044 - Chen; Hui (Fred) ; et al. | 2010-04-01 |
| Brush Box Cleaner Module With Force Control App 20100078041 - Chen; Hui (Fred) ; et al. | 2010-04-01 |
| Dual Chamber Megasonic Cleaner App 20090320875 - MARTINEZ; RICARDO ; et al. | 2009-12-31 |
| Multiple Window Pad Assembly App 20090305610 - Yilmaz; Alpay ; et al. | 2009-12-10 |
| Polishing System With Three Headed Carousel App 20090280727 - KARUPPIAH; LAKSHMANAN ; et al. | 2009-11-12 |
| High Throughput Chemical Mechanical Polishing System App 20090270015 - D'Ambra; Allen L. ; et al. | 2009-10-29 |
| Platen Exhaust For Chemical Mechanical Polishing System App 20090264049 - Chen; Hung Chih ; et al. | 2009-10-22 |
| Polishing System Having A Track App 20090258574 - Yilmaz; Alpay ; et al. | 2009-10-15 |
| Slim cell platform plumbing Grant 7,473,339 - D'Ambra , et al. January 6, 2 | 2009-01-06 |
| Systems And Methods For Modular And Configurable Substrate Cleaning App 20080156359 - OLGADO; DONALD J.K. ; et al. | 2008-07-03 |
| Multi-chemistry plating system Grant 7,223,323 - Yang , et al. May 29, 2 | 2007-05-29 |
| Closed loop control on liquid delivery system ECP slim cell Grant 7,155,319 - Nangoy , et al. December 26, 2 | 2006-12-26 |
| Closed loop control on liquid delivery system ECP slim cell App 20060190099 - Nangoy; Roy C. ; et al. | 2006-08-24 |
| Apparatus for electro chemical deposition Grant 7,005,046 - Stevens , et al. February 28, 2 | 2006-02-28 |
| Method for removing electrolyte from electrical contacts and wafer touching areas Grant 6,869,516 - Lubomirsky , et al. March 22, 2 | 2005-03-22 |
| Slim cell platform plumbing App 20040206623 - D'Ambra, Allen L. ; et al. | 2004-10-21 |
| Method for removing electrolyte from electrical contacts and wafer touching areas App 20040074777 - Lubomirsky, Dmitry ; et al. | 2004-04-22 |
| Multi-chemistry plating system App 20040016637 - Yang, Michael X. ; et al. | 2004-01-29 |
| Apparatus and method for electro chemical deposition App 20030000841 - Stevens, Joseph J. ; et al. | 2003-01-02 |
| Apparatus and method for electro chemical deposition Grant 6,454,927 - Stevens , et al. September 24, 2 | 2002-09-24 |
| Dual buffer chamber cluster tool for semiconductor wafer processing Grant 6,440,261 - Tepman , et al. August 27, 2 | 2002-08-27 |
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