Patent | Date |
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Method for prediction of premature dielectric breakdown in a semiconductor Grant 8,053,257 - Chanda , et al. November 8, 2 | 2011-11-08 |
Via bottom contact and method of manufacturing same Grant 7,830,019 - Chanda , et al. November 9, 2 | 2010-11-09 |
Structure for modeling stress-induced degradation of conductive interconnects Grant 7,692,439 - Chanda , et al. April 6, 2 | 2010-04-06 |
Structure for monitoring stress-induced degradation of conductive interconnects Grant 7,639,032 - Chanda , et al. December 29, 2 | 2009-12-29 |
Interconnect structure Grant 7,598,616 - Yang , et al. October 6, 2 | 2009-10-06 |
VIA bottom contact and method of manufacturing same Grant 7,585,764 - Chanda , et al. September 8, 2 | 2009-09-08 |
Via Bottom Contact And Method Of Manufacturing Same App 20090200673 - Chanda; Kaushik ;   et al. | 2009-08-13 |
Method of fabrication of interconnect structures Grant 7,563,710 - Yang , et al. July 21, 2 | 2009-07-21 |
Interconnect structure and method of fabrication of same Grant 7,528,493 - Yang , et al. May 5, 2 | 2009-05-05 |
Back end interconnect with a shaped interface Grant 7,494,915 - Clevenger , et al. February 24, 2 | 2009-02-24 |
Interconnect Structure And Method Of Fabrication Of Same App 20080246151 - Yang; Chih-Chao ;   et al. | 2008-10-09 |
Structure for modeling stress-induced degradation of conductive interconnects App 20080231312 - Chanda; Kaushik ;   et al. | 2008-09-25 |
Method For Prediction Of Premature Dielectric Breakdown In A Semiconductor App 20080174334 - Chanda; Kaushik ;   et al. | 2008-07-24 |
Structure and method for monitoring stress-induced degradation of conductive interconnects Grant 7,397,260 - Chanda , et al. July 8, 2 | 2008-07-08 |
Method for monitoring stress-induced degradation of conductive interconnects App 20080107149 - Chanda; Kaushik ;   et al. | 2008-05-08 |
Interconnect structure and method of fabrication of same Grant 7,335,588 - Yang , et al. February 26, 2 | 2008-02-26 |
Interconnect Structure And Method Of Fabrication Of Same App 20080014744 - Yang; Chih-Chao ;   et al. | 2008-01-17 |
Interconnect Structure And Method Of Fabrication Of Same App 20080006944 - Yang; Chih-Chao ;   et al. | 2008-01-10 |
Structure And Method For Monitoring Stress-induced Degradation Of Conductive Interconnects App 20070115018 - Chanda; Kaushik ;   et al. | 2007-05-24 |
Post-etch removal of fluorocarbon-based residues from a hybrid dielectric structure App 20070059922 - Clevenger; Lawrence A. ;   et al. | 2007-03-15 |
Via Bottom Contact And Method Of Manufacturing Same App 20070037403 - Chanda; Kaushik ;   et al. | 2007-02-15 |
Back End Interconnect With A Shaped Interface App 20060292852 - Clevenger; Lawrence A. ;   et al. | 2006-12-28 |
Method For Prediction Of Premature Dielectric Breakdown In A Semiconductor App 20060281338 - Chanda; Kaushik ;   et al. | 2006-12-14 |
Interconnect structure and method of fabrication of same App 20060234497 - Yang; Chih-Chao ;   et al. | 2006-10-19 |
Back end interconnect with a shaped interface Grant 7,122,462 - Clevenger , et al. October 17, 2 | 2006-10-17 |
Crystallographic modification of hard mask properties Grant 7,001,835 - Clevenger , et al. February 21, 2 | 2006-02-21 |
Back End Interconnect With a Shaped Interface App 20050112864 - Clevenger, Lawrence A. ;   et al. | 2005-05-26 |
Crystallographic Modification of Hard mask Properties App 20050112862 - Clevenger, Lawrence A. ;   et al. | 2005-05-26 |
Method of forming an on-chip decoupling capacitor with bottom hardmask Grant 6,387,754 - Dalton , et al. May 14, 2 | 2002-05-14 |
Method of forming an on-chip decoupling capacitor with bottom hardmask App 20010036753 - Dalton, Timothy J. ;   et al. | 2001-11-01 |