Patent | Date |
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Microlithography projection objective Grant 10,281,824 - Feldmann , et al. | 2019-05-07 |
Method of operating a projection exposure tool for microlithography Grant 10,241,423 - Conradi , et al. | 2019-03-26 |
Optical system and method of use Grant 9,823,579 - Conradi November 21, 2 | 2017-11-21 |
Microlithography Projection Objective App 20170192362 - Feldmann; Heiko ;   et al. | 2017-07-06 |
Method for adjusting an illumination setting Grant 9,690,203 - Zimmermann , et al. June 27, 2 | 2017-06-27 |
Reflective optical element for EUV lithography and method of manufacturing a reflective optical element Grant 9,606,446 - Wabra , et al. March 28, 2 | 2017-03-28 |
Method for improving the imaging properties of a projection objective, and such a projection objective Grant 9,581,813 - Conradi , et al. February 28, 2 | 2017-02-28 |
Method Of Operating A Projection Exposure Tool For Microlithography App 20160342097 - Conradi; Olaf ;   et al. | 2016-11-24 |
Method of operating a projection exposure tool for microlithography Grant 9,442,381 - Conradi , et al. September 13, 2 | 2016-09-13 |
Semiconductor microlithography projection exposure apparatus Grant 9,366,977 - Bleidistel , et al. June 14, 2 | 2016-06-14 |
Reflective Optical Element for EUV Lithography and Method of Manufacturing a Reflective Optical Element App 20150316851 - WABRA; Norbert ;   et al. | 2015-11-05 |
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective App 20150293352 - Conradi; Olaf ;   et al. | 2015-10-15 |
Projection exposure system and projection exposure method Grant 9,146,475 - Graupner , et al. September 29, 2 | 2015-09-29 |
Microlithography projection objective Grant 9,097,984 - Feldmann , et al. August 4, 2 | 2015-08-04 |
Method for improving the imaging properties of a projection objective, and such a projection objective Grant 9,069,263 - Conradi , et al. June 30, 2 | 2015-06-30 |
Method For Adjusting An Illumination Setting App 20150153652 - Zimmermann; Joerg ;   et al. | 2015-06-04 |
Optical System And Method Of Use App 20150125968 - Conradi; Olaf | 2015-05-07 |
Optical system and method of use Grant 8,947,633 - Conradi February 3, 2 | 2015-02-03 |
Microlithography Projection Objective App 20140333913 - Feldmann; Heiko ;   et al. | 2014-11-13 |
Microlithography Projection Objective App 20140293256 - Feldmann; Heiko ;   et al. | 2014-10-02 |
Microlithographic projection exposure apparatus with correction optical system that heats projection objective element Grant 8,773,638 - Dodoc , et al. July 8, 2 | 2014-07-08 |
Method Of Operating A Projection Exposure Tool For Microlithography App 20130301024 - Conradi; Olaf ;   et al. | 2013-11-14 |
Optical System And Method Of Use App 20130250261 - Conradi; Olaf | 2013-09-26 |
Projection Exposure System and Projection Exposure Method App 20130182234 - Graupner; Paul ;   et al. | 2013-07-18 |
Optical system and method of use Grant 8,462,315 - Conradi June 11, 2 | 2013-06-11 |
Method and system for correcting image changes Grant 8,325,323 - Conradi , et al. December 4, 2 | 2012-12-04 |
Semiconductor Microlithography Projection Exposure Apparatus App 20120069310 - Bleidistel; Sascha ;   et al. | 2012-03-22 |
Projection objective of a microlithographic projection exposure apparatus Grant 7,990,622 - Conradi , et al. August 2, 2 | 2011-08-02 |
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20110019169 - Conradi; Olaf ;   et al. | 2011-01-27 |
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective App 20100290024 - Conradi; Olaf ;   et al. | 2010-11-18 |
Projection objective of a microlithographic projection exposure apparatus Grant 7,830,611 - Conradi , et al. November 9, 2 | 2010-11-09 |
Projection exposure apparatus and method for operating the same Grant 7,808,615 - Gruner , et al. October 5, 2 | 2010-10-05 |
Microlithographic Projection Exposure Apparatus App 20100231883 - Dodoc; Aurelian ;   et al. | 2010-09-16 |
Method for improving the imaging properties of a projection objective, and such a projection objective Grant 7,777,963 - Conradi , et al. August 17, 2 | 2010-08-17 |
Optical System And Method Of Use App 20090231565 - Conradi; Olaf | 2009-09-17 |
Method And System For Correcting Image Changes App 20090153831 - Conradi; Olaf ;   et al. | 2009-06-18 |
Microlithography projection objective App 20090115986 - Feldmann; Heiko ;   et al. | 2009-05-07 |
Method for Improving the Imaging Properties of a Projection Objective, and Such a Projection Objective App 20080310029 - Conradi; Olaf ;   et al. | 2008-12-18 |
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20080239503 - Conradi; Olaf ;   et al. | 2008-10-02 |
Projection Exposure Apparatus And Method For Operating The Same App 20080002167 - Gruner; Toralf ;   et al. | 2008-01-03 |