| Patent | Date |
|---|
In-field illumination for eye tracking
Grant 11,455,031 - Sharma , et al. September 27, 2 | 2022-09-27 |
Fabrication of self-aligned grating elements with high refractive index for waveguide displays
Grant 11,448,806 - Colburn , et al. September 20, 2 | 2022-09-20 |
Nanoimprint lithography material with switchable mechanical properties
Grant 11,415,880 - Lane , et al. August 16, 2 | 2022-08-16 |
Gratings with variable depths formed using planarization for waveguide displays
Grant 11,402,578 - Colburn , et al. August 2, 2 | 2022-08-02 |
Substituted Mono- And Poly-phenyl-core Monomers And Polymers Thereof For Volume Bragg Gratings
App 20220153693 - PURVIS, II; Lafe Joseph ; et al. | 2022-05-19 |
Substituted Propane-core Monomers And Polymers Thereof For Volume Bragg Gratings
App 20220153895 - PURVIS, II; Lafe Joseph ; et al. | 2022-05-19 |
Corrective Optics For Reducing Fixed Pattern Noise In Head Mounted Displays
App 20220128820 - Geng; Ying ; et al. | 2022-04-28 |
Nanoimprint Lithography Processes For Switching Mechanical Properties Of Imprint Materials
App 20220128903 - Lane; Austin ; et al. | 2022-04-28 |
Corrective optics for reducing fixed pattern noise in head mounted displays
Grant 11,281,008 - Geng , et al. March 22, 2 | 2022-03-22 |
Gray-tone Lithography For Precise Control Of Grating Etch Depth
App 20220082936 - FRANKE; Elliott ; et al. | 2022-03-17 |
Techniques For Manufacturing Variable Etch Depth Gratings Using Gray-tone Lithography
App 20220082739 - FRANKE; Elliott ; et al. | 2022-03-17 |
Duty Cycle Range Increase For Waveguide Combiners
App 20220075109 - MOHANTY; Nihar Ranjan ; et al. | 2022-03-10 |
Waveguides with high refractive index gratings manufactured by post-patterning infusion
Grant 11,262,495 - Colburn , et al. March 1, 2 | 2022-03-01 |
Nanoimprint lithography processes for switching mechanical properties of imprint materials
Grant 11,249,393 - Lane , et al. February 15, 2 | 2022-02-15 |
High refractive index gratings for waveguide displays manufactured by self-aligned stacked process
Grant 11,249,242 - Colburn , et al. February 15, 2 | 2022-02-15 |
Nanoimprint Lithography Process Using Low Surface Energy Mask
App 20220026799 - Lane; Austin ; et al. | 2022-01-27 |
Gratings with variable etch heights for waveguide displays
Grant 11,175,455 - Colburn , et al. November 16, 2 | 2021-11-16 |
Nanoimprint lithography process using low surface energy mask
Grant 11,156,913 - Lane , et al. October 26, 2 | 2021-10-26 |
Duty cycle range increase for waveguide combiners
Grant 11,150,394 - Mohanty , et al. October 19, 2 | 2021-10-19 |
Gratings With Variable Depths For Waveguide Displays
App 20210294006 - Colburn; Matthew E. ; et al. | 2021-09-23 |
Self Aligned Pattern Formation Post Spacer Etchback In Tight Pitch Configurations
App 20210280422 - Burns; Sean D. ; et al. | 2021-09-09 |
Gratings with variable depths for waveguide displays
Grant 11,067,726 - Colburn , et al. July 20, 2 | 2021-07-20 |
Tunable shrinkage process for manufacturing gratings
Grant 11,035,988 - Colburn , et al. June 15, 2 | 2021-06-15 |
Aromatic Substituted Alkane-core Monomers And Polymers Thereof For Volume Bragg Gratings
App 20210155599 - PURVIS; Lafe ; et al. | 2021-05-27 |
Anthraquinone Derivatized Monomers And Polymers For Volume Bragg Gratings
App 20210155585 - PURVIS; Lafe ; et al. | 2021-05-27 |
Aromatic Substituted Methane-core Monomers And Polymers Thereof For Volume Bragg Gratings
App 20210155584 - PURVIS; Lafe ; et al. | 2021-05-27 |
Aromatic Substituted Ethane-core Monomers And Polymers Thereof For Volume Bragg Gratings
App 20210155581 - PURVIS; Lafe ; et al. | 2021-05-27 |
Thiophosphate And Phosphine Sulfide Derivatized Monomers And Polymers For Volume Bragg Gratings
App 20210155639 - LANE; Austin ; et al. | 2021-05-27 |
Self aligned pattern formation post spacer etchback in tight pitch configurations
Grant 11,018,007 - Burns , et al. May 25, 2 | 2021-05-25 |
Diffraction grating with a variable refractive index formed using an energy gradient
Grant 10,996,382 - Calafiore , et al. May 4, 2 | 2021-05-04 |
Fabrication of self-aligned grating elements with high refractive index for waveguide displays
Grant 10,983,257 - Colburn , et al. April 20, 2 | 2021-04-20 |
Variable-etch-depth gratings
Grant 10,976,483 - Vora , et al. April 13, 2 | 2021-04-13 |
Transparent Illumination Layer With Transparent Waveguide Structure
App 20210103087 - Wei; Guohua ; et al. | 2021-04-08 |
Nanoparticle dispersion for increasing optical index of refraction
Grant 10,962,703 - Lane , et al. March 30, 2 | 2021-03-30 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Grant 10,957,583 - Burns , et al. March 23, 2 | 2021-03-23 |
Anti-refraction cancelling prism for multi-beam interference lithography exposure
Grant 10,914,944 - Leibovici , et al. February 9, 2 | 2021-02-09 |
Diffraction grating with a variable refractive index using ion implantation
Grant 10,895,671 - Calafiore , et al. January 19, 2 | 2021-01-19 |
Manufacturing three-dimensional diffraction gratings by selective deposition or selective etching
Grant 10,838,121 - Mohanty , et al. November 17, 2 | 2020-11-17 |
Fluorene Derivatized Monomers And Polymers For Volume Bragg Gratings
App 20200354311 - LANE; Austin ; et al. | 2020-11-12 |
Spatial Deposition Of Resins With Different Functionality
App 20200356050 - Lane; Austin ; et al. | 2020-11-12 |
Spatial Deposition Of Resins With Different Functionality On Different Substrates
App 20200355862 - Lane; Austin ; et al. | 2020-11-12 |
Light-activated Controlled Radical Polymerization
App 20200356049 - Lane; Austin ; et al. | 2020-11-12 |
Thermally Reversible And Reorganizable Crosslinking Polymers For Volume Bragg Gratings
App 20200354594 - LANE; Austin ; et al. | 2020-11-12 |
Latent Imaging For Volume Bragg Gratings
App 20200354496 - LANE; Austin ; et al. | 2020-11-12 |
Thianthrene Derivatized Monomers And Polymers For Volume Bragg Gratings
App 20200355997 - LANE; Austin ; et al. | 2020-11-12 |
Diffraction grating with a variable refractive index using multiple resins
Grant 10,823,887 - Calafiore , et al. November 3, 2 | 2020-11-03 |
Gratings With Variable Depths Formed Using Planarization For Waveguide Displays
App 20200333531 - Colburn; Matthew E. ; et al. | 2020-10-22 |
Corrective Optics For Reducing Fixed Pattern Noise In Head Mounted Displays
App 20200271937 - Geng; Ying ; et al. | 2020-08-27 |
Variable-etch-depth Gratings
App 20200271850 - VORA; Ankit ; et al. | 2020-08-27 |
Curable Formulation With High Refractive Index And Its Application In Surface Relief Grating Using Nanoimprinting Lithography
App 20200249568 - Kind Code | 2020-08-06 |
Curable Formulation With High Refractive Index And Its Application In Surface Relief Grating Using Nanoimprinting Lithography
App 20200247073 - Kind Code | 2020-08-06 |
Duty Cycle Range Increase For Waveguide Combiners
App 20200249386 - Kind Code | 2020-08-06 |
Gratings with variable depths formed using planarization for waveguide displays
Grant 10,732,351 - Colburn , et al. | 2020-08-04 |
Fabricating of diffraction grating by ion beam etching
Grant 10,712,481 - Mohanty , et al. | 2020-07-14 |
Variable neutral density filter for multi-beam interference lithography exposure
Grant 10,712,670 - Leibovici , et al. | 2020-07-14 |
Corrective optics for reducing fixed pattern noise in head mounted displays
Grant 10,684,482 - Geng , et al. | 2020-06-16 |
Gratings with variable etch heights for waveguide displays
Grant 10,649,141 - Colburn , et al. | 2020-05-12 |
High refractive index gratings for waveguide displays manufactured by self-aligned stacked process
Grant 10,613,268 - Colburn , et al. | 2020-04-07 |
Self Aligned Pattern Formation Post Spacer Etchback In Tight Pitch Configurations
App 20200075336 - Burns; Sean D. ; et al. | 2020-03-05 |
Nanoimprint lithography system and method
Grant 10,569,449 - Curts , et al. Feb | 2020-02-25 |
Bragg-like Gratings On High Refractive Index Material
App 20200033530 - Colburn; Matthew E. ; et al. | 2020-01-30 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Grant 10,546,774 - Burns , et al. Ja | 2020-01-28 |
Gray-tone electron-beam lithography
Grant 10,534,115 - Calafiore , et al. Ja | 2020-01-14 |
Self aligned pattern formation post spacer etchback in tight pitch configurations
Grant 10,529,569 - Burns , et al. J | 2020-01-07 |
Self-aligned Quadruple Patterning (saqp) For Routing Layouts Including Multi-track Jogs
App 20190393082 - Burns; Sean D. ; et al. | 2019-12-26 |
Variable neutral density filter for multi-beam interference lithography exposure
Grant 10,509,327 - Leibovici , et al. Dec | 2019-12-17 |
Nanoimprint Lithography Material With Switchable Mechanical Properties
App 20190346760 - Lane; Austin ; et al. | 2019-11-14 |
Nanoimprint Lithography Processes For Switching Mechanical Properties Of Imprint Materials
App 20190346759 - Lane; Austin ; et al. | 2019-11-14 |
Nanoimprint Lithography Process Using Low Surface Energy Mask
App 20190346761 - Lane; Austin ; et al. | 2019-11-14 |
Gratings With Variable Depths For Waveguide Displays
App 20190324176 - Colburn; Matthew E. ; et al. | 2019-10-24 |
Gratings With Variable Depths Formed Using Planarization For Waveguide Displays
App 20190324202 - Colburn; Matthew E. ; et al. | 2019-10-24 |
Self aligned conductive lines with relaxed overlay
Grant 10,395,985 - Burns , et al. A | 2019-08-27 |
Manufacturing three-dimensional diffraction gratings by selective deposition or selective etching
Grant 10,274,651 - Mohanty , et al. | 2019-04-30 |
Self Aligned Pattern Formation Post Spacer Etchback In Tight Pitch Configurations
App 20180350599 - Burns; Sean D. ; et al. | 2018-12-06 |
Self aligned pattern formation post spacer etchback in tight pitch configurations
Grant 10,121,661 - Burns , et al. November 6, 2 | 2018-11-06 |
Corrective Optics For Reducing Fixed Pattern Noise In Head Mounted Displays
App 20180292656 - Geng; Ying ; et al. | 2018-10-11 |
Self aligned conductive lines with relaxed overlay
Grant 10,083,864 - Burns , et al. September 25, 2 | 2018-09-25 |
Self-aligned Quadruple Patterning (saqp) For Routing Layouts Including Multi-track Jogs
App 20180233403 - Burns; Sean D. ; et al. | 2018-08-16 |
Self Aligned Conductive Lines With Relaxed Overlay
App 20180233408 - Burns; Sean D. ; et al. | 2018-08-16 |
Self Aligned Pattern Formation Post Spacer Etchback In Tight Pitch Configurations
App 20180197738 - Burns; Sean D. ; et al. | 2018-07-12 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Grant 9,991,156 - Burns , et al. June 5, 2 | 2018-06-05 |
Aligning conductive vias with trenches
Grant 9,972,533 - Burns , et al. May 15, 2 | 2018-05-15 |
Self aligned pattern formation post spacer etchback in tight pitch configurations
Grant 9,934,970 - Burns , et al. April 3, 2 | 2018-04-03 |
Aligning Conductive Vias With Trenches
App 20180025943 - Burns; Sean D. ; et al. | 2018-01-25 |
Self Aligned Conductive Lines With Relaxed Overlay
App 20180005885 - Burns; Sean D. ; et al. | 2018-01-04 |
Self aligned conductive lines
Grant 9,852,946 - Burns , et al. December 26, 2 | 2017-12-26 |
Self Aligned Conductive Lines
App 20170358492 - Burns; Sean D. ; et al. | 2017-12-14 |
Self-aligned quadruple patterning process
Grant 9,842,737 - Colburn , et al. December 12, 2 | 2017-12-12 |
Self-aligned Quadruple Patterning (saqp) For Routing Layouts Including Multi-track Jogs
App 20170352585 - Burns; Sean D. ; et al. | 2017-12-07 |
Method and structure for cut material selection
Grant 9,779,944 - Burns , et al. October 3, 2 | 2017-10-03 |
Aligning conductive vias with trenches
Grant 9,773,700 - Burns , et al. September 26, 2 | 2017-09-26 |
Graphoepitaxy directed self-assembly process for semiconductor fin formation
Grant 9,659,824 - Cheng , et al. May 23, 2 | 2017-05-23 |
Self aligned conductive lines with relaxed overlay
Grant 9,607,886 - Burns , et al. March 28, 2 | 2017-03-28 |
Fin trimming in a double sit process
Grant 9,601,345 - Cheng , et al. March 21, 2 | 2017-03-21 |
Method to harden photoresist for directed self-assembly processes
Grant 9,563,122 - Cheng , et al. February 7, 2 | 2017-02-07 |
Method To Harden Photoresist For Directed Self-assembly Processes
App 20160320701 - Cheng; Joy ; et al. | 2016-11-03 |
Graphoepitaxy Directed Self-assembly Process For Semiconductor Fin Formation
App 20160322259 - Cheng; Joy ; et al. | 2016-11-03 |
Fin Trimming In A Double Sit Process
App 20160284558 - Cheng; Kangguo ; et al. | 2016-09-29 |
Integration of dense and variable pitch fin structures
Grant 9,378,972 - Cheng , et al. June 28, 2 | 2016-06-28 |
Self-aligned Quadruple Patterning Process
App 20160163600 - COLBURN; Matthew E. ; et al. | 2016-06-09 |
Self-aligned quadruple patterning process
Grant 9,305,845 - Colburn , et al. April 5, 2 | 2016-04-05 |
Self-aligned Quadruple Patterning Process
App 20160071771 - COLBURN; Matthew E. ; et al. | 2016-03-10 |
Grapho-epitaxy DSA process with dimension control of template pattern
Grant 9,123,658 - Abdallah , et al. September 1, 2 | 2015-09-01 |
Integration of dense and variable pitch fin structures
Grant 9,087,792 - Cheng , et al. July 21, 2 | 2015-07-21 |
Integration Of Dense And Variable Pitch Fin Structures
App 20150170927 - Cheng; Kangguo ; et al. | 2015-06-18 |
Process of multiple exposures with spin castable films
Grant 9,058,997 - Burkhardt , et al. June 16, 2 | 2015-06-16 |
Integration of dense and variable pitch fin structures
Grant 9,040,371 - Cheng , et al. May 26, 2 | 2015-05-26 |
Methods of forming nanoparticles using semiconductor manufacturing infrastructure
Grant 8,986,596 - Cheng , et al. March 24, 2 | 2015-03-24 |
Integration Of Dense And Variable Pitch Fin Structures
App 20150041812 - Cheng; Kangguo ; et al. | 2015-02-12 |
Integration Of Dense And Variable Pitch Fin Structures
App 20150041958 - Cheng; Kangguo ; et al. | 2015-02-12 |
Interconnect structures with engineered dielectrics with nanocolumnar porosity
Grant 8,901,741 - Colburn , et al. December 2, 2 | 2014-12-02 |
Sidewall image transfer process
Grant 8,883,649 - Yin , et al. November 11, 2 | 2014-11-11 |
Grapho-epitaxy Dsa Process With Dimension Control Of Template Pattern
App 20140322917 - Abdallah; Jassem A. ; et al. | 2014-10-30 |
Grapho-epitaxy Dsa Process With Dimension Control Of Template Pattern
App 20140315390 - ABDALLAH; JASSEM A. ; et al. | 2014-10-23 |
DSA grapho-epitaxy process with etch stop material
Grant 8,859,433 - Abdallah , et al. October 14, 2 | 2014-10-14 |
Grapho-epitaxy DSA process with dimension control of template pattern
Grant 8,853,085 - Abdallah , et al. October 7, 2 | 2014-10-07 |
Dsa Grapho-epitaxy Process With Etch Stop Material
App 20140256145 - ABDALLAH; JASSEM A. ; et al. | 2014-09-11 |
Circuit structure with low dielectric constant regions
Grant 8,772,941 - Clevenger , et al. July 8, 2 | 2014-07-08 |
Methods Of Forming Nanoparticles Using Semiconductor Manufacturing Infrastructure
App 20140138863 - Cheng; Joy ; et al. | 2014-05-22 |
Pneumatic method and apparatus for nano imprint lithography having a conforming mask
Grant 8,721,952 - Colburn , et al. May 13, 2 | 2014-05-13 |
Simultaneous photoresist development and neutral polymer layer formation
Grant 8,715,917 - Holmes , et al. May 6, 2 | 2014-05-06 |
Simultaneous Photoresist Development And Neutral Polymer Layer Formation
App 20140099583 - Holmes; Steven J. ; et al. | 2014-04-10 |
Methods of directed self-assembly, and layered structures formed therefrom
Grant 8,623,458 - Cheng , et al. January 7, 2 | 2014-01-07 |
Method and material for a thermally crosslinkable random copolymer
Grant 8,609,238 - Colburn , et al. December 17, 2 | 2013-12-17 |
Method of fabricating dual damascene structures using a multilevel multiple exposure patterning scheme
Grant 8,536,031 - Arnold , et al. September 17, 2 | 2013-09-17 |
Electrical fuses and resistors having sublithographic dimensions
Grant 8,513,769 - Black , et al. August 20, 2 | 2013-08-20 |
Method of forming a semiconductor device having a cut-way hole to expose a portion of a hardmask layer
Grant 8,507,346 - Burkhardt , et al. August 13, 2 | 2013-08-13 |
Selectively coated self-aligned mask
Grant 8,491,987 - Colburn , et al. July 23, 2 | 2013-07-23 |
Wafer Fill Patterns And Uses
App 20130181267 - Burkhardt; Martin ; et al. | 2013-07-18 |
Tone Inversion With Partial Underlayer Etch For Semiconductor Device Formation
App 20130175658 - Arnold; John C. ; et al. | 2013-07-11 |
Tone inversion with partial underlayer etch for semiconductor device formation
Grant 8,470,711 - Arnold , et al. June 25, 2 | 2013-06-25 |
Method for forming an interconnect structure
Grant 8,435,884 - Kim , et al. May 7, 2 | 2013-05-07 |
Method of fabricating dual damascene structures using a multilevel multiple exposure patterning scheme
App 20130026639 - Arnold; John C. ; et al. | 2013-01-31 |
Method for reducing tip-to-tip spacing between lines
Grant 8,361,704 - Colburn , et al. January 29, 2 | 2013-01-29 |
Interconnect structures with engineered dielectrics with nanocolumnar porosity
Grant 8,358,011 - Colburn , et al. January 22, 2 | 2013-01-22 |
Interconnect Structures With Engineered Dielectrics With Nanocolumnar Porosity
App 20130009315 - Colburn; Matthew E. ; et al. | 2013-01-10 |
Device and methodology for reducing effective dielectric constant in semiconductor devices
Grant 8,343,868 - Edelstein , et al. January 1, 2 | 2013-01-01 |
Interconnect structures with ternary patterned features generated from two lithographic processes
Grant 8,338,952 - Colburn , et al. December 25, 2 | 2012-12-25 |
Pneumatic Method And Apparatus For Nano Imprint Lithography Having A Conforming Mask
App 20120321740 - Colburn; Matthew E. ; et al. | 2012-12-20 |
Functionalized carbosilane polymers and photoresist compositions containing the same
Grant 8,334,088 - Allen , et al. December 18, 2 | 2012-12-18 |
Sidewall Image Transfer Process Employing A Cap Material Layer For A Metal Nitride Layer
App 20120282779 - Arnold; John C. ; et al. | 2012-11-08 |
Sidewall image transfer process employing a cap material layer for a metal nitride layer
Grant 8,298,954 - Arnold , et al. October 30, 2 | 2012-10-30 |
Interconnect Structures With Engineered Dielectrics With Nanocolumnar Porosity
App 20120261823 - Colburn; Matthew E. ; et al. | 2012-10-18 |
Sidewall Image Transfer Process
App 20120244711 - Yin; Yunpeng ; et al. | 2012-09-27 |
Process of Multiple Exposures With Spin Castable Films
App 20120214311 - Burkhardt; Martin ; et al. | 2012-08-23 |
Step and Flash Imprint Lithography
App 20120133078 - Willson; Carlton Grant ; et al. | 2012-05-31 |
Tone Inversion With Partial Underlayer Etch
App 20120126358 - Arnold; John C. ; et al. | 2012-05-24 |
Wafer Fill Patterns And Uses
App 20120126294 - Burkhardt; Martin ; et al. | 2012-05-24 |
Chemical trim of photoresist lines by means of a tuned overcoat
Grant 8,137,893 - Burns , et al. March 20, 2 | 2012-03-20 |
Method and system for tone inverting of residual layer tolerant imprint lithography
Grant 8,137,996 - Colburn , et al. March 20, 2 | 2012-03-20 |
Method and system for tone inverting of residual layer tolerant imprint lithography
Grant 8,137,997 - Colburn , et al. March 20, 2 | 2012-03-20 |
Method For Forming An Interconnect Structure
App 20120058640 - Kim; Ryoung-Han ; et al. | 2012-03-08 |
Reducing effective dielectric constant in semiconductor devices
Grant 8,129,286 - Edelstein , et al. March 6, 2 | 2012-03-06 |
Method for producing self-aligned mask, articles produced by same and composition for same
Grant 8,119,322 - Brunner , et al. February 21, 2 | 2012-02-21 |
Mask and etch process for pattern assembly
Grant 8,119,531 - Arnold , et al. February 21, 2 | 2012-02-21 |
Method for removing residues from a patterned substrate
Grant 8,053,368 - Burns , et al. November 8, 2 | 2011-11-08 |
Method And Material For A Thermally Crosslinkable Random Copolymer
App 20110256359 - Colburn; Matthew E. ; et al. | 2011-10-20 |
Integrated circuits and methods of design and manufacture thereof
Grant 8,039,203 - Wang , et al. October 18, 2 | 2011-10-18 |
Device for holding a template for use in imprint lithography
Grant 8,033,814 - Bailey , et al. October 11, 2 | 2011-10-11 |
Method and material for a thermally crosslinkable random copolymer
Grant 8,017,194 - Colburn , et al. September 13, 2 | 2011-09-13 |
Method Of Fabricating Dual Damascene Structures Using A Multilevel Multiple Exposure Patterning Scheme
App 20110204523 - Arnold; John C. ; et al. | 2011-08-25 |
Dual exposure track only pitch split process
Grant 7,994,060 - Burns , et al. August 9, 2 | 2011-08-09 |
Method for fabricating self-aligned nanostructure using self-assembly block copolymers, and structures fabricated therefrom
Grant 7,993,816 - Black , et al. August 9, 2 | 2011-08-09 |
Line ends forming
Grant 7,993,815 - Colburn , et al. August 9, 2 | 2011-08-09 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
Grant 7,982,312 - Colburn , et al. July 19, 2 | 2011-07-19 |
Method To Generate Airgaps With A Template First Scheme And A Self Aligned Blockout Mask And Structure
App 20110163446 - Nitta; Satyanarayana Venkata ; et al. | 2011-07-07 |
Process for interfacial adhesion in laminate structures through patterned roughing of a surface
Grant 7,972,965 - Cooney, III , et al. July 5, 2 | 2011-07-05 |
Methods Of Directed Self-assembly, And Layered Structures Formed Therefrom
App 20110147984 - CHENG; Joy ; et al. | 2011-06-23 |
Chemical Trim of Photoresist Lines by Means of A Tuned Overcoat
App 20110129652 - Burns; Sean David ; et al. | 2011-06-02 |
Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same
Grant 7,948,051 - Colburn , et al. May 24, 2 | 2011-05-24 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices
App 20110111590 - Edelstein; Daniel C. ; et al. | 2011-05-12 |
Dual Exposure Track Only Pitch Split Process
App 20110049680 - Burns; Sean D. ; et al. | 2011-03-03 |
Functionalized Carbosilane Polymers and Photoresist Compositions Containing the Same
App 20110045407 - Allen; Robert D. ; et al. | 2011-02-24 |
Device and methodology for reducing effective dielectric constant in semiconductor devices
Grant 7,892,940 - Edelstein , et al. February 22, 2 | 2011-02-22 |
Functionalized carbosilane polymers and photoresist compositions containing the same
Grant 7,883,828 - Allen , et al. February 8, 2 | 2011-02-08 |
Method and apparatus for direct referencing of top surface of workpiece during imprint lithography
Grant 7,883,832 - Colburn , et al. February 8, 2 | 2011-02-08 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
Grant 7,862,989 - Colburn , et al. January 4, 2 | 2011-01-04 |
Chemical trim of photoresist lines by means of a tuned overcoat material
Grant 7,862,982 - Burns , et al. January 4, 2 | 2011-01-04 |
Structure for stochastic integrated circuit personalization
Grant 7,838,873 - Clevenger , et al. November 23, 2 | 2010-11-23 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
Grant 7,837,459 - Colburn , et al. November 23, 2 | 2010-11-23 |
Electrical Fuses And Resistors Having Sublithographic Dimensions
App 20100283121 - Black; Charles T. ; et al. | 2010-11-11 |
Functionalized carbosilane polymers and photoresist compositions containing the same
Grant 7,824,845 - Allen , et al. November 2, 2 | 2010-11-02 |
Method And System For Tone Inverting Of Residual Layer Tolerant Imprint Lithography
App 20100230385 - Colburn; Matthew E. ; et al. | 2010-09-16 |
Method And System For Tone Inverting Of Residual Layer Tolerant Imprint Lithography
App 20100230048 - Colburn; Matthew E. ; et al. | 2010-09-16 |
Method and materials for patterning a neutral surface
Grant 7,790,350 - Breyta , et al. September 7, 2 | 2010-09-07 |
Method and system for tone inverting of residual layer tolerant imprint lithography
Grant 7,776,628 - Colburn , et al. August 17, 2 | 2010-08-17 |
Cut-and-paste imprint lithographic mold and method therefor
Grant 7,776,709 - Colburn , et al. August 17, 2 | 2010-08-17 |
Method For Reducing Tip-to-tip Spacing Between Lines
App 20100178615 - COLBURN; MATTHEW E. ; et al. | 2010-07-15 |
Gate patterning scheme with self aligned independent gate etch
Grant 7,749,903 - Halle , et al. July 6, 2 | 2010-07-06 |
Electrical fuses and resistors having sublithographic dimensions
Grant 7,741,721 - Black , et al. June 22, 2 | 2010-06-22 |
Method for fabricating dual damascene structures
Grant 7,727,708 - Colburn , et al. June 1, 2 | 2010-06-01 |
Device for holding a template for use in imprint lithography
Grant 7,708,542 - Bailey , et al. May 4, 2 | 2010-05-04 |
Microelectronic circuit structure with layered low dielectric constant regions
Grant 7,692,308 - Clevenger , et al. April 6, 2 | 2010-04-06 |
Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics
Grant 7,687,913 - Chakrapani , et al. March 30, 2 | 2010-03-30 |
Metal capping process for BEOL interconnect with air gaps
Grant 7,666,753 - Bonilla , et al. February 23, 2 | 2010-02-23 |
Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent
Grant 7,645,694 - Colburn , et al. January 12, 2 | 2010-01-12 |
Chemical Trim Of Photoresist Lines By Means Of A Tuned Overcoat Material
App 20090311490 - Burns; Sean David ; et al. | 2009-12-17 |
Interconnect Structures With Ternary Patterned Features Generated From Two Lithographic Processes
App 20090294982 - Colburn; Matthew E. ; et al. | 2009-12-03 |
Method For Removing Residues From A Patterned Substrate
App 20090246958 - Burns; Sean D. ; et al. | 2009-10-01 |
Device and methodology for reducing effective dielectric constant in semiconductor devices
Grant 7,592,685 - Edelstein , et al. September 22, 2 | 2009-09-22 |
Method For Fabricating Self-aligned Nanostructure Using Self-assembly Block Copolymers, And Structures Fabricated Therefrom
App 20090233236 - Black; Charles T. ; et al. | 2009-09-17 |
Imprint Lithography Templates Having Alignment Marks
App 20090214689 - Bailey; Todd C. ; et al. | 2009-08-27 |
Method for fabricating dual damascene structures
Grant 7,579,137 - Colburn , et al. August 25, 2 | 2009-08-25 |
Gate Patterning Scheme With Self Aligned Independent Gate Etch
App 20090203200 - Halle; Scott D. ; et al. | 2009-08-13 |
Method And Material For A Thermally Crosslinkable Random Copolymer
App 20090186234 - Colburn; Matthew E. ; et al. | 2009-07-23 |
Structure and method for stochastic integrated circuit personalization
Grant 7,544,578 - Clevenger , et al. June 9, 2 | 2009-06-09 |
Method and structure for ultra narrow crack stop for multilevel semiconductor device
Grant 7,544,602 - Clevenger , et al. June 9, 2 | 2009-06-09 |
Process of multiple exposures with spin castable film
App 20090104566 - Burkhardt; Martin ; et al. | 2009-04-23 |
Method of producing self-aligned mask in conjunction with blocking mask, articles produced by same and composition for same
Grant 7,517,637 - Colburn , et al. April 14, 2 | 2009-04-14 |
Selective thin metal cap process
Grant 7,514,361 - Bonilla , et al. April 7, 2 | 2009-04-07 |
Functionalized Carbosilane Polymers And Photoresist Compositions Containing The Same
App 20090081579 - Allen; Robert D. ; et al. | 2009-03-26 |
Integrated Circuits and Methods of Design and Manufacture Thereof
App 20090081563 - Wang; Helen ; et al. | 2009-03-26 |
Functionalized Carbosilane Polymers And Photoresist Compositions Containing The Same
App 20090081585 - Allen; Robert D. ; et al. | 2009-03-26 |
Functionalized Carbosilane Polymers And Photoresist Compositions Containing The Same
App 20090081597 - Allen; Robert D. ; et al. | 2009-03-26 |
Functionalized Carbosilane Polymers And Photoresist Compositions Containing The Same
App 20090081598 - Allen; Robert D. ; et al. | 2009-03-26 |
Microelectronic Circuit Structure With Layered Low Dielectric Constant Regions
App 20090072410 - Clevenger; Lawrence A. ; et al. | 2009-03-19 |
Line Ends Forming
App 20090068837 - Colburn; Matthew E. ; et al. | 2009-03-12 |
Memory Cell
App 20090065956 - Colburn; Matthew E. ; et al. | 2009-03-12 |
Selective Thin Metal Cap Process
App 20090053890 - Bonilla; Griselda ; et al. | 2009-02-26 |
Electrical Fuses And Resistors Having Sublithographic Dimensions
App 20090032959 - Black; Charles T. ; et al. | 2009-02-05 |
Method and materials for patterning a neutral surface
App 20090035668 - Breyta; Gregory ; et al. | 2009-02-05 |
Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same
Grant 7,485,341 - Colburn , et al. February 3, 2 | 2009-02-03 |
Microelectronic circuit structure with layered low dielectric constant regions and method of forming same
Grant 7,485,567 - Clevenger , et al. February 3, 2 | 2009-02-03 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, Materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
App 20090023083 - Colburn; Matthew E. ; et al. | 2009-01-22 |
Structure For Stochastic Integrated Circuit Personalization
App 20080308801 - Clevenger; Lawrence A. ; et al. | 2008-12-18 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
App 20080303160 - Colburn; Matthew E. ; et al. | 2008-12-11 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
App 20080305197 - Colburn; Matthew E. ; et al. | 2008-12-11 |
Interconnect Structures With Ternary Patterned Features Generated From Two Lithographic Processes
App 20080284039 - Colburn; Matthew E. ; et al. | 2008-11-20 |
Method For Improved Process Latitude By Elongated Via Integration
App 20080284031 - Colburn; Matthew E. | 2008-11-20 |
Nonlithographic Method to Produce Self-Aligned Mask, Articles Produced by Same and Compositions for Same
App 20080265382 - Colburn; Matthew E. ; et al. | 2008-10-30 |
Air Gap With Selective Pinchoff Using An Anti-nucleation Layer
App 20080265377 - Clevenger; Lawrence A. ; et al. | 2008-10-30 |
Nonlithographic Method to Produce Self-Aligned Mask, Articles Produced by Same and Compositions for Same
App 20080265415 - Colburn; Matthew E. ; et al. | 2008-10-30 |
Circuit structure with low dielectric constant regions and method of forming same
Grant 7,439,172 - Clevenger , et al. October 21, 2 | 2008-10-21 |
Method for improved process latitude by elongated via integration
Grant 7,439,628 - Colburn October 21, 2 | 2008-10-21 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices
App 20080254630 - EDELSTEIN; Daniel C. ; et al. | 2008-10-16 |
Method for fabricating dual damascence structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascence patterning
Grant 7,435,074 - Colburn , et al. October 14, 2 | 2008-10-14 |
DEVELOPMENT OR REMOVAL OF BLOCK COPOLYMER OR PMMA-b-S-BASED RESIST USING POLAR SUPERCRITICAL SOLVENT
App 20080248655 - Colburn; Matthew E. ; et al. | 2008-10-09 |
Method And Structure For Ultra Narrow Crack Stop For Multilevel Semiconductor Device
App 20080237868 - Clevenger; Lawrence A. ; et al. | 2008-10-02 |
Method For Producing Self-aligned Mask, Articles Produced By Same And Composition For Same
App 20080220615 - Brunner; Timothy A. ; et al. | 2008-09-11 |
Method for Fabricating Dual Damascene Structures
App 20080214011 - Colburn; Matthew E. ; et al. | 2008-09-04 |
Microelectronic Circuit Structure With Layered Low Dielectric Constant Regions And Method Of Forming Same
App 20080185728 - Clevenger; Lawrence A. ; et al. | 2008-08-07 |
Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent
Grant 7,407,554 - Colburn , et al. August 5, 2 | 2008-08-05 |
Imprint Reference Template For Multilayer Or Multipattern Registration And Method Therefor
App 20080180646 - Colburn; Matthew E. ; et al. | 2008-07-31 |
Device and methodology for reducing effective dielectric constant in semiconductor devices
Grant 7,405,147 - Edelstein , et al. July 29, 2 | 2008-07-29 |
Metal Capping Process For Beol Interconnect With Air Gaps
App 20080169565 - Bonilla; Griselda ; et al. | 2008-07-17 |
Circuit Structure with Low Dielectric Constant Regions and Method of Forming Same
App 20080171432 - Clevenger; Lawrence A. ; et al. | 2008-07-17 |
Structure And Method For Stochastic Integrated Circuit Personalization
App 20080157314 - Clevenger; Lawrence A. ; et al. | 2008-07-03 |
Method of forming closed air gap interconnects and structures formed thereby
Grant 7,393,776 - Colburn , et al. July 1, 2 | 2008-07-01 |
Method And System For Nanostructure Placement Using Imprint Lithography
App 20080131705 - Colburn; Matthew E. ; et al. | 2008-06-05 |
Method to generate airgaps with a template first scheme and a self aligned blockout mask
App 20080122106 - Nitta; Satyanarayana Venkata ; et al. | 2008-05-29 |
Method for producing self-aligned mask, articles produced by same and composition for same
Grant 7,378,738 - Brunner , et al. May 27, 2 | 2008-05-27 |
Method and system for tone inverting of residual layer tolerant imprint lithography
App 20080118645 - Colburn; Matthew E. ; et al. | 2008-05-22 |
Cut-and-paste Imprint Lithographic Mold And Method Therefor
App 20080116602 - Colburn; Matthew E. ; et al. | 2008-05-22 |
Closed air gap interconnect structure
Grant 7,361,991 - Saenger , et al. April 22, 2 | 2008-04-22 |
Cut-and-paste imprint lithographic mold and method therefor
Grant 7,344,955 - Colburn , et al. March 18, 2 | 2008-03-18 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices
App 20080038915 - EDELSTEIN; Daniel C. ; et al. | 2008-02-14 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices
App 20080038923 - EDELSTEIN; Daniel C. ; et al. | 2008-02-14 |
Process For Interfacial Adhesion In Laminate Structures Through Patterned Roughing Of A Surface
App 20080020546 - COONEY; Edward C. III ; et al. | 2008-01-24 |
Method of forming closed air gap interconnects and structures formed thereby
Grant 7,309,649 - Colburn , et al. December 18, 2 | 2007-12-18 |
Process for interfacial adhesion in laminate structures through patterned roughing of a surface
Grant 7,303,994 - Cooney, III , et al. December 4, 2 | 2007-12-04 |
Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks
Grant 7,303,383 - Sreenivasan , et al. December 4, 2 | 2007-12-04 |
Imprint Lithography System To Produce Light To Impinge Upon And Polymerize A Liquid In Superimposition With Template Overlay Marks
App 20070264588 - Sreenivasan; Sidlgata V. ; et al. | 2007-11-15 |
Interconnect structures with engineered dielectrics with nanocolumnar porosity
Grant 7,268,432 - Colburn , et al. September 11, 2 | 2007-09-11 |
Method for fabricating dual damascene structures
App 20070148598 - Colburn; Matthew E. ; et al. | 2007-06-28 |
Recovery Of Hydrophobicity Of Low-k And Ultra Low-k Organosilicate Films Used As Inter Metal Dielectrics
App 20070138640 - Chakrapani; Nirupama ; et al. | 2007-06-21 |
Imprint lithography template having a feature size under 250 nm
Grant 7,229,273 - Bailey , et al. June 12, 2 | 2007-06-12 |
Method of determining alignment of a template and a substrate having a liquid disposed therebetween
Grant 7,186,483 - Sreenivasan , et al. March 6, 2 | 2007-03-06 |
Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics
Grant 7,179,758 - Chakrapani , et al. February 20, 2 | 2007-02-20 |
Method of forming closed air gap interconnects and structures formed thereby
App 20060267208 - Colburn; Matthew E. ; et al. | 2006-11-30 |
Method of forming closed air gap interconnects and structures formed thereby
App 20060258147 - Colburn; Matthew E. ; et al. | 2006-11-16 |
Method for improved process latitude by elongated via integration
App 20060244146 - Colburn; Matthew E. | 2006-11-02 |
DEVELOPMENT OR REMOVAL OF BLOCK COPOLYMER OR PMMA-b-S-BASED RESIST USING POLAR SUPERCRITICAL SOLVENT
App 20060228653 - Colburn; Matthew E. ; et al. | 2006-10-12 |
Imprint reference template for multilayer or multipattern registration and method therefor
App 20060157898 - Colburn; Matthew E. ; et al. | 2006-07-20 |
Phase contrast alignment method and apparatus for nano imprint lithography
App 20060147820 - Colburn; Matthew E. ; et al. | 2006-07-06 |
Method and apparatus for direct referencing of top surface of workpiece during imprint lithography
App 20060145400 - Colburn; Matthew E. ; et al. | 2006-07-06 |
Method for improved process latitude by elongated via integration
Grant 7,071,097 - Colburn July 4, 2 | 2006-07-04 |
Cut-and-paste imprint lithographic mold and method therefor
App 20060110890 - Colburn; Matthew E. ; et al. | 2006-05-25 |
Pneumatic method and apparatus for nano imprint lithography
App 20060105571 - Colburn; Matthew E. ; et al. | 2006-05-18 |
Method for fabricating a self-aligned nanocolumnar airbridge and structure produced thereby
Grant 7,037,744 - Colburn , et al. May 2, 2 | 2006-05-02 |
Method for fabricating a self-aligned nanocolumnar airbridge and structure produced thereby
Grant 7,030,495 - Colburn , et al. April 18, 2 | 2006-04-18 |
Method for improved process latitude by elongated via integration
App 20060006546 - Colburn; Matthew E. | 2006-01-12 |
Process For Interfacial Adhesion In Laminate Structures Through Patterned Roughing Of A Surface
App 20050277266 - Cooney, Edward C. III ; et al. | 2005-12-15 |
Method for fabricating a self-aligned nanocolumnar airbridge and structure produced thereby
App 20050272341 - Colburn, Matthew E. ; et al. | 2005-12-08 |
Step and flash imprint lithography
App 20050236739 - Willson, Carlton Grant ; et al. | 2005-10-27 |
Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same
App 20050233597 - Colburn, Matthew E. ; et al. | 2005-10-20 |
Method For Fabricating A Self-aligned Nanocolumnar Airbridge And Structure Produced Thereby
App 20050208752 - Colburn, Matthew E. ; et al. | 2005-09-22 |
Method of producing self-aligned mask in conjuction with blocking mask, articles produced by same and composition for same
App 20050208430 - Colburn, Matthew E. ; et al. | 2005-09-22 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
App 20050202350 - Colburn, Matthew E. ; et al. | 2005-09-15 |
Robust ultra-low k interconnect structures using bridge-then-metallization fabrication sequence
Grant 6,930,034 - Colburn , et al. August 16, 2 | 2005-08-16 |
Device And Methodology For Reducing Effective Dielectric Constant In Semiconductor Devices
App 20050167838 - Edelstein, Daniel C. ; et al. | 2005-08-04 |
Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same
Grant 6,911,400 - Colburn , et al. June 28, 2 | 2005-06-28 |
Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics
App 20050106762 - Chakrapani, Nirupama ; et al. | 2005-05-19 |
Interconnect structures with engineered dielectrics with nanocolumnar porosity
App 20050079719 - Colburn, Matthew E. ; et al. | 2005-04-14 |
Imprint lithography templates having alignment marks
App 20050064344 - Bailey, Todd C. ; et al. | 2005-03-24 |
Method of forming closed air gap interconnects and structures formed thereby
App 20050062165 - Saenger, Katherine L. ; et al. | 2005-03-24 |
Method for producing self-aligned mask, articles produced by same and composition for same
App 20050045997 - Brunner, Timothy A. ; et al. | 2005-03-03 |
Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same
App 20040213971 - Colburn, Matthew E. ; et al. | 2004-10-28 |
Device for holding a template for use in imprint lithography
App 20040141163 - Bailey, Todd ; et al. | 2004-07-22 |
Robust ultra-low k interconnect structures using bridge-then-metallization fabrication sequence
App 20040127001 - Colburn, Matthew E. ; et al. | 2004-07-01 |
Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same
App 20040087176 - Colburn, Matthew E. ; et al. | 2004-05-06 |
Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same
App 20040087177 - Colburn, Matthew E. ; et al. | 2004-05-06 |
Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same
Grant 6,641,899 - Colburn , et al. November 4, 2 | 2003-11-04 |
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