Patent | Date |
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Device for Holding a Template for Use in Imprint Lithography App 20100173033 - Bailey; Todd ;   et al. | 2010-07-08 |
Electrode Formed In Aperture Defined By A Copolymer Mask App 20090239334 - Breitwisch; Matthew J. ;   et al. | 2009-09-24 |
Method of Automatic Fluid Dispensing for Imprint Lithography Processes App 20080199816 - Choi; Byung J. ;   et al. | 2008-08-21 |
Imprint Lithography Template Having a Feature Size Under 250 nm App 20080095878 - Bailey; Todd ;   et al. | 2008-04-24 |
Method of creating a dispersion of a liquid on a substrate Grant 7,060,324 - Bailey , et al. June 13, 2 | 2006-06-13 |
Method of aligning a template with a substrate employing moire patterns Grant 6,986,975 - Sreenivasan , et al. January 17, 2 | 2006-01-17 |
Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography Grant 6,954,275 - Choi , et al. October 11, 2 | 2005-10-11 |
High-resolution overlay alignment methods for imprint lithography Grant 6,921,615 - Sreenivasan , et al. July 26, 2 | 2005-07-26 |
High resolution overlay alignment systems for imprint lithography Grant 6,919,152 - Sreenivasan , et al. July 19, 2 | 2005-07-19 |
Method of varying template dimensions to achieve alignment during imprint lithography Grant 6,916,585 - Sreenivasan , et al. July 12, 2 | 2005-07-12 |
Dual wavelength method of determining a relative position of a substrate and a template Grant 6,902,853 - Sreenivasan , et al. June 7, 2 | 2005-06-07 |
Imprint lithography template comprising alignment marks Grant 6,842,229 - Sreenivasan , et al. January 11, 2 | 2005-01-11 |
Dual wavelength method of determining a relative position of a substrate and a template App 20040209177 - Sreenivasan, S.V. ;   et al. | 2004-10-21 |
Method of aligning a template with a substrate employing moire patterns App 20040189996 - Sreenivasan, S. V. ;   et al. | 2004-09-30 |
Method of determining alignment of a template and a substrate having a liquid disposed therebetween App 20040189994 - Sreenivasan, S. V. ;   et al. | 2004-09-30 |
Imprint lithography template having a feature size under 250 nm App 20040168586 - Bailey, Todd ;   et al. | 2004-09-02 |
Method of creating a dispersion of a liquid on a substrate App 20040170771 - Bailey, Todd ;   et al. | 2004-09-02 |
Imprint lithography template having a mold to compensate for material changes of an underlying liquid App 20040163563 - Sreenivasan, S. V. ;   et al. | 2004-08-26 |
Imprint lithography template comprising alignment marks App 20040141168 - Sreenivasan, S. V. ;   et al. | 2004-07-22 |
Method of varying template dimensions to achieve alignment during imprint lithography App 20040053146 - Sreenivasan, S.V. ;   et al. | 2004-03-18 |
Template for room temperature, low pressure micro-and nano-imprint lithography Grant 6,696,220 - Bailey , et al. February 24, 2 | 2004-02-24 |
Template for room temperature, low pressure micro-and nano-imprint lithography App 20020115002 - Bailey, Todd ;   et al. | 2002-08-22 |
High-resolution overlay alignment methods and systems for imprint lithography App 20020098426 - Sreenivasan, S. V. ;   et al. | 2002-07-25 |
Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography App 20020093122 - Choi, Byung J. ;   et al. | 2002-07-18 |
Method and system of automatic fluid dispensing for imprint lithography processes App 20020094496 - Choi, Byung J. ;   et al. | 2002-07-18 |