Chuc; Kien N.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chuc; Kien N..The latest application filed is for "modulating film properties by optimizing plasma coupling materials".
- Chuc; Kien N. - Cupertino CA
- Chuc; Kien N. - San Francisco CA
- CHUC; Kien N. - San Jose CA
| Patent | Date |
|---|---|
| Radio frequency conduit Grant D946,534 - Fischbach , et al. March 22, 2 | 2022-03-22 |
| Modulating film properties by optimizing plasma coupling materials Grant 11,270,905 - Venkatasubramanian , et al. March 8, 2 | 2022-03-08 |
| Modulating Film Properties By Optimizing Plasma Coupling Materials App 20210005500 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-01-07 |
| Process Kit For A High Throughput Processing Chamber App 20200325577 - GHOSH; Kalyanjit ; et al. | 2020-10-15 |
| Process kit for a high throughput processing chamber Grant 10,724,138 - Ghosh , et al. | 2020-07-28 |
| Micro-volume deposition chamber Grant 10,711,347 - DuBois , et al. | 2020-07-14 |
| Flow Control Features Of Cvd Chambers App 20200149166 - CHUC; Kien N. ; et al. | 2020-05-14 |
| Flow control features of CVD chambers Grant 10,550,472 - Chuc , et al. Fe | 2020-02-04 |
| Semiconductor processing system and methods using capacitively coupled plasma Grant 10,283,321 - Yang , et al. | 2019-05-07 |
| Gas distribution apparatus for processing chambers Grant 10,240,234 - Du Bois , et al. | 2019-03-26 |
| Process kit including flow isolator ring Grant 10,113,231 - Dubois , et al. October 30, 2 | 2018-10-30 |
| Process Kit For A High Throughput Processing Chamber App 20180274095 - GHOSH; Kalyanjit ; et al. | 2018-09-27 |
| Gas Distribution Apparatus for Processing Chambers App 20180237915 - DU BOIS; Dale R. ; et al. | 2018-08-23 |
| Process kit for a high throughput processing chamber Grant 10,017,855 - Ghosh , et al. July 10, 2 | 2018-07-10 |
| Micro-Volume Deposition Chamber App 20170298509 - DuBois; Dale R. ; et al. | 2017-10-19 |
| Process Chamber For Dielectric Gapfill App 20170226637 - Lubomirsky; Dmitry ; et al. | 2017-08-10 |
| Process Kit Including Flow Isolator Ring App 20160312359 - DUBOIS; Dale R. ; et al. | 2016-10-27 |
| Process Kit For A High Throughput Processing Chamber App 20160181088 - GHOSH; Kalyanjit ; et al. | 2016-06-23 |
| Semiconductor processing system and methods using capacitively coupled plasma Grant 9,144,147 - Yang , et al. September 22, 2 | 2015-09-22 |
| Flow Control Features Of Cvd Chambers App 20150013793 - CHUC; Kien N. ; et al. | 2015-01-15 |
| Flow control features of CVD chambers Grant 8,894,767 - Chuc , et al. November 25, 2 | 2014-11-25 |
| Process Chamber For Dielectric Gapfill App 20140083362 - LUBOMIRSKY; Dmitry ; et al. | 2014-03-27 |
| Semiconductor Processing System And Methods Using Capacitively Coupled Plasma App 20130153148 - Yang; Jang-Gyoo ; et al. | 2013-06-20 |
| Semiconductor Processing System And Methods Using Capacitively Coupled Plasma App 20130082197 - Yang; Jang-Gyoo ; et al. | 2013-04-04 |
| Semiconductor Processing System And Methods Using Capacitively Coupled Plasma App 20120180954 - Yang; Jang-Gyoo ; et al. | 2012-07-19 |
| Process Chamber For Dielectric Gapfill App 20120073501 - Lubomirsky; Dmitry ; et al. | 2012-03-29 |
| Flow Control Features Of Cvd Chambers App 20110011338 - Chuc; Kien N. ; et al. | 2011-01-20 |
| Process Chamber For Dielectric Gapfill App 20070289534 - Lubomirsky; Dmitry ; et al. | 2007-12-20 |
| Process Chamber For Dielectric Gapfill App 20070277734 - Lubomirsky; Dmitry ; et al. | 2007-12-06 |
| Process Chamber For Dielectric Gapfill App 20070281106 - Lubomirsky; Dmitry ; et al. | 2007-12-06 |
| Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport Grant 5,129,994 - Ebbing , et al. July 14, 1 | 1992-07-14 |
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