Patent | Date |
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Shuttering of aerosol streams Grant 10,850,510 - Christenson , et al. December 1, 2 | 2020-12-01 |
Shuttering of aerosol streams Grant 10,632,746 - Christenson , et al. | 2020-04-28 |
Shuttering of Aerosol Streams App 20200122461 - Christenson; Kurt K. ;   et al. | 2020-04-23 |
Shuttering of Aerosol Streams App 20190143678 - Christenson; Kurt K. ;   et al. | 2019-05-16 |
Substrate processing systems and related methods Grant 8,235,068 - Christenson August 7, 2 | 2012-08-07 |
Process for treatment of semiconductor wafer using water vapor containing environment Grant 8,142,571 - Christenson , et al. March 27, 2 | 2012-03-27 |
Process For Treatment Of Semiconductor Wafer Using Water Vapor Containing Environment App 20090286334 - Christenson; Kurt K. ;   et al. | 2009-11-19 |
Substrate processing systems and related methods App 20090277507 - Christenson; Kurt K. | 2009-11-12 |
Rinsing processes and equipment Grant 7,364,625 - Christenson , et al. April 29, 2 | 2008-04-29 |
Treatment systems and methods App 20070151576 - Christenson; Kurt K. ;   et al. | 2007-07-05 |
Using ozone to process wafer like objects App 20060070979 - Christenson; Kurt K. ;   et al. | 2006-04-06 |
Semiconductor wafer immersion systems and treatments using modulated acoustic energy App 20050098194 - Christenson, Kurt K. ;   et al. | 2005-05-12 |
Acoustic diffusers for acoustic field uniformity App 20050072625 - Christenson, Kurt K. | 2005-04-07 |
Semiconductor wafer cleaning systems and methods Grant 6,875,289 - Christenson , et al. April 5, 2 | 2005-04-05 |
Method for etching high-k films in solutions comprising dilute fluoride species Grant 6,835,667 - Christenson , et al. December 28, 2 | 2004-12-28 |
Treatment systems and methods App 20040050408 - Christenson, Kurt K. ;   et al. | 2004-03-18 |
Semiconductor wafer cleaning systems and methods App 20040050405 - Christenson, Kurt K. ;   et al. | 2004-03-18 |
Method for etching high-k films in solutions comprising dilute fluoride species App 20030235985 - Christenson, Kurt K. ;   et al. | 2003-12-25 |
Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized Grant 6,648,307 - Nelson , et al. November 18, 2 | 2003-11-18 |
Method and system to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized App 20030042631 - Nelson, Steven L. ;   et al. | 2003-03-06 |
Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized Grant 6,488,271 - Nelson , et al. December 3, 2 | 2002-12-03 |
Rinsing processes and equipment App 20020170573 - Christenson, Kurt K. ;   et al. | 2002-11-21 |
Method and system to control the concentration of dissolved gas in a liquid Grant 6,235,641 - Christenson May 22, 2 | 2001-05-22 |
System to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized Grant 5,971,368 - Nelson , et al. October 26, 1 | 1999-10-26 |