| Patent | Date |
|---|
Step and Repeat Imprint Lithography Process
App 20110221095 - Sreenivasan; Sidlgata V. ; et al. | 2011-09-15 |
Flexure based macro motion translation stage
Grant 8,016,277 - Choi , et al. September 13, 2 | 2011-09-13 |
Step and Repeat Imprint Lithography Processes
App 20100201042 - Sreenivasan; Sidlgata V. ; et al. | 2010-08-12 |
Device for Holding a Template for Use in Imprint Lithography
App 20100173033 - Bailey; Todd ; et al. | 2010-07-08 |
Step and repeat imprint lithography processes
Grant 7,727,453 - Sreenivasan , et al. June 1, 2 | 2010-06-01 |
Method of Automatic Fluid Dispensing for Imprint Lithography Processes
App 20080199816 - Choi; Byung J. ; et al. | 2008-08-21 |
Imprint Lithography Template Having a Feature Size Under 250 nm
App 20080095878 - Bailey; Todd ; et al. | 2008-04-24 |
Conforming Template for Patterning Liquids Disposed on Substrates
App 20070122942 - Sreenivasan; Sidlgata V. ; et al. | 2007-05-31 |
Conforming template for patterning liquids disposed on substrates
Grant 7,179,079 - Sreenivasan , et al. February 20, 2 | 2007-02-20 |
Chucking system for modulating shapes of substrates
App 20060176466 - Choi; Byung J. ; et al. | 2006-08-10 |
Step and repeat imprint lithography processes
Grant 7,077,992 - Sreenivasan , et al. July 18, 2 | 2006-07-18 |
Method of creating a dispersion of a liquid on a substrate
Grant 7,060,324 - Bailey , et al. June 13, 2 | 2006-06-13 |
System for determining characteristics of substrates employing fluid geometries
Grant 7,036,389 - Choi , et al. May 2, 2 | 2006-05-02 |
Step and repeat imprint lithography processes
App 20060076717 - Sreenivasan; Sidlgata V. ; et al. | 2006-04-13 |
Chucking system for modulating shapes of substrates
Grant 7,019,819 - Choi , et al. March 28, 2 | 2006-03-28 |
System for determining characteristics of substrates employing fluid geometries
Grant 6,990,870 - Choi , et al. January 31, 2 | 2006-01-31 |
Method of aligning a template with a substrate employing moire patterns
Grant 6,986,975 - Sreenivasan , et al. January 17, 2 | 2006-01-17 |
Chucking system for modulating shapes of substrates
Grant 6,982,783 - Choi , et al. January 3, 2 | 2006-01-03 |
Method for modulating shapes of substrates
Grant 6,980,282 - Choi , et al. December 27, 2 | 2005-12-27 |
Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography
Grant 6,954,275 - Choi , et al. October 11, 2 | 2005-10-11 |
Assembly and method for transferring imprint lithography templates
Grant 6,951,173 - Meissl , et al. October 4, 2 | 2005-10-04 |
Assembly And Method For Transferring Imprint Lithography Templates
App 20050214398 - Meissl, Mario J. ; et al. | 2005-09-29 |
High-resolution overlay alignment methods for imprint lithography
Grant 6,921,615 - Sreenivasan , et al. July 26, 2 | 2005-07-26 |
High resolution overlay alignment systems for imprint lithography
Grant 6,919,152 - Sreenivasan , et al. July 19, 2 | 2005-07-19 |
Method of varying template dimensions to achieve alignment during imprint lithography
Grant 6,916,585 - Sreenivasan , et al. July 12, 2 | 2005-07-12 |
Alignment methods for imprint lithography
Grant 6,916,584 - Sreenivasan , et al. July 12, 2 | 2005-07-12 |
Dual wavelength method of determining a relative position of a substrate and a template
Grant 6,902,853 - Sreenivasan , et al. June 7, 2 | 2005-06-07 |
Method for determining characteristics of substrate employing fluid geometries
Grant 6,871,558 - Choi , et al. March 29, 2 | 2005-03-29 |
Conforming template for patterning liquids disposed on substrates
App 20050051698 - Sreenivasan, Sidlgata V. ; et al. | 2005-03-10 |
Imprint lithography template comprising alignment marks
Grant 6,842,229 - Sreenivasan , et al. January 11, 2 | 2005-01-11 |
Chucking system for modulating shapes of substrates
App 20040223131 - Choi, Byung J. ; et al. | 2004-11-11 |
System for determining characteristics of substrates employing fluid geometries
App 20040223883 - Choi, Byung J. ; et al. | 2004-11-11 |
Dual wavelength method of determining a relative position of a substrate and a template
App 20040209177 - Sreenivasan, S.V. ; et al. | 2004-10-21 |
Method, system and holder for transferring templates during imprint lithography processes
Grant 6,805,054 - Meissl , et al. October 19, 2 | 2004-10-19 |
Method of determining alignment of a template and a substrate having a liquid disposed therebetween
App 20040189994 - Sreenivasan, S. V. ; et al. | 2004-09-30 |
Method of aligning a template with a substrate employing moire patterns
App 20040189996 - Sreenivasan, S. V. ; et al. | 2004-09-30 |
Imprint lithography template having a feature size under 250 nm
App 20040168586 - Bailey, Todd ; et al. | 2004-09-02 |
Method of creating a dispersion of a liquid on a substrate
App 20040170771 - Bailey, Todd ; et al. | 2004-09-02 |
Imprint lithography template having a mold to compensate for material changes of an underlying liquid
App 20040163563 - Sreenivasan, S. V. ; et al. | 2004-08-26 |
Imprint lithography template comprising alignment marks
App 20040141168 - Sreenivasan, S. V. ; et al. | 2004-07-22 |
Device for holding a template for use in imprint lithography
App 20040141163 - Bailey, Todd ; et al. | 2004-07-22 |
Step and repeat imprint lithography processes
App 20040124566 - Sreenivasan, Sidlgata V. ; et al. | 2004-07-01 |
Method and system for determining characteristics of substrates employing fluid geometries
App 20040112153 - Choi, Byung J. ; et al. | 2004-06-17 |
Method for modulating shapes of substrates
App 20040112861 - Choi, Byung J. ; et al. | 2004-06-17 |
Chucking system for modulating shapes of substrates
App 20040090611 - Choi, Byung J. ; et al. | 2004-05-13 |
High resolution overlay alignment systems for imprint lithography
App 20040086793 - Sreenivasan, S. V. ; et al. | 2004-05-06 |
Method of varying template dimensions to achieve alignment during imprint lithography
App 20040053146 - Sreenivasan, S.V. ; et al. | 2004-03-18 |
Template for room temperature, low pressure micro-and nano-imprint lithography
Grant 6,696,220 - Bailey , et al. February 24, 2 | 2004-02-24 |
Alignment methods for imprint lithography
App 20040021254 - Sreenivasan, Sidlgata V. ; et al. | 2004-02-05 |
Flexure based macro motion translation stage
App 20020150398 - Choi, Byung J. ; et al. | 2002-10-17 |
Template for room temperature, low pressure micro-and nano-imprint lithography
App 20020115002 - Bailey, Todd ; et al. | 2002-08-22 |
High-resolution overlay alignment methods and systems for imprint lithography
App 20020098426 - Sreenivasan, S. V. ; et al. | 2002-07-25 |
Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography
App 20020093122 - Choi, Byung J. ; et al. | 2002-07-18 |
Method and system of automatic fluid dispensing for imprint lithography processes
App 20020094496 - Choi, Byung J. ; et al. | 2002-07-18 |
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