Chen; Ying-Tsung
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chen; Ying-Tsung.The latest application filed is for "chemical mechanical polishing cleaning system with temperature control for defect reduction".
Company Profile
5.53.58
- Chen; Ying-Tsung - Hsinchu City TW
- Chen; Ying-Tsung - Hsinchu TW
- Chen; Ying-Tsung - Hsin-Chu TW
- Chen; Ying-Tsung - Kaohsiung TW
- Chen; Ying-Tsung - Kaohsiung City TW
- Chen; Ying-Tsung - Chiayi TW
- Chen; Ying-Tsung - Chiayi City TW
- Chen; Ying-Tsung - Fongyuan City Taichung County TW
- Chen, Ying-Tsung - Chiai TW
Patent Activity
| Patent | Date |
|---|---|
| Chemical Mechanical Polishing Cleaning System With Temperature Control For Defect Reduction App 20210272798 - Chen; Ssutzu ; et al. | 2021-09-02 |
| Hard Mask Removal Method App 20210225657 - Tu; Che-Hao ; et al. | 2021-07-22 |
| Semiconductor Device And Method App 20210159325 - Hsu; Shu-Wei ; et al. | 2021-05-27 |
| Hard mask removal method Grant 10,971,370 - Tu , et al. April 6, 2 | 2021-04-06 |
| Methods for Reducing Scratch Defects in Chemical Mechanical Planarization App 20200126803 - Pan; Wan-Chun ; et al. | 2020-04-23 |
| Hard Mask Removal Method App 20200118827 - Tu; Che-Hao ; et al. | 2020-04-16 |
| Planarization control in semiconductor manufacturing process Grant 10,541,139 - Nien , et al. Ja | 2020-01-21 |
| Methods for reducing scratch defects in chemical mechanical planarization Grant 10,522,365 - Pan , et al. Dec | 2019-12-31 |
| Hard mask removal method Grant 10,510,552 - Tu , et al. Dec | 2019-12-17 |
| Multi-layer mask and method of forming same Grant 10,269,567 - Tsai , et al. | 2019-04-23 |
| Doped poly-silicon for PolyCMP planarity improvement Grant 10,068,988 - Hong , et al. September 4, 2 | 2018-09-04 |
| Hard Mask Removal Method App 20180240679 - Tu; Che-Hao ; et al. | 2018-08-23 |
| Doped Poly-silicon For Polycmp Planarity Improvement App 20180145152 - Hong; William Weilun ; et al. | 2018-05-24 |
| Hard mask removal method Grant 9,960,050 - Tu , et al. May 1, 2 | 2018-05-01 |
| Surface treatment in a chemical mechanical process Grant 9,941,109 - Liu , et al. April 10, 2 | 2018-04-10 |
| Asymmetric application of pressure to a wafer during a CMP process Grant 9,922,837 - Liu , et al. March 20, 2 | 2018-03-20 |
| Doped poly-silicon for polyCMP planarity improvement Grant 9,871,115 - Hong , et al. January 16, 2 | 2018-01-16 |
| Surface Treatment in a Chemical Mechanical Process App 20180005840 - Liu; Chih-Wen ; et al. | 2018-01-04 |
| Doped Poly-Silicon for PolyCMP Planarity Improvement App 20180006134 - Hong; William Weilun ; et al. | 2018-01-04 |
| Multi-Layer Mask and Method of Forming Same App 20170372900 - Tsai; Teng-Chun ; et al. | 2017-12-28 |
| Planarization Control in Semiconductor Manufacturing Process App 20170278712 - Nien; Po-Chin ; et al. | 2017-09-28 |
| Multi-layer mask and method of forming same Grant 9,768,024 - Tsai , et al. September 19, 2 | 2017-09-19 |
| Asymmetric Application of Pressure to a Wafer During a CMP Process App 20170256414 - Liu; Chih-Wen ; et al. | 2017-09-07 |
| Method for forming semiconductor device Grant 9,755,056 - Hsu , et al. September 5, 2 | 2017-09-05 |
| Method and apparatus for semiconductor planarization Grant 9,721,831 - Nien , et al. August 1, 2 | 2017-08-01 |
| Methods for Reducing Scratch Defects in Chemical Mechanical Planarization App 20170213743 - Pan; Wan-Chun ; et al. | 2017-07-27 |
| Mechanisms for forming oxide layer over exposed polysilicon during a chemical mechanical polishing (CMP) process Grant 9,711,374 - Tu , et al. July 18, 2 | 2017-07-18 |
| Method and Apparatus for Semiconductor Planarization App 20170162432 - Nien; Po-Chin ; et al. | 2017-06-08 |
| Composite structure for gate level inter-layer dielectric Grant 9,595,450 - Tu , et al. March 14, 2 | 2017-03-14 |
| Oxygen treatment of replacement work-function metals in CMOS transistor gates Grant 9,384,962 - Hwang , et al. July 5, 2 | 2016-07-05 |
| Method For Forming Semiconductor Device App 20160190287 - Hsu; Chih-Kai ; et al. | 2016-06-30 |
| Semiconductor device and method of forming the same Grant 9,349,833 - Hung , et al. May 24, 2 | 2016-05-24 |
| Manufacturing method of non-planar FET Grant 9,312,365 - Tsai , et al. April 12, 2 | 2016-04-12 |
| CMP slurry particle breakup Grant 9,278,423 - Hong , et al. March 8, 2 | 2016-03-08 |
| Multi-gate MOSFET with embedded isolation structures Grant 9,269,791 - Fu , et al. February 23, 2 | 2016-02-23 |
| Amorphorus silicon insertion for STI-CMP planarity improvement Grant 9,209,040 - Lin , et al. December 8, 2 | 2015-12-08 |
| Semiconductor Processing Methods App 20150279686 - Kuo; Cheng-Yu ; et al. | 2015-10-01 |
| Composite Structure for Gate Level Inter-Layer Dielectric App 20150187594 - Tu; Che-Hao ; et al. | 2015-07-02 |
| Semiconductor structure Grant 9,054,187 - Liu , et al. June 9, 2 | 2015-06-09 |
| Manufacturing method for semiconductor device having metal gate Grant 9,024,393 - Fu , et al. May 5, 2 | 2015-05-05 |
| Amorphorus Silicon Insertion For Sti-cmp Planarity Improvement App 20150102456 - LIN; Kuo-Min ; et al. | 2015-04-16 |
| Method of forming semiconductor device having metal gate Grant 9,006,091 - Tsai , et al. April 14, 2 | 2015-04-14 |
| CMP Slurry Particle Breakup App 20150099431 - Hong; William Weilun ; et al. | 2015-04-09 |
| Semiconductor process Grant 8,987,096 - Chen , et al. March 24, 2 | 2015-03-24 |
| Planarization process for semiconductor device fabrication Grant 8,975,179 - Tu , et al. March 10, 2 | 2015-03-10 |
| Hard Mask Removal Method App 20150037978 - TU; CHE-HAO ; et al. | 2015-02-05 |
| Manufacturing Method of Non-Planar FET App 20150004766 - Tsai; Shih-Hung ; et al. | 2015-01-01 |
| Mechanisms For Forming Oxide Layer Over Exposed Polysilicon During A Chemical Mechanical Polishing (cmp) Process App 20140370696 - TU; Che-Hao ; et al. | 2014-12-18 |
| Semiconductor Device With Oxygen-containing Metal Gates App 20140339652 - Hwang; Guang-Yaw ; et al. | 2014-11-20 |
| Method of forming semiconductor device Grant 8,877,623 - Tsai , et al. November 4, 2 | 2014-11-04 |
| Non-planar FET and manufacturing method thereof Grant 8,872,280 - Tsai , et al. October 28, 2 | 2014-10-28 |
| Method Of Forming Semiconductor Device App 20140295660 - Tsai; Shih-Hung ; et al. | 2014-10-02 |
| Method For Manufacturing Multi-gate Transistor Device App 20140199817 - Tsai; Shih-Hung ; et al. | 2014-07-17 |
| Method for manufacturing multi-gate transistor device Grant 8,722,501 - Tsai , et al. May 13, 2 | 2014-05-13 |
| Manufacturing Method For Semiconductor Device Having Metal Gate App 20140106557 - Fu; Ssu-I ; et al. | 2014-04-17 |
| Semiconductor Structure App 20140077229 - Liu; An-Chi ; et al. | 2014-03-20 |
| Manufacturing method for semiconductor device having metal gate Grant 8,669,618 - Fu , et al. March 11, 2 | 2014-03-11 |
| Semiconductor structure and method of fabricating the same Grant 8,664,060 - Liu , et al. March 4, 2 | 2014-03-04 |
| Non-Planar FET and Manufacturing Method Thereof App 20140035066 - Tsai; Shih-Hung ; et al. | 2014-02-06 |
| Multi-gate Mosfet And Process Thereof App 20140015056 - Fu; Ssu-I ; et al. | 2014-01-16 |
| Gate height loss improvement for a transistor Grant 8,598,028 - Tu , et al. December 3, 2 | 2013-12-03 |
| Method Of Forming Semiconductor Device App 20130302976 - Tsai; Shih-Hung ; et al. | 2013-11-14 |
| Semiconductor Structure And Method Of Fabricating The Same App 20130200470 - Liu; An-Chi ; et al. | 2013-08-08 |
| Semiconductor Process App 20130203230 - Chen; Ying-Tsung ; et al. | 2013-08-08 |
| Gate Height Loss Improvement For A Transistor App 20130164930 - Tu; Che-Hao ; et al. | 2013-06-27 |
| Method of forming fin structures in integrated circuits Grant 8,470,714 - Tsai , et al. June 25, 2 | 2013-06-25 |
| Manufacturing Method For Semiconductor Device Having Metal Gate App 20130154012 - Fu; Ssu-I ; et al. | 2013-06-20 |
| Planarization Process For Semiconductor Device Fabrication App 20130095644 - Tu; Che-Hao ; et al. | 2013-04-18 |
| Method For Manufacturing Multi-gate Transistor Device App 20130095616 - Tsai; Shih-Hung ; et al. | 2013-04-18 |
| Metal Gate and Fabricating Method Thereof App 20120256276 - Hwang; Guang-Yaw ; et al. | 2012-10-11 |
| Fabrication method of a non-planar transistor Grant 8,278,184 - Chen , et al. October 2, 2 | 2012-10-02 |
| Semiconductor device including I/O oxide nitrided core oxide on substrate Grant 8,084,328 - Wu , et al. December 27, 2 | 2011-12-27 |
| Semiconductor device including I/O oxide nitrided core oxide on substrate, and method of manufacture App 20110081758 - Wu; Zhen-Cheng ; et al. | 2011-04-07 |
| Semiconductor device including I/O oxide and nitrided core oxide on substrate Grant 7,834,405 - Wu , et al. November 16, 2 | 2010-11-16 |
| Greasy soot purifying device Grant 7,473,290 - Yang , et al. January 6, 2 | 2009-01-06 |
| Formation and applications of nitrogen-free silicon carbide in semiconductor manufacturing App 20070264843 - Li; Lih-Ping ; et al. | 2007-11-15 |
| Method Of Fabricating An Interconnect Structure App 20070249164 - Chen; Pi-Tsung ; et al. | 2007-10-25 |
| Greasy soot purifying device App 20070175184 - Yang; Wen-Lung ; et al. | 2007-08-02 |
| Method for planarizing semiconductor structures Grant 7,247,571 - Chen , et al. July 24, 2 | 2007-07-24 |
| Post-ESL porogen burn-out for copper ELK integration Grant 7,217,648 - Lu , et al. May 15, 2 | 2007-05-15 |
| Interconnect structure with dielectric barrier and fabrication method thereof Grant 7,196,423 - Wu , et al. March 27, 2 | 2007-03-27 |
| Method for planarizing semiconductor structures App 20070054494 - Chen; Ying-Tsung ; et al. | 2007-03-08 |
| Semiconductor device including I/O oxide and nitrided core oxide on substrate, and method of manufacture App 20070013009 - Wu; Zhen-Cheng ; et al. | 2007-01-18 |
| Method and structure for ultra narrow gate Grant 7,081,413 - Chan , et al. July 25, 2 | 2006-07-25 |
| Post-ESL porogen burn-out for copper ELK integration App 20060134906 - Lu; Yung-Cheng ; et al. | 2006-06-22 |
| Back end of line integration scheme App 20060125102 - Wu; Zhen-Cheng ; et al. | 2006-06-15 |
| Method of forming copper interconnects Grant 7,056,826 - Wu , et al. June 6, 2 | 2006-06-06 |
| Interconnect structure with dielectric barrier and fabrication method thereof App 20050212135 - Wu, Zhen-Cheng ; et al. | 2005-09-29 |
| Method and structure for ultra narrow gate App 20050164503 - Chan, Bor-Wen ; et al. | 2005-07-28 |
| Method of forming copper interconnects App 20040130035 - Wu, Zhen-Cheng ; et al. | 2004-07-08 |
| Method for preventing chemical attack on a copper containing semiconductor wafer App 20030154999 - Shih, Tsu ; et al. | 2003-08-21 |
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