loadpatents
Patent applications and USPTO patent grants for Chen; Yi-Nan.The latest application filed is for "method for forming crack stop structure".
Patent | Date |
---|---|
Method for forming crack stop structure Grant 9,287,221 - Huang , et al. March 15, 2 | 2016-03-15 |
Method for forming trench MOS structure Grant 9,093,471 - Kuo , et al. July 28, 2 | 2015-07-28 |
Method For Forming Crack Stop Structure App 20150194390 - Huang; Tse-Yao ;   et al. | 2015-07-09 |
Vertical MOSFET electrostatic discharge device Grant 9,054,131 - Jang , et al. June 9, 2 | 2015-06-09 |
Process of forming slit in substrate Grant 8,975,137 - Wang , et al. March 10, 2 | 2015-03-10 |
Method For Forming Trench Mos Structure App 20150064893 - Kuo; Chin-Te ;   et al. | 2015-03-05 |
Crack stop structure and method for forming the same Grant 8,963,282 - Huang , et al. February 24, 2 | 2015-02-24 |
Wafer scrubber Grant 8,916,003 - Jang , et al. December 23, 2 | 2014-12-23 |
Trench MOS structure and method for forming the same Grant 8,912,595 - Kuo , et al. December 16, 2 | 2014-12-16 |
Memory device having buried bit line and vertical transistor and fabrication method thereof Grant 8,865,550 - Wu , et al. October 21, 2 | 2014-10-21 |
Crack stop structure and method for forming the same Grant 8,828,842 - Huang , et al. September 9, 2 | 2014-09-09 |
MOS test structure, method for forming MOS test structure and method for performing wafer acceptance test Grant 8,816,715 - Kuo , et al. August 26, 2 | 2014-08-26 |
Memory Device Having Buried Bit Line And Vertical Transistor And Fabrication Method Thereof App 20140213027 - Wu; Tieh-Chiang ;   et al. | 2014-07-31 |
Fabricating method of transistor Grant 8,772,119 - Su , et al. July 8, 2 | 2014-07-08 |
Memory device having buried bit line and vertical transistor and fabrication method thereof Grant 8,759,907 - Wu , et al. June 24, 2 | 2014-06-24 |
Method of forming gate conductor structures Grant 8,758,984 - Wu , et al. June 24, 2 | 2014-06-24 |
Crack Stop Structure And Method For Forming The Same App 20140154864 - Huang; Tse-Yao ;   et al. | 2014-06-05 |
Chemical mechanical polishing system Grant 8,739,806 - Liu , et al. June 3, 2 | 2014-06-03 |
Recessed gate transistor with cylindrical fins Grant 8,723,261 - Wu , et al. May 13, 2 | 2014-05-13 |
Slit recess channel gate Grant 8,698,235 - Wu , et al. April 15, 2 | 2014-04-15 |
Crack stop structure and method for forming the same Grant 8,692,245 - Huang , et al. April 8, 2 | 2014-04-08 |
Trench MOS structure and method for making the same Grant 8,692,318 - Kuo , et al. April 8, 2 | 2014-04-08 |
Chemical mechanical polishing system Grant 8,662,963 - Liu , et al. March 4, 2 | 2014-03-04 |
Method for forming openings in semiconductor device Grant 8,642,479 - Lin , et al. February 4, 2 | 2014-02-04 |
Method of gate work function adjustment and metal gate transistor Grant 8,614,467 - Wu , et al. December 24, 2 | 2013-12-24 |
Circuit structure with conductive and depletion regions to form tunable capacitors and resistors Grant 8,604,542 - Jang , et al. December 10, 2 | 2013-12-10 |
Method for forming fin-shaped semiconductor structure Grant 8,592,320 - Lin , et al. November 26, 2 | 2013-11-26 |
Slit Recess Channel Gate App 20130307067 - Wu; Tieh-Chiang ;   et al. | 2013-11-21 |
Method of bevel trimming three dimensional semiconductor device Grant 8,551,881 - Shih , et al. October 8, 2 | 2013-10-08 |
Semiconductor process Grant 8,546,234 - Wang , et al. October 1, 2 | 2013-10-01 |
Distance monitoring device Grant 8,545,289 - Liao , et al. October 1, 2 | 2013-10-01 |
Method of forming conductive pattern Grant 8,536,056 - Su , et al. September 17, 2 | 2013-09-17 |
Method of forming a slit recess channel gate Grant 8,530,306 - Wu , et al. September 10, 2 | 2013-09-10 |
Post-optical proximity correction photoresist pattern collapse rule Grant 8,533,638 - Fu , et al. September 10, 2 | 2013-09-10 |
Transistor with buried fins Grant 8,525,262 - Wu , et al. September 3, 2 | 2013-09-03 |
Monitoring pattern, and pattern stitch monitoring method and wafer therewith Grant 8,497,568 - Fu , et al. July 30, 2 | 2013-07-30 |
Method for forming self-aligned contact Grant 8,487,397 - Ho , et al. July 16, 2 | 2013-07-16 |
Method for manufacturing memory device Grant 8,486,834 - Hsu , et al. July 16, 2 | 2013-07-16 |
Bonding pad structure for semiconductor devices Grant 8,476,764 - Huang , et al. July 2, 2 | 2013-07-02 |
Circuit structure with vertical double gate Grant 8,476,704 - Jang , et al. July 2, 2 | 2013-07-02 |
Method of forming an etch mask Grant 8,470,515 - Huang , et al. June 25, 2 | 2013-06-25 |
Post-CMP wafer cleaning apparatus Grant 8,458,842 - Liu , et al. June 11, 2 | 2013-06-11 |
Method For Fabricating Single-sided Buried Strap In A Semiconductor Device App 20130102123 - Tsai; Tzu-Ching ;   et al. | 2013-04-25 |
Vertical Mosfet Electrostatic Discharge Device App 20130099309 - Jang; Jeng-Hsing ;   et al. | 2013-04-25 |
Method for fabricating a gate dielectric layer and for fabricating a gate structure Grant 8,420,477 - Su , et al. April 16, 2 | 2013-04-16 |
Plasma etching method and plasma etching apparatus for preparing high-aspect-ratio structures Grant 8,420,545 - Wu , et al. April 16, 2 | 2013-04-16 |
Method for increasing adhesion between polysilazane and silicon nitride Grant 8,420,541 - Shih , et al. April 16, 2 | 2013-04-16 |
Power device with trenched gate structure and method of fabricating the same Grant 8,415,729 - Wu , et al. April 9, 2 | 2013-04-09 |
Capacitor and manufacturing method thereof Grant 8,410,535 - Su , et al. April 2, 2 | 2013-04-02 |
Method For Forming Semiconductor Structure With Reduced Line Edge Roughness App 20130078815 - Wu; Chang-Ming ;   et al. | 2013-03-28 |
Wafer Scrubber App 20130074878 - Jang; Jeng-Hsing ;   et al. | 2013-03-28 |
Method For Fabricating Integrated Devices With Reducted Plasma Damage App 20130078804 - JANG; Jeng-Hsing ;   et al. | 2013-03-28 |
Method For Forming Dope Regions With Rapid Thermal Process App 20130078774 - Jang; Jeng-Hsing ;   et al. | 2013-03-28 |
Bonding Pad Structure For Semiconductor Devices App 20130069235 - Huang; Tse-Yao ;   et al. | 2013-03-21 |
Semiconductor Process App 20130071992 - Su; Kuo-Hui ;   et al. | 2013-03-21 |
Fabricating Method Of Transistor App 20130071978 - Su; Kuo-Hui ;   et al. | 2013-03-21 |
Method Of Forming An Etch Mask App 20130071790 - Huang; Tse-Yao ;   et al. | 2013-03-21 |
Wafer Scrubber Apparatus App 20130068264 - Jang; Jeng-Hsing ;   et al. | 2013-03-21 |
Method for manufacturing memory device Grant 8,399,321 - Hsu , et al. March 19, 2 | 2013-03-19 |
Crack Stop Structure And Method For Forming The Same App 20130062727 - Huang; Tse-Yao ;   et al. | 2013-03-14 |
Method for obtaining a layout design for an existing integrated circuit Grant 8,394,721 - Hsieh , et al. March 12, 2 | 2013-03-12 |
Method for via formation in a semiconductor device Grant 8,389,402 - Lin , et al. March 5, 2 | 2013-03-05 |
Method Of Forming Conductive Pattern App 20130052820 - Su; Kuo-Hui ;   et al. | 2013-02-28 |
Circuit Structure with Resistors or Capacitors App 20130049846 - Jang; Jeng Hsing ;   et al. | 2013-02-28 |
Circuit Structure with Vertical Double Gate App 20130043529 - Jang; Jeng Hsing ;   et al. | 2013-02-21 |
Crack Stop Structure And Method For Forming The Same App 20130043470 - Huang; Tse-Yao ;   et al. | 2013-02-21 |
Method For Forming Fin-shaped Semiconductor Structure App 20130045600 - Lin; Chih-Ching ;   et al. | 2013-02-21 |
Method of reducing microloading effect Grant 8,377,632 - Lee , et al. February 19, 2 | 2013-02-19 |
Self-aligned method for forming contact of device with reduced step height Grant 8,367,509 - Jang , et al. February 5, 2 | 2013-02-05 |
Method For Forming Openings In Semiconductor Device App 20130017687 - Lin; Chih-Ching ;   et al. | 2013-01-17 |
Process Of Forming Slit In Substrate App 20130017684 - Wang; Wen-Chieh ;   et al. | 2013-01-17 |
Method of inspecting memory cell Grant 8,335,119 - Tsai , et al. December 18, 2 | 2012-12-18 |
Method Of Reducing Striation On A Sidewall Of A Recess App 20120305525 - Lee; Hsiu-Chun ;   et al. | 2012-12-06 |
Semiconductor Process App 20120309192 - Wang; Wen-Chieh ;   et al. | 2012-12-06 |
Semiconductor Process App 20120309155 - Wang; Wen-Chieh ;   et al. | 2012-12-06 |
Pulse-plasma Etching Method And Pulse-plasma Etching Apparatus App 20120302065 - Lin; Chih Ching ;   et al. | 2012-11-29 |
Method Of Fabricating A Deep Trench Device App 20120302030 - Lee; Hsiu-Chun ;   et al. | 2012-11-29 |
Method Of Reducing Microloading Effect App 20120301833 - Lee; Hsiu-Chun ;   et al. | 2012-11-29 |
Test Layout Structure App 20120298992 - Kuo; Chin-Te ;   et al. | 2012-11-29 |
Method For Manufacturing Memory Device App 20120302060 - Hsu; Ping ;   et al. | 2012-11-29 |
Slit Recess Channel Gate and Method of Forming the Same App 20120299185 - Wu; Tieh-Chiang ;   et al. | 2012-11-29 |
Method For Implanting Wafer App 20120302049 - Hsu; Ping ;   et al. | 2012-11-29 |
Plasma Etching Method And Plasma Etching Apparatus For Preparing High-aspect-ratio Structures App 20120302031 - Wu; Chang Ming ;   et al. | 2012-11-29 |
Method For Via Formation In A Semiconductor Device App 20120302062 - Lin; Chih Ching ;   et al. | 2012-11-29 |
Method And System For Performing Pulse-etching In A Semiconductor Device App 20120302070 - Lin; Chih Ching ;   et al. | 2012-11-29 |
Method For Manufacturing Memory Device App 20120295408 - Hsu; Ping ;   et al. | 2012-11-22 |
Test Key Structure For Monitoring Gate Conductor To Deep Trench Misalignment And Testing Method Thereof App 20120293196 - Hsu; Ping ;   et al. | 2012-11-22 |
Chemical Mechanical Polishing System App 20120289133 - Liu; Li-Chung ;   et al. | 2012-11-15 |
Method Of Etching Trenches In A Semiconductor Substrate Utilizing Pulsed And Fluorocarbon-free Plasma App 20120289050 - Wu; Chang-Ming ;   et al. | 2012-11-15 |
Method For Processing Circuit In Package App 20120288967 - Hsieh; Ming-Teng ;   et al. | 2012-11-15 |
Chemical Mechanical Polishing System App 20120289128 - Liu; Li-Chung ;   et al. | 2012-11-15 |
Method for obtaining a layout design for an existing integrated circuit App 20120289048 - Hsieh; Ming-Teng ;   et al. | 2012-11-15 |
Cmp Apparatus And Method App 20120289131 - Liu; Li-Chung ;   et al. | 2012-11-15 |
Cmp Slurry Mix And Delivery System App 20120289134 - Liu; Li-Chung ;   et al. | 2012-11-15 |
Method for storing wafers App 20120288355 - Hsieh; Ming-Teng ;   et al. | 2012-11-15 |
Bump Structure And Fabrication Method Thereof App 20120288684 - Hsieh; Ming-Teng ;   et al. | 2012-11-15 |
Trench Mos Structure And Method For Forming The Same App 20120286353 - Kuo; Chin-Te ;   et al. | 2012-11-15 |
Protuberant Structure And Method For Making The Same App 20120286402 - Kuo; Chin-Te ;   et al. | 2012-11-15 |
Mos Test Structure, Method For Forming Mos Test Structure And Method For Performing Wafer Acceptance Test App 20120286819 - Kuo; Chin-Te ;   et al. | 2012-11-15 |
Method For Cleaning A Semiconductor Wafer App 20120285484 - Liu; Li-Chung ;   et al. | 2012-11-15 |
Post-cmp Wafer Cleaning Apparatus App 20120284936 - Liu; Li-Chung ;   et al. | 2012-11-15 |
Trench Mos Structure And Method For Making The Same App 20120286352 - Kuo; Chin-Te ;   et al. | 2012-11-15 |
Method Of Cleaning A Wafer App 20120285483 - Liu; Li-Chung ;   et al. | 2012-11-15 |
Method for repairing a semiconductor structure having a current-leakage issue App 20120288968 - Hsieh; Ming-Teng ;   et al. | 2012-11-15 |
Optical Lens And Optical Microscope System Using The Same App 20120287500 - Hsieh; Ming-Teng ;   et al. | 2012-11-15 |
Protuberant Structure And Method For Making The Same App 20120288683 - Kuo; Chin-Te ;   et al. | 2012-11-15 |
Method Of Forming Gate Conductor Structures App 20120288802 - Wu; Chang-Ming ;   et al. | 2012-11-15 |
Method For Decapsulating Integrated Circuit Package App 20120288966 - Hsieh; Ming-Teng ;   et al. | 2012-11-15 |
Manufacturing method of device and planarization process Grant 8,309,467 - Liao , et al. November 13, 2 | 2012-11-13 |
Semiconductor process Grant 8,309,459 - Wang , et al. November 13, 2 | 2012-11-13 |
Method For Increasing Adhesion Between Polysilazane And Silicon Nitride App 20120282777 - SHIH; Shing-Yih ;   et al. | 2012-11-08 |
Integrated Circuit Structure Including Copper-aluminum Interconnect And Method For Fabricating The Same App 20120273950 - Su; Kuo Hui ;   et al. | 2012-11-01 |
Method Of Oxidizing Polysilazane App 20120276714 - Shih; Shing-Yih ;   et al. | 2012-11-01 |
Memory Device Having Buried Bit Line And Vertical Transistor And Fabrication Method Thereof App 20120273874 - Wu; Tieh-Chiang ;   et al. | 2012-11-01 |
Integrated Circuit Structure Including A Copper-aluminum Interconnect And Method For Fabricating The Same App 20120273948 - Su; Kuo Hui ;   et al. | 2012-11-01 |
Methods For Fabricating A Gate Dielectric Layer And For Fabricating A Gate Structure App 20120276730 - Su; Kuo Hui ;   et al. | 2012-11-01 |
Method For Forming Trench Isolation App 20120276707 - Shih; Shing-Yih ;   et al. | 2012-11-01 |
Method For Fabricating A Gate Dielectric Layer And For Fabricating A Gate Structure App 20120276731 - Su; Kuo Hui ;   et al. | 2012-11-01 |
Method for forming conductive contact Grant 8,298,939 - Ho , et al. October 30, 2 | 2012-10-30 |
Method For Forming Self-aligned Contact App 20120267727 - Ho; Jar-Ming ;   et al. | 2012-10-25 |
Capacitor And Manufacturing Method Thereof App 20120267760 - Su; Kuo-Hui ;   et al. | 2012-10-25 |
Manufacturing Method Of Gate Dielectric Layer App 20120270408 - Su; Kuo-Hui ;   et al. | 2012-10-25 |
Manufacturing Method Of Gate Dielectric Layer App 20120270411 - Su; Kuo-Hui ;   et al. | 2012-10-25 |
Polishing Pad Wear Detecting Apparatus App 20120270474 - Liao; Chien-Mao ;   et al. | 2012-10-25 |
Method Of Bevel Trimming Three Dimensional Semiconductor Device App 20120270394 - Shih; Shing-Yih ;   et al. | 2012-10-25 |
Method Of Fabricating Semiconductor Component App 20120264300 - Liao; Chien-Mao ;   et al. | 2012-10-18 |
Membrane App 20120264359 - Liao; Chien-Mao ;   et al. | 2012-10-18 |
Chemical Mechanical Polishing Method App 20120264299 - Liao; Chien-Mao ;   et al. | 2012-10-18 |
Distance Monitoring Device App 20120264354 - Liao; Chien-Mao ;   et al. | 2012-10-18 |
Method for forming conductive contact Grant 8,288,279 - Ho , et al. October 16, 2 | 2012-10-16 |
Transistor With Buried Fins App 20120256257 - Wu; Tieh-Chiang ;   et al. | 2012-10-11 |
Power Device With Trenched Gate Structure And Method Of Fabricating The Same App 20120256230 - Wu; Tieh-Chiang ;   et al. | 2012-10-11 |
Recessed Trench Gate Structure And Method Of Fabricating The Same App 20120256255 - Wu; Tieh-Chiang ;   et al. | 2012-10-11 |
Recessed Gate Transistor With Cylindrical Fins App 20120256256 - Wu; Tieh-Chiang ;   et al. | 2012-10-11 |
Method For Matching Assistant Feature Tools App 20120259445 - Fu; Kuo Kuei ;   et al. | 2012-10-11 |
Model Of Defining A Photoresist Pattern Collapse Rule, And Photomask Layout, Semiconductor Substrate And Method For Improving Photoresist Pattern Collapse App 20120258386 - Fu; Kuo Kuei ;   et al. | 2012-10-11 |
Method Of Gate Work Function Adjustment And Metal Gate Transistor App 20120256279 - Wu; Tieh-Chiang ;   et al. | 2012-10-11 |
Monitoring Pattern, And Pattern Stitch Monitoring Method And Wafer Therewith App 20120256298 - Fu; Kuo Kuei ;   et al. | 2012-10-11 |
Antifuse element for integrated circuit device Grant 8,278,732 - Ho , et al. October 2, 2 | 2012-10-02 |
Method of forming a trench by a silicon-containing mask Grant 8,252,684 - Lee , et al. August 28, 2 | 2012-08-28 |
Manufacturing Method Of Device And Planarization Process App 20120149197 - Liao; Chien-Mao ;   et al. | 2012-06-14 |
Method for forming a recess array device structure in a semiconductor substrate Grant 8,178,440 - Wu , et al. May 15, 2 | 2012-05-15 |
Method for fabricating intra-device isolation structure Grant 8,178,418 - Ho , et al. May 15, 2 | 2012-05-15 |
Packing structure of light-emitting diode Grant D640,995 - Lin , et al. July 5, 2 | 2011-07-05 |
Method of fabricating a semiconductor device Grant 7,807,558 - Tsai , et al. October 5, 2 | 2010-10-05 |
Fabrication method for a damascene bit line contact plug Grant 7,678,692 - Chen , et al. March 16, 2 | 2010-03-16 |
Method Of Fabricating A Semiconductor Device App 20090011587 - TSAI; Tzu-Ching ;   et al. | 2009-01-08 |
Multi-layer hard mask structure for etching deep trench in substrate Grant 7,341,952 - Tzou , et al. March 11, 2 | 2008-03-11 |
Fabrication method for a damascene bit line contact plug Grant 7,285,377 - Chen , et al. October 23, 2 | 2007-10-23 |
Dynamic Random Access Memory Cell Layout And Fabrication Method Thereof App 20070152263 - Chang; Ming-Cheng ;   et al. | 2007-07-05 |
Fabrication Method for a Damascene Bit Line Contact Plug App 20070099125 - Chen; Yi-Nan ;   et al. | 2007-05-03 |
Memory device with vertical transistors and deep trench capacitors and method of fabricating the same Grant 7,211,483 - Chen , et al. May 1, 2 | 2007-05-01 |
Method of forming bit line contact via Grant 7,195,975 - Tsai , et al. March 27, 2 | 2007-03-27 |
Method for fabricating bit line of memory device App 20070020844 - Chen; Yi-Nan ;   et al. | 2007-01-25 |
Contact etching utilizing partially recessed hard mask App 20070018341 - Hsieh; Wen-Kuei ;   et al. | 2007-01-25 |
Contact etching utilizing partially recessed hard mask Grant 7,135,783 - Hsieh , et al. November 14, 2 | 2006-11-14 |
Method for forming self-aligned contact in semiconductor device Grant 7,115,491 - Huang , et al. October 3, 2 | 2006-10-03 |
Method for preventing leakage in shallow trench isolation Grant 7,109,094 - Chang , et al. September 19, 2 | 2006-09-19 |
Method for forming contact holes Grant 7,105,453 - Chen , et al. September 12, 2 | 2006-09-12 |
Shallow trench isolation void detecting method and structure for the same Grant 7,098,049 - Hsu , et al. August 29, 2 | 2006-08-29 |
Method of forming gate structure Grant 7,094,638 - Huang , et al. August 22, 2 | 2006-08-22 |
Method for enhancing adhesion between reworked photoresist and underlying oxynitride film Grant 7,090,965 - Wu , et al. August 15, 2 | 2006-08-15 |
STI forming method for improving STI step uniformity Grant 7,071,075 - Hao , et al. July 4, 2 | 2006-07-04 |
Interconnect structure and method for fabricating the same Grant 7,067,418 - Huang , et al. June 27, 2 | 2006-06-27 |
Contact etching utilizing multi-layer hard mask Grant 7,064,044 - Chen , et al. June 20, 2 | 2006-06-20 |
Multi-layer hard mask structure for etching deep trench in substrate App 20060127680 - Tzou; Kaan-Lu ;   et al. | 2006-06-15 |
Method of forming bit line contact via App 20060118886 - Tsai; Tzu-Ching ;   et al. | 2006-06-08 |
Deep trench self-alignment process for an active area of a partial vertical cell Grant 7,056,832 - Chang , et al. June 6, 2 | 2006-06-06 |
Method for forming bit line Grant 7,052,949 - Wu , et al. May 30, 2 | 2006-05-30 |
Partial vertical memory cell and method of fabricating the same Grant 7,033,886 - Chang , et al. April 25, 2 | 2006-04-25 |
Multi-layer hard mask structure for etching deep trench in substrate Grant 7,029,753 - Tzou , et al. April 18, 2 | 2006-04-18 |
Method of filling bit line contact via Grant 7,026,207 - Tsai , et al. April 11, 2 | 2006-04-11 |
Memory device with vertical transistors and deep trench capacitors and method of fabricating the same Grant 7,009,236 - Chen , et al. March 7, 2 | 2006-03-07 |
Method for forming contact hole Grant 7,005,374 - Huang , et al. February 28, 2 | 2006-02-28 |
Method of reworking layers over substrate Grant 6,998,347 - Hsu , et al. February 14, 2 | 2006-02-14 |
Interconnect structure and method for fabricating the same Grant 6,992,393 - Huang , et al. January 31, 2 | 2006-01-31 |
Contact etching utilizing multi-layer hard mask Grant 6,987,322 - Chen , et al. January 17, 2 | 2006-01-17 |
Damascene gate process Grant 6,984,566 - Hao , et al. January 10, 2 | 2006-01-10 |
Conducting wire and contact opening forming method for reducing photoresist thickness and via resistance Grant 6,979,638 - Huang , et al. December 27, 2 | 2005-12-27 |
Manufacturing method of a MOSFET gate Grant 6,977,134 - Hao , et al. December 20, 2 | 2005-12-20 |
Contact etching utilizing multi-layer hard mask App 20050277287 - Chen, Yi-Nan ;   et al. | 2005-12-15 |
Contact etching utilizing partially recessed hard mask App 20050275111 - Hsieh, Wen-Kuei ;   et al. | 2005-12-15 |
Contact Etching Utilizing Multi-layer Hard Mask App 20050275107 - Chen, Yi-Nan ;   et al. | 2005-12-15 |
Method for forming self-aligned contact in semiconductor device App 20050277258 - Huang, Tse-Yao ;   et al. | 2005-12-15 |
Method for forming shallow trench in semiconductor device Grant 6,974,741 - Lee , et al. December 13, 2 | 2005-12-13 |
Partial vertical memory cell and method of fabricating the same Grant 6,969,881 - Chang , et al. November 29, 2 | 2005-11-29 |
Method of forming geometric deep trench capacitors Grant 6,964,926 - Huang , et al. November 15, 2 | 2005-11-15 |
Shallow trench isolation void detecting method and structure for the same App 20050247930 - Hsu, Ping ;   et al. | 2005-11-10 |
Method of forming metal plug Grant 6,960,525 - Chen , et al. November 1, 2 | 2005-11-01 |
Method of reducing the aspect ratio of a trench Grant 6,960,530 - Wu , et al. November 1, 2 | 2005-11-01 |
Shallow trench isolation structure Grant 6,958,521 - Chang , et al. October 25, 2 | 2005-10-25 |
Method for forming bottle shaped trench Grant 6,953,723 - Chou , et al. October 11, 2 | 2005-10-11 |
Method for forming trench capacitor Grant 6,946,344 - Chou , et al. September 20, 2 | 2005-09-20 |
Interconnect Structure And Method For Fabricating The Same App 20050202671 - Huang, Tse-Yao ;   et al. | 2005-09-15 |
Conducting Wire And Contact Opening Forming Method For Reducing Photoresist Thickness And Via Resistance App 20050186775 - Huang, Tse-Yao ;   et al. | 2005-08-25 |
Corner rounding process for partial vertical transistor Grant 6,929,996 - Hao , et al. August 16, 2 | 2005-08-16 |
Method of preventing repeated collapse in a reworked photoresist layer Grant 6,929,902 - Wu , et al. August 16, 2 | 2005-08-16 |
Method for forming bottle-shaped trench Grant 6,929,998 - Chen , et al. August 16, 2 | 2005-08-16 |
Memory device with vertical transistors and deep trench capacitors and method of fabricating the same App 20050167719 - Chen, Yi-Nan ;   et al. | 2005-08-04 |
Method For Forming Bottle Shaped Trench App 20050170581 - Chou, Shih-Chung ;   et al. | 2005-08-04 |
Split gate flash memory cell and manufacturing method thereof Grant 6,924,204 - Tsai , et al. August 2, 2 | 2005-08-02 |
Bit line contact hole and method for forming the same App 20050164491 - Mao, Hui-Min ;   et al. | 2005-07-28 |
Method for manufacturing bit line contact structure of semiconductor memory App 20050158972 - Lin, Feng-Chuan ;   et al. | 2005-07-21 |
Dynamic random access memory cell layout and fabrication method thereof Grant 6,919,245 - Chang , et al. July 19, 2 | 2005-07-19 |
Isolation Structure For Trench Capacitors And Fabrication Method Thereof App 20050151182 - Chen, Yi-Nan ;   et al. | 2005-07-14 |
Method for forming shallow trench in semiconductor device App 20050148152 - Lee, Hsiu-Chun ;   et al. | 2005-07-07 |
Method for processing photoresist App 20050147926 - Lee, Hsiu-Chun ;   et al. | 2005-07-07 |
Method for forming contact hole App 20050136674 - Huang, Tse-Yao ;   et al. | 2005-06-23 |
Method of filling bit line contact via Grant 6,908,840 - Huang , et al. June 21, 2 | 2005-06-21 |
Method for preventing sneakage in shallow trench isolation and STI structure thereof App 20050127469 - Chang, Ming-Cheng ;   et al. | 2005-06-16 |
STI forming method for improving STI step uniformity App 20050124134 - Hao, Chung-Peng ;   et al. | 2005-06-09 |
Method for manufacturing gate structure for use in semiconductor device App 20050124127 - Ho, Tzu-En ;   et al. | 2005-06-09 |
Method For Controlling Critical Dimension By Utilizing Resist Sidewall Protection App 20050118531 - Lee, Hsiu-Chun ;   et al. | 2005-06-02 |
Method for preventing contact defects in interlayer dielectric layer Grant 6,900,118 - Tzou , et al. May 31, 2 | 2005-05-31 |
Contact hole forming method App 20050112858 - Yuan, Han-Ming ;   et al. | 2005-05-26 |
Method for formimg contact holes App 20050106887 - Chen, Yi-Nan ;   et al. | 2005-05-19 |
Shallow trench isolation void detecting method and structure for the same App 20050104063 - Hsu, Ping ;   et al. | 2005-05-19 |
Via contact forming method App 20050101124 - Wu, Chang-Ming ;   et al. | 2005-05-12 |
Partial vertical memory cell and method of fabricating the same App 20050090064 - Chang, Ming-Cheng ;   et al. | 2005-04-28 |
Method of forming shallow trench isolation with chamfered corners Grant 6,884,714 - Huang , et al. April 26, 2 | 2005-04-26 |
Method Of Forming Gate Structure App 20050085025 - Huang, Jin-Tau ;   et al. | 2005-04-21 |
Dynamic random access memory cell layout and fabrication method thereof App 20050082590 - Chang, Ming-Cheng ;   et al. | 2005-04-21 |
Interconnect process and method for removing metal silicide Grant 6,881,670 - Chen , et al. April 19, 2 | 2005-04-19 |
Etchant Composition For Sem Image Enhancement Of P-n Junction Contrast App 20050079649 - Chang, Shao-Kang ;   et al. | 2005-04-14 |
Semiconductor device having trench top isolation layer and method for forming the same Grant 6,872,619 - Chen , et al. March 29, 2 | 2005-03-29 |
Method of forming a memory cell with a single sided buried strap Grant 6,872,629 - Hsiao , et al. March 29, 2 | 2005-03-29 |
Method of forming a bottle-shaped trench in a semiconductor substrate Grant 6,867,089 - Chen , et al. March 15, 2 | 2005-03-15 |
Method to prevent electrical shorts between tungsten interconnects Grant 6,867,142 - Chen , et al. March 15, 2 | 2005-03-15 |
[cleaning Method Used In Interconnect Process] App 20050051191 - Kao, Shih-Chieh ;   et al. | 2005-03-10 |
[interconnect Process And Method For Removing Metal Silicide] App 20050054193 - Chen, Tien-Sung ;   et al. | 2005-03-10 |
Method for preventing contact defects in interlayer dielectric layer App 20050048763 - Tzou, Kaan-Lu ;   et al. | 2005-03-03 |
[interconnect Structure And Method For Fabricating The Same] App 20050048749 - HUANG, TSE-YAO ;   et al. | 2005-03-03 |
Dynamic random access memory cell layout and fabrication method thereof App 20050045936 - Chang, Ming-Cheng ;   et al. | 2005-03-03 |
Method For Fabricating A Conductive Plug In Integrated Circuit App 20050048766 - Wu, Wen-Chieh ;   et al. | 2005-03-03 |
Conducting wire and contact opening forming method for reducing photoresist thickness and via resistance App 20050048761 - Lin, Chih-Ching ;   et al. | 2005-03-03 |
Method of reducing trench aspect ratio Grant 6,861,333 - Wu , et al. March 1, 2 | 2005-03-01 |
Corner rounding process for partial vertical transistor App 20050042819 - Hao, Chung-Peng ;   et al. | 2005-02-24 |
Multi-layer hard mask structure for etching deep trench in substrate App 20050042871 - Tzou, Kaan-Lu ;   et al. | 2005-02-24 |
[split Gate Flash Memory Cell And Manufacturing Method Thereof] App 20050037567 - TSAI, TZU-CHING ;   et al. | 2005-02-17 |
[method Of Reworking Integrated Circuit Device] App 20050037622 - Hsu, Min-Yi ;   et al. | 2005-02-17 |
[split Gate Flash Memory Cell And Manufacturing Method Thereof] App 20050037566 - TSAI, TZU-CHING ;   et al. | 2005-02-17 |
Damascene gate process App 20050032359 - Hao, Chung-Peng ;   et al. | 2005-02-10 |
Method for forming aluminum-containing interconnect App 20050020059 - Chen, Yi-Nan ;   et al. | 2005-01-27 |
Method of fabricating a bottle shaped deep trench for trench capacitor DRAM devices Grant 6,846,744 - Chen January 25, 2 | 2005-01-25 |
Memory device with vertical transistors and deep trench capacitors and method of fabricating the same App 20050001256 - Chen, Yi-Nan ;   et al. | 2005-01-06 |
Memory device with vertical transistors and deep trench capacitors and manufacturing method thereof App 20050001286 - Wu, Chang-Rong ;   et al. | 2005-01-06 |
Method of forming geometric deep trench capacitors App 20040266098 - Huang, Tse-Yao ;   et al. | 2004-12-30 |
Method of forming adjacent holes on a semiconductor substrate Grant 6,835,653 - Huang , et al. December 28, 2 | 2004-12-28 |
Method of metal etching post cleaning Grant 6,833,081 - Chen , et al. December 21, 2 | 2004-12-21 |
Method for forming trench capacitor App 20040250392 - Chou, Shih-Chung ;   et al. | 2004-12-16 |
Method of forming a memory cell with a single sided buried strap App 20040248364 - Hsiao, Chih-Yuan ;   et al. | 2004-12-09 |
Partial vertical memory cell and method of fabricating the same App 20040238869 - Chang, Ming-Cheng ;   et al. | 2004-12-02 |
Method for forming a crown capacitor App 20040241954 - Chen, Yi-Nan ;   et al. | 2004-12-02 |
Method for increasing capacitance of deep trench capacitors Grant 6,825,094 - Wu , et al. November 30, 2 | 2004-11-30 |
Method of fabricating memory device with vertical transistors and trench capacitors App 20040235240 - Hsu, Yu-Sheng ;   et al. | 2004-11-25 |
Method for forming uniform bottom electrode in trench of trench capacitor App 20040235244 - Chen, Yi-Nan ;   et al. | 2004-11-25 |
Method of improving alignment for semiconductor fabrication Grant 6,818,524 - Yang , et al. November 16, 2 | 2004-11-16 |
Method for preventing sneakage in shallow trench isolation and STI structure thereof App 20040222489 - Chang, Ming-Cheng ;   et al. | 2004-11-11 |
Method for forming bottle trench Grant 6,815,356 - Tsai , et al. November 9, 2 | 2004-11-09 |
Fabrication method for a damascene bit line contact plug App 20040219462 - Chen, Yi-Nan ;   et al. | 2004-11-04 |
Method For Forming Vertical Transistor And Trench Capacitor App 20040219747 - Lin, Shian-Jyh ;   et al. | 2004-11-04 |
Deep trench self-alignment process for an active area of a partial vertical cell App 20040219798 - Chang, Ming-Cheng ;   et al. | 2004-11-04 |
Method for fabricating bottle-shaped trench capacitor App 20040214391 - Chen, Yi-Nan ;   et al. | 2004-10-28 |
Method for forming bottle-shaped trench App 20040214390 - Chen, Yi-Nan ;   et al. | 2004-10-28 |
Method for forming vertical transistor and trench capacitor Grant 6,808,979 - Lin , et al. October 26, 2 | 2004-10-26 |
Method of filling bit line contact via App 20040209427 - Huang, Tse-Yao ;   et al. | 2004-10-21 |
Semiconductor Device Having Trench Top Isolation Layer And Method For Forming The Same App 20040209422 - Chen, Yi-Nan ;   et al. | 2004-10-21 |
Method of forming bit line contact App 20040209429 - Lin, Chih-Ching ;   et al. | 2004-10-21 |
Method For Forming Bottle-shaped Trenches App 20040203215 - Tsai, Tzu-Ching ;   et al. | 2004-10-14 |
Method for enhancing adhesion between reworked photoresist and underlying oxynitride film App 20040202964 - Wu, Wen-Bin ;   et al. | 2004-10-14 |
Method of reducing the aspect ratio of a trench App 20040203247 - WU, Chang-Rong ;   et al. | 2004-10-14 |
Bit line contact hole and method for forming the same App 20040201043 - Mao, Hui-Min ;   et al. | 2004-10-14 |
Method Of Forming Shallow Trench Isolation With Chamfered Corners App 20040198038 - Huang, Tse-Yao ;   et al. | 2004-10-07 |
Method of forming bit line contact via App 20040198008 - Tsai, Tzu-Ching ;   et al. | 2004-10-07 |
Method for increasing capacitance of deep trench capacitors App 20040198014 - Wu, Chang-Rong ;   et al. | 2004-10-07 |
Method of filling bit line contact via App 20040197986 - Tsai, Tzu-Ching ;   et al. | 2004-10-07 |
Method for forming bottle-shaped trenches Grant 6,800,535 - Tsai , et al. October 5, 2 | 2004-10-05 |
Method of forming metal plug App 20040192026 - Chen, Yi-Nan ;   et al. | 2004-09-30 |
Method of reducing trench aspect ratio App 20040192010 - Wu, Chang-Rong ;   et al. | 2004-09-30 |
Method of forming bit lines and bit line contacts in a memory device Grant 6,797,564 - Wu , et al. September 28, 2 | 2004-09-28 |
Method for shallow trench isolation fabrication and partial oxide layer removal Grant 6,794,270 - Lee , et al. September 21, 2 | 2004-09-21 |
Method for forming contact Grant 6,790,765 - Huang , et al. September 14, 2 | 2004-09-14 |
Method of forming source/drain regions in semiconductor devices Grant 6,790,735 - Mao , et al. September 14, 2 | 2004-09-14 |
Process for filling polysilicon seam Grant 6,790,740 - Huang , et al. September 14, 2 | 2004-09-14 |
Bit line contact structure and method for forming the same Grant 6,780,739 - Mao , et al. August 24, 2 | 2004-08-24 |
Method of improving pattern profile of thin photoresist layer App 20040157168 - Huang, Tse-Yao ;   et al. | 2004-08-12 |
Method of fabricating shallow trench isolation Grant 6,774,007 - Liu , et al. August 10, 2 | 2004-08-10 |
Method for forming bit line App 20040127013 - Wu, Kuo-Chien ;   et al. | 2004-07-01 |
Method of fabricating a shallow trench isolation structure Grant 6,737,334 - Ho , et al. May 18, 2 | 2004-05-18 |
Method of forming source/drain regions in semiconductor devices App 20040092074 - Mao, Hui-Min ;   et al. | 2004-05-13 |
Process for etching metal layer App 20040079729 - Chen, Yi-Nan ;   et al. | 2004-04-29 |
Process for filling polysilicon seam App 20040082137 - Huang, Tse-Yao ;   et al. | 2004-04-29 |
Method of preventing repeated collapse in a reworked photoresist layer App 20040081923 - Wu, Yuan-Hsun ;   et al. | 2004-04-29 |
Method of forming a shallow trench isolation in a semiconductor substrate Grant 6,727,159 - Chen , et al. April 27, 2 | 2004-04-27 |
Method of forming a bottle-shaped trench in a semiconductor substrate Grant 6,716,696 - Chen , et al. April 6, 2 | 2004-04-06 |
Method of forming a bottle-shaped trench in a semiconductor substrate Grant 6,713,341 - Chen , et al. March 30, 2 | 2004-03-30 |
Method for forming bit line contact App 20040058519 - Wu, Kuo-Chien ;   et al. | 2004-03-25 |
Method of forming inter-metal dielectric Grant 6,709,975 - Mao , et al. March 23, 2 | 2004-03-23 |
Method for forming bottle trench App 20040038553 - Tsai, Tzu-Ching ;   et al. | 2004-02-26 |
Method for increasing area of a trench capacitor Grant 6,693,006 - Ho , et al. February 17, 2 | 2004-02-17 |
Manufacturing method of a MOSFET gate App 20030232285 - Hao, Chung-Peng ;   et al. | 2003-12-18 |
Method for shallow trench isolation fabrication and partial oxide layer removal App 20030216007 - Lee, Pei-Ing ;   et al. | 2003-11-20 |
Method of fabricating shallow trench isolation App 20030201473 - Liu, Hsien-Wen ;   et al. | 2003-10-30 |
Method of fabricating a shallow trench isolation structure App 20030199151 - Ho, Tzu-En ;   et al. | 2003-10-23 |
Method of forming inter-metal dielectric App 20030199138 - Mao, Hui Min ;   et al. | 2003-10-23 |
Method for increasing area of a trench capacitor App 20030153158 - Ho, Hsin-Jung ;   et al. | 2003-08-14 |
Method of forming a bottle-shaped trench in a semiconductor substrate App 20030148580 - Chen, Yi-Nan ;   et al. | 2003-08-07 |
Method of forming a bottle-shaped trench in a semiconductor substrate App 20030143855 - Chen, Yi-Nan ;   et al. | 2003-07-31 |
Method of forming shallow trench isolation App 20030143817 - Ho, Tzu En ;   et al. | 2003-07-31 |
Method of forming a shallow trench isolation in a semiconductor substrate App 20030143854 - Chen, Yi-Nan ;   et al. | 2003-07-31 |
Method of fabricating shallow trench isolation Grant 6,576,530 - Chen , et al. June 10, 2 | 2003-06-10 |
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