CHEN; Liang-Guang
Patent Applications and Registrations
Patent applications and USPTO patent grants for CHEN; Liang-Guang.The latest application filed is for "semiconductor processing tool and methods of operation".
Company Profile
28.53.72
- CHEN; Liang-Guang - Hsinchu City TW
- Chen; Liang-Guang - Hsinchu TW
- Chen; Liang-Guang - Hsin-Chu TW
- Chen; Liang-Guang - Jhuangwei Township Yilan County TW
- Chen; Liang-Guang - Yilan TW
Patent Activity
| Patent | Date |
|---|---|
| Semiconductor Processing Tool And Methods Of Operation App 20220310404 - CUI; Ji ; et al. | 2022-09-29 |
| Post-CMP Cleaning and Apparatus App 20220262620 - Huang; Fu-Ming ; et al. | 2022-08-18 |
| Post-CMP cleaning and apparatus Grant 11,322,345 - Huang , et al. May 3, 2 | 2022-05-03 |
| Composition And Method For Polishing And Integrated Circuit App 20220017780 - CUI; JI ; et al. | 2022-01-20 |
| Chemical Mechanical Polishing Slurry Composition, Method For Chemical Mechanical Polishing And Method For Forming Connecting Structure App 20210391208 - Cui; Ji ; et al. | 2021-12-16 |
| Methods For Chemical Mechanical Polishing And Forming Interconnect Structure App 20210391186 - Cui; Ji ; et al. | 2021-12-16 |
| Slurry Composition And Method For Polishing And Integratged Circuit App 20210371702 - CUI; JI ; et al. | 2021-12-02 |
| Vias with metal caps for underlying conductive lines Grant 11,133,247 - Ho , et al. September 28, 2 | 2021-09-28 |
| Fin Field-Effect Transistor Device and Method of Forming the Same App 20210296173 - Suen; Shich-Chang ; et al. | 2021-09-23 |
| Semiconductor devices formed using multiple planarization processes Grant 11,121,028 - Hsu , et al. September 14, 2 | 2021-09-14 |
| Chemical mechanical polishing composition and method Grant 11,117,239 - Suen , et al. September 14, 2 | 2021-09-14 |
| Method for reducing metal plug corrosion and device Grant 11,114,339 - Nieh , et al. September 7, 2 | 2021-09-07 |
| Metal Heterojunction Structure With Capping Metal Layer App 20210272818 - LIN; Yi-Sheng ; et al. | 2021-09-02 |
| CMP slurry and CMP method Grant 11,094,555 - Hsu , et al. August 17, 2 | 2021-08-17 |
| Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen App 20210220964 - Chang; Ting-Hsun ; et al. | 2021-07-22 |
| Chemical Mechanical Polishing Apparatus and Method App 20210220962 - Suen; Shich-Chang ; et al. | 2021-07-22 |
| Methods of Forming an Abrasive Slurry and Methods for Chemical-Mechanical Polishing App 20210183688 - Lee; Chia Hsuan ; et al. | 2021-06-17 |
| Metal heterojunction structure with capping metal layer Grant 11,037,799 - Lin , et al. June 15, 2 | 2021-06-15 |
| Semiconductor Device Cleaning Solution, Method of Use, and Method of Manufacture App 20210163859 - Chu; Pinlei Edmund ; et al. | 2021-06-03 |
| Fin field-effect transistor device and method of forming the same Grant 11,024,540 - Suen , et al. June 1, 2 | 2021-06-01 |
| Chemical mechanical polishing apparatus and method Grant 10,967,478 - Suen , et al. April 6, 2 | 2021-04-06 |
| Semiconductor device cleaning solution, method of use, and method of manufacture Grant 10,961,487 - Chu , et al. March 30, 2 | 2021-03-30 |
| Method for Metal Gate Surface Clean App 20210082688 - Suen; Shich-Chang ; et al. | 2021-03-18 |
| Methods of forming an abrasive slurry and methods for chemical-mechanical polishing Grant 10,937,691 - Lee , et al. March 2, 2 | 2021-03-02 |
| Chemical Mechanical Planarization Tool App 20210053180 - Yen; Michael ; et al. | 2021-02-25 |
| Method for metal gate surface clean Grant 10,847,359 - Suen , et al. November 24, 2 | 2020-11-24 |
| Cmp Slurry And Cmp Method App 20200279751 - Hsu; Chun-Wei ; et al. | 2020-09-03 |
| Systems and methods for chemical mechanical polish and clean Grant 10,755,934 - Suen , et al. A | 2020-08-25 |
| CMP slurry and CMP method Grant 10,692,732 - Hsu , et al. | 2020-06-23 |
| Methods of forming semiconductor devices using multiple planarization processes Grant 10,636,701 - Hsu , et al. | 2020-04-28 |
| Systems and Methods for Chemical Mechanical Polish and Clean App 20200118823 - SUEN; Shich-Chang ; et al. | 2020-04-16 |
| Methods Of Forming An Abrasive Slurry And Methods For Chemical-mechanical Polishing App 20200105580 - Lee; Chia Hsuan ; et al. | 2020-04-02 |
| Vias With Metal Caps For Underlying Conductive Lines App 20200105668 - Ho; Chia-Wei ; et al. | 2020-04-02 |
| Fin Field-Effect Transistor Device and Method of Forming the Same App 20200105599 - Suen; Shich-Chang ; et al. | 2020-04-02 |
| Metal Heterojunction Structure With Capping Metal Layer App 20200098591 - Lin; Yi-Sheng ; et al. | 2020-03-26 |
| Cmp Slurry And Cmp Method App 20200098590 - Hsu; Chun-Wei ; et al. | 2020-03-26 |
| Method for Reducing Metal Plug Corrosion and Device App 20200090997 - Nieh; Ling-Fu ; et al. | 2020-03-19 |
| Wet Chemical Heating System And A Method Of Chemical Mechanical Polishing App 20200070301 - CUI; JI JAMES ; et al. | 2020-03-05 |
| Semiconductor Devices Formed Using Multiple Planarization Processes App 20200006125 - Hsu; Chun-Wei ; et al. | 2020-01-02 |
| Systems and methods for chemical mechanical polish and clean Grant 10,515,808 - Suen , et al. Dec | 2019-12-24 |
| Method for reducing metal plug corrosion and device Grant 10,510,601 - Nieh , et al. Dec | 2019-12-17 |
| Fin Field-Effect Transistor device and method of forming the same Grant 10,504,782 - Suen , et al. Dec | 2019-12-10 |
| Post-CMP Cleaning and Apparatus App 20190244804 - Huang; Fu-Ming ; et al. | 2019-08-08 |
| Semiconductor Device Cleaning Solution, Method of Use, and Method of Manufacture App 20190161711 - Chu; Pinlei Edmund ; et al. | 2019-05-30 |
| Post-CMP cleaning and apparatus Grant 10,269,555 - Huang , et al. | 2019-04-23 |
| Chemical Mechanical Polishing Apparatus And Method App 20190099854 - Suen; Shich-Chang ; et al. | 2019-04-04 |
| Fin Field-effect Transistor Device And Method Of Forming The Same App 20190103312 - Suen; Shich-Chang ; et al. | 2019-04-04 |
| Semiconductor Devices and Methods of Forming App 20190103308 - Hsu; Chun-Wei ; et al. | 2019-04-04 |
| Chemical Mechanical Polishing Composition and Method App 20190099853 - Suen; Shich-Chang ; et al. | 2019-04-04 |
| Method for Reducing Metal Plug Corrosion and Device App 20190096761 - Nieh; Ling-Fu ; et al. | 2019-03-28 |
| Method for forming semiconductor structure using polishing process Grant 10,157,781 - Hsu , et al. Dec | 2018-12-18 |
| Interconnect structure for semiconductor devices Grant 10,062,645 - Kuo , et al. August 28, 2 | 2018-08-28 |
| Method For Forming Semiconductor Structure Using Polishing Process App 20180166331 - HSU; Chun-Wei ; et al. | 2018-06-14 |
| Method for operating a polishing head and method for polishing a substrate Grant 9,987,720 - Suen , et al. June 5, 2 | 2018-06-05 |
| Chemical mechanical polishing apparatus and method Grant 9,962,805 - Chang , et al. May 8, 2 | 2018-05-08 |
| Oxidation and etching post metal gate CMP Grant 9,917,173 - Liu , et al. March 13, 2 | 2018-03-13 |
| Retainer Ring For Semiconductor Manufacturing Processes App 20170341201 - Hsu; Chun-Wei ; et al. | 2017-11-30 |
| Chemical Mechanical Polishing Apparatus and Method App 20170304990 - Chang; Ting-Kui ; et al. | 2017-10-26 |
| Interconnect Structure for Semiconductor Devices App 20170278785 - Kuo; Han-Hsin ; et al. | 2017-09-28 |
| Formation method of semiconductor device structure Grant 9,768,064 - Hsu , et al. September 19, 2 | 2017-09-19 |
| Brush cleaning method Grant 9,723,915 - Huang , et al. August 8, 2 | 2017-08-08 |
| Method For Metal Gate Surface Clean App 20170221700 - Suen; Shich-Chang ; et al. | 2017-08-03 |
| Interconnect structure for semiconductor devices Grant 9,679,848 - Kuo , et al. June 13, 2 | 2017-06-13 |
| Oxidation and Etching Post Metal Gate CMP App 20170125549 - Liu; Chi-Jen ; et al. | 2017-05-04 |
| Mechanisms for removing debris from polishing pad Grant 9,630,295 - Peng , et al. April 25, 2 | 2017-04-25 |
| Method for metal gate surface clean Grant 9,633,832 - Suen , et al. April 25, 2 | 2017-04-25 |
| Post-CMP Cleaning and Apparatus App 20170092481 - Huang; Fu-Ming ; et al. | 2017-03-30 |
| Oxidation and etching post metal gate CMP Grant 9,564,511 - Liu , et al. February 7, 2 | 2017-02-07 |
| Mechanism for forming metal gate structure Grant 9,553,161 - Liu , et al. January 24, 2 | 2017-01-24 |
| Interconnect Structure for Semiconductor Devices App 20170018496 - Kuo; Han-Hsin ; et al. | 2017-01-19 |
| Systems and Methods for Chemical Mechanical Polish and Clean App 20170004972 - Suen; Shich-Chang ; et al. | 2017-01-05 |
| Interconnect structure for semiconductor devices Grant 9,460,997 - Kuo , et al. October 4, 2 | 2016-10-04 |
| Methods and systems for chemical mechanical polish and clean Grant 9,449,841 - Suen , et al. September 20, 2 | 2016-09-20 |
| Method For Metal Gate Surface Clean App 20160172186 - SUEN; Shich-Chang ; et al. | 2016-06-16 |
| Platen assembly, chemical-mechanical polisher, and method for polishing substrate Grant 9,352,443 - Suen , et al. May 31, 2 | 2016-05-31 |
| Method For Operating A Polishing Head And Method For Polishing A Substrate App 20160136777 - SUEN; Shich-Chang ; et al. | 2016-05-19 |
| Interconnects for semiconductor devices Grant 9,305,880 - Huang , et al. April 5, 2 | 2016-04-05 |
| Oxidation and Etching Post Metal Gate CMP App 20160064518 - Liu; Chi-Jen ; et al. | 2016-03-03 |
| Polishing head, and chemical-mechanical polishing system for polishing substrate Grant 9,272,386 - Suen , et al. March 1, 2 | 2016-03-01 |
| Method for cleaning metal gate surface Grant 9,269,585 - Suen , et al. February 23, 2 | 2016-02-23 |
| Reduction of OCD measurement noise by way of metal via slots Grant 9,252,060 - Tsai , et al. February 2, 2 | 2016-02-02 |
| Oxidation and etching post metal gate CMP Grant 9,209,272 - Liu , et al. December 8, 2 | 2015-12-08 |
| Amorphorus silicon insertion for STI-CMP planarity improvement Grant 9,209,040 - Lin , et al. December 8, 2 | 2015-12-08 |
| Brush Cleaning Method App 20150335146 - HUANG; Fu-Ming ; et al. | 2015-11-26 |
| Mechanism For Forming Metal Gate Structure App 20150295063 - LIU; Chi-Jen ; et al. | 2015-10-15 |
| Brush cleaning system Grant 9,119,464 - Huang , et al. September 1, 2 | 2015-09-01 |
| Method For Metal Gate Surface Clean App 20150200089 - SUEN; Shich-Chang ; et al. | 2015-07-16 |
| Mechanism for forming metal gate structure Grant 9,076,766 - Liu , et al. July 7, 2 | 2015-07-07 |
| Interconnect Structure for Semiconductor Devices App 20150187697 - Kuo; Han-Hsin ; et al. | 2015-07-02 |
| Methods And Systems For Chemical Mechanical Polish And Clean App 20150179432 - Suen; Shich-Chang ; et al. | 2015-06-25 |
| Platen Assembly, Chemical-Mechanical Polisher, and Method for Polishing Substrate App 20150133033 - Suen; Shich-Chang ; et al. | 2015-05-14 |
| Interconnects For Semiconductor Devices App 20150115447 - HUANG; Fu-Ming ; et al. | 2015-04-30 |
| Polishing Head, Chemical-Mechanical Polishing System, and Method for Polishing Substrate App 20150111477 - SUEN; Shich-Chang ; et al. | 2015-04-23 |
| Amorphorus Silicon Insertion For Sti-cmp Planarity Improvement App 20150102456 - LIN; Kuo-Min ; et al. | 2015-04-16 |
| Apparatus And Method Of Manufacturing Metal Gate Semiconductor Device App 20150087144 - LIU; CHI-JEN ; et al. | 2015-03-26 |
| Apparatus And Method For Manufacturing A Semiconductor Wafer App 20150087208 - TSAI; CHI-MING ; et al. | 2015-03-26 |
| Oxidation and Etching Post Metal Gate CMP App 20150072511 - Liu; Chi-Jen ; et al. | 2015-03-12 |
| Planarization process for semiconductor device fabrication Grant 8,975,179 - Tu , et al. March 10, 2 | 2015-03-10 |
| Mechanisms For Removing Debris From Polishing Pad App 20150024661 - PENG; He-Hui ; et al. | 2015-01-22 |
| Mechanism For Forming Metal Gate Structure App 20140367801 - LIU; Chi-Jen ; et al. | 2014-12-18 |
| Process for forming contact plugs Grant 8,703,612 - Suen , et al. April 22, 2 | 2014-04-22 |
| Gate height loss improvement for a transistor Grant 8,598,028 - Tu , et al. December 3, 2 | 2013-12-03 |
| Reduction Of Ocd Measurement Noise By Way Of Metal Via Slots App 20130256659 - Tsai; Chi-Ming ; et al. | 2013-10-03 |
| Brush Cleaning System App 20130192634 - HUANG; Fu-Ming ; et al. | 2013-08-01 |
| Gate Height Loss Improvement For A Transistor App 20130164930 - Tu; Che-Hao ; et al. | 2013-06-27 |
| Planarization Process For Semiconductor Device Fabrication App 20130095644 - Tu; Che-Hao ; et al. | 2013-04-18 |
| Semiconductor Device Surface Clean App 20130061876 - Suen; Shich-Chang ; et al. | 2013-03-14 |
| Process for Forming Contact Plugs App 20130065394 - Suen; Shich-Chang ; et al. | 2013-03-14 |
| Polisher for chemical mechanical planarization Grant 8,348,719 - Lu , et al. January 8, 2 | 2013-01-08 |
| Method for pre-conditioning CMP polishing pad Grant 8,021,566 - Chuang , et al. September 20, 2 | 2011-09-20 |
| Polisher for chemical mechanical planarization App 20080233839 - Lu; Hsin-Hsien ; et al. | 2008-09-25 |
| Apparatus and method for pre-conditioning CMP polishing pad App 20060270237 - Chuang; Chia-Che ; et al. | 2006-11-30 |
| Apparatus for pre-conditioning CMP polishing pad Grant 7,105,446 - Chuang , et al. September 12, 2 | 2006-09-12 |
| Apparatus and method for pre-conditioning CMP polishing pad App 20050051266 - Chuang, Chia-Che ; et al. | 2005-03-10 |
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