Chen; Hung-Chih
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chen; Hung-Chih.The latest application filed is for "integrated circuit structure, and method for forming thereof".
Company Profile
9.150.165
- Chen; Hung-Chih - Hsinchu TW
- Chen; Hung Chih - Sunnyvale CA
- Chen; Hung-Chih - Taipei TW
- Chen; Hung-Chih - New Taipei TW
- Chen; Hung-Chih - New Taipei City TW
- Chen; Hung-Chih - Hsin-Chu TW
- - New Taipei TW
- Chen; Hung-Chih - Liujiao Township TW
- Chen; Hung Chih - Santa Clara CA
- Chen; Hung-Chih - Tao Yuan TW
- Chen; Hung-Chih - Taoyuan County TW
- Chen; Hung Chih - San Jose CA
- Chen; Hung-Chih - Dadu Township Taichung County TW
- Chen; Hung-Chih - Taicheng TW
- Chen, Hung-Chih - Dadu Township TW
- Chen, Hung-Chih - Miaoli TW
- Chen; Hung-Chih - Cerritos CA
Patent Activity
| Patent | Date |
|---|---|
| Integrated Circuit Structure, And Method For Forming Thereof App 20220302054 - Mao; Yi-Chao ; et al. | 2022-09-22 |
| Retaining Ring With Shaped Surface And Method Of Forming App 20220152778 - Chen; Hung Chih ; et al. | 2022-05-19 |
| Retaining ring with shaped surface Grant 11,260,500 - Chen , et al. March 1, 2 | 2022-03-01 |
| Inner retaining ring and outer retaining ring for carrier head Grant 11,173,579 - Chen , et al. November 16, 2 | 2021-11-16 |
| Polishing pad having arc-shaped configuration Grant 11,072,049 - Chen July 27, 2 | 2021-07-27 |
| Retaining Ring with Shaped Surface App 20200398399 - Chen; Hung Chih ; et al. | 2020-12-24 |
| Retaining ring with shaped surface Grant 10,766,117 - Chen , et al. Sep | 2020-09-08 |
| Textured membrane for a multi-chamber carrier head Grant 10,702,971 - Oh , et al. | 2020-07-07 |
| Gateway, gateway setup method, and IoT device setup method in IoT system Grant 10,602,362 - Chen , et al. | 2020-03-24 |
| Methods and apparatus for conditioning of chemical mechanical polishing pads Grant 10,226,853 - Bajaj , et al. | 2019-03-12 |
| Polishing pad configuration and chemical mechanical polishing system Grant 10,207,389 - Chen Feb | 2019-02-19 |
| Polishing Pad Having Arc-shaped Configuration App 20190047110 - Chen; Hung Chih | 2019-02-14 |
| Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20180304441 - Chen; Hung Chih ; et al. | 2018-10-25 |
| Polishing pad configuration and polishing pad support Grant 10,105,812 - Chen October 23, 2 | 2018-10-23 |
| Orbital polishing with small pad Grant 10,076,817 - Chen , et al. September 18, 2 | 2018-09-18 |
| Inner retaining ring and outer retaining ring for carrier head Grant 10,022,837 - Chen , et al. July 17, 2 | 2018-07-17 |
| Retaining Ring With Shaped Surface App 20180185979 - Chen; Hung Chih ; et al. | 2018-07-05 |
| GATEWAY, GATEWAY SETUP METHOD, AND IoT DEVICE SETUP METHOD IN IoT SYSTEM App 20180184298 - Chen; Hung-Chih ; et al. | 2018-06-28 |
| Polishing system with pad carrier and conditioning station Grant 9,987,724 - Gurusamy , et al. June 5, 2 | 2018-06-05 |
| Retaining ring with Shaped Surface Grant 9,937,601 - Chen , et al. April 10, 2 | 2018-04-10 |
| Carrier for small pad for chemical mechanical polishing Grant 9,873,179 - Chen , et al. January 23, 2 | 2018-01-23 |
| Polishing system with front side pressure control Grant 9,808,906 - Chang , et al. November 7, 2 | 2017-11-07 |
| Carrier For Small Pad For Chemical Mechanical Polishing App 20170203405 - Chen; Hui ; et al. | 2017-07-20 |
| Modifying substrate thickness profiles Grant 9,662,762 - Gurusamy , et al. May 30, 2 | 2017-05-30 |
| Supporting base and computer system Grant 9,625,951 - Liang , et al. April 18, 2 | 2017-04-18 |
| Textured Membrane For A Multi-chamber Carrier Head App 20170001282 - Oh; Jeonghoon ; et al. | 2017-01-05 |
| Computer apparatus Grant 9,529,390 - Tseng , et al. December 27, 2 | 2016-12-27 |
| Supporting Base And Computer System App 20160349801 - Liang; Chen-Yi ; et al. | 2016-12-01 |
| Retaining ring with selected stiffness and thickness Grant 9,492,905 - Chen , et al. November 15, 2 | 2016-11-15 |
| Computer apparatus Grant 9,471,106 - Tseng , et al. October 18, 2 | 2016-10-18 |
| Polishing System with Front Side Pressure Control App 20160279756 - Chang; Shou-Sung ; et al. | 2016-09-29 |
| Textured membrane for a multi-chamber carrier head Grant 9,452,505 - Oh , et al. September 27, 2 | 2016-09-27 |
| Polishing system with front side pressure control Grant 9,358,658 - Chang , et al. June 7, 2 | 2016-06-07 |
| Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20160082571 - Chen; Hung Chih ; et al. | 2016-03-24 |
| Portable electronic apparatus and expanding platform thereof Grant 9,280,178 - Chen , et al. March 8, 2 | 2016-03-08 |
| Retaining Ring With Shaped Surface App 20160045997 - Chen; Hung Chih ; et al. | 2016-02-18 |
| Portable electronic device capable of pivoting Grant 9,261,917 - Chen February 16, 2 | 2016-02-16 |
| Fixing device for fixing a portable electronic device and portable electronic system therewith Grant 9,261,910 - Liang , et al. February 16, 2 | 2016-02-16 |
| Side pad design for edge pedestal Grant 9,254,547 - Yuan , et al. February 9, 2 | 2016-02-09 |
| Polishing Pad Configuration And Polishing Pad Support App 20160016281 - Chen; Hung Chih | 2016-01-21 |
| Modifying Substrate Thickness Profiles App 20160016279 - Gurusamy; Jay ; et al. | 2016-01-21 |
| Polishing Pad Configuration And Chemical Mechanical Polishing System App 20160016282 - Chen; Hung Chih | 2016-01-21 |
| Orbital Polishing With Small Pad App 20160016280 - Chen; Hung Chih ; et al. | 2016-01-21 |
| Polishing System With Pad Carrier And Conditioning Station App 20160016284 - Gurusamy; Jay ; et al. | 2016-01-21 |
| Electronic device and hinge structure thereof Grant 9,215,818 - Chen , et al. December 15, 2 | 2015-12-15 |
| Computer Apparatus App 20150346775 - Tseng; Tien Chung ; et al. | 2015-12-03 |
| Computer Apparatus App 20150346769 - Tseng; Tien Chung ; et al. | 2015-12-03 |
| Portable computer Grant 9,201,466 - Lai , et al. December 1, 2 | 2015-12-01 |
| Retaining ring with shaped surface Grant 9,186,773 - Chen , et al. November 17, 2 | 2015-11-17 |
| Computer apparatus Grant 9,189,015 - Tseng , et al. November 17, 2 | 2015-11-17 |
| Back plate for use with a backlight module, a backlight module using the same, and the manufacturing method thereof Grant 9,165,486 - Yu , et al. October 20, 2 | 2015-10-20 |
| Portable electronic apparatus and casing therefor Grant 9,122,450 - Liang , et al. September 1, 2 | 2015-09-01 |
| Slim border design of display device and backlight module thereof Grant 9,097,407 - Yu , et al. August 4, 2 | 2015-08-04 |
| Retaining Ring With Selected Stiffness And Thickness App 20150209930 - Chen; Hung Chih ; et al. | 2015-07-30 |
| Monitoring retaining ring thickness and pressure control Grant 9,067,295 - Deshpande , et al. June 30, 2 | 2015-06-30 |
| Systems and methods for substrate polishing end point detection using improved friction measurement Grant 9,061,394 - Chang , et al. June 23, 2 | 2015-06-23 |
| Polishing head zone boundary smoothing Grant 9,050,699 - Chen , et al. June 9, 2 | 2015-06-09 |
| Methods and apparatus for an improved polishing head retaining ring Grant 9,050,700 - Chen , et al. June 9, 2 | 2015-06-09 |
| Portable Electronic Apparatus And Expanding Platform Thereof App 20150146369 - CHEN; HUNG-CHIH ; et al. | 2015-05-28 |
| Fastening mechanism and electronic device having the same Grant 9,040,847 - Liang , et al. May 26, 2 | 2015-05-26 |
| Portable electronic device with hinge structure Grant 9,042,091 - Hsu , et al. May 26, 2 | 2015-05-26 |
| Retaining ring monitoring and control of pressure Grant 9,017,138 - Chen , et al. April 28, 2 | 2015-04-28 |
| Retaining ring with selected stiffness and thickness Grant 8,998,676 - Chen , et al. April 7, 2 | 2015-04-07 |
| Portable computer Grant 8,976,519 - Lai , et al. March 10, 2 | 2015-03-10 |
| Vapor Dryer Module With Reduced Particle Generation App 20150050105 - Zhang; Dan ; et al. | 2015-02-19 |
| Separable Peripheral Device App 20150046607 - LIN; YING-HAO ; et al. | 2015-02-12 |
| Textured Membrane For A Multi-chamber Carrier Head App 20150038065 - Oh; Jeonghoon ; et al. | 2015-02-05 |
| Portable computer Grant 08922984 - | 2014-12-30 |
| Portable computer Grant 8,922,984 - Chen , et al. December 30, 2 | 2014-12-30 |
| Portable computer Grant 8,917,500 - Lee , et al. December 23, 2 | 2014-12-23 |
| Portable computer with adjustable touch screen display Grant 8,896,558 - Lee , et al. November 25, 2 | 2014-11-25 |
| Fixing Device For Fixing A Portable Electronic Device And Portable Electronic System Therewith App 20140328019 - Liang; Chen-Yi ; et al. | 2014-11-06 |
| Portable Electronic Device Capable Of Pivoting App 20140313655 - Chen; Hung-Chih | 2014-10-23 |
| Inner retaining ring and outer retaining ring for carrier head Grant 8,840,446 - Chen , et al. September 23, 2 | 2014-09-23 |
| Polishing Pad Conditioner Pivot Point App 20140273767 - Chen; Hung Chih ; et al. | 2014-09-18 |
| Polishing System with Front Side Pressure Control App 20140273766 - Chang; Shou-Sung ; et al. | 2014-09-18 |
| Polishing System with Front Side Pressure Control App 20140273765 - Chang; Shou-Sung ; et al. | 2014-09-18 |
| Multi-chamber carrier head with a textured membrane Grant 8,808,062 - Oh , et al. August 19, 2 | 2014-08-19 |
| Plate with easy assembly Grant 8,808,832 - Liang , et al. August 19, 2 | 2014-08-19 |
| Sliding mechanism and slider electronic apparatus therewith Grant 8,811,604 - Chen , et al. August 19, 2 | 2014-08-19 |
| Methods And Apparatus For Conditioning Of Chemical Mechanical Polishing Pads App 20140206263 - BAJAJ; Rajeev ; et al. | 2014-07-24 |
| Portable Electronic Apparatus And Casing Therefor App 20140198443 - Liang; Chen-Yi ; et al. | 2014-07-17 |
| Portable electronic apparatus and casing therefor Grant 8,724,318 - Liang , et al. May 13, 2 | 2014-05-13 |
| Carrier head with narrow inner ring and wide outer ring Grant 8,721,391 - Chen , et al. May 13, 2 | 2014-05-13 |
| Portable Electronic Device With Hinge Structure App 20140126134 - Hsu; Wen-Chi ; et al. | 2014-05-08 |
| Retaining Ring With Selected Stiffness And Thickness App 20140120803 - Chen; Hung Chih ; et al. | 2014-05-01 |
| Sliding Mechanism And Slider Electronic Apparatus Therewith App 20140098473 - Chen; Hung-Chih ; et al. | 2014-04-10 |
| Knife and Fork Assembly that can Function as Chopsticks App 20140059783 - Lu; Meng-Chang ; et al. | 2014-03-06 |
| Computer Apparatus App 20140063717 - Tseng; Tien Chung ; et al. | 2014-03-06 |
| Retaining Ring With Shaped Surface App 20140053981 - Chen; Hung Chih ; et al. | 2014-02-27 |
| Portable Computer App 20140043746 - LAI; YEN-CHANG ; et al. | 2014-02-13 |
| Portable Computer App 20140043747 - LAI; YEN-CHANG ; et al. | 2014-02-13 |
| Portable Computer App 20140043749 - LAI; Yen-Chang ; et al. | 2014-02-13 |
| Electronic Device And Hinge Structure Thereof App 20140043737 - Chen; Hung-Chih ; et al. | 2014-02-13 |
| Monitoring Retaining Ring Thickness And Pressure Control App 20140027407 - Deshpande; Sameer ; et al. | 2014-01-30 |
| Sensors in Carrier Head of a CMP System App 20140020829 - Chen; Hung Chih ; et al. | 2014-01-23 |
| Method for holding and polishing a substrate Grant 8,628,378 - Zuniga , et al. January 14, 2 | 2014-01-14 |
| Multi-chamber Carrier Head With A Textured Membrane App 20130334752 - Oh; Jeonghoon ; et al. | 2013-12-19 |
| Textured platen Grant 8,597,084 - Chen December 3, 2 | 2013-12-03 |
| Apparatus and method for temperature control during polishing Grant 8,591,286 - Chen , et al. November 26, 2 | 2013-11-26 |
| Retaining ring with shaped surface Grant 8,585,468 - Chen , et al. November 19, 2 | 2013-11-19 |
| Slim Border Design of Display Device and Backlight Module Thereof App 20130301239 - Yu; Chiao-Kun ; et al. | 2013-11-14 |
| Polishing pad conditioner Grant 8,550,879 - Chen , et al. October 8, 2 | 2013-10-08 |
| Back Plate for Use with a Backlight Module, A Backlight Module Using the Same, and the Manufacturing Method Thereof App 20130258642 - Yu; Chiao-Kun ; et al. | 2013-10-03 |
| Polishing Head Zone Boundary Smoothing App 20130252518 - CHEN; Hung Chih ; et al. | 2013-09-26 |
| Retaining ring and articles for carrier head Grant 8,535,121 - Bennett , et al. September 17, 2 | 2013-09-17 |
| Retaining Ring Monitoring And Control Of Pressure App 20130203321 - Chen; Hung Chih ; et al. | 2013-08-08 |
| Methods And Apparatus For An Improved Polishing Head Retaining Ring App 20130196577 - Chen; Hung Chih ; et al. | 2013-08-01 |
| Retaining Ring And Articles For Carrier Head App 20130157549 - Bennett; Doyle E. ; et al. | 2013-06-20 |
| Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20130149942 - Chen; Hung Chih ; et al. | 2013-06-13 |
| Polishing head zone boundary smoothing Grant 8,460,067 - Chen , et al. June 11, 2 | 2013-06-11 |
| Multi-chamber carrier head with a textured membrane Grant 8,454,413 - Oh , et al. June 4, 2 | 2013-06-04 |
| Portable Computer App 20130128441 - Lee; Shang-Mao ; et al. | 2013-05-23 |
| Portable Computer App 20130127730 - Lee; Shang-Mao ; et al. | 2013-05-23 |
| Portable Computer App 20130128440 - Chen; Chun-Chien ; et al. | 2013-05-23 |
| Substrate Retainer App 20130115858 - Zuniga; Steven M. ; et al. | 2013-05-09 |
| Retaining ring and articles for carrier head Grant 8,376,813 - Bennett , et al. February 19, 2 | 2013-02-19 |
| Fastening Mechanism And Electronic Device Having The Same App 20130037295 - Liang; Chen-Yi ; et al. | 2013-02-14 |
| Ornamental Plate With Easy Assembly App 20130017358 - Liang; Chen-Yi ; et al. | 2013-01-17 |
| Portable Electronic Apparatus And Casing Therefor App 20120327611 - Liang; Chen-Yi ; et al. | 2012-12-27 |
| Closed-loop control for effective pad conditioning Grant 8,337,279 - Dhandapani , et al. December 25, 2 | 2012-12-25 |
| Gas Barrier Film And Method For Manufacturing The Same App 20120308808 - LIU; Ta-Jo ; et al. | 2012-12-06 |
| Substrate retainer Grant 8,298,047 - Zuniga , et al. October 30, 2 | 2012-10-30 |
| Measurement Of Pad Thickness And Control Of Conditioning App 20120270477 - Nangoy; Roy C. ; et al. | 2012-10-25 |
| Lithium Cell Simulating Device App 20120239340 - CHEN; HUNG-CHIH ; et al. | 2012-09-20 |
| Roller assembly for a brush cleaning device in a cleaning module Grant 8,250,695 - Karuppiah , et al. August 28, 2 | 2012-08-28 |
| Speaker Unit And Electronic Device Having The Same App 20120183170 - Chen; Hung-Chih | 2012-07-19 |
| Closed loop control of pad profile based on metrology feedback Grant 8,221,193 - Chang , et al. July 17, 2 | 2012-07-17 |
| Pressure Controlled Polishing Platen App 20120171933 - Chen; Hung Chih | 2012-07-05 |
| Brush alignment control mechanism Grant 8,181,302 - Chen , et al. May 22, 2 | 2012-05-22 |
| Retaining Ring With Shaped Surface App 20120071067 - Chen; Hung Chih ; et al. | 2012-03-22 |
| Apparatus And Method For Temperature Control During Polishing App 20120040592 - CHEN; HUNG CHIH ; et al. | 2012-02-16 |
| Substrate Edge Tuning With Retaining Ring App 20120034848 - Chen; Hung Chih ; et al. | 2012-02-09 |
| Carrier Head With Narrow Inner Ring And Wide Outer Ring App 20120034849 - Chen; Hung Chih ; et al. | 2012-02-09 |
| Substrate Holder To Reduce Substrate Edge Stress During Chemical Mechanical Polishing App 20120021673 - Chen; Hung Chih ; et al. | 2012-01-26 |
| In-situ performance prediction of pad conditioning disk by closed loop torque monitoring Grant 8,096,852 - Deshpande , et al. January 17, 2 | 2012-01-17 |
| Multiple zone carrier head with flexible membrane Grant 8,088,299 - Chen , et al. January 3, 2 | 2012-01-03 |
| Apparatus And Methods For Conditioning A Polishing Pad App 20110318997 - Nangoy; Roy C. ; et al. | 2011-12-29 |
| Retaining ring with shaped surface Grant 8,066,551 - Chen , et al. November 29, 2 | 2011-11-29 |
| Side Pad Design For Edge Pedestal App 20110244763 - Yuan; Yin ; et al. | 2011-10-06 |
| Substrate holder with liquid supporting surface Grant 8,021,211 - Chen , et al. September 20, 2 | 2011-09-20 |
| Retaining Ring With Shaped Surface App 20110195639 - Chen; Hung Chih ; et al. | 2011-08-11 |
| Platen exhaust for chemical mechanical polishing system Grant 7,988,535 - Chen , et al. August 2, 2 | 2011-08-02 |
| Apparatus and methods for conditioning a polishing pad Grant 7,963,826 - Nangoy , et al. June 21, 2 | 2011-06-21 |
| Substrate Retainer App 20110104990 - Zuniga; Steven M. ; et al. | 2011-05-05 |
| Retaining ring with shaped surface Grant 7,927,190 - Chen , et al. April 19, 2 | 2011-04-19 |
| Roller Assembly For A Brush Cleaning Device In A Cleaning Module App 20110079245 - Karuppiah; Lakshmanan ; et al. | 2011-04-07 |
| Multiple Zone Carrier Head With Flexible Membrane App 20110070810 - Chen; Hung Chih ; et al. | 2011-03-24 |
| Brush Alignment Control Mechanism App 20110067727 - CHEN; HUNG CHIH ; et al. | 2011-03-24 |
| Substrate retainer Grant 7,883,397 - Zuniga , et al. February 8, 2 | 2011-02-08 |
| Multiple zone carrier head with flexible membrane Grant 7,842,158 - Chen , et al. November 30, 2 | 2010-11-30 |
| Polishing Head Zone Boundary Smoothing App 20100291842 - CHEN; HUNG CHIH ; et al. | 2010-11-18 |
| Electrolyte retaining on a rotating platen by directional air flow Grant 7,815,787 - Chen , et al. October 19, 2 | 2010-10-19 |
| Keyboard Grant D620,013 - Chang , et al. July 20, 2 | 2010-07-20 |
| Carrier head using flexure restraints for retaining ring alignment Grant 7,749,052 - Yi , et al. July 6, 2 | 2010-07-06 |
| Retaining Ring And Articles For Carrier Head App 20100144255 - Bennett; Doyle E. ; et al. | 2010-06-10 |
| Polishing Pad Conditioner App 20100105302 - Chen; Hung Chih ; et al. | 2010-04-29 |
| Textured Platen App 20100099340 - Chen; Hung Chih | 2010-04-22 |
| Pad Conditioner Auto Disk Change App 20100099342 - Chen; Hung Chih ; et al. | 2010-04-22 |
| Apparatus And Methods For Conditioning A Polishing Pad App 20100093263 - Nangoy; Roy C. ; et al. | 2010-04-15 |
| Carrier Head Using Flexure Restraints For Retaining Ring Alignment App 20100062694 - Yi; Jin ; et al. | 2010-03-11 |
| In-situ Performance Prediction Of Pad Conditioning Disk By Closed Loop Torque Monitoring App 20100035525 - Deshpande; SAMEER ; et al. | 2010-02-11 |
| Closed Loop Control Of Pad Profile Based On Metrology Feedback App 20100035518 - Chang; Shou-Sung ; et al. | 2010-02-11 |
| Closed-loop Control For Effective Pad Conditioning App 20090318060 - Dhandapani; Sivakumar ; et al. | 2009-12-24 |
| Multiple Window Pad Assembly App 20090305610 - Yilmaz; Alpay ; et al. | 2009-12-10 |
| Polishing System With Three Headed Carousel App 20090280727 - KARUPPIAH; LAKSHMANAN ; et al. | 2009-11-12 |
| Pad Properties Using Nanoparticle Additives App 20090278081 - M'Saad; Hichem ; et al. | 2009-11-12 |
| Platen Exhaust For Chemical Mechanical Polishing System App 20090264049 - Chen; Hung Chih ; et al. | 2009-10-22 |
| Substrate Holder With Liquid Supporting Surface App 20090264056 - Chen; Hung Chih ; et al. | 2009-10-22 |
| Keyboard Grant D594,461 - Chang , et al. June 16, 2 | 2009-06-16 |
| Keyboard Grant D594,462 - Chang , et al. June 16, 2 | 2009-06-16 |
| Fast substrate loading on polishing head without membrane inflation step Grant 7,527,271 - Oh , et al. May 5, 2 | 2009-05-05 |
| Composite retaining ring Grant 7,503,837 - Oh , et al. March 17, 2 | 2009-03-17 |
| Keyboard Of Handheld Electronic Device App 20090058689 - Chang; Yu-Hsien ; et al. | 2009-03-05 |
| Vibration damping during chemical mechanical polishing Grant 7,497,767 - Chen , et al. March 3, 2 | 2009-03-03 |
| Substrate Retainer App 20090047873 - Zuniga; Steven M. ; et al. | 2009-02-19 |
| Apparatus And Methods For Conditioning A Polishing Pad App 20090036036 - Nangoy; Roy C. ; et al. | 2009-02-05 |
| Electrolyte Retaining On A Rotating Platen By Directional Air Flow App 20090032408 - Chen; Hung Chih ; et al. | 2009-02-05 |
| Apparatus And Methods For Conditioning A Polishing Pad App 20090036035 - Nangoy; Roy C. ; et al. | 2009-02-05 |
| Substrate retainer Grant 7,459,057 - Zuniga , et al. December 2, 2 | 2008-12-02 |
| Pad cleaning method Grant 7,452,264 - Mavliev , et al. November 18, 2 | 2008-11-18 |
| Non-contact Wet Wafer Holder App 20080268753 - Ishikawa; Tetsuya ; et al. | 2008-10-30 |
| Retaining Ring With Shaped Surface App 20080196833 - Chen; Hung Chih ; et al. | 2008-08-21 |
| Dual display module Grant 7,406,338 - Chen July 29, 2 | 2008-07-29 |
| Retaining ring with shaped surface Grant 7,344,434 - Chen , et al. March 18, 2 | 2008-03-18 |
| Vibration damping in chemical mechanical polishing system Grant 7,331,847 - Chen , et al. February 19, 2 | 2008-02-19 |
| Reataining Ring And Articles For Carrier Head App 20080039000 - Bennett; Doyle E. ; et al. | 2008-02-14 |
| Electrolyte retaining on a rotating platen by directional air flow App 20070295610 - Chen; Hung Chih ; et al. | 2007-12-27 |
| Pad cleaning method App 20070298692 - Mavliev; Rashid A. ; et al. | 2007-12-27 |
| Fast Substrate Loading On Polishing Head Without Membrane Inflation Step App 20070289124 - Oh; Jeonghoon ; et al. | 2007-12-20 |
| Rotational Alignment Mechanism For Load Cups App 20070281589 - Oh; Jeonghoon ; et al. | 2007-12-06 |
| Multipe Zone Carrier Head With Flexible Membrane App 20070272356 - Chen; Hung Chih ; et al. | 2007-11-29 |
| Friction weld of two dissimilar materials App 20070262488 - Chen; Hung Chih | 2007-11-15 |
| Paired pivot arm Grant 7,273,408 - Chen , et al. September 25, 2 | 2007-09-25 |
| Apparatus And Methods For Conditioning A Polishing Pad App 20070212983 - Nangoy; Roy C. ; et al. | 2007-09-13 |
| Multi-chamber Carrier Head With A Textured Membrane App 20070202785 - Oh; Jeonghoon ; et al. | 2007-08-30 |
| Composite Retaining Ring App 20070197146 - Oh; Jeonghoon ; et al. | 2007-08-23 |
| Multiple zone carrier head with flexible membrane Grant 7,255,771 - Chen , et al. August 14, 2 | 2007-08-14 |
| Carrier head vibration damping Grant 7,255,637 - Bennett , et al. August 14, 2 | 2007-08-14 |
| Six headed carousel Grant 7,241,203 - Chen , et al. July 10, 2 | 2007-07-10 |
| Paired pivot arm App 20070141954 - Chen; Hung Chih ; et al. | 2007-06-21 |
| Carrier head with multiple chambers Grant 7,207,871 - Zuniga , et al. April 24, 2 | 2007-04-24 |
| Carrier Head With Multiple Chambers App 20070082589 - Zuniga; Steven M. ; et al. | 2007-04-12 |
| Polishing Apparatus And Method With Direct Load Platen App 20070077861 - Chen; Hung Chih | 2007-04-05 |
| Polishing apparatus and method with direct load platen Grant 7,198,548 - Chen April 3, 2 | 2007-04-03 |
| Flexible membrane for multi-chamber carrier head Grant 7,198,561 - Chen , et al. April 3, 2 | 2007-04-03 |
| Composite retaining ring Grant 7,186,171 - Oh , et al. March 6, 2 | 2007-03-06 |
| Backlight Module Structure App 20070030699 - Tseng; Te-Hai ; et al. | 2007-02-08 |
| Six headed carousel Grant 7,166,016 - Chen January 23, 2 | 2007-01-23 |
| Temperature control in a chemical mechanical polishing system Grant 7,153,188 - Zuniga , et al. December 26, 2 | 2006-12-26 |
| Composite retaining ring App 20060240750 - Oh; Jeonghoon ; et al. | 2006-10-26 |
| Profile control platen Grant 7,115,024 - Chen , et al. October 3, 2 | 2006-10-03 |
| Carrier head for thermal drift compensation Grant 7,101,272 - Chen , et al. September 5, 2 | 2006-09-05 |
| Substrate removal from polishing tool Grant 7,081,042 - Chen , et al. July 25, 2 | 2006-07-25 |
| Carrier head for thermal drift compensation App 20060160479 - Chen; Hung Chih ; et al. | 2006-07-20 |
| Flexible membrane for multi-chamber carrier head App 20060154580 - Chen; Hung Chih ; et al. | 2006-07-13 |
| Vibration damping in chemical mechanical polishing system App 20060148387 - Chen; Hung Chih ; et al. | 2006-07-06 |
| Retaining ring deflection control Grant 7,048,621 - Chen , et al. May 23, 2 | 2006-05-23 |
| Load cup for chemical mechanical polishing Grant 7,044,832 - Yilmaz , et al. May 16, 2 | 2006-05-16 |
| Retaining Ring Deflection Control App 20060089092 - Chen; Hung Chih ; et al. | 2006-04-27 |
| Vibration damping in a chemical mechanical polishing system Grant 7,014,545 - Chen , et al. March 21, 2 | 2006-03-21 |
| Detection of lens anti-reflective coating decay by undesired residue detection Grant 7,016,029 - Chen , et al. March 21, 2 | 2006-03-21 |
| Carrier head with a compressible film Grant 7,001,260 - Chen , et al. February 21, 2 | 2006-02-21 |
| Substrate carrier with a textured membrane Grant 7,001,245 - Chen February 21, 2 | 2006-02-21 |
| Multi-chamber carrier head with a flexible membrane Grant 7,001,257 - Chen , et al. February 21, 2 | 2006-02-21 |
| Carrier head with a non-stick membrane Grant 7,001,256 - Zuniga , et al. February 21, 2 | 2006-02-21 |
| Substrate removal from polishing tool App 20060019582 - Chen; Hung Chih ; et al. | 2006-01-26 |
| Carrier head with flexible membrane to provide controllable pressure and loading area Grant 6,979,250 - Zuniga , et al. December 27, 2 | 2005-12-27 |
| Two part retaining ring Grant 6,974,371 - Chen , et al. December 13, 2 | 2005-12-13 |
| Vibration damping during chemical mechanical polishing App 20050245181 - Chen, Hung Chih ; et al. | 2005-11-03 |
| Multiple zone carrier head with flexible membrane App 20050211377 - Chen, Hung Chih ; et al. | 2005-09-29 |
| Dual display module App 20050197165 - Chen, Hung-Chih | 2005-09-08 |
| Retaining ring with shaped surface App 20050191947 - Chen, Hung Chih ; et al. | 2005-09-01 |
| Profile control platen App 20050186892 - Chen, Hung Chih ; et al. | 2005-08-25 |
| Load cup for chemical mechanical polishing App 20050176349 - Yilmaz, Alpay ; et al. | 2005-08-11 |
| Carrier head with a non-stick membrane Grant 6,923,714 - Zuniga , et al. August 2, 2 | 2005-08-02 |
| Profile control platen Grant 6,913,518 - Chen , et al. July 5, 2 | 2005-07-05 |
| Multi-chamber carrier head with a flexible membrane App 20050142993 - Chen, Hung Chih ; et al. | 2005-06-30 |
| Retaining ring with slurry transport grooves App 20050126708 - Chen, Hung Chih ; et al. | 2005-06-16 |
| Method of detecting a substrate in a carrier head Grant 6,857,931 - Chen , et al. February 22, 2 | 2005-02-22 |
| Multi-chamber carrier head with a flexible membrane Grant 6,857,945 - Chen , et al. February 22, 2 | 2005-02-22 |
| Vibration damping in a carrier head Grant 6,848,980 - Chen , et al. February 1, 2 | 2005-02-01 |
| Profile control platen App 20040224615 - Chen, Hung Chih ; et al. | 2004-11-11 |
| Two part retaining ring App 20040219870 - Chen, Hung Chih ; et al. | 2004-11-04 |
| Carrier head with flexible membrane to provide controllable pressure and loading area App 20040192173 - Zuniga, Steven M. ; et al. | 2004-09-30 |
| Substrate carrier with a textured membrane App 20040175951 - Chen, Hung Chih | 2004-09-09 |
| Methods for carrier head with multi-part flexible membrane Grant 6,776,694 - Zuniga , et al. August 17, 2 | 2004-08-17 |
| Vibration damping in a chemical mechanical polishing system App 20040142646 - Chen, Hung Chih ; et al. | 2004-07-22 |
| Control of a multi-chamber carrier head Grant 6,764,387 - Chen July 20, 2 | 2004-07-20 |
| Carrier head with flexible membranes to provide controllable pressure and loading area Grant 6,722,965 - Zuniga , et al. April 20, 2 | 2004-04-20 |
| Aroma mist spraying device App 20040046053 - Chen, Hung-Chih | 2004-03-11 |
| Method of detecting a substrate in a carrier head App 20040033762 - Chen, Hung Chih ; et al. | 2004-02-19 |
| Vibration damping in a chemical mechanical polishing system Grant 6,676,497 - Chen , et al. January 13, 2 | 2004-01-13 |
| Carrier head with flexible membrane App 20040005842 - Chen, Hung Chih ; et al. | 2004-01-08 |
| Carrier head with a substrate detector Grant 6,663,466 - Chen , et al. December 16, 2 | 2003-12-16 |
| Detection of lens anti-reflective coating decay by undesired residue detection App 20030228531 - Chen, Hung-Chih ; et al. | 2003-12-11 |
| Method and system for spraying a viscous material on a wafer Grant 6,652,912 - Leu , et al. November 25, 2 | 2003-11-25 |
| Carrier head with a non-stick membrane App 20030124963 - Zuniga, Steven M. ; et al. | 2003-07-03 |
| Vibration damping in a carrier head App 20030068966 - Chen, Hung Chih ; et al. | 2003-04-10 |
| Overlay Shift Correction For The Deposition Of Epitaxial Silicon Layer And Post-epitaxial Silicon Layers In A Semiconductor Device App 20030032256 - Lee, Kun-I ; et al. | 2003-02-13 |
| Carrier head with pressure transfer mechanism Grant 6,494,774 - Zuniga , et al. December 17, 2 | 2002-12-17 |
| Substrate retainer App 20020179251 - Zuniga, Steven M. ; et al. | 2002-12-05 |
| Methods for carrier head with multi-part flexible membrane App 20020182996 - Zuniga, Steven M. ; et al. | 2002-12-05 |
| Carrier head with a compressible film App 20020164938 - Chen, Hung Chih ; et al. | 2002-11-07 |
| Carrier head with multi-part flexible membrane Grant 6,450,868 - Zuniga , et al. September 17, 2 | 2002-09-17 |
| Carrier head with a compressible film Grant 6,431,968 - Chen , et al. August 13, 2 | 2002-08-13 |
| Carrier Head With Multi-part Flexible Membrane App 20020094767 - Zuniga, Steven M. ; et al. | 2002-07-18 |
| Carrier head with vibration dampening App 20020081956 - Bennett, Doyle E. ; et al. | 2002-06-27 |
| Carrier head with local pressure control for a chemical mechanical polishing apparatus App 20020072313 - Zuniga, Steven M. ; et al. | 2002-06-13 |
| Determining when to replace a retaining ring used in substrate polishing operations Grant 6,390,908 - Chen , et al. May 21, 2 | 2002-05-21 |
| Carrier head with flexible membranes to provide controllable pressure and loading area App 20020039879 - Zuniga, Steven M. ; et al. | 2002-04-04 |
| Carrier Head With A Substrate Detector App 20020002025 - CHEN, HUNG CHIH ; et al. | 2002-01-03 |
| Carrier head with pressurizable bladder Grant 6,241,593 - Chen , et al. June 5, 2 | 2001-06-05 |
| Method and apparatus for chemical mechanical polishing using a patterned pad Grant 6,241,596 - Osterheld , et al. June 5, 2 | 2001-06-05 |
| Carrier head for chemical mechanical polishing a substrate Grant 6,210,255 - Zuniga , et al. April 3, 2 | 2001-04-03 |
| Carrier head with local pressure control for a chemical mechanical polishing apparatus Grant 6,146,259 - Zuniga , et al. November 14, 2 | 2000-11-14 |
| Carrier head to apply pressure to and retain a substrate Grant 6,050,882 - Chen April 18, 2 | 2000-04-18 |
| Liquid dispensing system and method for dispensing Grant 6,021,921 - Lan , et al. February 8, 2 | 2000-02-08 |
| High pressure capacitive transducer Grant 4,617,607 - Park , et al. October 14, 1 | 1986-10-14 |
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