Patent | Date |
---|
Front-end Loader For Prosthetic Occluders And Methods Thereof App 20160213359 - Carpenter; Craig M. ;   et al. | 2016-07-28 |
Front-end loader for prosthetic occluders and methods thereof Grant 9,326,758 - Carpenter , et al. May 3, 2 | 2016-05-03 |
Methods of producing deformed metal articles Grant 8,974,611 - Carpenter , et al. March 10, 2 | 2015-03-10 |
Methods of producing deformed metal articles App 20130149553 - Carpenter; Craig M. ;   et al. | 2013-06-13 |
Methods of producing deformed metal articles Grant 8,382,920 - Carpenter , et al. February 26, 2 | 2013-02-26 |
Methods for forming and cleaning photolithography reticles Grant 7,767,365 - Carpenter , et al. August 3, 2 | 2010-08-03 |
Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces Grant 7,481,887 - Carpenter , et al. January 27, 2 | 2009-01-27 |
Chemical vapor deposition apparatus and deposition method Grant 7,468,104 - Mardian , et al. December 23, 2 | 2008-12-23 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces Grant 7,427,425 - Carpenter , et al. September 23, 2 | 2008-09-23 |
Deposition methods utilizing microwave excitation Grant 7,422,986 - Carpenter , et al. September 9, 2 | 2008-09-09 |
Apparatus and method for depositing materials onto microelectronic workpieces Grant 7,387,685 - Carpenter , et al. June 17, 2 | 2008-06-17 |
Chemical vapor deposition methods Grant 7,378,127 - Carpenter , et al. May 27, 2 | 2008-05-27 |
Methods for forming and cleaning photolithography reticles App 20080057411 - Carpenter; Craig M. ;   et al. | 2008-03-06 |
Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers Grant 7,335,396 - Carpenter , et al. February 26, 2 | 2008-02-26 |
Laser assisted material deposition Grant 7,311,947 - Dando , et al. December 25, 2 | 2007-12-25 |
Chemical vapor deposition apparatus Grant 7,270,715 - Dando , et al. September 18, 2 | 2007-09-18 |
Methods of producing deformed metal articles App 20070209741 - Carpenter; Craig M. ;   et al. | 2007-09-13 |
Semiconductor substrate deposition processor chamber liner apparatus Grant 7,234,412 - Carpenter , et al. June 26, 2 | 2007-06-26 |
Chemical vapor deposition method Grant 7,229,666 - Mardian , et al. June 12, 2 | 2007-06-12 |
Semiconductor substrate processing chamber and accessory attachment interfacial structure Grant 7,192,487 - Carpenter , et al. March 20, 2 | 2007-03-20 |
Chemically sensitive warning apparatus and method Grant 7,185,601 - Carpenter , et al. March 6, 2 | 2007-03-06 |
Deposition methods utilizing microwave excitation App 20070036895 - Carpenter; Craig M. ;   et al. | 2007-02-15 |
Methods and apparatus for vapor processing of micro-device workpieces App 20070020394 - Carpenter; Craig M. ;   et al. | 2007-01-25 |
Laser Assisted Material Deposition App 20060288937 - Dando; Ross S. ;   et al. | 2006-12-28 |
Laser Assisted Material Deposition App 20060289969 - Dando; Ross S. ;   et al. | 2006-12-28 |
Manifold assembly for feeding reactive precursors to substrate processing chambers App 20060249253 - Dando; Ross S. ;   et al. | 2006-11-09 |
Methods and apparatus for vapor processing of micro-device workpieces Grant 7,118,783 - Carpenter , et al. October 10, 2 | 2006-10-10 |
Heated gas line body feedthrough for vapor and gas delivery systems and methods of employing same App 20060207506 - Carpenter; Craig M. ;   et al. | 2006-09-21 |
Methods and processes utilizing microwave excitation Grant 7,105,208 - Carpenter , et al. September 12, 2 | 2006-09-12 |
Heated gas line body feedthrough for vapor and gas delivery systems and methods for employing same Grant 7,090,727 - Carpenter , et al. August 15, 2 | 2006-08-15 |
Deposition chamber surface enhancement and resulting deposition chambers App 20060065635 - Derderian; Garo J. ;   et al. | 2006-03-30 |
Semiconductor substrate processing chamber and substrate transfer chamber interfacial structure App 20060027326 - Carpenter; Craig M. ;   et al. | 2006-02-09 |
Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,969,309 - Carpenter November 29, 2 | 2005-11-29 |
High integrity sputtering target material and method for producing bulk quantities of same App 20050252268 - Michaluk, Christopher A. ;   et al. | 2005-11-17 |
Chemical vapor deposition apparatuses and deposition methods App 20050241581 - Carpenter, Craig M. ;   et al. | 2005-11-03 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces Grant 6,926,775 - Carpenter , et al. August 9, 2 | 2005-08-09 |
Chemical vapor deposition methods App 20050142291 - Dando, Ross S. ;   et al. | 2005-06-30 |
Apparatus and method for depositing materials onto microelectronic workpieces App 20050133161 - Carpenter, Craig M. ;   et al. | 2005-06-23 |
Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces App 20050120954 - Carpenter, Craig M. ;   et al. | 2005-06-09 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate App 20050112890 - Campbell, Philip H. ;   et al. | 2005-05-26 |
Laser assisted material deposition App 20050078462 - Dando, Ross S. ;   et al. | 2005-04-14 |
Chemical vapor deposition methods Grant 6,858,264 - Dando , et al. February 22, 2 | 2005-02-22 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces App 20050028734 - Carpenter, Craig M. ;   et al. | 2005-02-10 |
Chemical vapor deposition method App 20050028732 - Mardian, Allen P. ;   et al. | 2005-02-10 |
Apparatus and method for depositing materials onto microelectronic workpieces App 20050022739 - Carpenter, Craig M. ;   et al. | 2005-02-03 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate Grant 6,849,133 - Campbell , et al. February 1, 2 | 2005-02-01 |
Deposition apparatuses configured for utilizing phased microwave radiation Grant 6,845,734 - Carpenter , et al. January 25, 2 | 2005-01-25 |
Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces Grant 6,838,114 - Carpenter , et al. January 4, 2 | 2005-01-04 |
Method and apparatus for delivering precursors App 20040255859 - Dando, Ross S. ;   et al. | 2004-12-23 |
Magnetically-actuatable throttle valve App 20040237895 - Carpenter, Craig M. ;   et al. | 2004-12-02 |
Apparatus and method for depositing materials onto microelectronic workpieces Grant 6,821,347 - Carpenter , et al. November 23, 2 | 2004-11-23 |
Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers App 20040226507 - Carpenter, Craig M. ;   et al. | 2004-11-18 |
Chemical vapor deposition apparatus Grant 6,814,813 - Dando , et al. November 9, 2 | 2004-11-09 |
Chemical vapor deposition apparatuses App 20040216671 - Carpenter, Craig M. ;   et al. | 2004-11-04 |
Interfacial Structure For Semiconductor Substrate Processing Chambers And Substrate Transfer Chambers And For Semiconductor Substrate Processing Chambers And Accessory Attachments, And Semiconductor Substrate Processor Grant 6,800,172 - Carpenter , et al. October 5, 2 | 2004-10-05 |
Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies App 20040192177 - Carpenter, Craig M. | 2004-09-30 |
Method for delivering precursors Grant 6,797,337 - Dando , et al. September 28, 2 | 2004-09-28 |
Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates Grant 6,787,373 - Dando , et al. September 7, 2 | 2004-09-07 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces App 20040154538 - Carpenter, Craig M. ;   et al. | 2004-08-12 |
Semiconductor substrate processing chamber and accessory attachment interfacial structure App 20040144315 - Carpenter, Craig M. ;   et al. | 2004-07-29 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate App 20040144310 - Campbell, Philip H. ;   et al. | 2004-07-29 |
Deposition chamber surface enhancement and resulting deposition chambers App 20040134427 - Derderian, Garo J. ;   et al. | 2004-07-15 |
Front-end loader for prosthetic occluders and methods thereof App 20040133230 - Carpenter, Craig M. ;   et al. | 2004-07-08 |
Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,736,708 - Carpenter May 18, 2 | 2004-05-18 |
Deposition methods utilizing microwave excitation App 20040089233 - Carpenter, Craig M. ;   et al. | 2004-05-13 |
Chemical vapor deposition apparatus App 20040089240 - Dando, Ross S. ;   et al. | 2004-05-13 |
Chemical vapor deposition apparatuses and deposition methods App 20040083959 - Carpenter, Craig M. ;   et al. | 2004-05-06 |
Method and apparatus for delivering precursors App 20040083963 - Dando, Ross S. ;   et al. | 2004-05-06 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate Grant 6,677,250 - Campbell , et al. January 13, 2 | 2004-01-13 |
Apparatus and method for depositing materials onto microelectronic workpieces App 20040003777 - Carpenter, Craig M. ;   et al. | 2004-01-08 |
Methods and apparatus for vapor processing of micro-device workpieces App 20040000270 - Carpenter, Craig M. ;   et al. | 2004-01-01 |
Magnetically-actuatable throttle valve App 20030221616 - Carpenter, Craig M. ;   et al. | 2003-12-04 |
Apparatus and methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces App 20030219528 - Carpenter, Craig M. ;   et al. | 2003-11-27 |
Chemical vapor deposition apparatus and deposition method App 20030215569 - Mardian, Allen P. ;   et al. | 2003-11-20 |
Chemical vapor deposition apparatus App 20030200926 - Dando, Ross S. ;   et al. | 2003-10-30 |
Chemical vapor deposition methods App 20030203109 - Dando, Ross S. ;   et al. | 2003-10-30 |
Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates App 20030192477 - Dando, Ross S. ;   et al. | 2003-10-16 |
Semiconductor substrate deposition processor chamber liner apparatus App 20030194829 - Carpenter, Craig M. ;   et al. | 2003-10-16 |
Deposition methods utilizing microwave excitation, and deposition apparatuses App 20030194508 - Carpenter, Craig M. ;   et al. | 2003-10-16 |
Engagement mechanism for semiconductor substrate deposition process kit hardware Grant 6,620,253 - Dando , et al. September 16, 2 | 2003-09-16 |
Method of removing surface protrusions from thin films Grant 6,620,496 - Carpenter , et al. September 16, 2 | 2003-09-16 |
Method of replacing at least a portion of a semiconductor substrate deposition chamber liner Grant 6,613,587 - Carpenter , et al. September 2, 2 | 2003-09-02 |
Manifold assembly for feeding reactive precursors to substrate processing chambers App 20030159653 - Dando, Ross S. ;   et al. | 2003-08-28 |
Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor App 20030159780 - Carpenter, Craig M. ;   et al. | 2003-08-28 |
Heated gas line body feedthrough for vapor and gas delivery systems and methods of employing same App 20030033984 - Carpenter, Craig M. ;   et al. | 2003-02-20 |
CVD apparatuses and methods of forming a layer over a semiconductor substrate App 20030033980 - Campbell, Philip H. ;   et al. | 2003-02-20 |
Plasma enhanced chemical vapor deposition process Grant 6,468,925 - Campbell , et al. October 22, 2 | 2002-10-22 |
Chemical vapor deposition apparatuses and deposition methods App 20020129768 - Carpenter, Craig M. ;   et al. | 2002-09-19 |
Chemically sensitive warning apparatus and method App 20020121235 - Carpenter, Craig M. ;   et al. | 2002-09-05 |
Polishing slurry and method for chemical-mechanical polishing App 20020098700 - Alwan, James J. ;   et al. | 2002-07-25 |
Method of removing surface protrusions from thin films App 20020058455 - Carpenter, Craig M. ;   et al. | 2002-05-16 |
Plasma enhanced chemical vapor deposition process App 20020048963 - Campbell, Philip H. ;   et al. | 2002-04-25 |
Microelectronic Substrate Assembly Planarizing Machines And Methods Of Mechanical And Chemical-mechanical Planarization Of Microelectronic Substrate Assemblies App 20010044269 - CARPENTER, CRAIG M. | 2001-11-22 |