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Metal-organic-framework-containing Bodies And Related Methods App 20220234105 - Sturm; Edward A. ;   et al. | 2022-07-28 |
Gas Storage Systems And Method Thereof App 20220194804 - Byl; Oleg ;   et al. | 2022-06-23 |
Germanium Tetraflouride And Hydrogen Mixtures For An Ion Implantation System App 20220186358 - Byl; Oleg ;   et al. | 2022-06-16 |
Storage and Delivery Veseel for Storing GeH4, Using a Zeolitic Adsorbent App 20220112986 - BYL; Oleg | 2022-04-14 |
Germanium tetraflouride and hydrogen mixtures for an ion implantation system Grant 11,299,802 - Byl , et al. April 12, 2 | 2022-04-12 |
Method and Systems Useful for Producing Aluminum Ions App 20220108863 - TANG; Ying ;   et al. | 2022-04-07 |
Fluorinated Compositions For Ion Source Performance Improvements In Nitrogen Ion Implantation App 20220044908 - CHAMBERS; Barry Lewis ;   et al. | 2022-02-10 |
Ion Implantation System with Mixture of Arc Chamber Materials App 20210398773 - TANG; Ying ;   et al. | 2021-12-23 |
Gas Supply Packages, Adsorbents, And Related Methods App 20210370259 - Dubois; Lawrence H. ;   et al. | 2021-12-02 |
Ion implantation system with mixture of arc chamber materials Grant 11,139,145 - Tang , et al. October 5, 2 | 2021-10-05 |
Silicon implantation in substrates and provision of silicon precursor compositions therefor Grant 11,062,906 - Tang , et al. July 13, 2 | 2021-07-13 |
Germanium Tetraflouride And Hydrogen Mixtures For An Ion Implantation System App 20210189550 - BYL; Oleg ;   et al. | 2021-06-24 |
Plasma Immersion Methods For Ion Implantation App 20210090860 - TANG; Ying ;   et al. | 2021-03-25 |
Ion Implantation System With Mixture Of Arc Chamber Materials App 20210020402 - TANG; Ying ;   et al. | 2021-01-21 |
Ion implantation processes and apparatus using gallium Grant 10,892,137 - Sweeney , et al. January 12, 2 | 2021-01-12 |
Valve Assemblies And Fluid Storage And Dispensing Packages Comprising Same App 20200248873 - Kind Code | 2020-08-06 |
Adsorbents And Fluid Supply Packages And Apparatus Comprising Same App 20200206717 - Dubois; Lawrence H. ;   et al. | 2020-07-02 |
Ion Implantation Processes And Apparatus Using Gallium App 20200083015 - SWEENEY; Joseph D. ;   et al. | 2020-03-12 |
Carbon Materials For Carbon Implantation App 20200051819 - SWEENEY; Joseph D. ;   et al. | 2020-02-13 |
Ion implantation processes and apparatus Grant 10,497,532 - Byl , et al. De | 2019-12-03 |
Carbon materials for carbon implantation Grant 10,497,569 - Sweeney , et al. De | 2019-12-03 |
Carbon dopant gas and co-flow for implant beam and source life performance improvement Grant 10,354,877 - Byl , et al. July 16, 2 | 2019-07-16 |
Phosphorus Or Arsenic Ion Implantation Utilizing Enhanced Source Techniques App 20190103275 - Byl; Oleg ;   et al. | 2019-04-04 |
B2f4 Manufacturing Process App 20190071313 - Byl; Oleg ;   et al. | 2019-03-07 |
Phosphorus or arsenic ion implantation utilizing enhanced source techniques Grant 10,109,488 - Byl , et al. October 23, 2 | 2018-10-23 |
Carbon Dopant Gas And Co-flow For Implant Beam And Source Life Performance Improvement App 20180211839 - Byl; Oleg ;   et al. | 2018-07-26 |
Preparation of high pressure BF.sub.3/H.sub.2 mixtures Grant 9,996,090 - Byl , et al. June 12, 2 | 2018-06-12 |
Ion source cleaning in semiconductor processing systems Grant 9,991,095 - Sweeney , et al. June 5, 2 | 2018-06-05 |
Valve Assemblies And Fluid Storage And Dispensing Packages Comprising Same App 20180119888 - ELZER; Daneil ;   et al. | 2018-05-03 |
Carbon dopant gas and co-flow for implant beam and source life performance improvement Grant 9,960,042 - Byl , et al. May 1, 2 | 2018-05-01 |
B2F4 manufacturing process Grant 9,938,156 - Byl , et al. April 10, 2 | 2018-04-10 |
Ion implantation compositions, systems, and methods Grant 9,831,063 - Byl , et al. November 28, 2 | 2017-11-28 |
Ion Implantation Processes And Apparatus App 20170338075 - BYL; Oleg ;   et al. | 2017-11-23 |
Fluorinated compositions for ion source performance improvements in nitrogen ion implantation App 20170330726 - Chambers; Barry Lewis ;   et al. | 2017-11-16 |
Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates Grant 9,764,298 - Byl , et al. September 19, 2 | 2017-09-19 |
Phosphorus Or Arsenic Ion Implantation Utilizing Enhanced Source Techniques App 20170250084 - Byl; Oleg ;   et al. | 2017-08-31 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 9,685,304 - Kaim , et al. June 20, 2 | 2017-06-20 |
Carbon Materials For Carbon Implantation App 20170069499 - Sweeney; Joseph D. ;   et al. | 2017-03-09 |
Silicon Implantation In Substrates And Provision Of Silicon Precursor Compositions Therefor App 20160211137 - Tang; Ying ;   et al. | 2016-07-21 |
Remote Delivery Of Chemical Reagents App 20160172164 - Sweeney; Joseph D. ;   et al. | 2016-06-16 |
Apparatus And Method For Preparation Of Compounds Or Intermediates Thereof From A Solid Material, And Using Such Compounds And Intermediates App 20160107136 - Byl; Oleg ;   et al. | 2016-04-21 |
Preparation Of High Pressure Bf3/h2 Mixtures App 20160085246 - Byl; Oleg ;   et al. | 2016-03-24 |
Cluster ion implantation of arsenic and phosphorus Grant 9,269,582 - Byl , et al. February 23, 2 | 2016-02-23 |
Carbon Dopant Gas And Co-flow For Implant Beam And Source Life Performance Improvement App 20160020102 - Byl; Oleg ;   et al. | 2016-01-21 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20160013018 - Kaim; Robert ;   et al. | 2016-01-14 |
Ion Implantation Compositions, Systems, And Methods App 20150380212 - Byl; Oleg ;   et al. | 2015-12-31 |
Ion Implantation System And Method App 20150357152 - Jones; Edward E. ;   et al. | 2015-12-10 |
Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates Grant 9,205,392 - Byl , et al. December 8, 2 | 2015-12-08 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 9,142,387 - Kaim , et al. September 22, 2 | 2015-09-22 |
Ion implantation system and method Grant 9,111,860 - Jones , et al. August 18, 2 | 2015-08-18 |
Ion Implantation System And Method App 20140342538 - Jones; Edward E. ;   et al. | 2014-11-20 |
B2f4 Manufacturing Process App 20140301932 - Byl; Oleg ;   et al. | 2014-10-09 |
Ion implantation system and method Grant 8,796,131 - Jones , et al. August 5, 2 | 2014-08-05 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20140090598 - Kaim; Robert ;   et al. | 2014-04-03 |
Cluster Ion Implantation Of Arsenic And Phosphorus App 20140011346 - Byl; Oleg ;   et al. | 2014-01-09 |
Cleaning of semiconductor processing systems Grant 8,603,252 - Dimeo , et al. December 10, 2 | 2013-12-10 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 8,598,022 - Kaim , et al. December 3, 2 | 2013-12-03 |
Carbon Materials For Carbon Implantation App 20130078790 - Sweeney; Joseph D. ;   et al. | 2013-03-28 |
Ion Implantation System And Method App 20120252195 - Jones; Edward E. ;   et al. | 2012-10-04 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20120108044 - Kaim; Robert ;   et al. | 2012-05-03 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 8,138,071 - Kaim , et al. March 20, 2 | 2012-03-20 |
Ion Source Cleaning In Semiconductor Processing Systems App 20120058252 - Sweeney; Joseph D. ;   et al. | 2012-03-08 |
Apparatus And Method For Preparation Of Compounds Or Intermediates Thereof From A Solid Material, And Using Such Compounds And Intermediates App 20120051994 - Byl; Oleg ;   et al. | 2012-03-01 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 8,062,965 - Kaim , et al. November 22, 2 | 2011-11-22 |
Ion Source Cleaning In Semiconductor Processing Systems App 20110259366 - Sweeney; Joseph D. ;   et al. | 2011-10-27 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20110159671 - KAIM; Robert ;   et al. | 2011-06-30 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20110097882 - Kaim; Robert ;   et al. | 2011-04-28 |
Carbon Materials For Carbon Implantation App 20110021011 - SWEENEY; Joseph D. ;   et al. | 2011-01-27 |
Cleaning Of Semiconductor Processing Systems App 20100154835 - Dimeo; Frank ;   et al. | 2010-06-24 |