| Patent | Date |
|---|
Object Table, A Stage Apparatus And A Lithographic Apparatus
App 20220197155 - HERMANUSSEN; Sander Jeroen ; et al. | 2022-06-23 |
An Object Positioning System Diagnostic And Calibration Methods Positioning Control Method Lithographic Apparatus And Device Manufacturing Method
App 20220197157 - JANSEN; Bas ; et al. | 2022-06-23 |
Metrology Apparatus
App 20220121127 - PANDEY; Nitesh ; et al. | 2022-04-21 |
Electronic System, Accelerometer, Calibration Method, Lithographic Apparatus And Device Manufacturing Method
App 20220113636 - BUTLER; Hans ; et al. | 2022-04-14 |
Electron beam inspection apparatus stage positioning
Grant 11,302,512 - Baggen , et al. April 12, 2 | 2022-04-12 |
Frame assembly, lithographic apparatus and device manufacturing method
Grant 11,269,262 - Butler , et al. March 8, 2 | 2022-03-08 |
Metrology apparatus
Grant 11,262,661 - Pandey , et al. March 1, 2 | 2022-03-01 |
Pneumatic support device and lithographic apparatus with pneumatic support device
Grant 11,169,450 - Butler , et al. November 9, 2 | 2021-11-09 |
Projection system and mirror and radiation source for a lithographic apparatus
Grant 11,150,560 - Van De Kerkhof , et al. October 19, 2 | 2021-10-19 |
Piezoelectric Actuator, Actuator System, Substrate Support, And Lithographic Apparatus Including The Actuator
App 20210318624 - JANSEN; Bas ; et al. | 2021-10-14 |
Frame Assembly, Lithographic Apparatus and Device Manufacturing Method
App 20210240090 - BUTLER; Hans ; et al. | 2021-08-05 |
Lithographic Apparatus
App 20210223703 - BUTLER; Hans ; et al. | 2021-07-22 |
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
Grant 11,029,612 - Kimman , et al. June 8, 2 | 2021-06-08 |
Lithographic Apparatus and Method
App 20210132505 - BUTLER; Hans | 2021-05-06 |
Lithographic apparatus
Grant 10,976,675 - Butler , et al. April 13, 2 | 2021-04-13 |
Lithographic apparatus and device manufacturing method
Grant 10,962,891 - Lof , et al. March 30, 2 | 2021-03-30 |
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method
Grant 10,962,890 - Simons , et al. March 30, 2 | 2021-03-30 |
Lithographic apparatus, lithographic projection apparatus and device manufacturing method
Grant 10,955,761 - Butler , et al. March 23, 2 | 2021-03-23 |
Pneumatic Support Device and Lithographic Apparatus with Pneumatic Support Device
App 20210080834 - BUTLER; Hans ; et al. | 2021-03-18 |
Support structure, method and lithographic apparatus
Grant 10,921,720 - Butler February 16, 2 | 2021-02-16 |
Lithographic apparatus and device manufacturing method
Grant 10,866,529 - Butler , et al. December 15, 2 | 2020-12-15 |
Positioning Device, Lithographic Apparatus, Method for Compensating a Balance Mass Torque and Device Manufacturing Method
App 20200363732 - SIMONS; Wilhelmus Franciscus Johannes ; et al. | 2020-11-19 |
Vibration isolator, lithographic apparatus and device manufacturing method
Grant 10,816,910 - Butler , et al. October 27, 2 | 2020-10-27 |
Lithographic apparatus and device manufacturing method
Grant 10,788,755 - Lof , et al. September 29, 2 | 2020-09-29 |
Projection System and Mirror and Radiation Source for a Lithographic Apparatus
App 20200285155 - VAN DE KERKHOF; Marcus Adrianus ; et al. | 2020-09-10 |
Projection system and mirror and radiation source for a lithographic apparatus
Grant 10,732,511 - Van De Kerkhof , et al. | 2020-08-04 |
Lithographic Apparatus And Device Manufacturing Method
App 20200225590 - LOF; Joeri ; et al. | 2020-07-16 |
Lithographic Apparatus, Lithographic Projection Apparatus and Device Manufacturing Method
App 20200209757 - BUTLER; Hans ; et al. | 2020-07-02 |
Electron Beam Inspection Apparatus Stage Positioning
App 20200203118 - BAGGEN; Marcel Koenraad Marie ; et al. | 2020-06-25 |
Lithographic apparatus and device manufacturing method
Grant 10,678,139 - Lof , et al. | 2020-06-09 |
Lithographic apparatus
Grant 10,663,872 - Butler | 2020-05-26 |
Lithographic Apparatus
App 20200159126 - BUTLER; Hans ; et al. | 2020-05-21 |
Lithographic apparatus and device manufacturing method
Grant 10,649,347 - Ronde , et al. | 2020-05-12 |
Support Structure, Method and Lithographic Apparatus
App 20200124991 - Butler; Hans | 2020-04-23 |
Lithographic apparatus having an active base frame support
Grant 10,578,983 - Butler , et al. | 2020-03-03 |
Lithographic apparatus
Grant 10,571,815 - Butler , et al. Feb | 2020-02-25 |
Height Sensor, Lithographic Apparatus And Method For Manufacturing Devices
App 20200057390 - BUTLER; Hans ; et al. | 2020-02-20 |
Bearing Device, Magnetic Gravity Compensator, Vibration Isolation System, Lithographic Apparatus, Method To Control A Gravity Co
App 20200049203 - KIMMAN; Maarten Hartger ; et al. | 2020-02-13 |
Lithographic Apparatus, Lithographic Projection Apparatus And Device Manufacturing Method
App 20200050120 - BUTLER; Hans ; et al. | 2020-02-13 |
Lithography apparatus and device manufacturing method
Grant 10,551,751 - Butler , et al. Fe | 2020-02-04 |
Metrology Apparatus
App 20190384184 - Pandey; Nitesh ; et al. | 2019-12-19 |
Lithographic Apparatus
App 20190377266 - BUTLER; Hans ; et al. | 2019-12-12 |
Lithographic apparatus and device manufacturing method
Grant 10,503,086 - Butler , et al. Dec | 2019-12-10 |
Lithographic apparatus and device manufacturing method
Grant 10,503,084 - Lof , et al. Dec | 2019-12-10 |
Lithographic Apparatus And Device Manufacturing Method
App 20190354021 - BUTLER; Hans ; et al. | 2019-11-21 |
Lithographic apparatus
Grant 10,466,599 - Butler , et al. No | 2019-11-05 |
Lithographic Apparatus And Device Manufacturing Method
App 20190302631 - LOF; Joeri ; et al. | 2019-10-03 |
Positioning system, method to position, lithographic apparatus and device manufacturing method
Grant 10,416,572 - Butler , et al. Sept | 2019-09-17 |
Lithographic apparatus and device manufacturing method
Grant 10,409,175 - Butler , et al. Sept | 2019-09-10 |
Lithographic Apparatus And Device Manufacturing Method
App 20190250518 - LOF; Joeri ; et al. | 2019-08-15 |
Lithographic Apparatus And Device Manufacturing Method
App 20190212661 - LOF; Joeri ; et al. | 2019-07-11 |
Actuator system and lithographic apparatus
Grant 10,338,483 - Van Leeuwen , et al. | 2019-07-02 |
Lithographic Apparatus
App 20190187566 - BUTLER; Hans ; et al. | 2019-06-20 |
A Positioning System, Method To Position, Lithographic Apparatus And Device Manufacturing Method
App 20190179233 - BUTLER; Hans ; et al. | 2019-06-13 |
Projection System and Mirror and Radiation Source for a Lithographic Apparatus
App 20190171109 - VAN DE KERKHOF; Marcus Adrianus ; et al. | 2019-06-06 |
Lithographic Apparatus
App 20190171117 - Butler; Hans | 2019-06-06 |
Positioning device, lithographic apparatus and device manufacturing method
Grant 10,310,392 - Butler , et al. | 2019-06-04 |
Lithographic Apparatus And Device Manufacturing Method
App 20190129317 - RONDE; Michael ; et al. | 2019-05-02 |
Lithographic apparatus and device manufacturing method
Grant 10,261,428 - Lof , et al. | 2019-04-16 |
Projection system
Grant 10,248,027 - Butler , et al. | 2019-04-02 |
Lithographic apparatus
Grant 10,234,774 - Butler | 2019-03-19 |
Actuator System And Lithographic Apparatus
App 20190079416 - VAN LEEUWEN; Robbert Edgar ; et al. | 2019-03-14 |
Projection system and minor and radiation source for a lithographic apparatus
Grant 10,216,093 - Van De Kerkhof , et al. Feb | 2019-02-26 |
Lithographic apparatus and device manufacturing method
Grant 10,209,634 - Butler , et al. Feb | 2019-02-19 |
Vibration Isolator, Lithographic Apparatus And Device Manufacturing Method
App 20190049852 - Butler; Hans ; et al. | 2019-02-14 |
Lithographic apparatus and device manufacturing method
Grant 10,191,389 - Lof , et al. Ja | 2019-01-29 |
Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator
Grant 10,191,392 - Dams , et al. Ja | 2019-01-29 |
Lithographic apparatus and device manufacturing method
Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
Lithographic Apparatus And Device Manufacturing Method
App 20190011838 - BUTLER; Hans ; et al. | 2019-01-10 |
Lithographic apparatus and device manufacturing method
Grant 10,175,587 - Butler , et al. J | 2019-01-08 |
Lithographic Apparatus Having An Active Base Frame Support
App 20180373156 - BUTLER; Hans ; et al. | 2018-12-27 |
Lithographic apparatus and method
Grant 10,139,735 - Baselmans , et al. Nov | 2018-11-27 |
Positioning Device, Lithographic Apparatus And Device Manufacturing Method
App 20180335705 - BUTLER; Hans ; et al. | 2018-11-22 |
Lithographic Apparatus and Method of Operating a Lithographic Apparatus
App 20180329292 - KANEHARA; Junichi ; et al. | 2018-11-15 |
Object positioning in lithography
Grant 10,120,293 - Butler , et al. November 6, 2 | 2018-11-06 |
Lithographic Apparatus
App 20180224755 - BUTLER; Hans | 2018-08-09 |
Support device, lithographic apparatus and device manufacturing method
Grant 9,977,349 - Butler , et al. May 22, 2 | 2018-05-22 |
Lithographic apparatus
Grant 9,946,168 - Butler April 17, 2 | 2018-04-17 |
Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method
Grant 9,927,721 - Butler , et al. March 27, 2 | 2018-03-27 |
Lithographic Apparatus And Device Manufacturing Method
App 20180017879 - BUTLER; Hans ; et al. | 2018-01-18 |
Projection System
App 20170363965 - BUTLER; Hans ; et al. | 2017-12-21 |
Lithographic Apparatus And Device Manufacturing Method
App 20170343904 - LOF; Joeri ; et al. | 2017-11-30 |
Substrate table system, lithographic apparatus and substrate table swapping method
Grant 9,753,381 - Van De Ven , et al. September 5, 2 | 2017-09-05 |
Vibration isolator with displacement structure
Grant 9,754,711 - Janssen , et al. September 5, 2 | 2017-09-05 |
Lithographic apparatus and method for measuring a position
Grant 9,746,312 - Butler , et al. August 29, 2 | 2017-08-29 |
Lithographic apparatus and device manufacturing method
Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
Multi-stage system, a control method therefor, and a lithographic apparatus
Grant 9,726,988 - Butler , et al. August 8, 2 | 2017-08-08 |
Imprint lithographic apparatus and imprint lithographic method
Grant 9,715,171 - Butler , et al. July 25, 2 | 2017-07-25 |
Object Positioning System, Control System, Lithographic Apparatus, Object Positioning Method And Device Manufacturing Method
App 20170199468 - BUTLER; Hans ; et al. | 2017-07-13 |
Actuator, Positioning Device, Lithographic Apparatus, And Method For Manufacturing An Actuator
App 20170199469 - DAMS; Johannes Adrianus Antonius Theodorus ; et al. | 2017-07-13 |
Lithographic apparatus and device manufacturing method
Grant 9,696,630 - Van Der Wijst , et al. July 4, 2 | 2017-07-04 |
Positioning system, a lithographic apparatus and a method for positional control
Grant 9,671,702 - Butler , et al. June 6, 2 | 2017-06-06 |
Lithographic Apparatus and Method
App 20170131642 - BASELMANS; Johannes Jacobus Matheus ; et al. | 2017-05-11 |
Lithographic Apparatus And Device Manufacturing Method
App 20170102621 - LOF; Joeri ; et al. | 2017-04-13 |
Lithographic Apparatus And Device Manufacturing Method
App 20170010545 - LOF; Joeri ; et al. | 2017-01-12 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
Multi-stage System, A Control Method Therefor, And A Lithographic Apparatus
App 20160377993 - Butler; Hans ; et al. | 2016-12-29 |
Support Device, Lithographic Apparatus And Device Manufacturing Method
App 20160334718 - BUTLER; Hans ; et al. | 2016-11-17 |
Lithographic apparatus and device manufacturing method
Grant 9,494,869 - Butler , et al. November 15, 2 | 2016-11-15 |
Lithographic Apparatus And Device Manufacturing Method
App 20160299442 - BUTLER; Hans ; et al. | 2016-10-13 |
Lithographic Apparatus And Device Manufacturing Method
App 20160282727 - LOF; Joeri ; et al. | 2016-09-29 |
Multi-stage system, a control method therefor, and a lithographic apparatus
Grant 9,442,394 - Butler , et al. September 13, 2 | 2016-09-13 |
Object Positioning In Lithography
App 20160252827 - BUTLER; Hans ; et al. | 2016-09-01 |
Lithographic Apparatus And Device Manufacturing Method
App 20160238953 - BUTLER; Hans ; et al. | 2016-08-18 |
Lithographic apparatus with actuator to compensate acoustic vibration
Grant 9,378,722 - Butler , et al. June 28, 2 | 2016-06-28 |
Lithographic apparatus and device manufacturing method
Grant 9,366,972 - Lof , et al. June 14, 2 | 2016-06-14 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method
Grant 9,329,501 - Huang , et al. May 3, 2 | 2016-05-03 |
Vibration Isolator With Displacement Structure
App 20160099094 - JANSSEN; Jeroen Lodevicus Gerardus ; et al. | 2016-04-07 |
Arrangement for actuating an element in a microlithographic projection exposure apparatus
Grant 9,304,404 - Fischer , et al. April 5, 2 | 2016-04-05 |
Positioning System, A Lithographic Apparatus And A Method For Positional Control
App 20160077450 - BUTLER; Hans ; et al. | 2016-03-17 |
Movable support, position control system, lithographic apparatus and method of controlling a position of an exchangeable object
Grant 9,261,799 - Butler February 16, 2 | 2016-02-16 |
Lithographic Apparatus and Device Manufacturing Method
App 20160004170 - VAN DER WIJST; Marc Wilhelmus Maria ; et al. | 2016-01-07 |
Positioning system, a lithographic apparatus and a method for positional control
Grant 9,229,339 - Butler , et al. January 5, 2 | 2016-01-05 |
Multi-stage System, A Control Method Therefor, And A Lithographic Apparatus
App 20150338752 - BUTLER; Hans ; et al. | 2015-11-26 |
Enhancing alignment in lithographic apparatus device manufacture
Grant 9,195,128 - Butler November 24, 2 | 2015-11-24 |
Projection System and Mirror and Radiation Source for a Lithographic Apparatus
App 20150323872 - VAN DE KERKHOF; Marcus Adrianus ; et al. | 2015-11-12 |
Projection system and lithographic apparatus
Grant 9,164,401 - Loopstra , et al. October 20, 2 | 2015-10-20 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening
Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
Lithographic Apparatus And Device Manufacturing Method
App 20150261102 - LOF; Joeri ; et al. | 2015-09-17 |
Lithographic apparatus and device manufacturing method
Grant 9,134,632 - Van Der Wijst , et al. September 15, 2 | 2015-09-15 |
Multi-stage system, a control method therefor, and a lithographic apparatus
Grant 9,128,390 - Butler , et al. September 8, 2 | 2015-09-08 |
Positioning system, lithographic apparatus and device manufacturing method
Grant 9,122,173 - Butler , et al. September 1, 2 | 2015-09-01 |
Imprint lithography apparatus
Grant 9,116,423 - Jeunink , et al. August 25, 2 | 2015-08-25 |
Lithographic apparatus comprising a substrate table and a surface substrate actuator
Grant 9,110,387 - Butler , et al. August 18, 2 | 2015-08-18 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
Lithographic apparatus and device manufacturing method
Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
Substrate Table System, Lithographic Apparatus And Substrate Table Swapping Method
App 20150153661 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2015-06-04 |
Lithography Apparatus And Device Manufacturing Method
App 20150098073 - Butler; Hans ; et al. | 2015-04-09 |
Lithographic Apparatus
App 20150092171 - Butler; Hans | 2015-04-02 |
Lithographic apparatus and device manufacturing method
Grant 8,994,919 - Butler , et al. March 31, 2 | 2015-03-31 |
Multi-stage System, A Control Method Therefor, And A Lithographic Apparatus
App 20150062554 - BUTLER; Hans ; et al. | 2015-03-05 |
Lithographic apparatus
Grant 8,928,861 - Kuiper , et al. January 6, 2 | 2015-01-06 |
Lithographic apparatus and patterning device
Grant 8,922,749 - Butler , et al. December 30, 2 | 2014-12-30 |
Lithographic apparatus and patterning device
Grant 08922749 - | 2014-12-30 |
Multi-stage system, a control method therefor, and a lithographic apparatus
Grant 8,913,229 - Butler , et al. December 16, 2 | 2014-12-16 |
Actuator system, lithographic apparatus, and device manufacturing method
Grant 8,908,146 - Butler December 9, 2 | 2014-12-09 |
Lithographic Apparatus And Device Manufacturing Method
App 20140340666 - Butler; Hans ; et al. | 2014-11-20 |
Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method
Grant 8,854,607 - Kamidi , et al. October 7, 2 | 2014-10-07 |
Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method
App 20140293251 - Butler; Hans ; et al. | 2014-10-02 |
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus
Grant 8,781,775 - Butler , et al. July 15, 2 | 2014-07-15 |
Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object
Grant 8,743,344 - Butler , et al. June 3, 2 | 2014-06-03 |
Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping method
Grant 8,730,451 - Butler , et al. May 20, 2 | 2014-05-20 |
Active mount, lithographic apparatus comprising such active mount and method for tuning such active mount
Grant 8,717,532 - Butler , et al. May 6, 2 | 2014-05-06 |
Lithographic method and apparatus
Grant 8,705,004 - Butler , et al. April 22, 2 | 2014-04-22 |
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus
App 20140043596 - Fischer; Juergen ; et al. | 2014-02-13 |
Method for damping an object, an active damping system, and a lithographic apparatus
Grant 08619232 - | 2013-12-31 |
Method for damping an object, an active damping system, and a lithographic apparatus
Grant 8,619,232 - Butler , et al. December 31, 2 | 2013-12-31 |
Lithographic apparatus and device manufacturing method
Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
Lithographic apparatus and device manufacturing method
Grant 8,553,199 - Butler , et al. October 8, 2 | 2013-10-08 |
Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product
Grant 8,554,510 - Staals , et al. October 8, 2 | 2013-10-08 |
Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frame
Grant 8,493,553 - Butler , et al. July 23, 2 | 2013-07-23 |
Lithographic apparatus and device manufacturing method
Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
Lithographic apparatus and device manufacturing method
Grant 8,472,002 - Lof , et al. June 25, 2 | 2013-06-25 |
Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage system
Grant 8,446,567 - Butler , et al. May 21, 2 | 2013-05-21 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
Grant 8,368,868 - Vermeulen , et al. February 5, 2 | 2013-02-05 |
Lithographic Apparatus, Method Of Deforming A Substrate Table And Device Manufacturing Method
App 20120327386 - Huang; Yang-Shan ; et al. | 2012-12-27 |
Multi-stage System, A Control Method Therefor, And A Lithographic Apparatus
App 20120300186 - BUTLER; Hans ; et al. | 2012-11-29 |
Lithographic Apparatus Comprising A Substrate Table
App 20120300188 - Butler; Hans ; et al. | 2012-11-29 |
Position measurement system and lithographic apparatus
Grant 8,319,940 - Butler , et al. November 27, 2 | 2012-11-27 |
Lithographic Apparatus And Device Manufacturing Method
App 20120274911 - LOF; Joeri ; et al. | 2012-11-01 |
Combination of structure and an active damping system, and a lithographic apparatus
Grant 8,245,824 - Butler , et al. August 21, 2 | 2012-08-21 |
Lithographic apparatus and calibration method
Grant 8,248,583 - Van Den Brink , et al. August 21, 2 | 2012-08-21 |
Lithographic apparatus having acoustic resonator
Grant 8,243,258 - Butler , et al. August 14, 2 | 2012-08-14 |
Lithographic Apparatus and Device Manufacturing Method
App 20120154774 - VAN DER WIJST; Marc Wilhelmus Maria ; et al. | 2012-06-21 |
Positioning System, Lithographic Apparatus and Device Manufacturing Method
App 20120147355 - BUTLER; Hans ; et al. | 2012-06-14 |
Controller, Lithographic Apparatus, Method of Controlling the Position of an Object and Device Manufacturing Method
App 20120127449 - Kamidi; Ramidin Izair ; et al. | 2012-05-24 |
Positioning System, A Lithographic Apparatus And A Method For Positional Control
App 20120127451 - Butler; Hans ; et al. | 2012-05-24 |
Lithographic Apparatus For Transferring Pattern From Patterning Device Onto Substrate, And Damping Method
App 20120105819 - BUTLER; Hans ; et al. | 2012-05-03 |
Lithographic apparatus having an active damping subassembly
Grant 8,164,737 - Butler , et al. April 24, 2 | 2012-04-24 |
Lithographic apparatus and device manufacturing method
Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
Positioning system, lithographic apparatus and device manufacturing method
Grant 8,144,310 - Butler , et al. March 27, 2 | 2012-03-27 |
Lithographic Apparatus
App 20110317141 - KUIPER; Doede Frans ; et al. | 2011-12-29 |
Lithographic Apparatus And Device Manufacturing Method
App 20110285977 - LOF; Joeri ; et al. | 2011-11-24 |
Lithographic Apparatus And Device Manufacturing Method
App 20110279800 - Lof; Joeri ; et al. | 2011-11-17 |
Damping arrangement, active damping system, lithographic apparatus, and projection assembly
Grant 8,059,259 - Butler , et al. November 15, 2 | 2011-11-15 |
Lithographic apparatus and device manufacturing method
Grant 8,044,373 - Butler October 25, 2 | 2011-10-25 |
Lithographic Apparatus And Method For Measuring A Position
App 20110216300 - BUTLER; Hans ; et al. | 2011-09-08 |
Lithographic Apparatus And Method For Correcting A Position Of A Stage Of A Lithographic Apparatus
App 20110208459 - Butler; Hans ; et al. | 2011-08-25 |
Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method
App 20110194088 - Butler; Hans ; et al. | 2011-08-11 |
Projection System and Lithographic Apparatus
App 20110170078 - Loopstra; Erik Roelof ; et al. | 2011-07-14 |
Lithographic Apparatus and Device Manufacturing Method
App 20110171759 - BUTLER; Hans ; et al. | 2011-07-14 |
Lithographic Apparatus And Device Manufacturing Method
App 20110170077 - LOF; Joeri ; et al. | 2011-07-14 |
Imprint Lithographic Apparatus And Imprint Lithographic Method
App 20110163477 - Butler; Hans ; et al. | 2011-07-07 |
Method Of Measuring Properties Of Dynamic Positioning Errors In A Lithographic Apparatus, Data Processing Apparatus, And Computer Program Product
App 20110153265 - STAALS; Frank ; et al. | 2011-06-23 |
Active Mount, Lithographic Apparatus Comprising Such Active Mount And Method For Tuning Such Active Mount
App 20110149265 - BUTLER; Hans ; et al. | 2011-06-23 |
Lithographic Method and Apparatus
App 20110102757 - BUTLER; Hans ; et al. | 2011-05-05 |
Lithographic apparatus and device manufacturing method
Grant 7,936,443 - Butler , et al. May 3, 2 | 2011-05-03 |
Lithographic Apparatus And Patterning Device
App 20110096311 - BUTLER; Hans ; et al. | 2011-04-28 |
Lithographic Apparatus And Device Manufacturing Method
App 20110007285 - Lof; Joeri ; et al. | 2011-01-13 |
Imprint Lithography Apparatus
App 20110008483 - Jeunink; Andre Bernardus ; et al. | 2011-01-13 |
Lithographic Apparatus And Method
App 20110001951 - Butler; Hans | 2011-01-06 |
Lithographic Apparatus And Device Manufacturing Method
App 20110001942 - Lof; Joeri ; et al. | 2011-01-06 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method
Grant 7,859,644 - Van Der Toorn , et al. December 28, 2 | 2010-12-28 |
Actuator System, Lithographic Apparatus, and Device Manufacturing Method
App 20100321662 - Butler; Hans | 2010-12-23 |
Lithographic apparatus having feedthrough control system
Grant 7,847,919 - Butler December 7, 2 | 2010-12-07 |
Enhancing Alignment in Lithographic Apparatus Device Manufacture
App 20100290022 - BUTLER; Hans | 2010-11-18 |
Lithographic apparatus and device manufacturing method
Grant 7,760,324 - Benschop , et al. July 20, 2 | 2010-07-20 |
Method For Damping An Object, An Active Damping System, And A Lithographic Apparatus
App 20100157264 - Butler; Hans ; et al. | 2010-06-24 |
Lithographic Apparatus With Gas Pressure Means For Controlling A Planar Position Of A Patterning Device Contactless
App 20100159399 - VERMEULEN; Johannes Petrus Martinus Bernardus ; et al. | 2010-06-24 |
Projection Assembly And Lithographic Apparatus
App 20100089712 - Butler; Hans ; et al. | 2010-04-15 |
Lithographic apparatus with planar motor driven support
Grant 7,675,201 - Butler , et al. March 9, 2 | 2010-03-09 |
Cable Connection, Control System, and Method to Decrease the Passing on of Vibrations from a First Object to a Second Object
App 20100020525 - BUTLER; Hans ; et al. | 2010-01-28 |
Lithographic apparatus, method of controlling a component of a lithographic apparatus and device manufacturing method
Grant 7,649,613 - Butler January 19, 2 | 2010-01-19 |
Lithographic Apparatus and Calibration Method
App 20100007867 - VAN DEN BRINK; Marinus Aart ; et al. | 2010-01-14 |
Lithographic Apparatus Having A Feed Forward Pressure Pulse Compensation For The Metrology Frame
App 20090316129 - Butler; Hans ; et al. | 2009-12-24 |
Lithographic apparatus and device manufacturing method
Grant 7,630,059 - Butler , et al. December 8, 2 | 2009-12-08 |
Lithographic Apparatus And Device Manufacturing Method
App 20090290135 - Lof; Joeri ; et al. | 2009-11-26 |
Stage System Calibration Method, Stage System and Lithographic Apparatus Comprising Such Stage System
App 20090262326 - Butler; Hans ; et al. | 2009-10-22 |
Positioning System, Lithographic Apparatus and Device Manufacturing Method
App 20090262325 - Butler; Hans ; et al. | 2009-10-22 |
Lithographic apparatus and device manufacturing method
Grant 7,593,092 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method
Grant 7,592,760 - Butler , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method
Grant 7,593,093 - Lof , et al. September 22, 2 | 2009-09-22 |
Damping Arrangement, Active Damping System, Lithographic Apparatus, And Projection Assembly
App 20090207393 - Butler; Hans ; et al. | 2009-08-20 |
Movable Support, Position Control System, Lithographic Apparatus And Method Of Controlling A Position Of An Exchangeable Object
App 20090201477 - BUTLER; Hans | 2009-08-13 |
Lithographic Apparatus
App 20090195763 - Butler; Hans ; et al. | 2009-08-06 |
Combination Of Structure And An Active Damping System, And A Lithographic Apparatus
App 20090180092 - BUTLER; Hans ; et al. | 2009-07-16 |
Lithographic Apparatus Having Acoustic Resonator
App 20090161085 - Butler; Hans ; et al. | 2009-06-25 |
Lithographic Apparatus and Device Manufacturing Method
App 20090147230 - Butler; Hans ; et al. | 2009-06-11 |
Cable connection to decrease the passing on of vibrations from a first object to a second object
Grant 7,538,273 - Butler , et al. May 26, 2 | 2009-05-26 |
Lithographic Apparatus Having An Active Damping Subassembly
App 20090122284 - Butler; Hans ; et al. | 2009-05-14 |
Position Measurement System And Lithographic Apparatus
App 20090115987 - BUTLER; Hans ; et al. | 2009-05-07 |
Lithographic apparatus, and mechanism
Grant 7,525,643 - Butler April 28, 2 | 2009-04-28 |
Lithographic Apparatus and Device Manufacturing Method
App 20090103066 - BUTLER; Hans ; et al. | 2009-04-23 |
Lithographic apparatus and device manufacturing method
Grant 7,518,705 - Verweij , et al. April 14, 2 | 2009-04-14 |
Lithographic apparatus and device manufacturing method
Grant 7,505,114 - Butler March 17, 2 | 2009-03-17 |
Lithographic apparatus having a controlled motor, and motor control system and method
Grant 7,468,589 - Cox , et al. December 23, 2 | 2008-12-23 |
Lithographic apparatus, position quantity controller and control method with feedforward signal
Grant 7,468,782 - Butler December 23, 2 | 2008-12-23 |
Lithographic apparatus and device manufacturing method
App 20080308749 - Butler; Hans | 2008-12-18 |
Pattern alignment method and lithographic apparatus
Grant 7,433,018 - Butler October 7, 2 | 2008-10-07 |
Lithographic apparatus having feedthrough control system
App 20080239264 - Butler; Hans | 2008-10-02 |
Lithographic apparatus and device manufacturing method
Grant 7,420,299 - Butler , et al. September 2, 2 | 2008-09-02 |
Lithographic apparatus and device manufacturing method
Grant 7,382,439 - Butler June 3, 2 | 2008-06-03 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method
App 20080123071 - Van Der Toorn; Jan-Gerard Cornelis ; et al. | 2008-05-29 |
Lithographic apparatus, projection apparatus and device manufacturing method
Grant 7,352,436 - Butler , et al. April 1, 2 | 2008-04-01 |
Method for controlling the position of a movable object, a positioning system, and a lithographic apparatus
Grant 7,352,149 - Butler , et al. April 1, 2 | 2008-04-01 |
Lithographic apparatus and device manufacturing method
App 20080073561 - Butler; Hans ; et al. | 2008-03-27 |
Lithographic apparatus, overlay detector, device manufacturing method, and device manufactured thereby
Grant 7,349,101 - Butler March 25, 2 | 2008-03-25 |
Stage apparatus and lithographic apparatus
Grant 7,348,752 - Butler March 25, 2 | 2008-03-25 |
Stage Apparatus And Lithographic Apparatus
App 20080067967 - Butler; Hans | 2008-03-20 |
Lithographic apparatus and device manufacturing method
App 20080070353 - Verweij; Antonie Hendrik ; et al. | 2008-03-20 |
Lithographic apparatus and device manufacturing method
App 20080062394 - Butler; Hans ; et al. | 2008-03-13 |
Method For Controlling The Position Of A Movable Object, A Positioning System, And A Lithographic Apparatus
App 20080054838 - Butler; Hans ; et al. | 2008-03-06 |
Cable connection, control system for a cable connection, and method to decrease the passing on of vibrations from a first object to a second object via a cable connection
App 20080035372 - Butler; Hans ; et al. | 2008-02-14 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method
Grant 7,330,238 - Van Der Toorn , et al. February 12, 2 | 2008-02-12 |
Lithographic apparatus with planar motor driven support
App 20080024741 - Butler; Hans ; et al. | 2008-01-31 |
Lithographic apparatus and device manufacturing method
App 20080018877 - Butler; Hans ; et al. | 2008-01-24 |
Lithographic apparatus and device manufacturing method
App 20070268471 - Lof; Joeri ; et al. | 2007-11-22 |
Lithographic apparatus and device manufacturing method
App 20070263189 - Butler; Hans ; et al. | 2007-11-15 |
Lithographic apparatus and device manufacturing method
App 20070216882 - Benschop; Jozef Petrus Henricus ; et al. | 2007-09-20 |
Lithographic apparatus, method of controlling a component of a lithographic apparatus and device manufacturing method
App 20070206169 - Butler; Hans | 2007-09-06 |
Lithographic apparatus and device manufacturing method
Grant 7,265,813 - Houkes , et al. September 4, 2 | 2007-09-04 |
Lithographic apparatus and device manufacturing method
Grant 7,256,866 - Cox , et al. August 14, 2 | 2007-08-14 |
Lithographic apparatus having a controlled motor, and motor control system and method
App 20070164697 - Cox; Henrikus Herman Marie ; et al. | 2007-07-19 |
Pattern alignment method and lithographic apparatus
App 20070146669 - Butler; Hans | 2007-06-28 |
Lithographic apparatus and device manufacturing method
App 20070146675 - Butler; Hans | 2007-06-28 |
Lithographic apparatus and device manufacturing method
App 20070132970 - Lof; Joeri ; et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method
App 20070132979 - Lof; Joeri ; et al. | 2007-06-14 |
Measurement method, device manufacturing method and lithographic apparatus
Grant 7,227,614 - Butler , et al. June 5, 2 | 2007-06-05 |
Lithographic apparatus and device manufacturing method
Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
System for controlling a position of a mass
Grant 7,209,219 - Butler April 24, 2 | 2007-04-24 |
Lithographic apparatus and device manufacturing method
Grant 7,199,858 - Lof , et al. April 3, 2 | 2007-04-03 |
Lithographic apparatus, and mechanism
App 20070062398 - Butler; Hans | 2007-03-22 |
Lithographic apparatus with disturbance correction system and device manufacturing method
Grant 7,193,722 - Boogaarts , et al. March 20, 2 | 2007-03-20 |
Wireless signaling in a lithographic apparatus
Grant 7,190,437 - Butler , et al. March 13, 2 | 2007-03-13 |
Lithographic apparatus, projection apparatus and device manufacturing method
App 20060285101 - Butler; Hans ; et al. | 2006-12-21 |
Lithographic apparatus and device manufacturing method
App 20060268247 - Butler; Hans | 2006-11-30 |
Lithographic apparatus, position quantity controller and control method
App 20060238739 - Butler; Hans | 2006-10-26 |
Positioning device and device manufacturing method
Grant 7,126,674 - Butler October 24, 2 | 2006-10-24 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method
App 20060215131 - Van Der Toorn; Jan-Gerard Cornelis ; et al. | 2006-09-28 |
Lithographic apparatus and device manufacturing method with feed-forward focus control
Grant 7,113,256 - Butler , et al. September 26, 2 | 2006-09-26 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,098,990 - Butler August 29, 2 | 2006-08-29 |
Lithographic apparatus, control system and device manufacturing method
Grant 7,084,958 - Butler August 1, 2 | 2006-08-01 |
Lithographic apparatus and device manufacturing method
App 20060139613 - Houkes; Martijn ; et al. | 2006-06-29 |
Support device and lightographic apparatus
App 20060126040 - Butler; Hans ; et al. | 2006-06-15 |
Measurement method, device manufacturing method and lithographic apparatus
App 20060103819 - Butler; Hans ; et al. | 2006-05-18 |
Lithographic apparatus and device manufacturing method
App 20060077364 - Cox; Henrikus Herman Marie ; et al. | 2006-04-13 |
Positioning device and device manufacturing method
App 20050275822 - Butler, Hans | 2005-12-15 |
Lithographic apparatus and device manufacturing method
App 20050264778 - Lof, Joeri ; et al. | 2005-12-01 |
Lithographic apparatus,control system and device manufacturing method
App 20050231699 - Butler, Hans | 2005-10-20 |
Lithographic apparatus and device manufacturing method with feed-forward focus control
App 20050179880 - Butler, Hans ; et al. | 2005-08-18 |
Lithographic apparatus, overlay detector, device manufacturing method, and device manufactured thereby
App 20050140986 - Butler, Hans | 2005-06-30 |
Lithographic apparatus and device manufacturing method
App 20050139790 - Boogaarts, Martinus Godefridus Helena ; et al. | 2005-06-30 |
Wireless signaling in a lithographic apparatus
App 20050140955 - Butler, Hans ; et al. | 2005-06-30 |
Lithographic apparatus and method
Grant 6,912,041 - Butler , et al. June 28, 2 | 2005-06-28 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20050110970 - Butler, Hans | 2005-05-26 |
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, and measurement method
Grant 6,798,497 - Butler September 28, 2 | 2004-09-28 |
System for controlling a position of a mass
App 20040176861 - Butler, Hans | 2004-09-09 |
Lithographic apparatus and device manufacturing method
App 20040160582 - Lof, Joeri ; et al. | 2004-08-19 |
Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured thereby
Grant 6,741,331 - Boonman , et al. May 25, 2 | 2004-05-25 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 6,727,977 - Butler April 27, 2 | 2004-04-27 |
Lithographic apparatus and method
App 20030053035 - Butler, Hans ; et al. | 2003-03-20 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20030043354 - Butler, Hans | 2003-03-06 |
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, and measurement method
App 20030016340 - Butler, Hans | 2003-01-23 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20020167651 - Boonman, Marcus Emile Joannes ; et al. | 2002-11-14 |
Lithographic projection apparatus
Grant 6,373,072 - Butler , et al. April 16, 2 | 2002-04-16 |
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