Brooks Automation, Inc.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Brooks Automation, Inc..The latest application filed is for "substrate transport apparatus".
Company Profile
168.200.200
Trademarks
- Brooks Automation, Inc. - Chelmsford MA US
- Brooks Automation, Inc - Chelmsford MA
- Brooks Automation, Inc. - Clemsford MA
- Brooks Automation, Inc. - Chelsmford MA
- Brooks Automation, Inc. - Chemsford MA US
- Brooks Automation, Inc. -
Trademarks
Patent Activity
| Patent | Date |
|---|---|
| Sealed switched reluctance motor Grant 11,444,521 - Moura , et al. September 13, 2 | 2022-09-13 |
| Substrate transport apparatus Grant 11,426,865 - Gilchrist , et al. August 30, 2 | 2022-08-30 |
| Substrate Transport Apparatus App 20220270903 - CAVENEY; Robert T. | 2022-08-25 |
| Substrate Transport Apparatus App 20220266460 - CAVENEY; Robert T. | 2022-08-25 |
| Transport apparatus Grant 11,420,337 - Gilchrist , et al. August 23, 2 | 2022-08-23 |
| Position feedback for sealed environments Grant 11,404,939 - Moura , et al. August 2, 2 | 2022-08-02 |
| Substrate Processing Apparatus App 20220189816 - TSANG; Vincent W. ; et al. | 2022-06-16 |
| Capping And De-Capping Apparatus And A Method Of Operating Such An Apparatus App 20220177288 - Hovendahl; Lars Weber ; et al. | 2022-06-09 |
| Semiconductor wafer handling and transport Grant 11,352,220 - Caveney June 7, 2 | 2022-06-07 |
| Method And Apparatus For Substrate Transport Apparatus Position Compensation App 20220172973 - MOURA; Jairo T. ; et al. | 2022-06-02 |
| Substrate Processing Apparatus App 20220172972 - CAVENEY; Robert T. ; et al. | 2022-06-02 |
| Substrate Processing Apparatus App 20220161418 - Tsang; Vincent W. ; et al. | 2022-05-26 |
| Method and apparatus for health assessment of a transport apparatus Grant 11,338,437 - Gawlik , et al. May 24, 2 | 2022-05-24 |
| Method And Apparatus For Brushless Electrical Machine Control App 20220155372 - Moura; Jairo T. ; et al. | 2022-05-19 |
| Test tube capping and de-capping apparatus Grant 11,332,354 - Christensen , et al. May 17, 2 | 2022-05-17 |
| Automated Sample Storage System Having Storage Consumable With Sub-optimal Storage Density App 20220128585 - CROQUETTE; Etienne ; et al. | 2022-04-28 |
| Substrate transport apparatus Grant 11,302,564 - Caveney , et al. April 12, 2 | 2022-04-12 |
| Method and apparatus for substrate alignment Grant 11,295,975 - Hansen April 5, 2 | 2022-04-05 |
| Automated Vault Module App 20220099541 - Croquette; Etienne ; et al. | 2022-03-31 |
| Substrate transport apparatus Grant 11,273,558 - Caveney March 15, 2 | 2022-03-15 |
| Substrate transport apparatus Grant 11,276,598 - Caveney March 15, 2 | 2022-03-15 |
| Cryogenic freezer Grant 11,267,649 - Caveney , et al. March 8, 2 | 2022-03-08 |
| Substrate processing apparatus Grant 11,270,904 - Tsang , et al. March 8, 2 | 2022-03-08 |
| Capping and de-capping apparatus and a method of operating such an apparatus Grant 11,267,683 - Hovendahl , et al. March 8, 2 | 2022-03-08 |
| Automated Teach Apparatus For Robotic Systems And Method Therefor App 20220059383 - GRACIANO; Justo ; et al. | 2022-02-24 |
| Dual arm robot Grant 11,253,994 - Kremerman February 22, 2 | 2022-02-22 |
| Method and apparatus for substrate transport apparatus position compensation Grant 11,251,059 - Moura , et al. February 15, 2 | 2022-02-15 |
| Substrate transport apparatus Grant 11,235,935 - Babbs , et al. February 1, 2 | 2022-02-01 |
| Substrate Mapping Apparatus And Method Therefor App 20210407831 - Sunugatov; Radik ; et al. | 2021-12-30 |
| Automated vault module Grant 11,209,344 - Croquette , et al. December 28, 2 | 2021-12-28 |
| Substrate transport apparatus Grant 11,201,073 - Gilchrist December 14, 2 | 2021-12-14 |
| Side opening unified pod Grant 11,201,070 - Babbs , et al. December 14, 2 | 2021-12-14 |
| Substrate processing apparatus Grant 11,195,738 - Caveney , et al. December 7, 2 | 2021-12-07 |
| Substrate processing apparatus Grant 11,192,239 - Tsang , et al. December 7, 2 | 2021-12-07 |
| Automatic Wafer Centering Method And Apparatus App 20210375657 - Krupyshev; Alexander ; et al. | 2021-12-02 |
| Tube sealer Grant 11,179,898 - Reuteler November 23, 2 | 2021-11-23 |
| Method and apparatus for brushless electrical machine control Grant 11,181,582 - Moura , et al. November 23, 2 | 2021-11-23 |
| Automated system for storing, retrieving and managing samples Grant 11,175,298 - Neeper , et al. November 16, 2 | 2021-11-16 |
| Tray Engine and Methods for Transferring Trays to and From Tools and in Sorters App 20210346915 - Bonora; Anthony C. ; et al. | 2021-11-11 |
| Robot embedded vision apparatus Grant 11,164,769 - Moura November 2, 2 | 2021-11-02 |
| Automated sample storage system having storage consumable with sub-optimal storage density Grant 11,162,963 - Croquette , et al. November 2, 2 | 2021-11-02 |
| On The Fly Automatic Wafer Centering Method And Apparatus App 20210305076 - YIN; Bing ; et al. | 2021-09-30 |
| Substrate Transport Apparatus With Independent Accessory Feedthrough App 20210291357 - PLAISTED; Sean E. ; et al. | 2021-09-23 |
| Load Port Module App 20210296142 - Sunugatov; Radik ; et al. | 2021-09-23 |
| Substrate transport Grant 11,121,015 - Babbs , et al. September 14, 2 | 2021-09-14 |
| Load port module Grant 11,121,017 - Hall , et al. September 14, 2 | 2021-09-14 |
| Compact direct drive spindle Grant 11,110,598 - Caveney September 7, 2 | 2021-09-07 |
| Substrate Process Apparatus App 20210265188 - MOURA; Jairo T. ; et al. | 2021-08-26 |
| Substrate Processing Apparatus App 20210257241 - BUSSIERE; Christopher ; et al. | 2021-08-19 |
| Load Port Module App 20210249292 - Sunugatov; Radik ; et al. | 2021-08-12 |
| Automatic wafer centering method and apparatus Grant 11,088,004 - Krupyshev , et al. August 10, 2 | 2021-08-10 |
| End effector with slides for transferring trays Grant 11,077,466 - Bonora , et al. August 3, 2 | 2021-08-03 |
| Substrate Transport Apparatus App 20210229934 - BABBS; Daniel ; et al. | 2021-07-29 |
| Dual Scara Arm App 20210225678 - PIETRANTONIO; Antonio F. ; et al. | 2021-07-22 |
| Transport Apparatus And Adapter Pendant App 20210225685 - ATWOOD; Dana L. ; et al. | 2021-07-22 |
| Vessel Gripper App 20210221007 - White; Stephen | 2021-07-22 |
| Process Apparatus With On-the-fly Substrate Centering App 20210193495 - SHARROCK; Leigh F. | 2021-06-24 |
| Substrate Processing Apparatus App 20210183675 - Krupyshev; Alexander ; et al. | 2021-06-17 |
| Intelligent Condition Monitoring And Fault Diagnostic System For Preventative Maintenance App 20210173390 - HOSEK; Martin ; et al. | 2021-06-10 |
| Load Lock Fast Pump Vent App 20210175096 - HOFMEISTER; Christopher ; et al. | 2021-06-10 |
| Load port module Grant 11,031,265 - Sunugatov , et al. June 8, 2 | 2021-06-08 |
| Substrate transport apparatus with independent accessory feedthrough Grant 11,020,852 - Plaisted , et al. June 1, 2 | 2021-06-01 |
| Method And Apparatus For Health Assessment Of A Transport Apparatus App 20210146545 - GAWLIK; Aaron ; et al. | 2021-05-20 |
| Modular Sample Store App 20210144991 - CAMENISCH; Johann ; et al. | 2021-05-20 |
| Position feedback for self bearing motor Grant 11,002,566 - Hosek , et al. May 11, 2 | 2021-05-11 |
| Tube Sealer App 20210114313 - Reuteler; Beat | 2021-04-22 |
| On the fly automatic wafer centering method and apparatus Grant 10,978,330 - Yin , et al. April 13, 2 | 2021-04-13 |
| Time-optimal trajectories for robotic transfer devices Grant 10,967,511 - Krishnasamy , et al. April 6, 2 | 2021-04-06 |
| Tool Auto-teach Method And Apparatus App 20210098276 - Moura; Jairo T ; et al. | 2021-04-01 |
| Method And Apparatus For Substrate Alignment App 20210082729 - Hansen; Caspar | 2021-03-18 |
| Substrate Transport Apparatus App 20210066105 - Caveney; Robert T. | 2021-03-04 |
| Load port module Grant 10,923,375 - Sunugatov , et al. February 16, 2 | 2021-02-16 |
| Substrate Transport Apparatus App 20210043494 - CAVENEY; Robert T. ; et al. | 2021-02-11 |
| Robot Embedded Vision Apparatus App 20210043484 - MOURA; Jairo Terra | 2021-02-11 |
| Dual Arm Robot App 20210023698 - Caveney; Robert T. ; et al. | 2021-01-28 |
| Semiconductor process transport apparatus comprising an adapter pendant Grant 10,903,107 - Atwood , et al. January 26, 2 | 2021-01-26 |
| Dual scara arm Grant 10,903,104 - Pietrantonio , et al. January 26, 2 | 2021-01-26 |
| Tube sealer Grant 10,875,255 - Reuteler December 29, 2 | 2020-12-29 |
| Process apparatus with on-the-fly substrate centering Grant 10,879,101 - Sharrock December 29, 2 | 2020-12-29 |
| Substrate Process Apparatus App 20200395232 - Krupyshev; Alexander ; et al. | 2020-12-17 |
| Wafer Aligner App 20200388523 - Bonora; Anthony C ; et al. | 2020-12-10 |
| Position Feedback For Sealed Environments App 20200389075 - MOURA; Jairo T. ; et al. | 2020-12-10 |
| Load lock fast pump vent Grant 10,854,478 - Hofmeister , et al. December 1, 2 | 2020-12-01 |
| Intelligent condition monitoring and fault diagnostic system for preventative maintenance Grant 10,845,793 - Hosek , et al. November 24, 2 | 2020-11-24 |
| Method and apparatus for health assessment of a transport apparatus Grant 10,843,341 - Gawlik , et al. November 24, 2 | 2020-11-24 |
| Automated Cryogenic Storage System App 20200361706 - Caveney; Robert T. ; et al. | 2020-11-19 |
| Modular sample store Grant 10,834,918 - Camenisch , et al. November 17, 2 | 2020-11-17 |
| Substrate transport apparatus Grant 10,818,537 - Caveney , et al. October 27, 2 | 2020-10-27 |
| Automated System For Storing, Retrieving And Managing Samples App 20200333364 - Neeper; Robert K. ; et al. | 2020-10-22 |
| Substrate Processing Apparatus App 20200321232 - CAVENEY; Robert T. ; et al. | 2020-10-08 |
| Processing apparatus Grant 10,777,438 - Caveney , et al. Sept | 2020-09-15 |
| Tool auto-teach method and apparatus Grant 10,770,325 - Moura , et al. Sep | 2020-09-08 |
| Method And Apparatus For Substrate Transport Apparatus Position Compensation App 20200273734 - MOURA; Jairo T. ; et al. | 2020-08-27 |
| Sample Tube And Method App 20200271676 - Grimwood; Robin D. ; et al. | 2020-08-27 |
| Wafer aligner Grant 10,755,960 - Bonora , et al. A | 2020-08-25 |
| Substrate transport apparatus with interchangeable motor modules Grant 10,748,799 - Caveney A | 2020-08-18 |
| Method And Apparatus For Brushless Electrical Machine Control App 20200256919 - A1 | 2020-08-13 |
| Automatic handling buffer for bare stocker Grant 10,741,431 - Rebstock A | 2020-08-11 |
| Position feedback for sealed environments Grant 10,742,092 - Moura , et al. A | 2020-08-11 |
| Method and device for compensation for dimensional variations in low temperature sample group holders Grant 10,739,365 - Neeper A | 2020-08-11 |
| Dual arm robot Grant 10,737,381 - Caveney , et al. A | 2020-08-11 |
| Automated system for storing, retrieving and managing samples Grant 10,697,987 - Neeper , et al. | 2020-06-30 |
| Transport Apparatus App 20200180163 - GILCHRIST; Ulysses ; et al. | 2020-06-11 |
| Sample tube and method Grant 10,677,810 - Grimwood , et al. | 2020-06-09 |
| Reduced capacity carrier, transport, load port, buffer system Grant 10,679,882 - Bufano , et al. | 2020-06-09 |
| Load Port Module App 20200168488 - Sunugatov; Radik ; et al. | 2020-05-28 |
| Scalable Motion Control System App 20200166913 - Hosek; Martin ; et al. | 2020-05-28 |
| Load Port Module App 20200168493 - SUNUGATOV; Radik ; et al. | 2020-05-28 |
| Automated cryogenic storage system Grant 10,661,990 - Caveney , et al. | 2020-05-26 |
| Substrate Transport Apparatus App 20200161152 - Caveney; Robert T. ; et al. | 2020-05-21 |
| Substrate Transport App 20200161153 - Babbs; Daniel ; et al. | 2020-05-21 |
| Method and apparatus for substrate transport apparatus position compensation Grant 10,651,067 - Moura , et al. | 2020-05-12 |
| Transport Apparatus With Linear Bearing And Method Therefor App 20200144087 - BABBS; Daniel ; et al. | 2020-05-07 |
| Load Lock Fast Pump Vent App 20200126820 - HOFMEISTER; Christopher ; et al. | 2020-04-23 |
| Substrate Processing Apparatus App 20200122316 - Tsang; Vincent W. ; et al. | 2020-04-23 |
| Substrate handling system for aligning and orienting substrates during a transfer operation Grant 10,615,068 - Coady | 2020-04-07 |
| Sample Storage And Retrieval System App 20200101458 - CROQUETTE; Etienne ; et al. | 2020-04-02 |
| Compact Direct Drive Spindle App 20200101598 - CAVENEY; Robert T. | 2020-04-02 |
| Substrate processing apparatus Grant 10,607,879 - Cavins , et al. | 2020-03-31 |
| Substrate processing apparatus Grant 10,600,665 - Caveney , et al. | 2020-03-24 |
| Automated Sample Storage System Having Storage Consumable With Sub-optimal Storage Density App 20200088753 - CROQUETTE; Etienne ; et al. | 2020-03-19 |
| Integrated systems for interfacing with substrate container storage systems Grant 10,593,583 - Bonora , et al. | 2020-03-17 |
| Vacuum substrate storage Grant 10,586,722 - van der Meulen | 2020-03-10 |
| Sealed Robot Drive App 20200067368 - MOURA; Jairo T. ; et al. | 2020-02-27 |
| Cryogenic Freezer App 20200062501 - Caveney; Robert T. ; et al. | 2020-02-27 |
| Method and apparatus for brushless electrical machine control Grant 10,564,221 - Moura , et al. Feb | 2020-02-18 |
| Transport apparatus Grant 10,556,351 - Gilchrist , et al. Feb | 2020-02-11 |
| Load lock fast pump vent Grant 10,541,157 - Hofmeister , et al. Ja | 2020-01-21 |
| Access arbitration system for semiconductor fabrication equipment and methods for using and operating the same Grant 10,534,356 - Gonzalez , et al. January 14, 2 | 2020-01-14 |
| Substrate Processing Apparatus App 20200002104 - Bussiere; Christopher A. ; et al. | 2020-01-02 |
| Substrate Transport Apparatus With Multiple Movable Arms Utilizing A Mechanical Switch Mechanism App 20200001453 - Hofmeister; Christopher ; et al. | 2020-01-02 |
| Unequal Link Scara Arm App 20200001451 - Caveney; Robert T. ; et al. | 2020-01-02 |
| A Capping And De-Capping Apparatus And A Method Of Operating Such An Apparatus App 20190375619 - Hovendahl; Lars Weber ; et al. | 2019-12-12 |
| Tool Auto-teach Method And Apparatus App 20190371641 - MOURA; Jairo T. ; et al. | 2019-12-05 |
| Sample storage and retrieval system Grant 10,493,457 - Croquette , et al. De | 2019-12-03 |
| Compact direct drive spindle Grant 10,493,620 - Caveney De | 2019-12-03 |
| Test Tube Capping And De-Capping Apparatus App 20190359463 - Christensen; Stig ; et al. | 2019-11-28 |
| Scalable motion control system Grant 10,488,851 - Hosek , et al. Nov | 2019-11-26 |
| Automated sample storage system having storage consumable with sub-optimal storage density Grant 10,481,171 - Croquette , et al. Nov | 2019-11-19 |
| Sealed robot drive Grant 10,468,936 - Moura , et al. No | 2019-11-05 |
| Sealed Switched Reluctance Motor App 20190334422 - MOURA; Jairo T. ; et al. | 2019-10-31 |
| Methods and systems for controlling a semiconductor fabrication process Grant 10,444,749 - Pannese , et al. Oc | 2019-10-15 |
| Workpiece support structures and apparatus for accessing same Grant 10,434,661 - Bonora O | 2019-10-08 |
| Substrate Processing Apparatus App 20190304823 - CAVENEY; Robert T. ; et al. | 2019-10-03 |
| Automated Cryogenic Storage And Retrieval System App 20190293344 - Sun; Lingchen ; et al. | 2019-09-26 |
| Cryogenic freezer Grant 10,421,607 - Caveney , et al. Sept | 2019-09-24 |
| Substrate Transport Apparatus App 20190287833 - BUSSIERE; Christopher A. ; et al. | 2019-09-19 |
| Workpiece handling modules Grant 10,418,261 - Krupyshev , et al. Sept | 2019-09-17 |
| Automated Cryogenic Storage System App 20190276233 - Caveney; Robert T. ; et al. | 2019-09-12 |
| Unequal link SCARA arm Grant 10,406,679 - Caveney , et al. Sept | 2019-09-10 |
| Volumetric measurement Grant 10,393,563 - Lee , et al. A | 2019-08-27 |
| Substrate transport Grant 10,395,959 - Babbs , et al. A | 2019-08-27 |
| Tool auto-teach method and apparatus Grant 10,381,252 - Moura , et al. A | 2019-08-13 |
| Automatic Wafer Centering Method And Apparatus App 20190237351 - KRUPYSHEV; Alexander ; et al. | 2019-08-01 |
| Semiconductor Wafer Handling And Transport App 20190218041 - CAVENEY; Robert T. | 2019-07-18 |
| Sealed switched reluctance motor Grant 10,348,172 - Moura , et al. July 9, 2 | 2019-07-09 |
| Systems And Methods For Warming A Cryogenic Heat Exchanger Array, For Compact And Efficient Refrigeration, And For Adaptive Powe App 20190203984 - Flynn; Kevin P. ; et al. | 2019-07-04 |
| Automated cryogenic storage system Grant 10,336,539 - Caveney , et al. | 2019-07-02 |
| Substrate transport appartatus with multiple movable arms utilizing a mechanical switch mechanism Grant 10,335,945 - Hofmeister , et al. | 2019-07-02 |
| Substrate processing apparatus Grant 10,325,795 - Caveney , et al. | 2019-06-18 |
| Intelligent Condition Monitoring And Fault Diagnostic System For Preventative Maintenance App 20190179298 - HOSEK; Martin ; et al. | 2019-06-13 |
| Substrate Transport Apparatus App 20190172746 - CAVENEY; Robert T. ; et al. | 2019-06-06 |
| Transport Apparatus App 20190160690 - GILCHRIST; Ulysses ; et al. | 2019-05-30 |
| On The Fly Automatic Wafer Centering Method And Apparatus App 20190164800 - YIN; Bing ; et al. | 2019-05-30 |
| Method And Apparatus For Health Assessment Of A Transport Apparatus App 20190143521 - GAWLIK; Aaron ; et al. | 2019-05-16 |
| Helium management control system Grant 10,288,052 - Dresens , et al. | 2019-05-14 |
| System and Method for Cryogenic Cooling App 20190120528 - Bartlett; Allen J. ; et al. | 2019-04-25 |
| Substrate Transport Apparatus With Independent Accessory Feedthrough App 20190105770 - PLAISTED; Sean E. ; et al. | 2019-04-11 |
| Storage stacks Grant 10,251,388 - Reuteler | 2019-04-09 |
| Dual Scara Arm App 20190096726 - Pietrantonio; Antonio F. ; et al. | 2019-03-28 |
| Turn-secure rack Grant 10,239,061 - Weber-Hovendahl , et al. | 2019-03-26 |
| Semiconductor wafer handling and transport Grant 10,239,707 - Caveney | 2019-03-26 |
| Systems and methods for warming a cryogenic heat exchanger array, for compact and efficient refrigeration, and for adaptive power management Grant 10,228,167 - Flynn , et al. | 2019-03-12 |
| Helium Management Control System App 20190063807 - Dumas; Oliver J. ; et al. | 2019-02-28 |
| Dual Arm Robot App 20190054612 - Kremerman; Izya | 2019-02-21 |
| Substrate transport apparatus Grant 10,204,817 - Caveney , et al. Feb | 2019-02-12 |
| Substrate transport apparatus with active edge gripper Grant 10,204,811 - Duhamel , et al. Feb | 2019-02-12 |
| Linear vacuum robot with Z motion and articulated arm Grant 10,204,810 - Hoey , et al. Feb | 2019-02-12 |
| Tool Auto-teach Method And Apparatus App 20190027389 - MOURA; Jairo T. ; et al. | 2019-01-24 |
| Transport Apparatus And Adapter Pendant App 20190019719 - ATWOOD; Dana L ; et al. | 2019-01-17 |
| Drive assembly for robotic conveyor system Grant 10,168,344 - Neeper , et al. J | 2019-01-01 |
| Substrate Transport Apparatus App 20180370024 - Gilchrist; Ulysses ; et al. | 2018-12-27 |
| Linear wafer drive for handling wafers during semiconductor fabrication Grant 10,163,667 - Price , et al. Dec | 2018-12-25 |
| Tray Engine and Methods for Transferring Trays to and from Tools and in Sorters App 20180361433 - Bonora; Anthony C. ; et al. | 2018-12-20 |
| Time-optimal Trajectories For Robotic Transfer Devices App 20180361582 - KRISHNASAMY; Jayaraman ; et al. | 2018-12-20 |
| System and method for cryogenic cooling Grant 10,156,386 - Bartlett , et al. Dec | 2018-12-18 |
| Transport apparatus Grant 10,137,576 - Gilchrist , et al. November 27, 2 | 2018-11-27 |
| Dual scara arm Grant 10,141,214 - Pietrantonio , et al. Nov | 2018-11-27 |
| Substrate transport apparatus Grant 10,134,621 - Caveney , et al. November 20, 2 | 2018-11-20 |
| On the fly automatic wafer centering method and apparatus Grant 10,134,623 - Yin , et al. November 20, 2 | 2018-11-20 |
| Intelligent condition monitoring and fault diagnostic system for preventative maintenance Grant 10,120,374 - Hosek , et al. November 6, 2 | 2018-11-06 |
| Helium management control system Grant 10,113,781 - Dumas , et al. October 30, 2 | 2018-10-30 |
| Method And Apparatus For Substrate Transport App 20180308728 - KRUPYSHEV; Alexander ; et al. | 2018-10-25 |
| Sample selector Grant 10,101,352 - Borodkin , et al. October 16, 2 | 2018-10-16 |
| Wafer tray sorter with door coupled to detector Grant 10,092,929 - Bonora , et al. October 9, 2 | 2018-10-09 |
| Method And Apparatus For Substrate Transport Apparatus Position Compensation App 20180286728 - MOURA; Jairo T. ; et al. | 2018-10-04 |
| Semiconductor manufacturing systems Grant 10,086,511 - van der Meulen October 2, 2 | 2018-10-02 |
| Semiconductor stocker systems and methods Grant 10,090,179 - Rebstock October 2, 2 | 2018-10-02 |
| Side Opening Unified Pod App 20180269094 - Babbs; Daniel ; et al. | 2018-09-20 |
| Substrate transport apparatus Grant 10,065,307 - Gilchrist , et al. September 4, 2 | 2018-09-04 |
| Time-optimal trajectories for robotic transfer devices Grant 10,058,998 - Krishnasamy , et al. August 28, 2 | 2018-08-28 |
| Sealed Robot Drive App 20180233986 - MOURA; Jairo T. ; et al. | 2018-08-16 |
| Load Lock Fast Pump Vent App 20180226280 - HOFMEISTER; Christopher ; et al. | 2018-08-09 |
| Substrate Transport Apparatus App 20180211858 - CAVENEY; Robert T. | 2018-07-26 |
| Dual arm robot Grant 10,029,363 - Kremerman July 24, 2 | 2018-07-24 |
| Automated Vault Module App 20180202908 - Croquette; Etienne ; et al. | 2018-07-19 |
| Tool auto-teach method and apparatus Grant 10,002,781 - Moura , et al. June 19, 2 | 2018-06-19 |
| Workpiece Support Structures and Apparatus for Accessing Same App 20180141219 - Bonora; Anthony C. | 2018-05-24 |
| Semiconductor Wafer Handling And Transport App 20180141762 - CAVENEY; Robert T. | 2018-05-24 |
| Side opening unified pod Grant 9,978,623 - Babbs , et al. May 22, 2 | 2018-05-22 |
| Substrate Processing Apparatus App 20180138066 - CAVENEY; Robert T. ; et al. | 2018-05-17 |
| Load Lock Fast Pump Vent App 20180114708 - HOFMEISTER; Christopher ; et al. | 2018-04-26 |
| Sample Tube And Method App 20180100868 - Grimwood; Robin D. ; et al. | 2018-04-12 |
| Method And Device For Compensation For Dimensional Variations In Low Temperature Sample Group Holders App 20180095099 - NEEPER; Robert K. | 2018-04-05 |
| Integrated Systems For Interfacing With Substrate Container Storage Systems App 20180096873 - Bonora; Anthony C. ; et al. | 2018-04-05 |
| Substrate Processing Apparatus App 20180068881 - CAVINS; Jeffrey A. ; et al. | 2018-03-08 |
| Modular Sample Store App 20180020659 - CAMENISCH; Johann ; et al. | 2018-01-25 |
| Substrate Processing Apparatus App 20180019155 - TSANG; Vincent W. ; et al. | 2018-01-18 |
| Tube Sealer App 20180009173 - Reuteler; Beat | 2018-01-11 |
| Substrate Transport Apparatus App 20180005866 - CAVENEY; Robert T. ; et al. | 2018-01-04 |
| Automated System For Storing, Retrieving And Managing Samples App 20170370955 - Neeper; Robert K. ; et al. | 2017-12-28 |
| Compact Direct Drive Spindle App 20170361459 - CAVENEY; Robert T. | 2017-12-21 |
| Multi-Refrigerator High Speed Cryopump App 20170306939 - Bartlett; Allen J. ; et al. | 2017-10-26 |
| Substrate Handling System For Aligning And Orienting Substrates During A Transfer Operation App 20170301576 - Coady; Matthew W. | 2017-10-19 |
| Dual Arm Robot App 20170282357 - CAVENEY; Robert T. ; et al. | 2017-10-05 |
| High Speed Substrate Aligner Apparatus App 20170236739 - MOURA; Jairo T. ; et al. | 2017-08-17 |
| Sample Selector App 20170227561 - BORODKIN; Mark ; et al. | 2017-08-10 |
| Automated Sample Storage System Having Storage Consumable With Sub-optimal Storage Density App 20170205437 - CROQUETTE; Etienne ; et al. | 2017-07-20 |
| Ventilation Assisted Passive Cell Freezing Device App 20170184479 - Schryver; Brian ; et al. | 2017-06-29 |
| Tray Engine With Slide Attached To An End Effector Base App 20170100750 - Bonora; Anthony C. ; et al. | 2017-04-13 |
| Time-optimal Trajectories For Robotic Transfer Devices App 20170087720 - KRISHNASAMY; Jayaraman ; et al. | 2017-03-30 |
| Process Apparatus With On-the-fly Substrate Centering App 20170084476 - SHARROCK; Leigh F. | 2017-03-23 |
| Substrate Transport Apparatus App 20170040203 - CAVENEY; Robert T. ; et al. | 2017-02-09 |
| On The Fly Automatic Wafer Centering Method And Apparatus App 20170018446 - YIN; Bing ; et al. | 2017-01-19 |
| Cryopump Hybrid Frontal Array App 20170009756 - Wells; Jeffrey A | 2017-01-12 |
| Helium Management Control System App 20170002802 - Dresens; Paul E. ; et al. | 2017-01-05 |
| Substrate Transport Apparatus App 20160325440 - CAVENEY; Robert T. | 2016-11-10 |
| Substrate Processing Apparatus App 20160329234 - Krupyshev; Alexander ; et al. | 2016-11-10 |
| Workpiece Handling Modules App 20160314993 - Krupyshev; Alexander G. ; et al. | 2016-10-27 |
| Recirculation Substrate Container Purging Systems And Methods App 20160296983 - Rebstock; Lutz | 2016-10-13 |
| Automated Cryogenic Storage System App 20160288999 - Caveney; Robert T. ; et al. | 2016-10-06 |
| Processing Apparatus App 20160293467 - CAVENEY; Robert T. ; et al. | 2016-10-06 |
| Cryogenic Freezer App 20160289000 - Caveney; Robert T. ; et al. | 2016-10-06 |
| Substrate Handling System For Aligning And Orienting Substrates During A Transfer Operation App 20160240418 - Coady; Matthew W. | 2016-08-18 |
| Unequal Link Scara Arm App 20160221183 - CAVENEY; Robert T. ; et al. | 2016-08-04 |
| Position Feedback For Sealed Environments App 20160164382 - MOURA; Jairo T. ; et al. | 2016-06-09 |
| Cryopump App 20160146200 - Syssoev; Sergei ; et al. | 2016-05-26 |
| Compact Direct Drive Spindle App 20160136806 - Caveney; Robert T. | 2016-05-19 |
| Tool Auto-teach Method And Apparatus App 20160129586 - MOURA; Jairo T. ; et al. | 2016-05-12 |
| Substrate Processing Apparatus App 20160133493 - Caveney; Robert T. ; et al. | 2016-05-12 |
| Wafer Aligner App 20160126128 - BONORA; Anthony C. ; et al. | 2016-05-05 |
| Reduced Capacity Carrier, Transport, Load Port, Buffer System App 20160111308 - Bufano; Michael L. ; et al. | 2016-04-21 |
| Storage Stacks App 20160095309 - Reuteler; Beat | 2016-04-07 |
| Method And Apparatus For Providing Temperature Control To A Cryopump App 20160069339 - Ball-DiFazio; Doreen J. ; et al. | 2016-03-10 |
| Side Opening Unified Pod App 20160035608 - Babbs; Daniel ; et al. | 2016-02-04 |
| Scalable Motion Control System App 20160018816 - Hosek; Martin ; et al. | 2016-01-21 |
| Dual Scara Arm App 20160020126 - Pietrantonio; Antonio F. ; et al. | 2016-01-21 |
| Intelligent Condition Monitoring And Fault Diagnostic System For Preventative Maintenance App 20150346717 - HOSEK; Martin ; et al. | 2015-12-03 |
| Sample Storage And Retrieval System App 20150273468 - CROQUETTE; Etienne ; et al. | 2015-10-01 |
| Sample Selector App 20150274423 - Borodkin; Mark ; et al. | 2015-10-01 |
| Load Station App 20150249029 - Sharrock; Leigh F. ; et al. | 2015-09-03 |
| Dual Arm Robot App 20150217446 - Kremerman; Izya | 2015-08-06 |
| Stacked Process Modules For A Semiconductor Handling System App 20150221534 - van der Meulen; Peter | 2015-08-06 |
| Portable Cryogenic Workstation App 20150204598 - Affleck; Rhett L. ; et al. | 2015-07-23 |
| Substrate Transport Apparatus App 20150206782 - Caveney; Robert T. ; et al. | 2015-07-23 |
| Method And Apparatus For Brushless Electrical Machine Control App 20150168496 - MOURA; Jairo T. ; et al. | 2015-06-18 |
| Reduced Capacity Carrier And Method Of Use App 20150155192 - Gilchrist; Ulysses ; et al. | 2015-06-04 |
| Substrate Handling System For Aligning And Orienting Substrates During A Transfer Operation App 20150147148 - Coady; Matthew W. | 2015-05-28 |
| Sealed Switched Reluctance Motor App 20150137651 - MOURA; Jairo T. ; et al. | 2015-05-21 |
| Sealed Robot Drive App 20150139770 - MOURA; Jairo T. ; et al. | 2015-05-21 |
| Substrate Transport Apparatus App 20150128749 - Gilchrist; Ulysses | 2015-05-14 |
| Substrate Processing Apparatus App 20150110584 - Gilchrist; Ulysses ; et al. | 2015-04-23 |
| Volumetric Measurement App 20150062332 - Lee; David Charles ; et al. | 2015-03-05 |
| Integrated Systems For Interfacing With Substrate Container Storage Systems App 20150063958 - Bonora; Anthony C. ; et al. | 2015-03-05 |
| Access Arbitration System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same App 20150057764 - Gonzalez; Pablo ; et al. | 2015-02-26 |
| Helium Management Control System App 20150040596 - Dresens; Paul E. ; et al. | 2015-02-12 |
| Port Door Positioning Apparatus and Associated Methods App 20150021230 - Bonora; Anthony C. | 2015-01-22 |
| Substrate Processing Apparatus App 20150013910 - Krupyshev; Alexander ; et al. | 2015-01-15 |
| Process Apparatus With On-the-fly Substrate Centering App 20150010379 - Sharrock; Leigh F. | 2015-01-08 |
| Device And Method For Removing A Peelable Seal App 20140367051 - Neeper; Robert K. ; et al. | 2014-12-18 |
| Load Port Module App 20140369793 - Hall; Daniel A. ; et al. | 2014-12-18 |
| Workpiece Structures and Apparatus for Accessing Same App 20140356107 - Bonora; Anthony C. | 2014-12-04 |
| Elevator-based Tool Loading And Buffering System App 20140341679 - Friedman; Gerald M. ; et al. | 2014-11-20 |
| Transport Apparatus App 20140301818 - Gilchrist; Ulysses ; et al. | 2014-10-09 |
| Substrate Transport Apparatus With Multiple Movable Arms Utilizing A Mechanical Switch Mechanism App 20140294551 - Hofmeister; Christopher ; et al. | 2014-10-02 |
| Method And Apparatus For Tuning An Electrostatic Ion Trap App 20140264068 - Brucker; Gerardo A. ; et al. | 2014-09-18 |
| Semiconductor Wafer Handling And Transport App 20140271083 - Caveney; Robert T. | 2014-09-18 |
| Time-optimal Trajectories For Robotic Transfer Devices App 20140249675 - Krishnasamy; Jayaraman ; et al. | 2014-09-04 |
| Substrate Transport App 20140202921 - Babbs; Daniel ; et al. | 2014-07-24 |
| Wafer Center Finding With Kalman Filter App 20140207284 - Kiley; Christopher C. ; et al. | 2014-07-24 |
| Intelligent Condition Monitoring And Fault Diagnostic System For Preventative Maintenance App 20140201571 - HOSEK; Martin ; et al. | 2014-07-17 |
| Semiconductor Wafer Handling Transport App 20140199138 - van der Meulen; Peter ; et al. | 2014-07-17 |
| Load Lock Chamber App 20140178157 - Hofmeister; Christopher ; et al. | 2014-06-26 |
| Substrate Processing Apparatus App 20140161570 - Hofmeister; Christopher ; et al. | 2014-06-12 |
| Ionization Gauge With Operational Parameters And Geometry Designed For High Pressure Operation App 20140152320 - Brucker; Gerardo A. | 2014-06-05 |
| Systems and Methods for Warming a Cryogenic Heat Exchanger Array, for Compact and Efficient Refrigeration, and for Adaptive Power Management App 20140144165 - Flynn; Kevin P. ; et al. | 2014-05-29 |
| High Speed Substrate Aligner Apparatus App 20140147234 - Moura; Jairo T. ; et al. | 2014-05-29 |
| Helium Management Control System App 20140130527 - Dumas; Oliver J. ; et al. | 2014-05-15 |
| Substrate Transport Apparatus App 20140126987 - Gilchrist; Ulysses ; et al. | 2014-05-08 |
| Substrate Transport Apparatus With Active Edge Gripper App 20140119856 - Duhamel; Michael ; et al. | 2014-05-01 |
Company Registrations
| NCAGE Code | 0KP96 | BROOKS AUTOMATION INC |
| CAGE Code | 0KP96 | BROOKS AUTOMATION INC |
| CAGE Code | 31949 | BROOKS AUTOMATION, INC. CTI CRYOGENICS |
| CAGE Code | 4H4W8 | BROOKS AUTOMATION, INC. POLYCOLD SYSTEMS |
| S.A.M. Registration | 0KP96 [603199688] | BROOKS AUTOMATION INC |
| S.A.M. Registration | 0KP96 [603199688] | BROOKS AUTOMATION INC |
| SEC | 0000933974 | Brooks Automation, Inc. of DELAWARE |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 