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Methods And Systems For Controlling Temperature During Microfeature Workpiece Processing, E.g., Cvd Deposition App 20100282164 - Beaman; Kevin L. ;   et al. | 2010-11-11 |
Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition Grant 7,771,537 - Beaman , et al. August 10, 2 | 2010-08-10 |
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers Grant 7,647,886 - Kubista , et al. January 19, 2 | 2010-01-19 |
Electronic systems Grant 7,528,430 - Chen , et al. May 5, 2 | 2009-05-05 |
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Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces Grant 7,422,635 - Zheng , et al. September 9, 2 | 2008-09-09 |
Capacitor constructions and semiconductor structures Grant 7,405,438 - Chen , et al. July 29, 2 | 2008-07-29 |
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers Grant 7,344,755 - Beaman , et al. March 18, 2 | 2008-03-18 |
Capacitor constructions and rugged silicon-containing surfaces Grant 7,321,148 - Blalock , et al. January 22, 2 | 2008-01-22 |
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces Grant 7,279,398 - Basceri , et al. October 9, 2 | 2007-10-09 |
DRAM cells Grant 7,268,382 - Chen , et al. September 11, 2 | 2007-09-11 |
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition Grant 7,258,892 - Beaman , et al. August 21, 2 | 2007-08-21 |
Methods for treating pluralities of discrete semiconductor substrates Grant 7,247,581 - Doan , et al. July 24, 2 | 2007-07-24 |
Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces Grant 7,235,138 - Zheng , et al. June 26, 2 | 2007-06-26 |
Methods for treating semiconductor substrates Grant 7,220,312 - Doan , et al. May 22, 2 | 2007-05-22 |
Methods for treating pluralities of discrete semiconductor substrates Grant 7,183,208 - Doan , et al. February 27, 2 | 2007-02-27 |
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Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces App 20060213440 - Zheng; Lingyi A. ;   et al. | 2006-09-28 |
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Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers App 20060196538 - Kubista; David J. ;   et al. | 2006-09-07 |
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces App 20060121689 - Basceri; Cem ;   et al. | 2006-06-08 |
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Methods for forming small-scale capacitor structures App 20050164466 - Zheng, Lingyi A. ;   et al. | 2005-07-28 |
Methods of forming rugged semiconductor-containing surfaces Grant 6,916,723 - Chen , et al. July 12, 2 | 2005-07-12 |
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition App 20050126489 - Beaman, Kevin L. ;   et al. | 2005-06-16 |
Methods of forming rugged silicon-containing surfaces Grant 6,887,755 - Blalock , et al. May 3, 2 | 2005-05-03 |
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers App 20050081786 - Kubista, David J. ;   et al. | 2005-04-21 |
Methods of forming deuterated silicon nitride-containing materials Grant 6,881,636 - Weimer , et al. April 19, 2 | 2005-04-19 |
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces App 20050059261 - Basceri, Cem ;   et al. | 2005-03-17 |
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Methods Of Forming Rugged Silicon-containing Surfaces App 20050051826 - Blalock, Guy T. ;   et al. | 2005-03-10 |
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Semiconductor structures, DRAM cells and electronic systems App 20050042824 - Chen, Shenlin ;   et al. | 2005-02-24 |
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers App 20050039680 - Beaman, Kevin L. ;   et al. | 2005-02-24 |
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Apparatuses for treating pluralities of discrete semiconductor substrates; and methods for treating pluralities of discrete semiconductor substrates App 20050009335 - Dean, Trung Tri ;   et al. | 2005-01-13 |
Methods of forming deuterated silicon nitride-containing materials App 20050003680 - Weimer, Ronald A. ;   et al. | 2005-01-06 |
Methods for treating pluralities of discrete semiconductor substrates Grant 6,835,674 - Doan , et al. December 28, 2 | 2004-12-28 |
Method of atomic layer deposition on plural semiconductor substrates simultaneously App 20040235302 - Doan, Trung Tri ;   et al. | 2004-11-25 |
Semiconductor structures, and methods of forming rugged semiconductor-containing surfaces App 20040212048 - Chen, Shenlin ;   et al. | 2004-10-28 |
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Methods for simultaneously depositing layers over pluralities of discrete semiconductor substrate App 20030186515 - Dean, Trung Tri ;   et al. | 2003-10-02 |
Methods For Treating Pluralities of Discrete Semiconductor Substrates App 20030176062 - Doan, Trung Tri ;   et al. | 2003-09-18 |
Methods for treating pluralities of discrete semiconductor substrates App 20030176057 - Doan, Trung Tri ;   et al. | 2003-09-18 |
Apparatuses For Treating Pluralities of Discrete Semiconductor Substrates App 20030176061 - Doan, Trung Tri ;   et al. | 2003-09-18 |
Methods For Treating Pluralities Of Discrete Semiconductor Substrates App 20030176060 - Doan, Trung Tri ;   et al. | 2003-09-18 |
Methods for treating pluralities of discrete semiconductor substrates App 20030176047 - Doan, Trung Tri ;   et al. | 2003-09-18 |
Method of forming DRAM trench capacitor with metal layer over hemispherical grain polysilicon Grant 6,291,289 - Rhodes , et al. September 18, 2 | 2001-09-18 |
Method Of Forming Dram Trench Capacitor With Metal Layer Over Hemispherical Grain Polysilicon App 20010012656 - RHODES, HOWARD E. ;   et al. | 2001-08-09 |
Capacitor Structures App 20010001210 - Rhodes, Howard E. ;   et al. | 2001-05-17 |
Method to form hemi-spherical grain (HSG) silicon Grant 6,121,081 - Thakur , et al. September 19, 2 | 2000-09-19 |
Method to form hemi-spherical grain (HSG) silicon Grant 5,837,580 - Thakur , et al. November 17, 1 | 1998-11-17 |
Method to form hemi-spherical grain (HSG) silicon from amorphous silicon Grant 5,656,531 - Thakur , et al. August 12, 1 | 1997-08-12 |