loadpatents
Patent applications and USPTO patent grants for Boh; Kelvin.The latest application filed is for "shutter disk".
Patent | Date |
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Methods, apparatuses and systems for substrate processing for lowering contact resistance Grant 11,328,929 - Ow , et al. May 10, 2 | 2022-05-10 |
Shutter Disk App 20220028702 - Kang; Zhang ;   et al. | 2022-01-27 |
Shutter disk Grant 11,171,017 - Kang , et al. November 9, 2 | 2021-11-09 |
Lower shield for a substrate processing chamber Grant D931,241 - Babu , et al. September 21, 2 | 2021-09-21 |
Apparatus And Systems For Substrate Processing For Lowering Contact Resistance App 20210233773 - OW; YUEH SHENG ;   et al. | 2021-07-29 |
Methods And Apparatus For Processing A Substrate App 20210140029 - OW; YUEH SHENG ;   et al. | 2021-05-13 |
Inner shield for a substrate processing chamber Grant D913,979 - Babu , et al. March 23, 2 | 2021-03-23 |
Shutter Disk App 20210074552 - Kang; Zhang ;   et al. | 2021-03-11 |
High Conductance Inner Shield For Process Chamber App 20210066050 - Babu; Sarath ;   et al. | 2021-03-04 |
High Conductance Lower Shield For Process Chamber App 20210066051 - Babu; Sarath ;   et al. | 2021-03-04 |
Methods, Apparatuses And Systems For Substrate Processing For Lowering Contact Resistance App 20190341264 - OW; YUEH SHENG ;   et al. | 2019-11-07 |
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