Boh; Kelvin
Patent Applications and Registrations
Patent applications and USPTO patent grants for Boh; Kelvin.The latest application filed is for "shutter disk".
- Boh; Kelvin - Singapore SG
| Patent | Date |
|---|---|
| Methods, apparatuses and systems for substrate processing for lowering contact resistance Grant 11,328,929 - Ow , et al. May 10, 2 | 2022-05-10 |
| Shutter Disk App 20220028702 - Kang; Zhang ; et al. | 2022-01-27 |
| Shutter disk Grant 11,171,017 - Kang , et al. November 9, 2 | 2021-11-09 |
| Lower shield for a substrate processing chamber Grant D931,241 - Babu , et al. September 21, 2 | 2021-09-21 |
| Apparatus And Systems For Substrate Processing For Lowering Contact Resistance App 20210233773 - OW; YUEH SHENG ; et al. | 2021-07-29 |
| Methods And Apparatus For Processing A Substrate App 20210140029 - OW; YUEH SHENG ; et al. | 2021-05-13 |
| Inner shield for a substrate processing chamber Grant D913,979 - Babu , et al. March 23, 2 | 2021-03-23 |
| Shutter Disk App 20210074552 - Kang; Zhang ; et al. | 2021-03-11 |
| High Conductance Inner Shield For Process Chamber App 20210066050 - Babu; Sarath ; et al. | 2021-03-04 |
| High Conductance Lower Shield For Process Chamber App 20210066051 - Babu; Sarath ; et al. | 2021-03-04 |
| Methods, Apparatuses And Systems For Substrate Processing For Lowering Contact Resistance App 20190341264 - OW; YUEH SHENG ; et al. | 2019-11-07 |
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