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Non-bonded Rotatable Targets And Their Methods Of Sputtering
App 20140110245 - Gossman; Robert Dwayne ; et al. | 2014-04-24 |
In-line deposition system and process for deposition of a thin film layer
Grant 8,673,777 - Black , et al. March 18, 2 | 2014-03-18 |
Modular system and process for continuous deposition of a thin film layer on a substrate
Grant 8,597,430 - Pavol , et al. December 3, 2 | 2013-12-03 |
System And Process For Forming Thin Film Photovoltaic Device
App 20130252367 - Black; Russell Weldon ; et al. | 2013-09-26 |
Modular system and process for continuous deposition of a thin film layer on a substrate
Grant 8,481,355 - Pavol , et al. July 9, 2 | 2013-07-09 |
Sputtering cathode having a non-bonded semiconducting target
Grant 8,460,521 - Feldman-Peabody , et al. June 11, 2 | 2013-06-11 |
Vapor deposition apparatus and process for continuous deposition of a thin film layer on a substrate
Grant 8,430,966 - Rathweg , et al. April 30, 2 | 2013-04-30 |
Cool-down system and method for a vapor deposition system
Grant 8,430,963 - Paulman , et al. April 30, 2 | 2013-04-30 |
In-line Deposition System And Process For Deposition Of A Thin Film Layer
App 20130084669 - Black; Russell Weldon ; et al. | 2013-04-04 |
Methods for high-rate sputtering of a compound semiconductor on large area substrates
Grant 8,409,407 - Halloran , et al. April 2, 2 | 2013-04-02 |
Vapor deposition apparatus and process for continuous indirect deposition of a thin film layer on a substrate
Grant 8,361,232 - Black January 29, 2 | 2013-01-29 |
Seal configuration for a system for continuous deposition of a thin film layer on a substrate
Grant 8,361,229 - Reed , et al. January 29, 2 | 2013-01-29 |
Methods of sputtering using a non-bonded semiconducting target
Grant 8,349,144 - Black , et al. January 8, 2 | 2013-01-08 |
Modular System And Process For Continuous Deposition Of A Thin Film Layer On A Substrate
App 20130000555 - PAVOL; MARK JEFFREY ; et al. | 2013-01-03 |
Apparatus for Forming a Conductive Transparent Oxide Film Layer for Use in a Cadmium Telluride Based Thin Film Photovoltaic Device
App 20120298651 - Feldman-Peabody; Scott Daniel ; et al. | 2012-11-29 |
Modular system and process for continuous deposition of a thin film layer on a substrate
Grant 8,247,255 - Pavol , et al. August 21, 2 | 2012-08-21 |
Apparatus and methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
Grant 8,236,601 - Feldman-Peabody , et al. August 7, 2 | 2012-08-07 |
Integrated Deposition Of Thin Film Layers In Cadmium Telluride Based Photovoltaic Module Manufacture
App 20120164784 - Feldman-Peabody; Scott Daniel ; et al. | 2012-06-28 |
Active viewport detection assembly for substrate detection in a vapor detection system
Grant 8,189,198 - Black , et al. May 29, 2 | 2012-05-29 |
Sputtering Cathode Having A Non-bonded Semiconducting Target
App 20120061238 - Feldman-Peabody; Scott Daniel ; et al. | 2012-03-15 |
Non-bonded Rotary Semiconducting Targets And Methods Of Their Sputtering
App 20120048725 - Black; Russell Weldon | 2012-03-01 |
Methods Of Sputtering Using A Non-bonded Semiconducting Target
App 20120048726 - Black; Russell Weldon ; et al. | 2012-03-01 |
Slit Valve For Vacuum Chamber Module
App 20120042828 - Black; Russell Weldon | 2012-02-23 |
Vapor Deposition Apparatus And Process For Continuous Deposition Of A Thin Film Layer On A Substrate
App 20120027921 - Feldman-Peabody; Scott Daniel ; et al. | 2012-02-02 |
Systems And Methods For High-rate Deposition Of Thin Film Layers On Photovoltaic Module Substrates
App 20120024695 - Black; Russell Weldon | 2012-02-02 |
Integrated Gearbox And Rotary Feedthrough System For A Vacuum Chamber Structure
App 20120000426 - Black; Russell Weldon | 2012-01-05 |
Apparatus And Methods Of Forming A Conductive Transparent Oxide Film Layer For Use In A Cadmium Telluride Based Thin Film Photovoltaic Device
App 20120003772 - Feldman-Peabody; Scott Daniel ; et al. | 2012-01-05 |
Vapor Deposition Apparatus And Process For Continuous Indirect Deposition Of A Thin Film Layer On A Substrate
App 20110269256 - Black; Russell Weldon | 2011-11-03 |
Modular System For High-rate Deposition Of Thin Film Layers On Photovoltaic Module Substrates
App 20110263065 - Black; Russell Weldon ; et al. | 2011-10-27 |
Methods For High-rate Sputtering Of A Compound Semiconductor On Large Area Substrates
App 20110259732 - Halloran; Sean Timothy ; et al. | 2011-10-27 |
Seal Configuration For A System For Continuous Deposition Of A Thin Film Layer On A Substrate
App 20110263063 - Reed; Max William ; et al. | 2011-10-27 |
Cool-down System And Method For A Vapor Deposition System
App 20110165325 - PAULMAN; JASON SCOTT ; et al. | 2011-07-07 |
Conveyor Assembly For A Vapor Deposition Apparatus
App 20110139073 - REED; MAX WILLIAM ; et al. | 2011-06-16 |
Active Viewport Detection Assembly For Substrate Detection In A Vapor Detection System
App 20110141473 - BLACK; RUSSELL WELDON ; et al. | 2011-06-16 |
Vapor Deposition Apparatus And Process For Continuous Deposition Of A Thin Film Layer On A Substrate
App 20110143491 - RATHWEG; CHRISTOPHER ; et al. | 2011-06-16 |
Modular System And Process For Continuous Deposition Of A Thin Film Layer On A Substrate
App 20110143481 - PAVOL; MARK JEFFREY ; et al. | 2011-06-16 |
Modular System And Process For Continuous Deposition Of A Thin Film Layer On A Substrate
App 20110143478 - PAVOL; MARK JEFFREY ; et al. | 2011-06-16 |
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