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Method Of Producing A Semiconductor Component And Semiconductor Component App 20220285402 - Meinhold; Dirk ;   et al. | 2022-09-08 |
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device Grant 11,422,151 - Kautzsch , et al. August 23, 2 | 2022-08-23 |
Semiconductor Die With Pressure And Acceleration Sensor Elements App 20220074803 - BIESELT; Steffen ;   et al. | 2022-03-10 |
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process Grant 11,078,072 - Kautzsch , et al. August 3, 2 | 2021-08-03 |
Micro-mechanical sensor and method for manufacturing a micro-electro-mechanical sensor Grant 10,961,116 - Meinhold , et al. March 30, 2 | 2021-03-30 |
Stressed decoupled micro-electro-mechanical system sensor Grant 10,870,575 - Theuss , et al. December 22, 2 | 2020-12-22 |
Micromechanical Sensor And Methods For Producing A Micromechanical Sensor And A Micromechanical Sensor Element App 20200379004 - LANDGRAF; Erhard ;   et al. | 2020-12-03 |
Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element Grant 10,852,319 - Landgraf , et al. December 1, 2 | 2020-12-01 |
Capacitive Microelectromechanical Device And Method For Forming A Capacitive Microelectromechanical Device App 20200300886 - KAUTZSCH; Thoralf ;   et al. | 2020-09-24 |
Microelectromechanical Device, Method For Manufacturing A Microelectromechanical Device, And Method For Manufacturing A System On Chip Using A Cmos Process App 20200290867 - KAUTZSCH; Thoralf ;   et al. | 2020-09-17 |
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process Grant 10,683,203 - Kautzsch , et al. | 2020-06-16 |
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device Grant 10,684,306 - Bieselt , et al. | 2020-06-16 |
Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure Grant 10,580,663 - Kautzsch , et al. | 2020-03-03 |
Integrated semiconductor device and manufacturing method Grant 10,544,037 - Kautzsch , et al. Ja | 2020-01-28 |
Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies Grant 10,539,587 - Kautzsch , et al. Ja | 2020-01-21 |
Stressed Decoupled Micro-electro-mechanical System Sensor App 20200002159 - THEUSS; Horst ;   et al. | 2020-01-02 |
Micro-mechanical Sensor And Method For Manufacturing A Micro-electro-mechanical Sensor App 20190345027 - MEINHOLD; Dirk ;   et al. | 2019-11-14 |
Silicon on nothing devices and methods of formation thereof Grant 10,354,911 - Kautzsch , et al. July 16, 2 | 2019-07-16 |
Emitter and method for manufacturing the same Grant 10,290,805 - Bieselt , et al. | 2019-05-14 |
Micromechanical Sensor And Methods For Producing A Micromechanical Sensor And A Micromechanical Sensor Element App 20190004084 - LANDGRAF; Erhard ;   et al. | 2019-01-03 |
Method for manufacturing an electronic device and method for operating an electronic device Grant 10,170,497 - Kautzsch , et al. J | 2019-01-01 |
Microelectromechanical Device, Method For Manufacturing A Microelectromechanical Device, And Method For Manufacturing A System On Chip Using A Cmos Process App 20180297838 - KAUTZSCH; Thoralf ;   et al. | 2018-10-18 |
Carrier and a method for processing a carrier Grant 10,096,511 - Bieselt October 9, 2 | 2018-10-09 |
Accelerometer With Compatibility To Complementary Metal-oxide-semiconductor Technologies App 20180217178 - KAUTZSCH; Thoralf ;   et al. | 2018-08-02 |
Method For Manufacturing An Electronic Device And Method For Operating An Electronic Device App 20180175069 - Kautzsch; Thoralf ;   et al. | 2018-06-21 |
Integrated Semiconductor Device And Manufacturing Method App 20180155188 - Kautzsch; Thoralf ;   et al. | 2018-06-07 |
Emitter And Method For Manufacturing The Same App 20180159034 - BIESELT; Steffen ;   et al. | 2018-06-07 |
Mechanical stress-decoupling in semiconductor device Grant 9,991,340 - Bieselt , et al. June 5, 2 | 2018-06-05 |
System and method for a comb-drive MEMS device Grant 9,938,133 - Kautzsch , et al. April 10, 2 | 2018-04-10 |
Stress decoupled piezoresistive relative pressure sensor and method for manufacturing the same Grant 9,938,135 - Bieselt April 10, 2 | 2018-04-10 |
Method for manufacturing an electronic device and method for operating an electronic device Grant 9,929,181 - Kautzsch , et al. March 27, 2 | 2018-03-27 |
Microelectromechanical Device And Method For Forming A Microelectromechanical Device Having A Support Structure Holding A Lamella Structure App 20180065846 - Kautzsch; Thoralf ;   et al. | 2018-03-08 |
Integrated semiconductor device and manufacturing method Grant 9,896,329 - Kautzsch , et al. February 20, 2 | 2018-02-20 |
Emitter and method for manufacturing the same Grant 9,887,355 - Bieselt , et al. February 6, 2 | 2018-02-06 |
Stress Decoupled Piezoresistive Relative Pressure Sensor And Method For Manufacturing The Same App 20170369306 - BIESELT; Steffen | 2017-12-28 |
System and Method for a Comb-drive MEMS Device App 20170297895 - Kautzsch; Thoralf ;   et al. | 2017-10-19 |
Silicon on Nothing Devices and Methods of Formation Thereof App 20170287772 - Kautzsch; Thoralf ;   et al. | 2017-10-05 |
Mechanical Stress-decoupling In Semiconductor Device App 20170229537 - Bieselt; Steffen ;   et al. | 2017-08-10 |
Carrier and a method for processing a carrier Grant 9,716,015 - Bieselt July 25, 2 | 2017-07-25 |
Silicon on nothing devices and methods of formation thereof Grant 9,711,393 - Kautzsch , et al. July 18, 2 | 2017-07-18 |
Mechanical stress-decoupling in semiconductor device Grant 9,663,354 - Bieselt , et al. May 30, 2 | 2017-05-30 |
Carrier And A Method For Processing A Carrier App 20170140978 - Bieselt; Steffen | 2017-05-18 |
Carrier and a method for processing a carrier Grant 9,613,878 - Bieselt April 4, 2 | 2017-04-04 |
Method For Manufacturing An Electronic Device And Method For Operating An Electronic Device App 20170092659 - Kautzsch; Thoralf ;   et al. | 2017-03-30 |
Electronic device, a method for manufacturing an electronic device, and a method for operating an electronic device Grant 9,560,765 - Kautzsch , et al. January 31, 2 | 2017-01-31 |
Integrated Semiconductor Device And Manufacturing Method App 20170015546 - Kautzsch; Thoralf ;   et al. | 2017-01-19 |
Capacitive Microelectromechanical Device And Method For Forming A Capacitive Microelectromechanical Device App 20170010301 - BIESELT; Steffen ;   et al. | 2017-01-12 |
Emitter And Method For Manufacturing The Same App 20160308084 - BIESELT; Steffen ;   et al. | 2016-10-20 |
Micromechanical system and method for manufacturing a micromechanical system Grant 9,382,111 - Kautzsch , et al. July 5, 2 | 2016-07-05 |
Systems And Methods For Horizontal Integration Of Acceleration Sensor Structures App 20160185594 - Kautzsch; Thoralf ;   et al. | 2016-06-30 |
Systems and methods for horizontal integration of acceleration sensor structures Grant 9,330,929 - Kautzsch , et al. May 3, 2 | 2016-05-03 |
Carrier And A Method For Processing A Carrier App 20160118270 - Bieselt; Steffen | 2016-04-28 |
Systems And Methods For Horizontal Integration Of Acceleration Sensor Structures App 20160104625 - Kautzsch; Thoralf ;   et al. | 2016-04-14 |
Carrier with hollow chamber and support structure therein Grant 9,263,357 - Bieselt February 16, 2 | 2016-02-16 |
Wafer, a method for processing a wafer, and a method for processing a carrier Grant 9,236,241 - Kautzsch , et al. January 12, 2 | 2016-01-12 |
Micromechanical System And Method For Manufacturing A Micromechanical System App 20150375999 - Kautzsch; Thoralf ;   et al. | 2015-12-31 |
Silicon on Nothing Devices and Methods of Formation Thereof App 20150340268 - Kautzsch; Thoralf ;   et al. | 2015-11-26 |
Mechanical Stress-decoupling In Semiconductor Device App 20150332956 - Bieselt; Steffen ;   et al. | 2015-11-19 |
Wafer, A Method For Processing A Wafer, And A Method For Processing A Carrier App 20150318166 - KAUTZSCH; Thoralf ;   et al. | 2015-11-05 |
Silicon on nothing devices and methods of formation thereof Grant 9,136,328 - Kautzsch , et al. September 15, 2 | 2015-09-15 |
Carrier And A Method For Processing A Carrier App 20150162254 - Bieselt; Steffen | 2015-06-11 |
Electronic Device, A Method For Manufacturing An Electronic Device, And A Method For Operating An Electronic Device App 20150163915 - Kautzsch; Thoralf ;   et al. | 2015-06-11 |
Carrier And A Method For Processing A Carrier App 20150162253 - Bieselt; Steffen | 2015-06-11 |
Silicon on Nothing Devices and Methods of Formation Thereof App 20140097521 - Kautzsch; Thoralf ;   et al. | 2014-04-10 |