Bevan; Malcolm J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Bevan; Malcolm J..The latest application filed is for "film thickness uniformity improvement using edge ring and bias electrode geometry".

Company Profile

3.38.44

Bevan; Malcolm J. - Saratoga CA
BEVAN; Malcolm J. - Santa Clara CA
Bevan; Malcolm J. - Dallas TX
Bevan; Malcolm J. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Gate interface engineering with doped layer Grant 11,456,178 - Hung , et al. September 27, 2	2022-09-27
Film Thickness Uniformity Improvement Using Edge Ring And Bias Electrode Geometry App 20220301920 - LO; Kin Pong ; et al.	2022-09-22
Gate all around I/O engineering Grant 11,450,759 - Hung , et al. September 20, 2	2022-09-20
Film thickness uniformity improvement using edge ring and bias electrode geometry Grant 11,380,575 - Lo , et al. July 5, 2	2022-07-05
Methods For Calibrating An Optical Emission Spectrometer App 20220178747 - LO; Kin Pong ; et al.	2022-06-09
Cap oxidation for FinFET formation Grant 11,271,097 - Hung , et al. March 8, 2	2022-03-08
Film Thickness Uniformity Improvement Using Edge Ring And Bias Electrode Geometry App 20220028656 - LO; Kin Pong ; et al.	2022-01-27
Process Kit With Protective Ceramic Coatings For Hydrogen And Nh3 Plasma Application App 20220013336 - WU; Jian ; et al.	2022-01-13
Gate Interface Engineering With Doped Layer App 20210398814 - Hung; Steven C. H. ; et al.	2021-12-23
Method And Apparatus For Selective Nitridation Process App 20210202702 - ROGERS; Matthew Scott ; et al.	2021-07-01
Cap Oxidation For Finfet Formation App 20210134986 - Hung; Steven C. ; et al.	2021-05-06
Gate All Around I/O Engineering App 20210104617 - Hung; Steven C.H. ; et al.	2021-04-08
Method and Apparatus for Selective Deposition of Dielectric Films App 20210043448 - Li; Ning ; et al.	2021-02-11
Treatments to enhance material structures Grant 10,872,763 - Chu , et al. December 22, 2	2020-12-22
Treatments To Enhance Material Structures App 20200350157 - Chu; David ; et al.	2020-11-05
System and method for mitigating oxide growth in a gate dielectric Grant 10,068,771 - Bevan , et al. September 4, 2	2018-09-04
Method and apparatus for selective nitridation process Grant 10,049,881 - Rogers , et al. August 14, 2	2018-08-14
Method And Apparatus For Selective Deposition Of Dielectric Films App 20180211833 - Li; Ning ; et al.	2018-07-26
System And Method For Mitigating Oxide Growth In A Gate Dielectric App 20180130662 - Bevan; Malcolm J. ; et al.	2018-05-10
System and method for mitigating oxide growth in a gate dielectric Grant 9,892,927 - Bevan , et al. February 13, 2	2018-02-13
System and method for mitigating oxide growth in a gate dielectric Grant 9,779,946 - Bevan , et al. October 3, 2	2017-10-03
System And Method For Mitigating Oxide Growth In A Gate Dielectric App 20170170022 - Bevan; Malcolm J. ; et al.	2017-06-15
System And Method For Mitigating Oxide Growth In A Gate Dielectric App 20170133228 - Bevan; Malcolm J. ; et al.	2017-05-11
System and method for mitigating oxide growth in a gate dielectric Grant 9,576,804 - Bevan , et al. February 21, 2	2017-02-21
System And Method For Mitigating Oxide Growth In A Gate Dielectric App 20160300722 - Bevan; Malcolm J. ; et al.	2016-10-13
System and method for mitigating oxide growth in a gate dielectric Grant 9,396,951 - Bevan , et al. July 19, 2	2016-07-19
System and method for mitigating oxide growth in a gate dielectric Grant 9,368,355 - Bevan , et al. June 14, 2	2016-06-14
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20160155641 - Bevan; Malcolm J. ; et al.	2016-06-02
System and method for mitigating oxide growth in a gate dielectric Grant 9,337,046 - Bevan , et al. May 10, 2	2016-05-10
System and method for mitigating oxide growth in a gate dielectric Grant 9,337,044 - Bevan , et al. May 10, 2	2016-05-10
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20160013082 - Bevan; Malcolm J. ; et al.	2016-01-14
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20160013083 - Bevan; Malcolm J. ; et al.	2016-01-14
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20160013061 - Bevan; Malcolm J. ; et al.	2016-01-14
System and method for mitigating oxide growth in a gate dielectric Grant 9,177,806 - Bevan , et al. November 3, 2	2015-11-03
NH3 containing plasma nitridation of a layer on a substrate Grant 9,054,048 - Liu , et al. June 9, 2	2015-06-09
Method and apparatus for single step selective nitridation Grant 9,023,700 - Ganguly , et al. May 5, 2	2015-05-05
Method And Apparatus For Single Step Selective Nitridation App 20140342543 - GANGULY; Udayan ; et al.	2014-11-20
Apparatus and Method for Conformal Treatment of Dielectric Films Using Inductively Coupled Plasma App 20140302686 - Pan; Heng ; et al.	2014-10-09
Post-Deposition Treatment Methods For Silicon Nitride App 20140273530 - Nguyen; Victor ; et al.	2014-09-18
In situ vapor phase surface activation of SiO.sub.2 Grant 8,778,816 - Sato , et al. July 15, 2	2014-07-15
Method and apparatus for single step selective nitridation Grant 8,748,259 - Ganguly , et al. June 10, 2	2014-06-10
Methods and apparatus for forming nitrogen-containing layers Grant 8,546,273 - Bevan , et al. October 1, 2	2013-10-01
Methods and apparatus for forming nitrogen-containing layers Grant 8,481,433 - Bevan , et al. July 9, 2	2013-07-09
Nh3 Containing Plasma Nitridation Of A Layer On A Substrate App 20130012032 - LIU; WEI ; et al.	2013-01-10
In Situ Vapor Phase Surface Activation Of SiO2 App 20120202357 - Sato; Tatsuya E. ; et al.	2012-08-09
Methods And Apparatus For Forming Nitrogen-containing Layers App 20110281442 - Bevan; Malcolm J. ; et al.	2011-11-17
Method And Apparatus For Single Step Selective Nitridation App 20110217834 - Ganguly; Udayan ; et al.	2011-09-08
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20110120374 - Bevan; Malcolm J. ; et al.	2011-05-26
System and method for mitigating oxide growth in a gate dielectric Grant 7,906,441 - Bevan , et al. March 15, 2	2011-03-15
Methods And Apparatus For Forming Nitrogen-containing Layers App 20100248497 - BEVAN; Malcolm J. ; et al.	2010-09-30
Thermal treatment of nitrided oxide to improve negative bias thermal instability Grant 7,682,988 - Alshareef , et al. March 23, 2	2010-03-23
Methodology for Reducing Post Burn-In Vmin Drift App 20090045472 - Chakravarthi; Srinivasan ; et al.	2009-02-19
Integrated circuits with composite gate dielectric Grant 7,423,326 - Rotondaro , et al. September 9, 2	2008-09-09
Post high voltage gate oxide pattern high-vacuum outgas surface treatment Grant 7,402,524 - Kirkpatrick , et al. July 22, 2	2008-07-22
Dual-gate integrated circuit semiconductor device Grant 7,339,240 - Kirkpatrick , et al. March 4, 2	2008-03-04
System and Method for Mitigating Oxide Growth in a Gate Dielectric App 20080050882 - Bevan; Malcolm J. ; et al.	2008-02-28
Post high voltage gate dielectric pattern plasma surface treatment App 20060183337 - Kirkpatrick; Brian K. ; et al.	2006-08-17
Post high voltage gate dielectric pattern plasma surface treatment Grant 7,049,242 - Kirkpatrick , et al. May 23, 2	2006-05-23
Post high voltage gate oxide pattern high-vacuum outgas surface treatment App 20060084229 - Kirkpatrick; Brian K. ; et al.	2006-04-20
Post high voltage gate oxide pattern high-vacuum outgas surface treatment Grant 7,018,925 - Kirkpatrick , et al. March 28, 2	2006-03-28
Thermal treatment of nitrided oxide to improve negative bias thermal instability App 20060046514 - Alshareef; Husam N. ; et al.	2006-03-02
System and method for mitigating oxide growth in a gate dielectric App 20050221564 - Bevan, Malcolm J. ; et al.	2005-10-06
Gate dielectric and method App 20050205948 - Rotondaro, Antonio L.P. ; et al.	2005-09-22
System and method for mitigating oxide growth in a gate dielectric Grant 6,921,703 - Bevan , et al. July 26, 2	2005-07-26
Gate dielectric and method Grant 6,919,251 - Rotondaro , et al. July 19, 2	2005-07-19
Post high voltage gate oxide pattern high-vacuum outgas surface treatment App 20040266113 - Kirkpatrick, Brian K. ; et al.	2004-12-30
System and method for mitigating oxide growth in a gate dielectric App 20040229475 - Bevan, Malcolm J. ; et al.	2004-11-18
Sidewall processes using alkylsilane precursors for MOS transistor fabrication Grant 6,806,149 - Bu , et al. October 19, 2	2004-10-19
Post high voltage gate dielectric pattern plasma surface treatment App 20040142570 - Kirkpatrick, Brian K. ; et al.	2004-07-22
Sidewall processes using alkylsilane precursors for MOS transistor fabrication App 20040063260 - Bu, Haowen ; et al.	2004-04-01
Gate dielectric and method App 20040023462 - Rotondaro, Antonio L.P. ; et al.	2004-02-05
CVD deposition of M-SION gate dielectrics App 20030111678 - Colombo, Luigi ; et al.	2003-06-19
Economic and low thermal budget spacer nitride process App 20030020111 - Bevan, Malcolm J.	2003-01-30