| Patent | Date |
|---|
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing
App 20220310359 - Savas; Stephen E. ; et al. | 2022-09-29 |
Processing of Semiconductors Using Vaporized Solvents
App 20220223405 - Meng; Shuang ; et al. | 2022-07-14 |
Processing of workpieces with reactive species generated using alkyl halide
Grant 11,387,111 - Yang , et al. July 12, 2 | 2022-07-12 |
Silicon mandrel etch after native oxide punch-through
Grant 11,387,115 - Yan , et al. July 12, 2 | 2022-07-12 |
Workpiece Processing Apparatus with Outer Gas Channel Insert
App 20220208523 - Long; Maolin ; et al. | 2022-06-30 |
Induction Coil Assembly for Plasma Processing Apparatus
App 20220208512 - Long; Maolin ; et al. | 2022-06-30 |
Grid Assembly for Plasma Processing Apparatus
App 20220208514 - Long; Maolin | 2022-06-30 |
Directly Driven Hybrid ICP-CCP Plasma Source
App 20220208518 - Long; Maolin | 2022-06-30 |
Electrostatic Chuck Assembly for Plasma Processing Apparatus
App 20220208591 - Long; Maolin | 2022-06-30 |
Workpiece Support For A Thermal Processing System
App 20220205478 - Sohn; Manuel ; et al. | 2022-06-30 |
Cooled Shield for ICP Source
App 20220208527 - Long; Maolin | 2022-06-30 |
Workpiece Processing Apparatus with Thermal Processing Systems
App 20220208572 - Bremensdorfer; Rolf | 2022-06-30 |
Configurable Faraday Shield
App 20220208529 - Long; Maolin | 2022-06-30 |
Workpiece Processing Apparatus with Gas Showerhead Assembly
App 20220195601 - Yang; Michael ; et al. | 2022-06-23 |
Workpiece Processing Apparatus with Vacuum Anneal Reflector Control
App 20220199376 - Yang; Michael ; et al. | 2022-06-23 |
Workpiece Processing Apparatus with Thermal Processing Systems
App 20220187021 - Sohn; Manuel ; et al. | 2022-06-16 |
Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
App 20220189737 - Hezler; Dieter ; et al. | 2022-06-16 |
Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
App 20220189747 - Desai; Dixit ; et al. | 2022-06-16 |
Enhanced ignition in inductively coupled plasmas for workpiece processing
Grant 11,348,784 - Savas , et al. May 31, 2 | 2022-05-31 |
Plasma processing apparatus having a focus ring adjustment assembly
Grant 11,348,767 - Zucker , et al. May 31, 2 | 2022-05-31 |
Arc Lamp With Forming Gas For Thermal Processing Systems
App 20220165561 - Yang; Michael X. ; et al. | 2022-05-26 |
Systems And Methods For Workpiece Processing Using Neutral Atom Beams
App 20220165614 - Savas; Stephen E. | 2022-05-26 |
Processing of workpieces using ozone gas and hydrogen radicals
Grant 11,315,801 - Zhang , et al. April 26, 2 | 2022-04-26 |
Processing of semiconductors using vaporized solvents
Grant 11,289,323 - Meng , et al. March 29, 2 | 2022-03-29 |
Thermal Processing of Closed Shape Workpieces
App 20220090221 - Bremensdorfer; Rolf ; et al. | 2022-03-24 |
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
App 20220084839 - Zhang; Qi ; et al. | 2022-03-17 |
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
App 20220084792 - Savas; Stephen E. ; et al. | 2022-03-17 |
Spacer etching process
Grant 11,276,560 - Sung , et al. March 15, 2 | 2022-03-15 |
Plasma Strip Tool With Movable Insert
App 20220068611 - Long; Maolin ; et al. | 2022-03-03 |
Carbon containing hardmask removal process using sulfur containing process gas
Grant 11,264,249 - Dai , et al. March 1, 2 | 2022-03-01 |
Rapid Thermal Processing System With Cooling System
App 20220059371 - Sohn; Manuel ; et al. | 2022-02-24 |
Rapid Thermal Processing System With Cooling System
App 20220059363 - Sohn; Manuel ; et al. | 2022-02-24 |
Generation of Hydrogen Reactive Species For Processing of Workpieces
App 20220059321 - Zhang; Qi ; et al. | 2022-02-24 |
Systems and methods for workpiece processing
Grant 11,257,696 - Yang , et al. February 22, 2 | 2022-02-22 |
Gas flow control for millisecond anneal system
Grant 11,255,606 - Pfahler , et al. February 22, 2 | 2022-02-22 |
Methods for processing a workpiece using fluorine radicals
Grant 11,257,680 - Zhang , et al. February 22, 2 | 2022-02-22 |
Silicon oxide selective dry etch process
Grant 11,251,050 - Zhang , et al. February 15, 2 | 2022-02-15 |
Systems and methods for workpiece processing using neutral atom beams
Grant 11,251,075 - Savas February 15, 2 | 2022-02-15 |
Material deposition prevention on a workpiece in a process chamber
Grant 11,251,026 - Cue , et al. February 15, 2 | 2022-02-15 |
Plasma Strip Tool with Multiple Gas Injection
App 20210398775 - Ma; Shawming ; et al. | 2021-12-23 |
Surface Smoothing of Workpieces
App 20210391185 - Zhang; Qi ; et al. | 2021-12-16 |
Plasma strip tool with uniformity control
Grant 11,201,036 - Ma , et al. December 14, 2 | 2021-12-14 |
Low thermal budget annealing
Grant 11,195,732 - Timans December 7, 2 | 2021-12-07 |
Pedestal assembly for plasma processing apparatus
Grant 11,195,704 - Zucker , et al. December 7, 2 | 2021-12-07 |
Thermal processing of closed shape workpieces
Grant 11,193,178 - Bremensdorfer , et al. December 7, 2 | 2021-12-07 |
Spacer open process by dual plasma
Grant 11,195,718 - Sung , et al. December 7, 2 | 2021-12-07 |
Variable mode plasma chamber utilizing tunable plasma potential
Grant 11,189,464 - Savas , et al. November 30, 2 | 2021-11-30 |
Processing of Workpieces Using Ozone Gas and Hydrogen Radicals
App 20210366727 - Zhang; Qi ; et al. | 2021-11-25 |
Selective etch process using hydrofluoric acid and ozone gases
Grant 11,183,397 - Zhang , et al. November 23, 2 | 2021-11-23 |
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
App 20210343541 - Ma; Shawming | 2021-11-04 |
Generation of hydrogen reactive species for processing of workpieces
Grant 11,164,725 - Zhang , et al. November 2, 2 | 2021-11-02 |
Selective deposition using methylation treatment
Grant 11,164,742 - Yang , et al. November 2, 2 | 2021-11-02 |
Processing of workpieces using hydrogen radicals and ozone gas
Grant 11,164,727 - Xie , et al. November 2, 2 | 2021-11-02 |
Nitrogen Injection for ARC Lamps
App 20210307115 - Bremensdorfer; Rolf ; et al. | 2021-09-30 |
Processing of Workpieces Using Flourocarbon Plasma
App 20210305071 - Wang; Shanyu ; et al. | 2021-09-30 |
Air Leak Detection In Plasma Processing Apparatus With Separation Grid
App 20210307151 - Meng; Shuang ; et al. | 2021-09-30 |
Support Structure for Thermal Processing Systems
App 20210272839 - Sohn; Manuel ; et al. | 2021-09-02 |
Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
App 20210272858 - Storek; Michael ; et al. | 2021-09-02 |
Surface smoothing of workpieces
Grant 11,107,695 - Zhang , et al. August 31, 2 | 2021-08-31 |
Method for high aspect ratio photoresist removal in pure reducing plasma
Grant 11,107,693 - Diao , et al. August 31, 2 | 2021-08-31 |
Pre-heat processes for millisecond anneal system
Grant 11,101,142 - Timans August 24, 2 | 2021-08-24 |
Plasma Processing Apparatus and Methods
App 20210257196 - Ma; Shawming ; et al. | 2021-08-19 |
Surface treatment of substrates using passivation layers
Grant 11,094,528 - Gao , et al. August 17, 2 | 2021-08-17 |
Surface treatment of silicon or silicon germanium surfaces using organic radicals
Grant 11,062,910 - Yang , et al. July 13, 2 | 2021-07-13 |
Atomic layer etch process using plasma in conjunction with a rapid thermal activation process
Grant 11,062,912 - Ma July 13, 2 | 2021-07-13 |
Chamber Seasoning to Improve Etch Uniformity by Reducing Chemistry
App 20210202214 - Zhang; Qi ; et al. | 2021-07-01 |
Systems and Methods for Removal of Hardmask
App 20210202231 - Sahay; Jeyta Anand ; et al. | 2021-07-01 |
Methods for tuning plasma potential using variable mode plasma chamber
Grant 11,049,692 - Savas , et al. June 29, 2 | 2021-06-29 |
Systems and Methods for Workpiece Processing
App 20210193489 - Yang; Michael | 2021-06-24 |
Ozone treatment for selective silicon nitride etch over silicon
Grant 11,043,393 - Wang , et al. June 22, 2 | 2021-06-22 |
Air leak detection in plasma processing apparatus with separation grid
Grant 11,039,527 - Meng , et al. June 15, 2 | 2021-06-15 |
Control System For Adaptive Control Of A Thermal Processing System
App 20210132592 - Yang; Michael X. ; et al. | 2021-05-06 |
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
App 20210118694 - Zhang; Qi ; et al. | 2021-04-22 |
Post Etch Defluorination Process
App 20210111017 - Vaniapura; Vijay ; et al. | 2021-04-15 |
Integration of materials removal and surface treatment in semiconductor device fabrication
Grant 10,964,528 - Yang , et al. March 30, 2 | 2021-03-30 |
Nitrogen injection for ARC lamps
Grant 10,966,286 - Bremensdorfer , et al. March 30, 2 | 2021-03-30 |
Chamber wall heating for a millisecond anneal system
Grant 10,957,563 - Janisch , et al. March 23, 2 | 2021-03-23 |
Methods For The Treatment Of Workpieces
App 20210082724 - Xie; Ting ; et al. | 2021-03-18 |
Method for processing a workpiece
Grant 10,950,428 - Xie , et al. March 16, 2 | 2021-03-16 |
Chamber seasoning to improve etch uniformity by reducing chemistry
Grant 10,950,416 - Zhang , et al. March 16, 2 | 2021-03-16 |
Methods For Processing a Workpiece Using Fluorine Radicals
App 20210066085 - Zhang; Qi ; et al. | 2021-03-04 |
Spacer Etching Process
App 20210066047 - Sung; Tsai Wen ; et al. | 2021-03-04 |
Method for Processing a Workpiece
App 20210066074 - Xie; Ting ; et al. | 2021-03-04 |
Silicon Oxide Selective Dry Etch Process
App 20210066088 - Zhang; Qi ; et al. | 2021-03-04 |
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing
App 20210050213 - Savas; Stephen E. ; et al. | 2021-02-18 |
Surface treatment of carbon containing films using organic radicals
Grant 10,910,228 - Yang , et al. February 2, 2 | 2021-02-02 |
Strip process for high aspect ratio structure
Grant 10,901,321 - Vaniapura , et al. January 26, 2 | 2021-01-26 |
Processing Of Workpieces Using Deposition Process And Etch Process
App 20210020445 - Wang; Shanyu ; et al. | 2021-01-21 |
Processing Of Workpieces Using Hydrogen Radicals And Ozone Gas
App 20210020413 - Xie; Ting ; et al. | 2021-01-21 |
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
App 20210020411 - Savas; Stephen E. ; et al. | 2021-01-21 |
Methods For Tuning Plasma Potential Using Variable Mode Plasma Chamber
App 20210020404 - Savas; Stephen E. ; et al. | 2021-01-21 |
Spacer Open Process By Dual Plasma
App 20210005456 - Sung; Tsai Wen ; et al. | 2021-01-07 |
Plasma Processing Apparatus With Post Plasma Gas Injection
App 20210005431 - Ma; Shawming ; et al. | 2021-01-07 |
Features for Improving Process Uniformity in a Millisecond Anneal System
App 20200402811 - Cosceev; Alexandr ; et al. | 2020-12-24 |
Post etch defluorination process
Grant 10,872,761 - Vaniapura , et al. December 22, 2 | 2020-12-22 |
Thermal Processing System With Transmission Switch Plate
App 20200396798 - Yang; Michael X. ; et al. | 2020-12-17 |
Surface Pretreatment Process To Improve Quality Of Oxide Films Produced By Remote Plasma
App 20200373129 - Xie; Ting ; et al. | 2020-11-26 |
Focus Ring Adjustment Assembly Of A System For Processing Workpieces Under Vacuum
App 20200365405 - Zucker; Martin L. ; et al. | 2020-11-19 |
Plasma Processing Apparatus Having A Focus Ring Adjustment Assembly
App 20200365377 - Zucker; Martin L. ; et al. | 2020-11-19 |
Systems And Methods For Transportation Of Replaceable Parts In a Vacuum Processing Apparatus
App 20200365381 - Zucker; Martin L. ; et al. | 2020-11-19 |
End Effectors For Moving Workpieces And Replaceable Parts Within A System For Processing Workpieces Under Vacuum
App 20200361094 - Zucker; Martin L. ; et al. | 2020-11-19 |
Substrate Support in a Millisecond Anneal System
App 20200357671 - Cibere; Joseph | 2020-11-12 |
Hydrogen Assisted Atmospheric Radical Oxidation
App 20200350158 - Yang; Michael X. ; et al. | 2020-11-05 |
Preheat Processes for Millisecond Anneal System
App 20200350217 - Lieberer; Markus ; et al. | 2020-11-05 |
Selective Deposition Using Methylation Treatment
App 20200350161 - Yang; Michael X. ; et al. | 2020-11-05 |
Surface treatment of silicon and carbon containing films by remote plasma with organic precursors
Grant 10,804,109 - Yang , et al. October 13, 2 | 2020-10-13 |
Plasma processing apparatus with post plasma gas injection
Grant 10,790,119 - Ma , et al. September 29, 2 | 2020-09-29 |
Pre-Heat Processes for Millisecond Anneal System
App 20200303206 - Timans; Paul | 2020-09-24 |
Thermal Processing System With Temperature Non-Uniformity Control
App 20200294826 - Yang; Michael X. ; et al. | 2020-09-17 |
Features for improving process uniformity in a millisecond anneal system
Grant 10,770,309 - Cosceev , et al. Sep | 2020-09-08 |
Thermal imaging of heat sources in thermal processing systems
Grant 10,760,976 - Yang Sep | 2020-09-01 |
Gas Supply With Angled Injectors In Plasma Processing Apparatus
App 20200258718A1 - | 2020-08-13 |
Substrate support in a millisecond anneal system
Grant 10,734,262 - Cibere | 2020-08-04 |
Post Plasma Gas Injection In A Separation Grid
App 20200243305A1 - | 2020-07-30 |
Preheat processes for millisecond anneal system
Grant 10,727,140 - Lieberer , et al. | 2020-07-28 |
Ozone Treatment for Selective Silicon Nitride Etch Over Silicon
App 20200234969A1 - | 2020-07-23 |
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
App 20200234983A1 - | 2020-07-23 |
Strip Process for High Aspect Ratio Structure
App 20200218158A1 - | 2020-07-09 |
Silicon Mandrel Etch After Native Oxide Punch-through
App 20200203182A1 - | 2020-06-25 |
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
App 20200203175A1 - | 2020-06-25 |
Surface Smoothing of Workpieces
App 20200203173A1 - | 2020-06-25 |
Silicon oxide selective dry etch process
Grant 10,692,730 - Zhang , et al. | 2020-06-23 |
Carbon Containing Hardmask Removal Process Using Sulfur Containing Process Gas
App 20200194277A1 - | 2020-06-18 |
Integration Of Materials Removal And Surface Treatment In Semiconductor Device Fabrication
App 20200185216A1 - | 2020-06-11 |
Pre-heat processes for millisecond anneal system
Grant 10,679,864 - Timans | 2020-06-09 |
Systems and Methods for Workpiece Processing
App 20200176288A1 - | 2020-06-04 |
Chamber Seasoning to Improve Etch Uniformity by Reducing Chemistry
App 20200161094A1 - | 2020-05-21 |
Systems And Methods For Workpiece Processing
App 20200161162A1 - | 2020-05-21 |
Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask
App 20200135554A1 - | 2020-04-30 |
Ozone for Selective Hydrophilic Surface Treatment
App 20200118813A1 - | 2020-04-16 |
Method for High Aspect Ratio Photoresist Removal in Pure Reducing Plasma
App 20200098576 - Diao; Li ; et al. | 2020-03-26 |
Strip process for high aspect ratio structure
Grant 10,599,039 - Vaniapura , et al. | 2020-03-24 |
Atomic layer etch process using plasma in conjunction with a rapid thermal activation process
Grant 10,580,661 - Ma | 2020-03-03 |
Systems and methods for workpiece processing
Grant 10,580,672 - Yang , et al. | 2020-03-03 |
Method for processing a workpiece using a multi-cycle thermal treatment process
Grant 10,573,532 - Yang , et al. Feb | 2020-02-25 |
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