Beaman; Kevin L.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Beaman; Kevin L..The latest application filed is for "methods for forming small-scale capacitor structures".

Company Profile

0.33.41

Beaman; Kevin L. - Boise ID

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition Grant 8,518,184 - Beaman , et al. August 27, 2	2013-08-27
Methods For Forming Small-scale Capacitor Structures App 20130166057 - Zheng; Lingyi A. ; et al.	2013-06-27
Methods for forming small-scale capacitor structures Grant 8,384,192 - Zheng , et al. February 26, 2	2013-02-26
Methods of forming isolation structures, and methods of forming nonvolatile memory Grant 8,030,170 - Ho , et al. October 4, 2	2011-10-04
Method of forming a structure over a semiconductor substrate Grant 8,017,470 - Beaman , et al. September 13, 2	2011-09-13
Methods For Forming Small-scale Capacitor Structures App 20110163416 - Zheng; Lingyi A. ; et al.	2011-07-07
Methods Of Forming Isolation Structures, And Methods Of Forming Nonvolatile Memory App 20110136319 - Ho; Yunjun ; et al.	2011-06-09
Liner for shallow trench isolation Grant 7,919,829 - Trivedi , et al. April 5, 2	2011-04-05
Methods for forming small-scale capacitor structures Grant 7,906,393 - Zheng , et al. March 15, 2	2011-03-15
Methods And Systems For Controlling Temperature During Microfeature Workpiece Processing, E.g., Cvd Deposition App 20100282164 - Beaman; Kevin L. ; et al.	2010-11-11
Method of forming a structure over a semiconductor substrate App 20100267226 - Beaman; Kevin L. ; et al.	2010-10-21
Method of forming a structure over a semiconductor substrate Grant 7,803,678 - Beaman , et al. September 28, 2	2010-09-28
Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition Grant 7,771,537 - Beaman , et al. August 10, 2	2010-08-10
Methods of forming programmable memory devices Grant 7,651,910 - Beaman , et al. January 26, 2	2010-01-26
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers Grant 7,647,886 - Kubista , et al. January 19, 2	2010-01-19
Methods for forming shallow trench isolation Grant 7,514,366 - Trivedi , et al. April 7, 2	2009-04-07
Semiconductor assemblies, methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates App 20080261388 - Beaman; Kevin L. ; et al.	2008-10-23
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces Grant 7,422,635 - Zheng , et al. September 9, 2	2008-09-09
Method of forming a structure over a semiconductor substrate Grant 7,399,714 - Beaman , et al. July 15, 2	2008-07-15
Methods of forming transistors Grant 7,371,647 - Beaman , et al. May 13, 2	2008-05-13
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers Grant 7,344,755 - Beaman , et al. March 18, 2	2008-03-18
Liner For Shallow Trench Isolation App 20070290293 - Trivedi; Jigish D. ; et al.	2007-12-20
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces Grant 7,279,398 - Basceri , et al. October 9, 2	2007-10-09
Liner for shallow trench isolation Grant 7,271,464 - Trivedi , et al. September 18, 2	2007-09-18
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition Grant 7,258,892 - Beaman , et al. August 21, 2	2007-08-21
Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces Grant 7,235,138 - Zheng , et al. June 26, 2	2007-06-26
Methods For Forming Shallow Trench Isolation App 20070004131 - Trivedi; Jigish D. ; et al.	2007-01-04
Methods of forming capacitors and methods of forming capacitor dielectric layers Grant 7,153,736 - Eppich , et al. December 26, 2	2006-12-26
Methods of forming programmable memory devices App 20060252207 - Beaman; Kevin L. ; et al.	2006-11-09
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces App 20060213440 - Zheng; Lingyi A. ; et al.	2006-09-28
Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition App 20060204649 - Beaman; Kevin L. ; et al.	2006-09-14
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces App 20060205187 - Zheng; Lingyi A. ; et al.	2006-09-14
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers App 20060196538 - Kubista; David J. ; et al.	2006-09-07
Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces App 20060198955 - Zheng; Lingyi A. ; et al.	2006-09-07
Plasma nitridization for adjusting transistor threshold voltage App 20060194452 - Beaman; Kevin L. ; et al.	2006-08-31
Plasma nitridization for adjusting transistor threshold voltage App 20060194446 - Beaman; Kevin L. ; et al.	2006-08-31
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces App 20060121689 - Basceri; Cem ; et al.	2006-06-08
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces Grant 7,056,806 - Basceri , et al. June 6, 2	2006-06-06
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces App 20060115957 - Basceri; Cem ; et al.	2006-06-01
Liner for shallow trench isolation App 20060043521 - Trivedi; Jigish D. ; et al.	2006-03-02
Semiconductor assemblies, methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates App 20060008998 - Beaman; Kevin L. ; et al.	2006-01-12
Methods for forming small-scale capacitor structures App 20050164466 - Zheng, Lingyi A. ; et al.	2005-07-28
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition App 20050126489 - Beaman, Kevin L. ; et al.	2005-06-16
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers App 20050081786 - Kubista, David J. ; et al.	2005-04-21
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces App 20050059261 - Basceri, Cem ; et al.	2005-03-17
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces App 20050045102 - Zheng, Lingyi A. ; et al.	2005-03-03
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers App 20050039680 - Beaman, Kevin L. ; et al.	2005-02-24
Sputtered insulating layer for wordline stacks Grant 6,815,372 - Beaman November 9, 2	2004-11-09
Plasma nitridization for adjusting transistor threshold voltage App 20040183144 - Beaman, Kevin L. ; et al.	2004-09-23
Methods of forming capacitors and methods of forming capacitor dielectric layers App 20040161889 - Eppich, Denise M. ; et al.	2004-08-19
Semiconductor assemblies, methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates App 20040147069 - Beaman, Kevin L. ; et al.	2004-07-29
PD-SOI substrate with suppressed floating body effect and method for its fabrication Grant 6,746,937 - Beaman June 8, 2	2004-06-08
Methods of forming DRAM cells Grant 6,734,062 - Gonzalez , et al. May 11, 2	2004-05-11
Methods of forming capacitors and methods of forming capacitor dielectric layers Grant 6,723,599 - Eppich , et al. April 20, 2	2004-04-20
Sputtered insulating layer for wordline stacks App 20040067629 - Beaman, Kevin L.	2004-04-08
DRAM cell constructions Grant 6,707,090 - Gonzalez , et al. March 16, 2	2004-03-16
Semiconductor assemblies, methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates Grant 6,690,046 - Beaman , et al. February 10, 2	2004-02-10
Methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates Grant 6,686,298 - Beaman , et al. February 3, 2	2004-02-03
Methods of forming programmable memory devices App 20030216000 - Beaman, Kevin L. ; et al.	2003-11-20
PD-SOI substrate with suppressed floating body effect and method for its fabrication App 20030203593 - Beaman, Kevin L.	2003-10-30
DRAM cell constructions Grant 6,639,243 - Gonzalez , et al. October 28, 2	2003-10-28
Sputtered insulating layer for wordline stacks Grant 6,617,262 - Beaman September 9, 2	2003-09-09
DRAM cell constructions App 20030160242 - Gonzalez, Fernando ; et al.	2003-08-28
Methods Of Forming Flash Field Effect Transistor Gates And Non-flash Field Effect Transistor Gates App 20030129801 - Beaman, Kevin L.	2003-07-10
Methods of forming capacitors and methods of forming capacitor dielectric layers App 20030104669 - Eppich, Denise M. ; et al.	2003-06-05
Methods of forming DRAM cells App 20030003655 - Gonzalez, Fernando ; et al.	2003-01-02
PD-SOI substrate with suppressed floating body effect and method for its fabrication Grant 6,437,375 - Beaman August 20, 2	2002-08-20
Sputtered insulating layer for wordline stacks App 20020102863 - Beaman, Kevin L.	2002-08-01
Use of atomic oxidation for fabrication of oxide-nitride-oxide stack for flash memory devices App 20020090783 - Beaman, Kevin L. ; et al.	2002-07-11
Semiconductor assemblies, methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates App 20020074576 - Beaman, Kevin L. ; et al.	2002-06-20
DRAM cell constructions App 20020055225 - Gonzalez, Fernando ; et al.	2002-05-09
PD-SOI substrate with suppressed floating body effect and method for its fabrication App 20010052621 - Beaman, Kevin L.	2001-12-20

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