| Patent | Date |
|---|
Lidar Detection Systems And Methods With High Repetition Rate To Observe Far Objects
App 20220291343 - Zhang; Rui ; et al. | 2022-09-15 |
Fiber-based Transmitter And Receiver Channels Of Light Detection And Ranging Systems
App 20220276355 - Li; Yufeng ; et al. | 2022-09-01 |
Distributed lidar systems
Grant 11,422,234 - Zhang , et al. August 23, 2 | 2022-08-23 |
Lidar Systems And Methods For Focusing On Ranges Of Interest
App 20220244359 - Zhang; Rui ; et al. | 2022-08-04 |
LiDAR detection systems and methods with high repetition rate to observe far objects
Grant 11,391,823 - Zhang , et al. July 19, 2 | 2022-07-19 |
Lidar Systems And Methods For Exercising Precise Control Of A Fiber Laser
App 20220173566 - Zhang; Rui ; et al. | 2022-06-02 |
Multiwavelength Lidar Design
App 20220155449 - Bao; Junwei ; et al. | 2022-05-19 |
Multiwavelength LiDAR design
Grant 11,300,683 - Bao , et al. April 12, 2 | 2022-04-12 |
LiDAR systems and methods for exercising precise control of a fiber laser
Grant 11,289,873 - Zhang , et al. March 29, 2 | 2022-03-29 |
Lidar Systems And Methods That Use A Multi-facet Mirror
App 20220082667 - Ledbetter; Micah ; et al. | 2022-03-17 |
HIGH RESOLUTION LiDAR USING HIGH FREQUENCY PULSE FIRING
App 20210356567 - LI; Yimin ; et al. | 2021-11-18 |
MEMS BEAM STEERING AND FISHEYE RECEIVING LENS FOR LiDAR SYSTEM
App 20210286076 - LI; Yimin ; et al. | 2021-09-16 |
METHOD AND SYSTEM FOR ENCODING AND DECODING LiDAR
App 20210231784 - LI; Yimin ; et al. | 2021-07-29 |
High resolution LiDAR using high frequency pulse firing
Grant 11,054,508 - Li , et al. July 6, 2 | 2021-07-06 |
2D SCANNING HIGH PRECISION LiDAR USING COMBINATION OF ROTATING CONCAVE MIRROR AND BEAM STEERING DEVICES
App 20210156966 - Bao; Junwei ; et al. | 2021-05-27 |
MEMS beam steering and fisheye receiving lens for LiDAR system
Grant 11,009,605 - Li , et al. May 18, 2 | 2021-05-18 |
Method and system for encoding and decoding LiDAR
Grant 10,969,475 - Li , et al. April 6, 2 | 2021-04-06 |
2D scanning high precision LiDAR using combination of rotating concave mirror and beam steering devices
Grant 10,942,257 - Bao , et al. March 9, 2 | 2021-03-09 |
Lidar Systems And Methods For Exercising Precise Control Of A Fiber Laser
App 20200227882 - Zhang; Rui ; et al. | 2020-07-16 |
Lidar Systems And Methods With Beam Steering And Wide Angle Signal Detection
App 20200225330 - Zhang; Rui ; et al. | 2020-07-16 |
Lidar Systems That Use A Multi-facet Mirror
App 20200150247 - Ledbetter; Micah ; et al. | 2020-05-14 |
Apparatus for controlling and operating an autonomous vehicle
Grant 10,635,621 - Shao , et al. | 2020-04-28 |
Lidar Detection Systems And Methods That Use Multi-plane Mirrors
App 20200025881 - Li; Yimin ; et al. | 2020-01-23 |
High Density Lidar Scanning
App 20200026071 - BAO; Junwei ; et al. | 2020-01-23 |
Lidar Systems And Methods For Focusing On Ranges Of Interest
App 20190383911 - Zhang; Rui ; et al. | 2019-12-19 |
Compensation Circuitry For Lidar Receiver Systems And Method Of Use Thereof
App 20190310354 - Li; Yufeng ; et al. | 2019-10-10 |
Lidar Safety Systems And Methods
App 20190277953 - Li; Yufeng ; et al. | 2019-09-12 |
Distributed Lidar Systems
App 20190265339 - ZHANG; Rui ; et al. | 2019-08-29 |
Distributed Lidar Systems
App 20190265334 - ZHANG; Rui ; et al. | 2019-08-29 |
2-dimensional Steering System For Lidar Systems
App 20190265336 - ZHANG; Rui ; et al. | 2019-08-29 |
Multi-wavelength Pulse Steering In Lidar Systems
App 20190265337 - ZHANG; Rui ; et al. | 2019-08-29 |
Lidar Systems With Fiber Optic Coupling
App 20190257926 - Zhang; Rui ; et al. | 2019-08-22 |
Lidar Detection Systems And Methods With High Repetition Rate To Observe Far Objects
App 20190257947 - Zhang; Rui ; et al. | 2019-08-22 |
Receive Path For Lidar System
App 20190257924 - LI; Jim ; et al. | 2019-08-22 |
Lidar Detection Systems And Methods
App 20190212416 - Li; Yimin ; et al. | 2019-07-11 |
Lidar With Large Dynamic Range
App 20190120942 - ZHANG; Rui ; et al. | 2019-04-25 |
MEMS BEAM STEERING AND FISHEYE RECEIVING LENS FOR LiDAR SYSTEM
App 20190025428 - LI; Yimin ; et al. | 2019-01-24 |
Hot-plug capable input and output (IO) subsystem
Grant 10,133,698 - Shao , et al. November 20, 2 | 2018-11-20 |
High Resolution Lidar Using Multi-stage Multi-phase Signal Modulation, Integration, Sampling, And Analysis
App 20180275274 - BAO; Junwei ; et al. | 2018-09-27 |
HIGH RESOLUTION LiDAR USING HIGH FREQUENCY PULSE FIRING
App 20180188357 - LI; Yimin ; et al. | 2018-07-05 |
Multiwavelength Lidar Design
App 20180188371 - BAO; Junwei ; et al. | 2018-07-05 |
METHOD AND SYSTEM FOR ENCODING AND DECODING LiDAR
App 20180188358 - LI; Yimin ; et al. | 2018-07-05 |
2D SCANNING HIGH PRECISION LiDAR USING COMBINATION OF ROTATING CONCAVE MIRROR AND BEAM STEERING DEVICES
App 20180188355 - BAO; Junwei ; et al. | 2018-07-05 |
Apparatus For Controlling And Operating An Autonomous Vehicle
App 20180137076 - SHAO; WESLEY ; et al. | 2018-05-17 |
Spatially resolved optical emission spectroscopy (OES) in plasma processing
Grant 9,970,818 - Bao , et al. May 15, 2 | 2018-05-15 |
Differential acoustic time of flight measurement of temperature of semiconductor substrates
Grant 9,846,088 - Pei , et al. December 19, 2 | 2017-12-19 |
Hot-plug Capable Input And Output (io) Subsystem
App 20170228339 - Shao; Wesley ; et al. | 2017-08-10 |
Accurate and fast neural network training for library-based critical dimension (CD) metrology
Grant 9,607,265 - Jin , et al. March 28, 2 | 2017-03-28 |
Nondestructive inline X-ray metrology with model-based library method
Grant 9,490,183 - Jin , et al. November 8, 2 | 2016-11-08 |
Nondestructive Inline X-ray Metrology With Model-based Library Method
App 20150330915 - JIN; Wen ; et al. | 2015-11-19 |
System for in-situ film stack measurement during etching and etch control method
Grant 9,059,038 - Li , et al. June 16, 2 | 2015-06-16 |
Spatially Resolved Optical Emission Spectroscopy (oes) In Plasma Processing
App 20150124250 - BAO; Junwei ; et al. | 2015-05-07 |
Differential Acoustic Time Of Flight Measurement Of Temperature Of Semiconductor Substrates
App 20150078416 - PEI; Jun ; et al. | 2015-03-19 |
Accurate And Fast Neural Network Training For Library-based Critical Dimension (cd) Metrology
App 20140032463 - Jin; Wen ; et al. | 2014-01-30 |
System For In-situ Film Stack Measurement During Etching And Etch Control Method
App 20140024143 - LI; Shifang ; et al. | 2014-01-23 |
Accurate and fast neural network training for library-based critical dimension (CD) metrology
Grant 8,577,820 - Jin , et al. November 5, 2 | 2013-11-05 |
Wide process range library for metrology
Grant 8,381,140 - Hench , et al. February 19, 2 | 2013-02-19 |
Transforming metrology data from a semiconductor treatment system using multivariate analysis
Grant 8,346,506 - Vuong , et al. January 1, 2 | 2013-01-01 |
Accurate and Fast Neural network Training for Library-Based Critical Dimension (CD) Metrology
App 20120226644 - Jin; Wen ; et al. | 2012-09-06 |
Wide Process Range Library For Metrology
App 20120210289 - Hench; John J. ; et al. | 2012-08-16 |
Transforming Metrology Data From A Semiconductor Treatment System Using Multivariate Analysis
App 20120199287 - Vuong; Vi ; et al. | 2012-08-09 |
Transforming metrology data from a semiconductor treatment system using multivariate analysis
Grant 8,170,833 - Vuong , et al. May 1, 2 | 2012-05-01 |
Optical metrology of structures formed on semiconductor wafers using machine learning systems
Grant 7,831,528 - Doddi , et al. November 9, 2 | 2010-11-09 |
Data flow management in generating profile models used in optical metrology
Grant 7,783,669 - Qiu , et al. August 24, 2 | 2010-08-24 |
Data flow management in generating different signal formats used in optical metrology
Grant 7,765,234 - Qiu , et al. July 27, 2 | 2010-07-27 |
Allocating processing units to processing clusters to generate simulated diffraction signals
Grant 7,765,076 - Erva , et al. July 27, 2 | 2010-07-27 |
Allocating processing units to generate simulated diffraction signals used in optical metrology
Grant 7,742,888 - Erva , et al. June 22, 2 | 2010-06-22 |
Automated process control using optical metrology and a correlation between profile models and key profile shape variables
Grant 7,667,858 - Chard , et al. February 23, 2 | 2010-02-23 |
Optical metrology optimization for repetitive structures
Grant 7,616,325 - Vuong , et al. November 10, 2 | 2009-11-10 |
Library accuracy enhancment and evaluation
Grant 7,617,075 - Li , et al. November 10, 2 | 2009-11-10 |
Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables
Grant 7,596,422 - Chard , et al. September 29, 2 | 2009-09-29 |
Optical metrology model optimization based on goals
Grant 7,588,949 - Vuong , et al. September 15, 2 | 2009-09-15 |
Optical metrology of single features
Grant 7,586,623 - Bischoff , et al. September 8, 2 | 2009-09-08 |
Generation and use of integrated circuit profile-based simulation information
Grant 7,580,823 - Jakatdar , et al. August 25, 2 | 2009-08-25 |
Optical Metrology Of Structures Formed On Semiconductor Wafers Using Machine Learning Systems
App 20090198635 - Doddi; Srinivas ; et al. | 2009-08-06 |
Controlling a fabrication tool using support vector machine
Grant 7,567,352 - Jin , et al. July 28, 2 | 2009-07-28 |
Managing and using metrology data for process and equipment control
Grant 7,526,354 - Madriaga , et al. April 28, 2 | 2009-04-28 |
Optimizing selected variables of an optical metrology system
Grant 7,525,673 - Vuong , et al. April 28, 2 | 2009-04-28 |
Weighting function to enhance measured diffraction signals in optical metrology
Grant 7,523,021 - Vuong , et al. April 21, 2 | 2009-04-21 |
Consecutive measurement of structures formed on a semiconductor wafer using a polarized reflectometer
Grant 7,522,295 - Vuong , et al. April 21, 2 | 2009-04-21 |
Selecting a profile model for use in optical metrology using a machine learning system
Grant 7,523,076 - Drege , et al. April 21, 2 | 2009-04-21 |
Evaluating a profile model to characterize a structure to be examined using optical metrology
Grant 7,518,740 - Chard , et al. April 14, 2 | 2009-04-14 |
Transforming Metrology Data From A Semiconductor Treatment System Using Multivariate Analysis
App 20090094001 - VUONG; Vi ; et al. | 2009-04-09 |
Parallel profile determination in optical metrology
Grant 7,515,283 - Khuong , et al. April 7, 2 | 2009-04-07 |
Modeling and measuring structures with spatially varying properties in optical metrology
Grant 7,515,282 - Li , et al. April 7, 2 | 2009-04-07 |
Optical metrology using a support vector machine with simulated diffraction signal inputs
Grant 7,511,835 - Jin , et al. March 31, 2 | 2009-03-31 |
Model and parameter selection for optical metrology
Grant 7,505,153 - Vuong , et al. March 17, 2 | 2009-03-17 |
Optimizing selected variables of an optical metrology model
Grant 7,495,781 - Vuong , et al. February 24, 2 | 2009-02-24 |
Optical metrology using support vector machine with profile parameter inputs
Grant 7,483,809 - Jin , et al. January 27, 2 | 2009-01-27 |
Selection of wavelengths for integrated circuit optical metrology
Grant 7,474,993 - Doddi , et al. January 6, 2 | 2009-01-06 |
In-die optical metrology
Grant 7,474,420 - Li , et al. January 6, 2 | 2009-01-06 |
Parallel profile determination for an optical metrology system
Grant 7,469,192 - Khuong , et al. December 23, 2 | 2008-12-23 |
Transforming metrology data from a semiconductor treatment system using multivariate analysis
Grant 7,467,064 - Vuong , et al. December 16, 2 | 2008-12-16 |
Optical Metrology Optimization For Repetitive Structures
App 20080285054 - VUONG; Vi ; et al. | 2008-11-20 |
Examining a structure formed on a semiconductor wafer using machine learning systems
Grant 7,453,584 - Li , et al. November 18, 2 | 2008-11-18 |
Generic interface for an optical metrology system
Grant 7,450,232 - Li , et al. November 11, 2 | 2008-11-11 |
Optical Metrology Of Single Features
App 20080259357 - BISCHOFF; Joerg ; et al. | 2008-10-23 |
Optical metrology using support vector machine with profile parameter inputs
App 20080255786 - Jin; Wen ; et al. | 2008-10-16 |
Optical metrology using a support vector machine with simulated diffraction signal inputs
App 20080255801 - Jin; Wen ; et al. | 2008-10-16 |
Controlling A Fabrication Tool Using Support Vector Machine
App 20080252908 - JIN; Wen ; et al. | 2008-10-16 |
Split machine learning systems
Grant 7,421,414 - Liu , et al. September 2, 2 | 2008-09-02 |
Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer
Grant 7,417,750 - Vuong , et al. August 26, 2 | 2008-08-26 |
Optical Metrology Model Optimization For Repetitive Structures
App 20080195342 - LI; Shifang ; et al. | 2008-08-14 |
Automated process control using optical metrology and a correlation between profile models and key profile shape variables
App 20080170241 - Chard; Jeffrey ; et al. | 2008-07-17 |
Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables
App 20080170242 - Chard; Jeffrey ; et al. | 2008-07-17 |
Selecting a hypothetical profile to use in optical metrology
Grant 7,394,554 - Vuong , et al. July 1, 2 | 2008-07-01 |
Model And Parameter Selection For Optical Metrology
App 20080151269 - Vuong; Vi ; et al. | 2008-06-26 |
Optical metrology optimization for repetitive structures
Grant 7,388,677 - Vuong , et al. June 17, 2 | 2008-06-17 |
Optical metrology of single features
Grant 7,379,192 - Bischoff , et al. May 27, 2 | 2008-05-27 |
Allocating processing units to processing clusters to generate simulated diffraction signals
App 20080115140 - Erva; Hemalatha ; et al. | 2008-05-15 |
Controlling a fabrication tool using support vector machine
Grant 7,372,583 - Jin , et al. May 13, 2 | 2008-05-13 |
Consecutive Measurement Of Structures Formed On A Semiconductor Wafer Using An Angle-resolved Spectroscopic Scatterometer
App 20080106729 - Vuong; Vi ; et al. | 2008-05-08 |
Consecutive measurement of structures formed on a semiconductor wafer using a polarized reflectometer
App 20080106728 - Vuong; Vi ; et al. | 2008-05-08 |
Data flow management in generating profile models used in optical metrology
App 20080091724 - Qiu; Hong ; et al. | 2008-04-17 |
Data flow management in generating different signal formats used in optical metrology
App 20080089574 - Qiu; Hong ; et al. | 2008-04-17 |
Optical metrology model optimization for repetitive structures
Grant 7,355,728 - Li , et al. April 8, 2 | 2008-04-08 |
Library Accuracy Enhancment And Evaluation
App 20080071504 - Li; Shifang ; et al. | 2008-03-20 |
Generic Interface For An Optical Metrology System
App 20080037017 - Li; Shifang ; et al. | 2008-02-14 |
Model and parameter selection for optical metrology
Grant 7,330,279 - Vuong , et al. February 12, 2 | 2008-02-12 |
Examining A Structure Formed On A Semiconductor Wafer Using Machine Learning Systems
App 20080033683 - LI; Shifang ; et al. | 2008-02-07 |
Allocating processing units to generate simulated diffraction signals used in optical metrology
App 20080027565 - Erva; Hemalatha ; et al. | 2008-01-31 |
Parallel profile determination in optical metrology
App 20080013108 - Khuong; Tri Thanh ; et al. | 2008-01-17 |
Generating a profile model to characterize a structure to be examined using optical metrology
App 20080013107 - Chard; Jeffrey A. ; et al. | 2008-01-17 |
Parallel profile determination for an optical metrology system
App 20080015812 - Khuong; Tri Thanh ; et al. | 2008-01-17 |
Optimizing selected variables of an optical metrology model
App 20080007740 - Vuong; Vi ; et al. | 2008-01-10 |
Managing and using metrology data for process and equipment control
App 20080009081 - Madriaga; Manuel ; et al. | 2008-01-10 |
Evaluating a profile model to characterize a structure to be examined using optical metrology
App 20080007738 - Chard; Jeffrey A. ; et al. | 2008-01-10 |
Optimizing selected variables of an optical metrology system
App 20080007739 - Vuong; Vi ; et al. | 2008-01-10 |
Library accuracy enhancement and evaluation
Grant 7,302,367 - Li , et al. November 27, 2 | 2007-11-27 |
Examining a structure formed on a semiconductor wafer using machine learning systems
Grant 7,280,229 - Li , et al. October 9, 2 | 2007-10-09 |
In-die optical metrology
App 20070229855 - Li; Shifang ; et al. | 2007-10-04 |
Library accuracy enhancement and evaluation
App 20070225940 - Li; Shifang ; et al. | 2007-09-27 |
Optical metrology of a structure formed on a semiconductor wafer using optical pulses
Grant 7,274,465 - Bischoff , et al. September 25, 2 | 2007-09-25 |
Generic interface for an optical metrology system
Grant 7,271,902 - Li , et al. September 18, 2 | 2007-09-18 |
Weighting function to enhance measured diffraction signals in optical metrology
App 20070211260 - Vuong; Vi ; et al. | 2007-09-13 |
Selection of wavelengths for integrated circuit optical metrology
App 20070198211 - Doddi; Srinivas ; et al. | 2007-08-23 |
Transforming metrology data from a semiconductor treatment system using multivariate analysis
App 20070185684 - Vuong; Vi ; et al. | 2007-08-09 |
Optical metrology model optimization based on goals
App 20070135959 - Vuong; Vi ; et al. | 2007-06-14 |
Generation and use of integrated circuit profile-based simulation information
App 20070118349 - Jakatdar; Nickhil ; et al. | 2007-05-24 |
Selection of wavelengths for integrated circuit optical metrology
Grant 7,216,045 - Doddi , et al. May 8, 2 | 2007-05-08 |
Optical metrology model optimization based on goals
Grant 7,171,284 - Vuong , et al. January 30, 2 | 2007-01-30 |
Modeling and measuring structures with spatially varying properties in optical metrology
App 20070002337 - Li; Shifang ; et al. | 2007-01-04 |
Optical metrology model optimization for repetitive structures
App 20060290947 - Li; Shifang ; et al. | 2006-12-28 |
Generation and use of integrated circuit profile-based simulation information
Grant 7,136,796 - Jakatdar , et al. November 14, 2 | 2006-11-14 |
Generic interface for an optical metrology system
App 20060244966 - Li; Shifang ; et al. | 2006-11-02 |
Parametric optimization of optical metrology model
Grant 7,126,700 - Bao , et al. October 24, 2 | 2006-10-24 |
Split machine learning systems
App 20060224528 - Liu; Wei ; et al. | 2006-10-05 |
Selecting unit cell configuration for repeating structures in optical metrology
App 20060187466 - Li; Shifang ; et al. | 2006-08-24 |
Optical metrology of single features
App 20060187468 - Bischoff; Joerg ; et al. | 2006-08-24 |
Optical metrology of a structure formed on a semiconductor wafer using optical pulses
App 20060181713 - Bischoff; Joerg ; et al. | 2006-08-17 |
Generic interface for an optical metrology system
Grant 7,064,829 - Li , et al. June 20, 2 | 2006-06-20 |
Examining a structure formed on a semiconductor wafer using machine learning systems
App 20060119863 - Li; Shifang ; et al. | 2006-06-08 |
Optical metrology of single features
Grant 7,030,999 - Bischoff , et al. April 18, 2 | 2006-04-18 |
Optical metrology model optimization based on goals
App 20060064280 - Vuong; Vi ; et al. | 2006-03-23 |
Optical metrology optimization for repetitive structures
App 20050209816 - Vuong, Vi ; et al. | 2005-09-22 |
Selecting a profile model for use in optical metrology using a machine learining system
App 20050192914 - Drege, Emmanuel ; et al. | 2005-09-01 |
Parametric optimization of optical metrology model
App 20050128489 - Bao, Junwei ; et al. | 2005-06-16 |
Selecting a hypothetical profile to use in optical metrology
App 20050057748 - Vuong, Vi ; et al. | 2005-03-17 |
Metrology hardware adaptation with universal library
Grant 6,853,942 - Drege , et al. February 8, 2 | 2005-02-08 |
Integrated circuit profile value determination
Grant 6,842,261 - Bao , et al. January 11, 2 | 2005-01-11 |
Optical metrology of structures formed on semiconductor wafer using machine learning systems
App 20040267397 - Doddi, Srinivas ; et al. | 2004-12-30 |
System and method for efficient simulation of reflectometry response from two-dimensional grating structures
Grant 6,833,914 - Bao , et al. December 21, 2 | 2004-12-21 |
Optical metrology of single features
App 20040212812 - Bischoff, Joerg ; et al. | 2004-10-28 |
Generic interface for an optical metrology system
App 20040184035 - Li, Shifang ; et al. | 2004-09-23 |
Optical metrology of single features
Grant 6,775,015 - Bischoff , et al. August 10, 2 | 2004-08-10 |
Diffraction order selection for optical metrology simulation
App 20040090629 - Drege, Emmanuel ; et al. | 2004-05-13 |
Metrology hardware specification using a hardware simulator
Grant 6,721,691 - Bao , et al. April 13, 2 | 2004-04-13 |
Integrated circuit profile value determination
App 20040039473 - Bao, Junwei ; et al. | 2004-02-26 |
Model and parameter selection for optical metrology
App 20040017574 - Vuong, Vi ; et al. | 2004-01-29 |
Optical metrology of single features
App 20030232454 - Bischoff, Joerg ; et al. | 2003-12-18 |
Selection of wavelengths for integrated circuit optical metrology
App 20030225535 - Doddi, Srinivas ; et al. | 2003-12-04 |
Combined optical profilometry and projection microscopy of integrated circuit structures
Grant 6,645,824 - Yang , et al. November 11, 2 | 2003-11-11 |
Combined Optical Profilometry And Projection Microscopy Of Integrated Circuit Structures
App 20030203590 - Yang, Wenge ; et al. | 2003-10-30 |
Metrology Hardware Specification Using A Hardware Simulator
App 20030187602 - Bao, Junwei ; et al. | 2003-10-02 |
Metrology hardware adaptation with universal library
App 20030187604 - Drege, Emmanuel ; et al. | 2003-10-02 |
Generation and use of integrated circuit profile-based simulation information
App 20030163295 - Jakatdar, Nickhil ; et al. | 2003-08-28 |
Profile refinement for integrated circuit metrology
Grant 6,609,086 - Bao , et al. August 19, 2 | 2003-08-19 |
System to determine suitability of sion arc surface for DUV resist patterning
Grant 6,597,463 - Singh , et al. July 22, 2 | 2003-07-22 |
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