| Patent | Date |
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Blocker plate for use in a substrate process chamber
Grant 11,421,322 - Yuan , et al. August 23, 2 | 2022-08-23 |
Process kit for a substrate support
Grant 11,387,134 - Mustafa , et al. July 12, 2 | 2022-07-12 |
Method for forming a metal gapfill
Grant 11,355,391 - Cen , et al. June 7, 2 | 2022-06-07 |
Extreme ultraviolet mask with backside coating
Grant 11,249,386 - Jindal , et al. February 15, 2 | 2022-02-15 |
Methods of reducing or eliminating defects in tungsten film
Grant 10,879,081 - Jian , et al. December 29, 2 | 2020-12-29 |
Method For Forming A Metal Gapfill
App 20200303250 - CEN; Xi ; et al. | 2020-09-24 |
Process integration approach of selective tungsten via fill
Grant 10,727,119 - Ren , et al. | 2020-07-28 |
Process kit design for in-chamber heater and wafer rotating mechanism
Grant 10,704,147 - Rasheed , et al. | 2020-07-07 |
Extreme Ultraviolet Mask With Backside Coating
App 20200133114 - Jindal; Vibhu ; et al. | 2020-04-30 |
Methods for depositing semiconductor films
Grant 10,535,527 - Xu , et al. Ja | 2020-01-14 |
In-Situ Pre-Clean For Selectivity Improvement For Selective Deposition
App 20190385838 - Wu; Kai ; et al. | 2019-12-19 |
Blocker Plate For Use In A Substrate Process Chamber
App 20190382895 - YUAN; XIAOXIONG ; et al. | 2019-12-19 |
Blocker plate for use in a substrate process chamber
Grant 10,508,339 - Yuan , et al. Dec | 2019-12-17 |
In-situ pre-clean for selectivity improvement for selective deposition
Grant 10,395,916 - Wu , et al. A | 2019-08-27 |
Process Kit For A Substrate Support
App 20190229007 - MUSTAFA; MUHANNAD ; et al. | 2019-07-25 |
Methods Of Reducing Or Eliminating Defects In Tungsten Film
App 20190157102 - JIAN; GUOQIANG ; et al. | 2019-05-23 |
Process Integration Approach Of Selective Tungsten Via Fill
App 20190157145 - REN; He ; et al. | 2019-05-23 |
Substrate processing apparatus and methods
Grant 10,256,076 - Toh , et al. | 2019-04-09 |
Process integration approach of selective tungsten via fill
Grant 10,256,144 - Ren , et al. | 2019-04-09 |
Methods And Apparatus For Depositing Tungsten Nucleation Layers
App 20190017165 - Wu; Kai ; et al. | 2019-01-17 |
Methods For Depositing Semiconductor Films
App 20190019684 - Xu; Yi ; et al. | 2019-01-17 |
Blocker Plate For Use In A Substrate Process Chamber
App 20180347043 - YUAN; XIAOXIONG ; et al. | 2018-12-06 |
Process Integration Approach Of Selective Tungsten Via Fill
App 20180315650 - REN; He ; et al. | 2018-11-01 |
Process Kit Design For In-chamber Heater And Wafer Rotating Mechanism
App 20180155838 - RASHEED; Muhammad M. ; et al. | 2018-06-07 |
Methods To Selectively Deposit Corrosion-Free Metal Contacts
App 20180145034 - Xu; Yi ; et al. | 2018-05-24 |
Electromigration Improvement Using Tungsten For Selective Cobalt Deposition On Copper Surfaces
App 20180144973 - Ye; Weifeng ; et al. | 2018-05-24 |
Methods for forming low-resistance contacts through integrated process flow systems
Grant 9,947,578 - Lei , et al. April 17, 2 | 2018-04-17 |
In-Situ Pre-Clean For Selectivity Improvement For Selective Deposition
App 20180076020 - Wu; Kai ; et al. | 2018-03-15 |
Methods For Forming Low-resistance Contacts Through Integrated Process Flow Systems
App 20170148670 - LEI; YU ; et al. | 2017-05-25 |
Substrate Processing Apparatus And Methods
App 20170117118 - TOH; Shi Wei ; et al. | 2017-04-27 |
Methods for etching via atomic layer deposition (ALD) cycles
Grant 9,595,466 - Fu , et al. March 14, 2 | 2017-03-14 |
Methods Of Etchback Profile Tuning
App 20160300731 - WU; KAI ; et al. | 2016-10-13 |
Methods For Etching Via Atomic Layer Deposition (ald) Cycles
App 20160276214 - FU; Xinyu ; et al. | 2016-09-22 |
Method for Brokering Purchases of Procedural Services
App 20140304021 - Banthia; Vikash ; et al. | 2014-10-09 |
Method for Brokering Purchases of Procedural Services
App 20130297329 - Banthia; Vikash ; et al. | 2013-11-07 |
Methods Of Thin Film Process
App 20110151676 - Ingle; Nitin K. ; et al. | 2011-06-23 |
Methods of thin film process
Grant 7,939,422 - Ingle , et al. May 10, 2 | 2011-05-10 |
Multi-step anneal of thin films for film densification and improved gap-fill
Grant 7,642,171 - Ingle , et al. January 5, 2 | 2010-01-05 |
Gap-fill depositions in the formation of silicon containing dielectric materials
Grant 7,456,116 - Ingle , et al. November 25, 2 | 2008-11-25 |
Methods Of Thin Film Process
App 20080182382 - Ingle; Nitin K. ; et al. | 2008-07-31 |
Gap-fill Depositions Introducing Hydroxyl-containing Precursors In The Formation Of Silicon Containing Dielectric Materials
App 20080115726 - Ingle; Nitin K. ; et al. | 2008-05-22 |
Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials
Grant 7,335,609 - Ingle , et al. February 26, 2 | 2008-02-26 |
Multi-step Anneal Of Thin Films For Film Densification And Improved Gap-fill
App 20070212847 - Ingle; Nitin K. ; et al. | 2007-09-13 |
Multi-step Anneal Of Thin Films For Film Densification And Improved Gap-fill
App 20070000897 - Ingle; Nitin K. ; et al. | 2007-01-04 |
Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials
App 20060046427 - Ingle; Nitin K. ; et al. | 2006-03-02 |
Multi-step anneal of thin films for film densification and improved gap-fill
App 20060030165 - Ingle; Nitin K. ; et al. | 2006-02-09 |
Gap-fill depositions in the formation of silicon containing dielectric materials
App 20050142895 - Ingle, Nitin K. ; et al. | 2005-06-30 |
Gas flow control in a wafer processing system having multiple chambers for performing same process
Grant 6,843,882 - Janakiraman , et al. January 18, 2 | 2005-01-18 |
Gas flow control in a wafer processing system having multiple chambers for performing same process
App 20040007176 - Janakiraman, Karthik ; et al. | 2004-01-15 |
Detection of contaminants on semiconductor wafers
App 20020006677 - Egermeier, John ; et al. | 2002-01-17 |
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