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Miniature RF and microwave components and methods for fabricating such components Grant 11,145,947 - Brown , et al. October 12, 2 | 2021-10-12 |
Cantilever microprobes for contacting electronic components Grant 10,788,512 - Chen , et al. September 29, 2 | 2020-09-29 |
Miniature RF and Microwave Components and Methods for Fabricating Such Components App 20200227805 - Brown; Elliott R. ;   et al. | 2020-07-16 |
Cantilever microprobes for contacting electronic components Grant 10,416,192 - Chen , et al. Sept | 2019-09-17 |
Cantilever Microprobes For Contacting Electronic Components App 20190227099 - Chen; Richard T. ;   et al. | 2019-07-25 |
Miniature RF and Microwave Components and Methods for Fabricating Such Components App 20190221911 - Brown; Elliott R. ;   et al. | 2019-07-18 |
Miniature RF and Microwave Components and Methods for Fabricating Such Components App 20180241112 - Brown; Elliott R. ;   et al. | 2018-08-23 |
Miniature RF and Microwave Components and Methods for Fabricating Such Components App 20170263994 - Brown; Elliott R. ;   et al. | 2017-09-14 |
Method for fabricating miniature structures or devices such as RF and microwave components Grant 9,620,834 - Brown , et al. April 11, 2 | 2017-04-11 |
Miniature RF and microwave components and methods for fabricating such components Grant 9,614,266 - Brown , et al. April 4, 2 | 2017-04-04 |
Cantilever Microprobes For Contacting Electronic Components App 20160109481 - Chen; Richard T. ;   et al. | 2016-04-21 |
Miniature RF and Microwave Components and Methods for Fabricating Such Components App 20150311575 - Brown; Elliott R. ;   et al. | 2015-10-29 |
Microprobe Tips and Methods for Making App 20150108002 - Kim; Kieun ;   et al. | 2015-04-23 |
Cantilever Microprobes for Contacting Electronic Components and Methods for Making Such Probes App 20140231264 - Chen; Richard T. ;   et al. | 2014-08-21 |
Formation of silicon sheets by impinging fluid Grant 8,790,460 - Bang July 29, 2 | 2014-07-29 |
Method for Fabricating Miniature Structures or Devices such as RF and Microwave Components App 20140197904 - Brown; Elliott R. ;   et al. | 2014-07-17 |
Methods of creating probe structures from a plurality of planar layers Grant 8,729,916 - Chen , et al. May 20, 2 | 2014-05-20 |
Methods of creating probe structures from a plurality of planar layers Grant 8,723,543 - Chen , et al. May 13, 2 | 2014-05-13 |
Probe devices formed from multiple planar layers of structural material with tip regions formed from one or more intermediate planar layers Grant 8,717,055 - Chen , et al. May 6, 2 | 2014-05-06 |
Method for fabricating miniature structures or devices such as RF and microwave components Grant 8,713,788 - Brown , et al. May 6, 2 | 2014-05-06 |
Methods of creating probe structures from a plurality of planar layers Grant 8,717,054 - Chen , et al. May 6, 2 | 2014-05-06 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20120064227 - Chen; Richard T. ;   et al. | 2012-03-15 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20120061009 - Chen; Richard T. ;   et al. | 2012-03-15 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20120064226 - Chen; Richard T. ;   et al. | 2012-03-15 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20120062260 - Chen; Richard T. ;   et al. | 2012-03-15 |
Miniature RF and Microwave Components and Methods for Fabricating Such Components App 20120007698 - Brown; Elliott R. ;   et al. | 2012-01-12 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20110187398 - Chen; Richard T. ;   et al. | 2011-08-04 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20110187397 - Chen; Richard T. ;   et al. | 2011-08-04 |
Miniature RF and Microwave Components and Methods for Fabricating Such Components App 20110080236 - Brown; Elliott R. ;   et al. | 2011-04-07 |
Probe arrays and method for making Grant 7,878,385 - Kumar , et al. February 1, 2 | 2011-02-01 |
MEMS device with two axes comb drive actuators Grant 7,872,394 - Gritters , et al. January 18, 2 | 2011-01-18 |
Formation Of Silicon Sheets By Impinging Fluid App 20100288186 - Bang; Christopher A. | 2010-11-18 |
Miniature RF and microwave components and methods for fabricating such components Grant 7,830,228 - Brown , et al. November 9, 2 | 2010-11-09 |
Monolithic structures including alignment and/or retention fixtures for accepting components Grant 7,811,427 - Cohen , et al. October 12, 2 | 2010-10-12 |
Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns App 20100213068 - Bang; Christopher A. | 2010-08-26 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20100176834 - Chen; Richard T. ;   et al. | 2010-07-15 |
Microprobe Tips and Methods for Making App 20100155253 - Kim; Kieun ;   et al. | 2010-06-24 |
Complex Microdevices and Apparatus and Methods for Fabricating Such Devices App 20100133952 - Bang; Christopher A. ;   et al. | 2010-06-03 |
Electrochemically Fabricated Hermetically Sealed Microstructures and Methods of and Apparatus for Producing Such Structures App 20100133109 - Cohen; Adam L. ;   et al. | 2010-06-03 |
Electrochemically Fabricated Microprobes App 20100134131 - Chen; Richard T. ;   et al. | 2010-06-03 |
Fabrication Process for Co-Fabricating a Multilayer Probe Array and a Space Transformer App 20100136851 - Cohen; Adam L. ;   et al. | 2010-06-03 |
Cantilever microprobes for contacting electronic components and methods for making such probes Grant 7,679,388 - Chen , et al. March 16, 2 | 2010-03-16 |
Electrochemical Fabrication Method for Producing Compliant Beam-Like Structures App 20100006443 - Cohen; Adam L. ;   et al. | 2010-01-14 |
Fabrication process for co-fabricating multilayer probe array and a space transformer Grant 7,640,651 - Cohen , et al. January 5, 2 | 2010-01-05 |
Vertical Microprobes for Contacting Electronic Components and Method for Making Such Probes App 20090256583 - Chen; Richard T. ;   et al. | 2009-10-15 |
Cantilever microprobes for contacting electronic components and methods for making such probes Grant 7,557,595 - Chen , et al. July 7, 2 | 2009-07-07 |
Cantilever microprobes for contacting electronic components and methods for making such probes Grant 7,511,523 - Chen , et al. March 31, 2 | 2009-03-31 |
Complex Microdevices and Apparatus and Methods for Fabricating Such Devices App 20090015903 - Bang; Christopher A. ;   et al. | 2009-01-15 |
Miniature RF and Microwave Components and Methods for Fabricating Such Components App 20080246558 - Brown; Elliott R. ;   et al. | 2008-10-09 |
Electrochemically Fabricated Microprobes App 20080211524 - Chen; Richard T. ;   et al. | 2008-09-04 |
Vertical Microprobes for Contacting Electronic Components and Method for Making Such Probes App 20080157793 - Chen; Richard T. ;   et al. | 2008-07-03 |
Complex microdevices and apparatus and methods for fabricating such devices Grant 7,372,616 - Bang , et al. May 13, 2 | 2008-05-13 |
Electrochemically Fabricated Hermetically Sealed Microstructures and Methods of and Apparatus for Producing Such Structures App 20080105558 - Cohen; Adam L. ;   et al. | 2008-05-08 |
Vertical Microprobes for Contacting Electronic Components and Method for Making Such Probes App 20080106280 - Chen; Richard T. ;   et al. | 2008-05-08 |
Probe Arrays and Method for Making App 20080105355 - Kumar; Ananda H. ;   et al. | 2008-05-08 |
Microprobe Tips and Methods for Making App 20080108221 - Kim; Kieun ;   et al. | 2008-05-08 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20080100326 - Chen; Richard T. ;   et al. | 2008-05-01 |
Probe Arrays and Method for Making App 20080093424 - Kumar; Ananda H. ;   et al. | 2008-04-24 |
Monolithic Structures Including Alignment and/or Retention Fixtures for Accepting Components App 20080062638 - Cohen; Adam L. ;   et al. | 2008-03-13 |
Microprobe tips and methods for making Grant 7,273,812 - Kim , et al. September 25, 2 | 2007-09-25 |
Cantilever microprobes for contacting electronic components and methods for making such probes Grant 7,265,562 - Chen , et al. September 4, 2 | 2007-09-04 |
Cantilever microprobes for contacting electronic components and methods for making such probes Grant 7,265,565 - Chen , et al. September 4, 2 | 2007-09-04 |
Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns App 20070199822 - Bang; Christopher A. | 2007-08-30 |
Miniature RF and microwave components and methods for fabricating such components Grant 7,259,640 - Brown , et al. August 21, 2 | 2007-08-21 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20070182427 - Chen; Richard T. ;   et al. | 2007-08-09 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20070170940 - Chen; Richard T. ;   et al. | 2007-07-26 |
Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes App 20070170943 - Chen; Richard T. ;   et al. | 2007-07-26 |
Miniature RF and microwave components and methods for fabricating such components Grant 7,239,219 - Brown , et al. July 3, 2 | 2007-07-03 |
Methods of and apparatus for molding structures using sacrificial metal patterns Grant 7,229,542 - Bang June 12, 2 | 2007-06-12 |
Complex microdevices and apparatus and methods for fabricating such devices Grant 7,185,542 - Bang , et al. March 6, 2 | 2007-03-06 |
Electrochemically fabricated hermetically sealed microstructures and methods of and apparatus for producing such structures App 20070045121 - Cohen; Adam L. ;   et al. | 2007-03-01 |
Vertical microprobes for contacting electronic components and method for making such probes App 20060238209 - Chen; Richard T. ;   et al. | 2006-10-26 |
Microprobe tips and methods for making App 20060112550 - Kim; Kieun ;   et al. | 2006-06-01 |
Probe arrays and method for making App 20060108678 - Kumar; Ananda H. ;   et al. | 2006-05-25 |
Microprobe tips and methods for making App 20060053625 - Kim; Kieun ;   et al. | 2006-03-16 |
Microprobe tips and methods for making App 20060051948 - Kim; Kieun ;   et al. | 2006-03-09 |
Electrochemically fabricated microprobes App 20060006888 - Kruglick; Ezekiel J. J. ;   et al. | 2006-01-12 |
Electrochemical fabrication method for fabricating space transformers or co-fabricating probes and space transformers App 20050223543 - Cohen, Adam L. ;   et al. | 2005-10-13 |
Complex microdevices and apparatus and methods for fabricating such devices App 20050221529 - Bang, Christopher A. ;   et al. | 2005-10-06 |
Cantilever microprobes for contacting electronic components and methods for making such probes App 20050212539 - Chen, Richard T. ;   et al. | 2005-09-29 |
Cantilever microprobes for contacting electronic components and methods for making such probes App 20050189958 - Chen, Richard T. ;   et al. | 2005-09-01 |
Cantilever microprobes for contacting electronic components and methods for making such probes App 20050179458 - Chen, Richard T. ;   et al. | 2005-08-18 |
Electrochemical fabrication method for producing compliant beam-like structures App 20050053849 - Cohen, Adam L. ;   et al. | 2005-03-10 |
Miniature RF and microwave components and methods for fabricating such components App 20040140862 - Brown, Elliott R. ;   et al. | 2004-07-22 |
Monolithic structures including alignment and/or retention fixtures for accepting components App 20040134772 - Cohen, Adam L. ;   et al. | 2004-07-15 |
Methods of and apparatus for molding structures using sacrificial metal patterns App 20030234179 - Bang, Christopher A. | 2003-12-25 |
Miniature RF and microwave components and methods for fabricating such components App 20030222738 - Brown, Elliott R. ;   et al. | 2003-12-04 |
Complex microdevices and apparatus and methods for fabricating such devices App 20030183008 - Bang, Christopher A. ;   et al. | 2003-10-02 |
Double acting crash sensor App 20030018420 - Apanius, Christopher ;   et al. | 2003-01-23 |
Flexible silicon strain gage App 20020179985 - Boggs, Bradley J. ;   et al. | 2002-12-05 |
Flexible silicon strain gage Grant 6,444,487 - Boggs , et al. September 3, 2 | 2002-09-03 |
Capacitive differential pressure sensor with coupled diaphragms Grant 6,431,003 - Stark , et al. August 13, 2 | 2002-08-13 |
Media compatible pressure sensor Grant 6,311,561 - Bang , et al. No | 2001-11-06 |
Superconducting detector and method of making same Grant 5,264,375 - Bang , et al. November 23, 1 | 1993-11-23 |