| Patent | Date |
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Protective Multilayer Coating For Processing Chamber Components
App 20220277936 - BAJAJ; Geetika ; et al. | 2022-09-01 |
Deposition Of Silicon-based Dielectric Films
App 20220270870 - Bajaj; Geetika ; et al. | 2022-08-25 |
Methods For Forming Impurity Free Metal Alloy Films
App 20220267904 - Bajaj; Geetika ; et al. | 2022-08-25 |
Method of forming a fluorinated metal film
Grant 11,390,947 - Deepak , et al. July 19, 2 | 2022-07-19 |
Methods for forming impurity free metal alloy films
Grant 11,359,282 - Bajaj , et al. June 14, 2 | 2022-06-14 |
Methods For Forming Impurity Free Metal Alloy Films
App 20220049353 - Bajaj; Geetika ; et al. | 2022-02-17 |
Ultrathin Conformal Coatings For Electrostatic Dissipation In Semiconductor Process Tools
App 20210100087 - Natu; Gayatri ; et al. | 2021-04-01 |
Ultrathin Conformal Coatings For Electrostatic Dissipation In Semiconductor Process Tools
App 20210100141 - Natu; Gayatri ; et al. | 2021-04-01 |
Methods For Forming A Protective Coating On Processing Chamber Surfaces Or Components
App 20210071300 - BAJAJ; Geetika ; et al. | 2021-03-11 |
Selective nitride removal
Grant 10,886,137 - Goradia , et al. January 5, 2 | 2021-01-05 |
Oxy-fluoride Compounds For Chamber Parts Protection
App 20200283897 - DEEPAK; Nitin ; et al. | 2020-09-10 |
Gas-phase selective etching systems and methods
Grant 10,573,527 - Bajaj , et al. Feb | 2020-02-25 |
Selective atomic layer etching of semiconductor materials
Grant 10,497,573 - Goradia , et al. De | 2019-12-03 |
Halogen Resistant Coatings And Methods Of Making And Using Thereof
App 20190338418 - Goradia; Prerna ; et al. | 2019-11-07 |
Selective Nitride Removal
App 20190333776 - Goradia; Prerna Sonthalia ; et al. | 2019-10-31 |
Gas-phase Selective Etching Systems And Methods
App 20190311909 - Bajaj; Geetika ; et al. | 2019-10-10 |
Low Temperature In-situ Cleaning Method For Epi-chambers
App 20190301011 - BAJAJ; Geetika ; et al. | 2019-10-03 |
Selective Atomic Layer Etching Of Semiconductor Materials
App 20190287808 - Goradia; Prerna Sonthalia ; et al. | 2019-09-19 |
Method for forming yttrium oxide on semiconductor processing equipment
Grant 10,253,406 - Kalita , et al. | 2019-04-09 |
Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment
Grant 10,233,554 - Pareek , et al. | 2019-03-19 |
Methods for chemical etching of silicon
Grant 10,177,002 - Bajaj , et al. J | 2019-01-08 |
Corrosion Resistant Coating For Semiconductor Process Equipment
App 20180374706 - PAREEK; YOGITA ; et al. | 2018-12-27 |
Aerosol Assisted CVD For Industrial Coatings
App 20180347039 - Arnepalli; Ranga Rao ; et al. | 2018-12-06 |
Selective Deposition And Etching Of Metal Pillars Using AACVD And An Electrical Bias
App 20180350604 - Visser; Robert Jan ; et al. | 2018-12-06 |
Low Temperature Selective Epitaxial Silicon Deposition
App 20180308685 - BAJAJ; Geetika ; et al. | 2018-10-25 |
Selective Poreseal Deposition Prevention And Residue Removal Using Sam
App 20180261500 - Bajaj; Geetika ; et al. | 2018-09-13 |
Selective poreseal deposition prevention and residue removal using SAM
Grant 10,074,559 - Bajaj , et al. September 11, 2 | 2018-09-11 |
Selective etching of amorphous silicon over epitaxial silicon
Grant 9,991,129 - Bajaj , et al. June 5, 2 | 2018-06-05 |
Methods And Systems For Thermal Ale And Ald
App 20180080124 - Bajaj; Geetika ; et al. | 2018-03-22 |
Methods For Chemical Etching Of Silicon
App 20170316946 - BAJAJ; Geetika ; et al. | 2017-11-02 |
Aluminum Electroplating And Oxide Formation As Barrier Layer For Aluminum Semiconductor Process Equipment
App 20170260639 - PAREEK; Yogita ; et al. | 2017-09-14 |
Method For Electrochemically Grown Yttria Or Yttrium Oxide On Semiconductor Processing Equipment
App 20170260618 - KALITA; Laksheswar ; et al. | 2017-09-14 |
Selective Sealant Removal
App 20160172238 - Kumar; Bhaskar ; et al. | 2016-06-16 |
Ultra-thin structure to protect copper and method of preparation
Grant 9,257,330 - Chatterjee , et al. February 9, 2 | 2016-02-09 |
Ultra-thin Structure To Protect Copper And Method Of Preparation
App 20150147879 - Chatterjee; Amit ; et al. | 2015-05-28 |
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