loadpatents
Patent applications and USPTO patent grants for Babu; Sarath.The latest application filed is for "shutter disk".
Patent | Date |
---|---|
Methods and apparatus for high voltage electrostatic chuck protection Grant 11,289,357 - Wada , et al. March 29, 2 | 2022-03-29 |
Pre-clean chamber with integrated shutter garage Grant 11,251,028 - Tsai , et al. February 15, 2 | 2022-02-15 |
Shutter Disk App 20220028702 - Kang; Zhang ;   et al. | 2022-01-27 |
Shutter disk Grant 11,171,017 - Kang , et al. November 9, 2 | 2021-11-09 |
Preclean Chamber Upper Shield With Showerhead App 20210335581 - BABU; Sarath ;   et al. | 2021-10-28 |
Methods And Apparatus For Reducing Defects In Preclean Chambers App 20210335582 - OW; Yueh Sheng ;   et al. | 2021-10-28 |
Lower shield for a substrate processing chamber Grant D931,241 - Babu , et al. September 21, 2 | 2021-09-21 |
Two piece shutter disk assembly with self-centering feature Grant 11,043,406 - Tsai , et al. June 22, 2 | 2021-06-22 |
Inner shield for a substrate processing chamber Grant D913,979 - Babu , et al. March 23, 2 | 2021-03-23 |
Common Electrostatic Chuck For Differing Substrates App 20210074523 - Ramachandran; Vinodh ;   et al. | 2021-03-11 |
Shutter Disk App 20210074552 - Kang; Zhang ;   et al. | 2021-03-11 |
High Conductance Lower Shield For Process Chamber App 20210066051 - Babu; Sarath ;   et al. | 2021-03-04 |
High Conductance Inner Shield For Process Chamber App 20210066050 - Babu; Sarath ;   et al. | 2021-03-04 |
Methods And Apparatus For High Voltage Electrostatic Chuck Protection App 20200411353 - WADA; YUICHI ;   et al. | 2020-12-31 |
Methods and apparatus for shutter disk assembly detection Grant 10,851,453 - Tsai , et al. December 1, 2 | 2020-12-01 |
Pre-clean Chamber With Integrated Shutter Garage App 20190348264 - Tsai; Cheng-Hsiung Matt ;   et al. | 2019-11-14 |
Two Piece Shutter Disk Assembly With Self-centering Feature App 20190326154 - TSAI; CHENG-HSIUNG ;   et al. | 2019-10-24 |
Methods And Apparatus For Shutter Disk Assembly Detection App 20190316251 - TSAI; CHENG-HSIUNG ;   et al. | 2019-10-17 |
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