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Patent applications and USPTO patent grants for Azuma; Tomoyuki.The latest application filed is for "metal-binding peptide and use thereof".
Patent | Date |
---|---|
Metal-binding Peptide And Use Thereof App 20210085807 - Teramura; Yuji ;   et al. | 2021-03-25 |
Substrate Processing Apparatus App 20140283992 - AZUMA; Tomoyuki ;   et al. | 2014-09-25 |
Substrate processing apparatus and substrate processing method Grant 8,765,002 - Azuma , et al. July 1, 2 | 2014-07-01 |
Substrate Processing Apparatus And Substrate Processing Method App 20120223054 - AZUMA; Tomoyuki ;   et al. | 2012-09-06 |
Method of cleaning and process for producing semiconductor device Grant 7,767,585 - Saga , et al. August 3, 2 | 2010-08-03 |
Process for producing structural body and etchant for silicon oxide film Grant 7,670,496 - Saga , et al. March 2, 2 | 2010-03-02 |
Method Of Cleaning And Process For Producing Semiconductor Device App 20090221143 - Saga; Koichiro ;   et al. | 2009-09-03 |
Wet Etching Method And Wet Etching Apparatus App 20090114619 - Sotoaka; Ryuji ;   et al. | 2009-05-07 |
Substrate Cleaning Device and Cleaning Method Thereof App 20080047577 - Goto; Hideto ;   et al. | 2008-02-28 |
Anisotropic etching agent composition used for manufacturing of micro-structures of silicon and etching method App 20070175862 - Yamada; Kenji ;   et al. | 2007-08-02 |
Process for producing structural body and etchant for silicon oxide film App 20050205515 - Saga, Koichiro ;   et al. | 2005-09-22 |
Cleaning method App 20040221875 - Saga, Koichiro ;   et al. | 2004-11-11 |
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