AVOYAN; Armen

Patent Applications and Registrations

Patent applications and USPTO patent grants for AVOYAN; Armen.The latest application filed is for "chamber component cleanliness measurement system".

Company Profile

2.39.40

AVOYAN; Armen - Oakland CA
AVOYAN; Armen - Glendale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chamber Component Cleanliness Measurement System App 20220252548 - YASSERI; Amir A. ; et al.	2022-08-11
Conditioning Chamber Component App 20210205858 - YASSERI; Amir A. ; et al.	2021-07-08
Conditioning chamber component Grant 10,967,407 - Yasseri , et al. April 6, 2	2021-04-06
Electrostatic chuck cleaning fixture Grant 10,391,526 - Avoyan , et al. A	2019-08-27
Conditioning Chamber Component App 20180318890 - YASSERI; Amir A. ; et al.	2018-11-08
Dual phase cleaning chambers and assemblies comprising the same Grant 9,748,078 - Avoyan , et al. August 29, 2	2017-08-29
Dielectric window cleaning apparatuses Grant 9,623,449 - Avoyan , et al. April 18, 2	2017-04-18
Portable sonic particle removal tool with a chemically controlled working fluid Grant 9,505,036 - Avoyan , et al. November 29, 2	2016-11-29
Wet clean process for cleaning plasma processing chamber components Grant 9,406,534 - Avoyan , et al. August 2, 2	2016-08-02
Methods for mixed acid cleaning of showerhead electrodes Grant 9,396,912 - Avoyan , et al. July 19, 2	2016-07-19
Gas injector particle removal process and apparatus Grant 9,390,895 - LaCroix , et al. July 12, 2	2016-07-12
Dual Phase Cleaning Chambers And Assemblies Comprising The Same App 20160141153 - Avoyan; Armen ; et al.	2016-05-19
Mixed acid cleaning assemblies Grant 9,293,305 - Avoyan , et al. March 22, 2	2016-03-22
Wet Clean Process for Cleaning Plasma Processing Chamber Components App 20160079096 - Avoyan; Armen ; et al.	2016-03-17
Dual phase cleaning chambers and assemblies comprising the same Grant 9,245,719 - Avoyan , et al. January 26, 2	2016-01-26
Platen and adapter assemblies for facilitating silicon electrode polishing Grant 9,120,201 - Avoyan , et al. September 1, 2	2015-09-01
Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber Grant 9,079,228 - Shih , et al. July 14, 2	2015-07-14
Electrostatic Chuck Cleaning Fixture App 20150165492 - Avoyan; Armen ; et al.	2015-06-18
System and method for cleaning gas injectors Grant 8,945,317 - Avoyan , et al. February 3, 2	2015-02-03
Gas Injector Particle Removal Process And Apparatus App 20150000712 - LaCroix; Cliff ; et al.	2015-01-01
Portable Sonic Particle Removal Tool With A Chemically Controlled Working Fluid App 20140261575 - Avoyan; Armen ; et al.	2014-09-18
Platen And Adapter Assemblies For Facilitating Silicon Electrode Polishing App 20140030966 - Avoyan; Armen ; et al.	2014-01-30
Electrode carrier assemblies Grant 8,580,079 - La Croix , et al. November 12, 2	2013-11-12
Dielectric Window Cleaning Apparatuses App 20130263897 - Avoyan; Armen ; et al.	2013-10-10
Platen and adapter assemblies for facilitating silicon electrode polishing Grant 8,550,880 - Avoyan , et al. October 8, 2	2013-10-08
Method of cleaning aluminum plasma chamber parts Grant 8,545,639 - Shih , et al. October 1, 2	2013-10-01
System And Method For Cleaning Gas Injectors App 20130146095 - Avoyan; Armen ; et al.	2013-06-13
Electrode securing platens and electrode polishing assemblies incorporating the same Grant 8,444,456 - La Croix , et al. May 21, 2	2013-05-21
Mixed Acid Cleaning Assemblies App 20130104942 - Avoyan; Armen ; et al.	2013-05-02
Methods For Mixed Acid Cleaning Of Showerhead Electrodes App 20130104938 - Avoyan; Armen ; et al.	2013-05-02
Method Of Cleaning Aluminum Plasma Chamber Parts App 20130104930 - Shih; Hong ; et al.	2013-05-02
Dual Phase Cleaning Chambers and Assemblies Comprising The Same App 20130019907 - Avoyan; Armen ; et al.	2013-01-24
Electrode transporter and fixture sets incorporating the same Grant 8,276,898 - Avoyan , et al. October 2, 2	2012-10-02
Peripherally engaging electrode carriers and assemblies incorporating the same Grant 8,276,604 - Augustino , et al. October 2, 2	2012-10-02
Cleaning of bonded silicon electrodes Grant 8,221,552 - Outka , et al. July 17, 2	2012-07-17
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses Grant 8,215,321 - Shih , et al. July 10, 2	2012-07-10
Backside mounted electrode carriers and assemblies incorporating the same Grant 8,171,877 - Augustino , et al. May 8, 2	2012-05-08
Electrode Securing Platens And Electrode Polishing Assemblies Incorporating The Same App 20120108152 - La Croix; Cliff ; et al.	2012-05-03
Backside Mounted Electrode Carriers And Assemblies Incorporating The Same App 20120013242 - Augustino; Jason ; et al.	2012-01-19
Electrode Carrier Assemblies App 20110308732 - La Croix; Cliff ; et al.	2011-12-22
Immersive oxidation and etching process for cleaning silicon electrodes Grant 8,075,703 - Avoyan , et al. December 13, 2	2011-12-13
Processes for reconditioning multi-component electrodes Grant 8,075,701 - Avoyan , et al. December 13, 2	2011-12-13
Method for inspecting electrostatic chucks with Kelvin probe analysis Grant 8,022,718 - Avoyan , et al. September 20, 2	2011-09-20
Methods And Apparatus For Wet Cleaning Electrode Assemblies For Plasma Processing Apparatuses App 20110180117 - Shih; Hong ; et al.	2011-07-28
Methodology For Cleaning Of Surface Metal Contamination From An Upper Electrode Used In A Plasma Chamber App 20110146704 - Shih; Hong ; et al.	2011-06-23
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses Grant 7,942,973 - Shih , et al. May 17, 2	2011-05-17
Platen And Adapter Assemblies For Facilitating Silicon Electrode Polishing App 20100144246 - Avoyan; Armen ; et al.	2010-06-10
Immersive Oxidation And Etching Process For Cleaning Silicon Electrodes App 20100139692 - Avoyan; Armen ; et al.	2010-06-10
Method For Inspecting Electrostatic Chucks With Kelvin Probe Analysis App 20100045316 - AVOYAN; ARMEN ; et al.	2010-02-25
Processes For Reconditioning Multi-component Electrodes App 20090325320 - Avoyan; Armen ; et al.	2009-12-31
Peripherally Engaging Electrode Carriers And Assemblies Incorporating The Same App 20090321018 - Augustino; Jason ; et al.	2009-12-31
Backside Mounted Electrode Carriers And Assemblies Incorporating The Same App 20090322199 - Augustino; Jason ; et al.	2009-12-31
Electrode Transporter And Fixture Sets Incorporating The Same App 20090311079 - Avoyan; Armen ; et al.	2009-12-17
Methodology for cleaning of surface metal contamination from electrode assemblies Grant 7,578,889 - Shih , et al. August 25, 2	2009-08-25
Methodology for cleaning of surface metal contamination from electrode assemblies App 20080236620 - Shih; Hong ; et al.	2008-10-02
Cleaning of bonded silicon electrodes App 20080236618 - Outka; Duane ; et al.	2008-10-02
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses App 20080092920 - Shih; Hong ; et al.	2008-04-24
Wet Cleaning Of Electrostatic Chucks App 20060112969 - Shih; Hong ; et al.	2006-06-01
Wet cleaning of electrostatic chucks Grant 7,052,553 - Shih , et al. May 30, 2	2006-05-30
Method of plasma etch endpoint detection using a V-I probe diagnostics App 20050217795 - Avoyan, Armen ; et al.	2005-10-06
Method for toolmatching and troubleshooting a plasma processing system Grant 6,919,689 - Jafarian-Tehrani , et al. July 19, 2	2005-07-19
Method for toolmatching and troubleshooting a plasma processing system App 20050151479 - Avoyan, Armen ; et al.	2005-07-14
Method for toolmatching and troubleshooting a plasma processing system Grant 6,873,114 - Avoyan , et al. March 29, 2	2005-03-29
Method for toolmatching and troubleshooting a plasma processing system App 20040104734 - Jafarian-Tehrani, Seyed Jafar ; et al.	2004-06-03
Method for toolmatching and troubleshooting a plasma processing system App 20040061448 - Avoyan, Armen ; et al.	2004-04-01