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Methods And Apparatus For Test Pattern Forming And Film Property Measurement App 20220216118 - BASOL; Bulent Mehmet ;   et al. | 2022-07-07 |
Methods and apparatus for test pattern forming and film property measurement Grant 11,289,386 - Basol , et al. March 29, 2 | 2022-03-29 |
Methods and systems for material property profiling of thin films Grant 10,790,203 - Basol , et al. September 29, 2 | 2020-09-29 |
Methods And Apparatus For Test Pattern Forming And Film Property Measurement App 20200219778 - BASOL; Bulent Mehmet ;   et al. | 2020-07-09 |
Methods And Systems For Material Property Profiling Of Thin Films App 20190148248 - BASOL; Bulent M. ;   et al. | 2019-05-16 |
Roll-to-roll processing method and tools for electroless deposition of thin layers Grant 8,497,152 - Ashjaee July 30, 2 | 2013-07-30 |
Roll-to-roll Manufacturing Of Flexible Thin Film Photovoltaic Modules App 20110239450 - Basol; Bulent M. ;   et al. | 2011-10-06 |
Method and apparatus for stringing thin film solar cells Grant 8,016,007 - Ashjaee , et al. September 13, 2 | 2011-09-13 |
Roll-to-roll processing method and tools for electroless deposition of thin layers Grant 7,923,281 - Basol , et al. April 12, 2 | 2011-04-12 |
Roll-to-roll Processing Method And Tools For Electroless Deposition Of Thin Layers App 20100291727 - ASHJAEE; Jalal | 2010-11-18 |
Method And Apparatus For Stringing Thin Film Solar Cells App 20100200170 - Ashjaee; Jalal ;   et al. | 2010-08-12 |
Roll-to-roll Processing Method And Tools For Electroless Deposition Of Thin Layers App 20090246908 - Basol; Bulent M. ;   et al. | 2009-10-01 |
Reactor To Form Solar Cell Absorbers App 20090183675 - Pinarbasi; Mustafa ;   et al. | 2009-07-23 |
Apparatus for processing surface of workpiece with small electrodes and surface contacts Grant 7,476,304 - Ashjaee , et al. January 13, 2 | 2009-01-13 |
System for electropolishing and electrochemical mechanical polishing Grant 7,427,337 - Basol , et al. September 23, 2 | 2008-09-23 |
Reel-to-reel Reaction Of A Precursor Film To Form Solar Cell Absorber App 20080175993 - Ashjaee; Jalal ;   et al. | 2008-07-24 |
Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing Grant 7,316,602 - Basol , et al. January 8, 2 | 2008-01-08 |
Method and apparatus for substrate rinsing App 20070051389 - Ashjaee; Jalal | 2007-03-08 |
Integrated system for processing semiconductor wafers App 20070004316 - Ashjaee; Jalal ;   et al. | 2007-01-04 |
Edge and bevel cleaning process and system Grant 7,122,473 - Ashjaee , et al. October 17, 2 | 2006-10-17 |
Integrated system for processing semiconductor wafers Grant 7,059,944 - Ashjaee , et al. June 13, 2 | 2006-06-13 |
Integrated system for processing semiconductor wafers App 20060035569 - Ashjaee; Jalal ;   et al. | 2006-02-16 |
Apparatus of sealing wafer backside for full-face processing Grant 6,988,932 - Ashjaee , et al. January 24, 2 | 2006-01-24 |
Integrated system for processing semiconductor wafers Grant 6,953,392 - Ashjaee , et al. October 11, 2 | 2005-10-11 |
Method and apparatus of sealing wafer backside for full-face electrochemical plating Grant 6,939,206 - Ashjaee , et al. September 6, 2 | 2005-09-06 |
Apparatus and method for loading a wafer in polishing system Grant 6,932,679 - Talieh , et al. August 23, 2 | 2005-08-23 |
Chemical mechanical polishing method and apparatus for controlling material removal profile App 20050159084 - Basol, Bulent M. ;   et al. | 2005-07-21 |
System for electropolishing and electrochemical mechanical polishing App 20050133379 - Basol, Bulent M. ;   et al. | 2005-06-23 |
Adjustable gap chemical mechanical polishing method and apparatus App 20050118932 - Talieh, Homayoun ;   et al. | 2005-06-02 |
Edge and bevel cleaning process and system App 20050079713 - Ashjaee, Jalal ;   et al. | 2005-04-14 |
Method and apparatus for full surface electrotreating of a wafer App 20050034994 - Ashjaee, Jalal ;   et al. | 2005-02-17 |
Method of sealing wafer backside for full-face electrochemical plating Grant 6,855,037 - Ashjaee , et al. February 15, 2 | 2005-02-15 |
Method and apparatus for full surface electrotreating of a wafer Grant 6,852,208 - Ashjaee , et al. February 8, 2 | 2005-02-08 |
Method of sealing wafer backside for full-face processing App 20040166789 - Ashjaee, Jalal ;   et al. | 2004-08-26 |
Edge and bevel cleaning process and system Grant 6,777,338 - Ashjaee , et al. August 17, 2 | 2004-08-17 |
Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing App 20040112760 - Basol, Bulent M. ;   et al. | 2004-06-17 |
Distributed control system for semiconductor manufacturing equipment Grant 6,736,929 - Komandur , et al. May 18, 2 | 2004-05-18 |
Distributed control system for semiconductor manufacturing equipment App 20040089421 - Komandur, Srinivasan M. ;   et al. | 2004-05-13 |
Integrated system for processing semiconductor wafers App 20030166382 - Ashjaee, Jalal ;   et al. | 2003-09-04 |
Distributed control system for semiconductor manufacturing equipment App 20030155073 - Komandur, Srinivasan M. ;   et al. | 2003-08-21 |
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein Grant 6,604,988 - Talieh , et al. August 12, 2 | 2003-08-12 |
Method and apparatus for full surface electrotreating of a wafer App 20030029731 - Ashjaee, Jalal ;   et al. | 2003-02-13 |
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein App 20030022605 - Talieh, Homayoun ;   et al. | 2003-01-30 |
Method and apparatus of sealing wafer backside for full-face electrochemical plating App 20030008602 - Ashjaee, Jalal ;   et al. | 2003-01-09 |
Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing Grant 6,482,307 - Ashjaee , et al. November 19, 2 | 2002-11-19 |
Edge and bevel cleaning process and system App 20020155648 - Ashjaee, Jalal ;   et al. | 2002-10-24 |
Method of sealing wafer backside for full-face electrochemical plating App 20020127956 - Ashjaee, Jalal ;   et al. | 2002-09-12 |
Integrated system for processing semiconductor wafers App 20020088543 - Ashjaee, Jalal ;   et al. | 2002-07-11 |
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein App 20020009959 - Talieh, Homayoun ;   et al. | 2002-01-24 |
Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing App 20010035354 - Ashjaee, Jalal ;   et al. | 2001-11-01 |
Wafer handling apparatus and method Grant 4,507,078 - Tam , et al. March 26, 1 | 1985-03-26 |