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Method for forming a cavity and a component having a cavity Grant 10,840,107 - Armbruster , et al. November 17, 2 | 2020-11-17 |
Mechanical component and manufacturing method for a mechanical component Grant 10,589,988 - Heinzelmann , et al. | 2020-03-17 |
Method For Forming A Cavity And A Component Having A Cavity App 20190348300 - Armbruster; Simon ;   et al. | 2019-11-14 |
Method for forming a cavity and a component having a cavity Grant 10,431,474 - Armbruster , et al. O | 2019-10-01 |
Mirror system and projection device Grant 9,885,866 - Straub , et al. February 6, 2 | 2018-02-06 |
Micromechanical component and corresponding test method for a micromechanical component Grant 9,764,945 - Reiss , et al. September 19, 2 | 2017-09-19 |
Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting Grant 9,725,311 - Franz , et al. August 8, 2 | 2017-08-08 |
Method for producing a wafer equipped with transparent plates Grant 9,663,351 - Armbruster , et al. May 30, 2 | 2017-05-30 |
Method For Forming A Cavity And A Component Having A Cavity App 20170140943 - Armbruster; Simon ;   et al. | 2017-05-18 |
Micromechanical Layer System App 20170081183 - Armbruster; Simon ;   et al. | 2017-03-23 |
Mirror System And Projection Device App 20170052363 - Straub; Rainer ;   et al. | 2017-02-23 |
Method for structuring a layered structure from two semiconductor layers, and micromechanical component Grant 9,490,137 - Armbruster , et al. November 8, 2 | 2016-11-08 |
Micromechanical component and method for producing a micromechanical component Grant 9,360,664 - Armbruster , et al. June 7, 2 | 2016-06-07 |
Method For Structuring A Layered Structure From Two Semiconductor Layers, And Micromechanical Component App 20150235859 - ARMBRUSTER; Simon ;   et al. | 2015-08-20 |
Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting App 20150232330 - FRANZ; Jochen ;   et al. | 2015-08-20 |
Method for producing a wafer equipped with transparent plates App 20150232328 - ARMBRUSTER; Simon ;   et al. | 2015-08-20 |
Component having a via Grant 9,082,831 - Ahles , et al. July 14, 2 | 2015-07-14 |
Micromirror And Manufacturing Method For At Least One Micromirror Which Is Situatable Or Situated In A Micromirror Device App 20150153566 - Armbruster; Simon ;   et al. | 2015-06-04 |
Micromechanical Component And Method For Producing A Micromechanical Component App 20150062677 - ARMBRUSTER; Simon ;   et al. | 2015-03-05 |
Micromechanical Component And Corresponding Test Method For A Micromechanical Component App 20150061695 - REISS; Sebastian ;   et al. | 2015-03-05 |
Micromechanical component, micromirror device, and manufacturing method for a micromechanical component App 20140376071 - ARMBRUSTER; Simon ;   et al. | 2014-12-25 |
Sensor and method for its production Grant 8,749,013 - Benzel , et al. June 10, 2 | 2014-06-10 |
Mechanical Component And Manufacturing Method For A Mechanical Component App 20140118005 - HEINZELMANN; Wolfgang ;   et al. | 2014-05-01 |
Micromechanical component and corresponding production method Grant 8,558,327 - Knese , et al. October 15, 2 | 2013-10-15 |
Method for producing a component, and sensor element Grant 8,530,261 - Kramer , et al. September 10, 2 | 2013-09-10 |
Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate Grant 8,519,494 - Kramer , et al. August 27, 2 | 2013-08-27 |
Micromechanical capacitive pressure transducer and production method Grant 8,492,855 - Lammel , et al. July 23, 2 | 2013-07-23 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type Grant 8,492,850 - Lammel , et al. July 23, 2 | 2013-07-23 |
Method for manufacturing capped MEMS components Grant 8,470,631 - Kramer , et al. June 25, 2 | 2013-06-25 |
Method for manufacturing chips Grant 8,389,327 - Kramer , et al. March 5, 2 | 2013-03-05 |
Sensor and method for the manufacture thereof Grant 8,334,534 - Reinmuth , et al. December 18, 2 | 2012-12-18 |
Micromechanical component and method for the manufacture thereof Grant 8,217,476 - Kraft , et al. July 10, 2 | 2012-07-10 |
Method For Manufacturing A Semiconductor Structure, And A Corresponding Semiconductor Structure App 20120132925 - Lammel; Gerhard ;   et al. | 2012-05-31 |
Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure Grant 8,148,234 - Lammel , et al. April 3, 2 | 2012-04-03 |
Component having a VIA App 20120068356 - Ahles; Marcus ;   et al. | 2012-03-22 |
Method for manufacturing a component, method for manufacturing a component system, component, and component system App 20110169107 - Kramer; Torsten ;   et al. | 2011-07-14 |
Method For Manufacturing Chips App 20110151620 - Kramer; Torsten ;   et al. | 2011-06-23 |
Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate App 20110147864 - Kramer; Torsten ;   et al. | 2011-06-23 |
Micromechanical sensor element Grant 7,918,136 - Muchow , et al. April 5, 2 | 2011-04-05 |
Micromechanical Component And Method For The Manufacture Thereof App 20110001200 - Kraft; Karl-Heinz ;   et al. | 2011-01-06 |
Sensor And Method For Producing The Same App 20110002359 - Benzel; Hubert ;   et al. | 2011-01-06 |
Method for manufacturing a sensor array including a monolithically integrated circuit Grant 7,858,424 - Benzel , et al. December 28, 2 | 2010-12-28 |
Micromechanical semiconductor sensor Grant 7,843,025 - Benzel , et al. November 30, 2 | 2010-11-30 |
Method For Manufacturing Capped Mems Components App 20100267183 - Kramer; Torsten ;   et al. | 2010-10-21 |
Semiconductor component configured as a diaphragm sensor Grant 7,755,152 - Benzel , et al. July 13, 2 | 2010-07-13 |
Method For Producing A Component, And Sensor Element App 20100164027 - Kramer; Torsten ;   et al. | 2010-07-01 |
Micromechanical Component And Corresponding Production Method App 20100164023 - Knese; Kathrin ;   et al. | 2010-07-01 |
Sensor and method for the manufacture thereof App 20100140618 - Reinmuth; Jochen ;   et al. | 2010-06-10 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type App 20100035068 - Lammel; Gerhard ;   et al. | 2010-02-11 |
Micromechanical device and method for producing a micromechanical device Grant 7,647,832 - Muchow , et al. January 19, 2 | 2010-01-19 |
Method For Manufacturing A Semiconductor Component, As Well As A Semiconductor Component, In A Particular A Diaphragm Sensor App 20090256219 - BENZEL; Hubert ;   et al. | 2009-10-15 |
Method for Manufacturing a Semiconductor Structure, and a Corresponding Semiconductor Structure App 20090236610 - Lammel; Gerhard ;   et al. | 2009-09-24 |
Method for manufacturing a micromechanical sensor element Grant 7,572,661 - Benzel , et al. August 11, 2 | 2009-08-11 |
Method for manufacturing a diaphragm sensor Grant 7,569,412 - Benzel , et al. August 4, 2 | 2009-08-04 |
Method for Manufacturing a Sensor Array Including a Monolithically Integrated Circuit App 20090142873 - Benzel; Hubert ;   et al. | 2009-06-04 |
Method For Manufacturing A Semiconductor Component, As Well As A Semiconductor Component, In Particular A Membrane Sensor App 20090127640 - Benzel; Hubert ;   et al. | 2009-05-21 |
Micromechanical Capacitive Pressure Transducer and Production Method App 20090101997 - Lammel; Gerhard ;   et al. | 2009-04-23 |
Micromechanical Sensor Element App 20090084182 - Muchow; Joerg ;   et al. | 2009-04-02 |
Method for manufacturing a membrane sensor Grant 7,494,839 - Benzel , et al. February 24, 2 | 2009-02-24 |
Micromechanical component and method Grant 7,404,332 - Lammel , et al. July 29, 2 | 2008-07-29 |
Sensor element with trenched cavity Grant 7,354,786 - Benzel , et al. April 8, 2 | 2008-04-08 |
Micromechanical device and method for producing a micromechanical device App 20070126069 - Muchow; Joerg ;   et al. | 2007-06-07 |
Micromechanical component and method App 20060137460 - Lammel; Gerhard ;   et al. | 2006-06-29 |
Micromechanical sensor element App 20060063293 - Benzel; Hubert ;   et al. | 2006-03-23 |
Sensor element with trenched cavity App 20060057816 - Benzel; Hubert ;   et al. | 2006-03-16 |
Method for manufacturing a semiconductor component, as well as a semiconductor component, in particular a membrane sensor App 20050181529 - Benzel, Hubert ;   et al. | 2005-08-18 |
Method for manufacturing a semicondutor component, as well as a semicondutor component, in particular a diaphragm sensor App 20050142687 - Benzel, Hubert ;   et al. | 2005-06-30 |