| Patent | Date |
|---|
Method and system for providing a quality metric for improved process control
Grant 11,372,340 - Kandel , et al. June 28, 2 | 2022-06-28 |
Device-like Metrology Targets
App 20220197152 - Levinski; Vladimir ; et al. | 2022-06-23 |
Machine Learning in Metrology Measurements
App 20220107175 - AMIT; Eran | 2022-04-07 |
Machine learning in metrology measurements
Grant 11,248,905 - Amit February 15, 2 | 2022-02-15 |
Method And Apparatus For Gait Analysis
App 20210386325 - AMIT; Eran ; et al. | 2021-12-16 |
Single Cell Grey Scatterometry Overlay Targets and Their Measurement Using Varying Illumination Parameter(s)
App 20210373445 - Manassen; Amnon ; et al. | 2021-12-02 |
Overlay measurement using multiple wavelengths
Grant 11,158,548 - Lamhot , et al. October 26, 2 | 2021-10-26 |
Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s)
Grant 11,119,417 - Manassen , et al. September 14, 2 | 2021-09-14 |
System for combined imaging and scatterometry metrology
Grant 11,067,904 - Amit , et al. July 20, 2 | 2021-07-20 |
Polarization measurements of metrology targets and corresponding target designs
Grant 11,060,845 - Amit , et al. July 13, 2 | 2021-07-13 |
Device metrology targets and methods
Grant 11,054,752 - Amit , et al. July 6, 2 | 2021-07-06 |
Method and apparatus for gait analysis
Grant 11,006,860 - Amit , et al. May 18, 2 | 2021-05-18 |
Overlay Measurement Using Multiple Wavelengths
App 20200381312 - Lamhot; Yuval ; et al. | 2020-12-03 |
Recipe optimization based zonal analysis
Grant 10,763,146 - Volkovich , et al. Sep | 2020-09-01 |
Quick adjustment of metrology measurement parameters according to process variation
Grant 10,699,969 - Peled , et al. | 2020-06-30 |
Metrology using overlay and yield critical patterns
Grant 10,685,165 - Kandel , et al. | 2020-06-16 |
Single Cell Grey Scatterometry Overlay Targets and Their Measurement Using Varying Illumination Parameter(s)
App 20200159129 - Manassen; Amnon ; et al. | 2020-05-21 |
Polarization Measurements Of Metrology Targets And Corresponding Target Designs
App 20200158492 - Amit; Eran ; et al. | 2020-05-21 |
Device-like Metrology Targets
App 20200124981 - Levinski; Vladimir ; et al. | 2020-04-23 |
Overlay measurement using phase and amplitude modeling
Grant 10,622,238 - Gutman , et al. | 2020-04-14 |
Device metrology targets and methods
Grant 10,571,811 - Amit , et al. Feb | 2020-02-25 |
Metrology targets with supplementary structures in an intermediate layer
Grant 10,551,749 - Levinski , et al. Fe | 2020-02-04 |
Compound imaging metrology targets
Grant 10,527,951 - Yohanan , et al. J | 2020-01-07 |
Overlay Measurement Using Phase and Amplitude Modeling
App 20190378737 - Gutman; Nadav ; et al. | 2019-12-12 |
Target location in semiconductor manufacturing
Grant 10,504,802 - Ittah , et al. Dec | 2019-12-10 |
Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals
Grant 10,473,460 - Gutman , et al. Nov | 2019-11-12 |
Polarization measurements of metrology targets and corresponding target designs
Grant 10,458,777 - Amit , et al. Oc | 2019-10-29 |
Estimating and eliminating inter-cell process variation inaccuracy
Grant 10,415,963 - Marciano , et al. Sept | 2019-09-17 |
Identifying registration errors of DSA lines
Grant 10,401,841 - Volkovich , et al. Sep | 2019-09-03 |
Combined Imaging And Scatterometry Metrology
App 20190250521 - Amit; Eran ; et al. | 2019-08-15 |
Scatterometry overlay based on reflection peak locations
Grant 10,365,230 - Amit , et al. July 30, 2 | 2019-07-30 |
Lithography systems with integrated metrology tools having enhanced functionalities
Grant 10,331,050 - Amit , et al. | 2019-06-25 |
Enhancing Metrology Target Information Content
App 20190178630 - Amit; Eran ; et al. | 2019-06-13 |
Overlay Measurements of Overlapping Target Structures Based on Symmetry of Scanning Electron Beam Signals
App 20190178639 - Gutman; Nadav ; et al. | 2019-06-13 |
Method and apparatus for direct self assembly in target design and production
Grant 10,303,835 - Amit , et al. | 2019-05-28 |
Metrology target for combined imaging and scatterometry metrology
Grant 10,274,837 - Amit , et al. | 2019-04-30 |
Machine Learning in Metrology Measurements
App 20190086200 - AMIT; Eran | 2019-03-21 |
Recipe Optimization Based Zonal Analysis
App 20190088514 - VOLKOVICH; Roie ; et al. | 2019-03-21 |
Quick Adjustment Of Metrology Measurement Parameters According To Process Variation
App 20190074227 - Peled; Einat ; et al. | 2019-03-07 |
Device Metrology Targets And Methods
App 20190004438 - Amit; Eran ; et al. | 2019-01-03 |
Lithography Systems with Integrated Metrology Tools Having Enhanced Funcionalities
App 20180299791 - Amit; Eran ; et al. | 2018-10-18 |
Target Location in Semiconductor Manufacturing
App 20180301385 - Ittah; Naomi ; et al. | 2018-10-18 |
On-product derivation and adjustment of exposure parameters in a directed self-assembly process
Grant 10,025,285 - Volkovich , et al. July 17, 2 | 2018-07-17 |
Device-Like Metrology Targets
App 20180188663 - Levinski; Vladimir ; et al. | 2018-07-05 |
Removing process-variation-related inaccuracies from scatterometry measurements
Grant 9,874,527 - Amit , et al. January 23, 2 | 2018-01-23 |
Metrology Target Design For Tilted Device Designs
App 20170023358 - Lee; Myungjun ; et al. | 2017-01-26 |
Device Metrology Targets And Methods
App 20160266505 - Amit; Eran ; et al. | 2016-09-15 |
Metrology Using Overlay And Yield Critical Patterns
App 20160253450 - Kandel; Daniel ; et al. | 2016-09-01 |
Compound Imaging Metrology Targets
App 20160179017 - YOHANAN; Raviv ; et al. | 2016-06-23 |
Polarization Measurements Of Metrology Targets And Corresponding Target Designs
App 20160178351 - AMIT; Eran ; et al. | 2016-06-23 |
Method for estimating and correcting misregistration target inaccuracy
Grant 9,329,033 - Amit , et al. May 3, 2 | 2016-05-03 |
Identifying Registration Errors Of Dsa Lines
App 20160018819 - VOLKOVICH; Roie ; et al. | 2016-01-21 |
Removing Process-variation-related Inaccuracies From Scatterometry Measurements
App 20150316490 - Amit; Eran ; et al. | 2015-11-05 |
On-product Derivation And Adjustment Of Exposure Parameters In A Directed Self-assembly Process
App 20150301514 - VOLKOVICH; Roie ; et al. | 2015-10-22 |
Estimating And Eliminating Inter-cell Process Variation Inaccuracy
App 20150292877 - Marciano; Tal ; et al. | 2015-10-15 |
Method And Apparatus For Direct Self Assembly In Target Design And Production
App 20150242558 - AMIT; Eran ; et al. | 2015-08-27 |
Combined Imaging And Scatterometry Metrology
App 20150177135 - AMIT; Eran ; et al. | 2015-06-25 |
Device-like scatterometry overlay targets
Grant 8,913,237 - Levinski , et al. December 16, 2 | 2014-12-16 |
Method For Estimating And Correcting Misregistration Target Inaccuracy
App 20140060148 - Amit; Eran ; et al. | 2014-03-06 |
Device-like Scatterometry Overlay Targets
App 20130342831 - Levinski; Vladimir ; et al. | 2013-12-26 |
Method And System For Providing A Quality Metric For Improved Process Control
App 20130035888 - Kandel; Daniel ; et al. | 2013-02-07 |
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