loadpatents
Patent applications and USPTO patent grants for Akahori; Takashi.The latest application filed is for "plasma process device and plasma process method".
Patent | Date |
---|---|
Plasma process device and plasma process method Grant 8,394,231 - Takatsuki , et al. March 12, 2 | 2013-03-12 |
Plasma process device and plasma process method App 20070131171 - Takatsuki; Koichi ;   et al. | 2007-06-14 |
Plasma process apparatus App 20070113787 - Higashiura; Tsutomu ;   et al. | 2007-05-24 |
Semiconductor device and fabrication method therefor Grant 6,949,829 - Akahori , et al. September 27, 2 | 2005-09-27 |
Plasma process apparatus App 20040255863 - Higashiura, Tsutomu ;   et al. | 2004-12-23 |
Plasma deposition method and system Grant 6,767,829 - Akahori July 27, 2 | 2004-07-27 |
Plasma processing device and plasma processing method App 20040127033 - Takatsuki, Koichi ;   et al. | 2004-07-01 |
Method of manufacturing semiconductor device Grant 6,737,350 - Akahori , et al. May 18, 2 | 2004-05-18 |
Process for the production of semiconductor device Grant 6,727,182 - Akahori , et al. April 27, 2 | 2004-04-27 |
Semiconductor device having an adhesion layer Grant 6,720,659 - Akahori April 13, 2 | 2004-04-13 |
Semiconductor device and fabrication method therefor App 20040041266 - Akahori, Takashi ;   et al. | 2004-03-04 |
Plasma deposition method and system App 20030129851 - Akahori, Takashi | 2003-07-10 |
Semiconductor device having fluorine-added carbon dielectric film and method of fabricating the same App 20020047203 - Akahori, Takashi ;   et al. | 2002-04-25 |
Plasma film forming method and plasma film forming apparatus Grant 6,355,902 - Akahori , et al. March 12, 2 | 2002-03-12 |
Plasma film forming method and plasma film forming apparatus App 20010020608 - Akahori, Takashi ;   et al. | 2001-09-13 |
Process For The Production Of Semiconductor Device App 20010001741 - AKAHORI, TAKASHI ;   et al. | 2001-05-24 |
Semiconductor device and method for producing the same Grant 6,218,299 - Akahori , et al. April 17, 2 | 2001-04-17 |
Method for forming a thin film Grant 5,508,066 - Akahori April 16, 1 | 1996-04-16 |
Optical recording carrier and optical recording process Grant 5,386,408 - Akahori January 31, 1 | 1995-01-31 |
Method for forming a thin film for a semiconductor device Grant 5,296,404 - Akahori , et al. March 22, 1 | 1994-03-22 |
Thin film forming apparatus Grant 4,960,071 - Akahori , et al. October 2, 1 | 1990-10-02 |
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