| Patent | Date |
|---|
Crystallization method, thin film transistor manufacturing method, thin film transistor, display, and semiconductor device
Grant 8,168,979 - Kato , et al. May 1, 2 | 2012-05-01 |
Display device
Grant 8,044,403 - Kawachi October 25, 2 | 2011-10-25 |
Electronic device, constituted by using thin-film transistors
Grant 8,035,106 - Kawachi October 11, 2 | 2011-10-11 |
Crystallization apparatus, crystallization method, device, and light modulation element
Grant 8,009,345 - Taniguchi , et al. August 30, 2 | 2011-08-30 |
Method for dehydrogenation treatment and method for forming crystalline silicon film
Grant 7,998,841 - Azuma , et al. August 16, 2 | 2011-08-16 |
Thin-film semiconductor device and method for manufacturing the same
Grant 7,982,272 - Mitsuhashi , et al. July 19, 2 | 2011-07-19 |
Thin-film semiconductor device, lateral bipolar thin-film transistor, hybrid thin-film transistor, MOS thin-film transistor, and method of fabricating thin-film transistor
Grant 7,977,752 - Kawachi July 12, 2 | 2011-07-12 |
Display device and electronic device using thin-film transistors formed on semiconductor thin films which are crystallized on insulating substrates
Grant 7,960,916 - Kawachi June 14, 2 | 2011-06-14 |
Phase modulation device, phase modulation device fabrication method, crystallization apparatus, and crystallization method
Grant 7,955,432 - Ogawa , et al. June 7, 2 | 2011-06-07 |
Crystallizing method, thin-film transistor manufacturing method, thin-film transistor, and display device
Grant 7,943,936 - Hiramatsu , et al. May 17, 2 | 2011-05-17 |
Light irradiation apparatus, light irradiation method, crystallization apparatus, crystallization method, and semiconductor device
Grant 7,927,421 - Taniguchi April 19, 2 | 2011-04-19 |
Crystallization apparatus, crystallization method, device, and light modulation element
Grant 7,897,946 - Taniguchi , et al. March 1, 2 | 2011-03-01 |
Method of forming polycrystalline semiconductor film
Grant 7,888,247 - Iga , et al. February 15, 2 | 2011-02-15 |
Laser crystallization apparatus and crystallization method
Grant 7,847,214 - Takami , et al. December 7, 2 | 2010-12-07 |
Phase shifter for laser annealing
Grant 7,833,349 - Jyumonji November 16, 2 | 2010-11-16 |
Optical device and crystallization device
Grant 7,830,606 - Ono , et al. November 9, 2 | 2010-11-09 |
Light irradiation apparatus, light irradiation method, crystallization apparatus, crystallization method, device, and light modulation element
Grant 7,813,022 - Taniguchi October 12, 2 | 2010-10-12 |
Crystallization apparatus, crystallization method, device and phase modulation element
Grant 7,803,520 - Taniguchi , et al. September 28, 2 | 2010-09-28 |
Aberration measurement apparatus and aberration measurement method
Grant 7,796,245 - Taniguchi September 14, 2 | 2010-09-14 |
Electronic device, display device, interface circuit and differential amplification device, which are constituted by using thin-film transistors
Grant 7,791,077 - Kawachi September 7, 2 | 2010-09-07 |
Method and apparatus for forming crystalline portions of semiconductor film
Grant 7,776,151 - Taniguchi , et al. August 17, 2 | 2010-08-17 |
Light application apparatus, crystallization apparatus and optical modulation element assembly
Grant 7,751,031 - Taniguchi , et al. July 6, 2 | 2010-07-06 |
Method of crystallizing semiconductor film
Grant 7,727,913 - Shimoto , et al. June 1, 2 | 2010-06-01 |
Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display
Grant 7,692,864 - Taniguchi , et al. April 6, 2 | 2010-04-06 |
Simulation apparatus and simulation method used to design characteristics and circuits of semiconductor device, and semiconductor device fabrication method
Grant 7,685,543 - Tsuji , et al. March 23, 2 | 2010-03-23 |
Thin-film semiconductor device and method for manufacturing the same
Grant 7,670,885 - Mitsuhashi March 2, 2 | 2010-03-02 |
Laser crystallization apparatus and crystallization method
Grant 7,642,482 - Takami , et al. January 5, 2 | 2010-01-05 |
Wiring, display device and method of manufacturing the same
Grant 7,626,125 - Nakamura December 1, 2 | 2009-12-01 |
Optical device and crystallization device
Grant 7,612,943 - Ono , et al. November 3, 2 | 2009-11-03 |
Photomask to which phase shift is applied and exposure apparatus
Grant 7,608,369 - Taniguchi October 27, 2 | 2009-10-27 |
Crystallization apparatus and crystallization method
Grant 7,608,148 - Matsumura , et al. October 27, 2 | 2009-10-27 |
Phase shifter for laser annealing
Grant 7,575,834 - Jyumonji August 18, 2 | 2009-08-18 |
Crystallization apparatus and crystallization method
Grant 7,572,335 - Taniguchi , et al. August 11, 2 | 2009-08-11 |
Crystallization method, thin film transistor manufacturing method, thin film transistor, display, and semiconductor device
Grant 7,560,321 - Kato , et al. July 14, 2 | 2009-07-14 |
Laser anneal apparatus
Grant 7,550,694 - Jyumonji , et al. June 23, 2 | 2009-06-23 |
Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus
Grant 7,540,921 - Matsumura , et al. June 2, 2 | 2009-06-02 |
Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display
Grant 7,537,660 - Taniguchi , et al. May 26, 2 | 2009-05-26 |
Crystallizing method, thin-film transistor manufacturing method, thin-film transistor, and display device
Grant 7,531,390 - Hiramatsu , et al. May 12, 2 | 2009-05-12 |
Thin-film semiconductor substrate, method of manufacturing thin-film semiconductor substrate, method of crystallization, apparatus for crystallization, thin-film semiconductor device, and method of manufacturing thin-film semiconductor device
Grant 7,518,252 - Hiramatsu , et al. April 14, 2 | 2009-04-14 |
Crystallization apparatus, crystallization method, and phase shifter
Grant 7,505,204 - Taniguchi , et al. March 17, 2 | 2009-03-17 |
Generation method of light intensity distribution, generation apparatus of light intensity distribution, and light modulation element assembly
Grant 7,499,147 - Taniguchi , et al. March 3, 2 | 2009-03-03 |
Image display apparatus using thin-film transistors
Grant 7,492,361 - Kawachi , et al. February 17, 2 | 2009-02-17 |
Thin-film transistor, method for manufacturing thin-film transistor, and display using thin-film transistors
Grant 7,485,505 - Nakazaki , et al. February 3, 2 | 2009-02-03 |
Liquid crystal pixel memory, liquid crystal display, and methods of driving the same
Grant 7,468,719 - Kawachi December 23, 2 | 2008-12-23 |
Thin-film transistor circuit, design method for thin-film transistor, design program for thin-film transistor circuit, design program recording medium, design library database, and display device
Grant 7,464,364 - Kawachi December 9, 2 | 2008-12-09 |
Light irradiation apparatus, crystallization apparatus, crystallization method and device
Grant 7,459,026 - Taniguchi , et al. December 2, 2 | 2008-12-02 |
Crystallization apparatus, crystallization method, device, optical modulation element, and display apparatus
Grant 7,445,674 - Taniguchi , et al. November 4, 2 | 2008-11-04 |
Thin-film forming method using silane and an oxidizing gas
Grant 7,446,060 - Goto , et al. November 4, 2 | 2008-11-04 |
Liquid crystal pixel memory, liquid crystal display, and methods of driving the same
Grant 7,425,940 - Kawachi September 16, 2 | 2008-09-16 |
Crystallization apparatus, crystallization method, and phase shifter
Grant 7,413,608 - Taniguchi , et al. August 19, 2 | 2008-08-19 |
Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus
Grant 7,410,848 - Jyumonji , et al. August 12, 2 | 2008-08-12 |
Method of manufacturing semiconductor device
Grant 7,407,873 - Nakamura , et al. August 5, 2 | 2008-08-05 |
Processing method, processing apparatus, crystallization method and crystallization apparatus using pulsed laser beam
Grant 7,405,141 - Jyumonji , et al. July 29, 2 | 2008-07-29 |
Laser crystallization apparatus
Grant 7,369,215 - Takami May 6, 2 | 2008-05-06 |
Light irradiation apparatus, crystallization apparatus, crystallization method, semiconductor device and light modulation element
Grant 7,361,221 - Matsumura , et al. April 22, 2 | 2008-04-22 |
Semiconductor device including semiconductor thin films having different crystallinity, substrate of the same, and manufacturing method of the same, and liquid crystal display and manufacturing method of the same
Grant 7,352,002 - Kimura , et al. April 1, 2 | 2008-04-01 |
Crystallization apparatus, crystallization method, and phase modulation device
Grant 7,347,897 - Kato , et al. March 25, 2 | 2008-03-25 |
Thin film transistor, semiconductor device, display, crystallization method, and method of manufacturing thin film transistor
Grant 7,335,910 - Kato , et al. February 26, 2 | 2008-02-26 |
Crystallization apparatus and method; manufacturing method of electronic device, electronic device, and optical modulation element
Grant 7,318,865 - Akita , et al. January 15, 2 | 2008-01-15 |
Method and apparatus for forming crystalline portions of semiconductor film
Grant 7,311,771 - Taniguchi , et al. December 25, 2 | 2007-12-25 |
Thin-film transistor formed on insulating substrate
Grant 7,309,900 - Nakano , et al. December 18, 2 | 2007-12-18 |
Method and apparatus for forming substrate for semiconductor or the like
Grant 7,307,727 - Takami December 11, 2 | 2007-12-11 |
Film-forming method, method of manufacturing semiconductor device, semiconductor device, method of manufacturing display device, and display device
Grant 7,307,028 - Goto , et al. December 11, 2 | 2007-12-11 |
Laser crystallization apparatus and laser crystallization method
Grant 7,292,320 - Takami November 6, 2 | 2007-11-06 |
Thin-film transistor, method for manufacturing thin-film transistor, and display using thin-film transistors
Grant 7,288,787 - Nakazaki , et al. October 30, 2 | 2007-10-30 |
Crystallization apparatus using pulsed laser beam
Grant 7,247,813 - Jyumonji , et al. July 24, 2 | 2007-07-24 |
Light application apparatus, crystallization apparatus and optical modulation element assembly
Grant 7,239,374 - Taniguchi , et al. July 3, 2 | 2007-07-03 |
Crystallization apparatus, crystallization method, method of manufacturing thin film transistor, thin film transistor, and display apparatus
Grant 7,232,982 - Takami June 19, 2 | 2007-06-19 |
Light irradiation apparatus, light irradiation method, crystallization apparatus, crystallization method, device, and light modulation element
Grant 7,227,679 - Taniguchi June 5, 2 | 2007-06-05 |
Crystallization apparatus and crystallization method
Grant 7,217,319 - Matsumura , et al. May 15, 2 | 2007-05-15 |
Crystallization apparatus, crystallization method, device and phase modulation element
Grant 7,214,270 - Taniguchi , et al. May 8, 2 | 2007-05-08 |
Laser annealing method
Grant 7,186,602 - Jyumonji , et al. March 6, 2 | 2007-03-06 |
Crystallization apparatus, crystallization method, and phase shift mask
Grant 7,172,841 - Taniguchi , et al. February 6, 2 | 2007-02-06 |
Memory circuit, display circuit, and display device
Grant 7,173,593 - Matsumura , et al. February 6, 2 | 2007-02-06 |
Method of picking up sectional image of laser light
Grant 7,157,677 - Jyumonji , et al. January 2, 2 | 2007-01-02 |
Interconnect, interconnect forming method, thin film transistor, and display device
Grant 7,138,715 - Kado , et al. November 21, 2 | 2006-11-21 |
Method and apparatus for forming substrate for semiconductor or the like
Grant 7,130,048 - Takami October 31, 2 | 2006-10-31 |
Thin-film semiconductor substrate, method of manufacturing thin-film semiconductor substrate, method of crystallization, apparatus for crystallization, thin-film semiconductor device, and method of manufacturing thin-film semiconductor device
Grant 7,105,419 - Hiramatsu , et al. September 12, 2 | 2006-09-12 |
Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display
Grant 7,101,436 - Taniguchi , et al. September 5, 2 | 2006-09-05 |
Semiconductor device including semiconductor thin films having different crystallinity, substrate of the same, and manufacturing method of the same, and liquid crystal display and manufacturing method of the same
Grant 7,087,505 - Kimura , et al. August 8, 2 | 2006-08-08 |
Thin film semiconductor device having a gate electrode insulator formed through high-heat oxidization
Grant 7,067,404 - Oana , et al. June 27, 2 | 2006-06-27 |
Crystallization apparatus, crystallization method, thin film transistor and display apparatus
Grant 7,056,626 - Taniguchi , et al. June 6, 2 | 2006-06-06 |
Method and apparatus for forming pattern on thin substrate or the like
Grant 7,046,341 - Taniguchi , et al. May 16, 2 | 2006-05-16 |
Crystallization apparatus, crystallization method, and phase shift mask and filter for use in these apparatus and method
Grant 7,018,749 - Taniguchi March 28, 2 | 2006-03-28 |
Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, thin film transistor, and display
Grant 7,011,709 - Taniguchi , et al. March 14, 2 | 2006-03-14 |
Crystallization apparatus, crystallization method, and phase shifter
Grant 7,001,461 - Taniguchi , et al. February 21, 2 | 2006-02-21 |
Method and apparatus for forming crystallized semiconductor layer, and method for manufacturing semiconductor apparatus
Grant 6,987,035 - Yamamoto , et al. January 17, 2 | 2006-01-17 |
Light emission type display apparatus
Grant 6,963,173 - Kawachi , et al. November 8, 2 | 2005-11-08 |
Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it
Grant 6,953,714 - Kimura , et al. October 11, 2 | 2005-10-11 |
Method and apparatus for forming pattern on thin substrate or the like
Grant 6,927,839 - Taniguchi , et al. August 9, 2 | 2005-08-09 |
Thin film semiconductor device having arrayed configuration of semiconductor crystals
App 20050161676 - Kimura, Yoshinobu ; et al. | 2005-07-28 |
Interconnect, interconnect forming method, thin film transistor, and display device
Grant 6,890,849 - Kado , et al. May 10, 2 | 2005-05-10 |
Thin film semiconductor device and its substrate sheet as well as the method for production thereof
App 20050085002 - Matsumura, Masakiyo ; et al. | 2005-04-21 |
Semiconductor device, annealing method, annealing apparatus and display apparatus
Grant 6,870,126 - Jyumonji , et al. March 22, 2 | 2005-03-22 |
Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it
Grant 6,828,178 - Matsumura , et al. December 7, 2 | 2004-12-07 |
Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it
App 20030132439 - Kimura, Yoshinobu ; et al. | 2003-07-17 |
| 