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Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20220301864 - ABURATANI; Yukinori ; et al. | 2022-09-22 |
Substrate processing apparatus and temperature measurement unit
Grant 11,424,146 - Aburatani , et al. August 23, 2 | 2022-08-23 |
Method of manufacturing semiconductor device
Grant 11,289,350 - Aburatani , et al. March 29, 2 | 2022-03-29 |
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate Support
App 20220005712 - Ichimura; Keita ; et al. | 2022-01-06 |
Substrate Processing Apparatus
App 20210395887 - OHASHI; Naofumi ; et al. | 2021-12-23 |
Substrate Processing Apparatus
App 20200312625 - YOSHINO; Teruo ; et al. | 2020-10-01 |
Method Of Manufacturing Semiconductor Device
App 20200035523 - ABURATANI; Yukinori ; et al. | 2020-01-30 |
Method of manufacturing semiconductor device
Grant 10,453,720 - Aburatani , et al. Oc | 2019-10-22 |
Plasma processing apparatus and method of manufacturing semiconductor device
Grant 10,403,478 - Yanai , et al. Sep | 2019-09-03 |
Substrate Processing Apparatus And Temperature Measurement Unit
App 20190019699 - ABURATANI; Yukinori ; et al. | 2019-01-17 |
Method of manufacturing semiconductor device
Grant 10,014,171 - Aburatani , et al. July 3, 2 | 2018-07-03 |
Method of Manufacturing Semiconductor Device
App 20170372894 - ABURATANI; Yukinori ; et al. | 2017-12-28 |
Substrate thermometry unit
Grant D795,715 - Aburatani August 29, 2 | 2017-08-29 |
Substrate thermometry unit
Grant D795,716 - Aburatani August 29, 2 | 2017-08-29 |
Substrate Processing Apparatus
App 20170081764 - ABURATANI; Yukinori ; et al. | 2017-03-23 |
Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device
App 20150371832 - YANAI; Hidehiro ; et al. | 2015-12-24 |
Substrate processing apparatus and method of manufacturing semiconductor device
Grant 9,082,797 - Aburatani , et al. July 14, 2 | 2015-07-14 |
Substrate processing apparatus and method of manufacturing semiconductor device
Grant 8,876,453 - Aburatani , et al. November 4, 2 | 2014-11-04 |
Substrate processing apparatus and semiconductor device manufacturing method
Grant 8,814,488 - Aburatani August 26, 2 | 2014-08-26 |
Method of manufacturing a semiconductor device
Grant 8,420,167 - Nakashima , et al. April 16, 2 | 2013-04-16 |
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
App 20130012035 - Aburatani; Yukinori ; et al. | 2013-01-10 |
Substrate processing apparatus and manufacturing method of a semiconductor device
Grant 8,277,161 - Aburatani , et al. October 2, 2 | 2012-10-02 |
Substrate processing apparatus and manufacturing method for semiconductor devices
Grant 8,128,333 - Aburatani March 6, 2 | 2012-03-06 |
Semiconductor manufacturing equipment
Grant D652,395 - Shimada , et al. January 17, 2 | 2012-01-17 |
Semiconductor manufacturing equipment
Grant D651,990 - Shimada , et al. January 10, 2 | 2012-01-10 |
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device
App 20110170989 - ABURATANI; Yukinori ; et al. | 2011-07-14 |
Substrate Processing Apparatus And Semiconductor Device Manufacturing Method
App 20100280653 - ABURATANI; Yukinori | 2010-11-04 |
Substrate Processing Apparatus
App 20100229416 - ABURATANI; Yukinori ; et al. | 2010-09-16 |
Substrate processing apparatus having gas side flow via gas inlet
Grant 7,700,054 - Hayashida , et al. April 20, 2 | 2010-04-20 |
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device
App 20090269937 - ABURATANI; Yukinori | 2009-10-29 |
Substrate processing apparatus, method of manufacturing semiconductor device, and reaction vessel
App 20090191718 - Nakashima; Seiyo ; et al. | 2009-07-30 |
Substrate processing apparatus and manufacturing method for semiconductor devices
App 20090185892 - Aburatani; Yukinori | 2009-07-23 |
Substrate processing apparatus and manufacturing method of a semiconductor device
App 20090003977 - Aburatani; Yukinori ; et al. | 2009-01-01 |
Substrate processing apparatus and semiconductor device manufacturing method
App 20080260502 - Aburatani; Yukinori | 2008-10-23 |
Substrate processing apparatus, method of manufacturing semiconductor device, and reaction vessel
App 20080173238 - Nakashima; Seiyo ; et al. | 2008-07-24 |
Substrate processing apparatus, method of manufacturing semiconductor device, and heating apparatus
App 20080153314 - Hayashida; Akira ; et al. | 2008-06-26 |
Substrate processing apparatus and manufacturing method for semiconductor devices
App 20080134483 - Aburatani; Yukinori | 2008-06-12 |
Substrate processing apparatus and substrate processing method
App 20060075972 - Nakashima; Seiyo ; et al. | 2006-04-13 |
Substrate processing apparatus and method for manufacturing a semiconductor device employing same
App 20020094600 - Aburatani, Yukinori ; et al. | 2002-07-18 |
Substrate processing apparatus and substrate processing method
App 20020017363 - Nakashima, Seiyo ; et al. | 2002-02-14 |
Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method
Grant 6,190,104 - Ikeda , et al. February 20, 2 | 2001-02-20 |
Substrate transferring mechanism
Grant 6,143,083 - Yonemitsu , et al. November 7, 2 | 2000-11-07 |
Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section
Grant 6,066,210 - Yonemitsu , et al. May 23, 2 | 2000-05-23 |
Substrate processing apparatus
Grant 5,788,447 - Yonemitsu , et al. August 4, 1 | 1998-08-04 |
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