Abe; Tamotsu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Abe; Tamotsu.The latest application filed is for "extreme ultraviolet light generating apparatus".
Company Profile
3.64.52
- Abe; Tamotsu - Hiratsuka JP
- Abe; Tamotsu - Oyama JP
- ABE; Tamotsu - Oyama-shi JP
- Abe; Tamotsu - Fujisawa JP
- ABE; Tamotsu - Hiratsuka-shi JP
- Abe; Tamotsu - Fujisawa-shi JP
- Abe; Tamotsu - Kanagawa JP
- Abe; Tamotsu - Odawara JP
- Abe; Tamotsu - Tokyo JP
- ABE; Tamotsu - Odawara-shi JP
Patent Activity
| Patent | Date |
|---|---|
| Extreme ultraviolet light generation apparatus Grant 10,764,986 - Nagai , et al. Sep | 2020-09-01 |
| Extreme ultraviolet light generation apparatus Grant 10,314,152 - Nagai , et al. | 2019-06-04 |
| Extreme ultraviolet light generation apparatus Grant 10,172,225 - Suzuki , et al. J | 2019-01-01 |
| Extreme ultraviolet light generating apparatus Grant 10,126,657 - Hosoda , et al. November 13, 2 | 2018-11-13 |
| Extreme ultraviolet light generating apparatus Grant 10,102,938 - Yabu , et al. October 16, 2 | 2018-10-16 |
| Extreme Ultraviolet Light Generating Apparatus App 20180253010 - HOSODA; Hirokazu ; et al. | 2018-09-06 |
| Extreme Ultraviolet Light Generating Apparatus App 20180240562 - YABU; Takayuki ; et al. | 2018-08-23 |
| Extreme ultraviolet light generation apparatus Grant 9,986,629 - Suzuki , et al. May 29, 2 | 2018-05-29 |
| Extreme Ultraviolet Light Generation Apparatus App 20180146536 - SUZUKI; Toru ; et al. | 2018-05-24 |
| Extreme ultraviolet light generation apparatus Grant 9,942,973 - Abe , et al. April 10, 2 | 2018-04-10 |
| Extreme ultraviolet light generation device Grant 9,872,372 - Ueda , et al. January 16, 2 | 2018-01-16 |
| Bread conveying apparatus Grant 9,731,848 - Suzuki , et al. August 15, 2 | 2017-08-15 |
| Extreme Ultraviolet Light Generation Apparatus App 20170215267 - ABE; Tamotsu ; et al. | 2017-07-27 |
| Extreme Ultraviolet Light Generation Device App 20170094767 - UEDA; Atsushi ; et al. | 2017-03-30 |
| Extreme Ultraviolet Light Generation Apparatus App 20170064800 - NAGAI; Shinji ; et al. | 2017-03-02 |
| Extreme Ultraviolet Light Generation Apparatus App 20170055336 - NAGAI; Shinji ; et al. | 2017-02-23 |
| Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system Grant 9,578,730 - Abe , et al. February 21, 2 | 2017-02-21 |
| Extreme ultraviolet light generation apparatus Grant 9,510,433 - Nagai , et al. November 29, 2 | 2016-11-29 |
| Extreme Ultraviolet Light Generation Apparatus App 20160234920 - SUZUKI; Toru ; et al. | 2016-08-11 |
| Extreme Ultraviolet Light Generation Apparatus And Extreme Ultraviolet Light Generation System App 20160135276 - ABE; Tamotsu ; et al. | 2016-05-12 |
| Target supply device and target supply method Grant 9,310,686 - Yabu , et al. April 12, 2 | 2016-04-12 |
| Extreme Ultraviolet Light Generation Apparatus App 20150008345 - NAGAI; Shinji ; et al. | 2015-01-08 |
| Extreme ultraviolet light generation apparatus Grant 8,872,142 - Nagai , et al. October 28, 2 | 2014-10-28 |
| Bread Conveying Apparatus And Bread Slicing Apparatus App 20140245703 - Suzuki; Minoru ; et al. | 2014-09-04 |
| Laser device with optical element module on separate plate Grant 8,817,838 - Abe , et al. August 26, 2 | 2014-08-26 |
| Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus Grant 8,804,902 - Someya , et al. August 12, 2 | 2014-08-12 |
| Chamber apparatus and extreme ultraviolet light generation system Grant 8,759,804 - Nishisaka , et al. June 24, 2 | 2014-06-24 |
| Method And Apparatus For Cleaning Collector Mirror In Euv Light Generator App 20140166046 - Asayama; Takeshi ; et al. | 2014-06-19 |
| Target generation device Grant 8,705,035 - Ishihara , et al. April 22, 2 | 2014-04-22 |
| Extreme ultra violet light source apparatus Grant 8,698,116 - Moriya , et al. April 15, 2 | 2014-04-15 |
| Extreme ultraviolet light generation apparatus Grant 8,698,112 - Yabu , et al. April 15, 2 | 2014-04-15 |
| Target Supply Device And Target Supply Method App 20140034759 - YABU; Takayuki ; et al. | 2014-02-06 |
| Extreme ultraviolet light generation apparatus Grant 8,629,417 - Nagai , et al. January 14, 2 | 2014-01-14 |
| Extreme ultraviolet light generation system Grant 8,624,208 - Nagai , et al. January 7, 2 | 2014-01-07 |
| Chamber Apparatus And Extreme Ultraviolet Light Generation System App 20140001369 - NISHISAKA; Toshihiro ; et al. | 2014-01-02 |
| Extreme ultraviolet light source apparatus Grant 8,569,723 - Nagai , et al. October 29, 2 | 2013-10-29 |
| Extreme ultraviolet light source apparatus Grant 8,558,202 - Yanagida , et al. October 15, 2 | 2013-10-15 |
| Extreme Ultra Violet Light Source Apparatus App 20130240762 - MORIYA; Masato ; et al. | 2013-09-19 |
| Method and apparatus for cleaning collector mirror in EUV light generator Grant 8,536,550 - Asayama , et al. September 17, 2 | 2013-09-17 |
| Extreme ultra violet light source apparatus Grant 8,536,551 - Moriya , et al. September 17, 2 | 2013-09-17 |
| Collector Mirror Exchanging Apparatus And Method For Extreme Ultraviolet Light Source Apparatus App 20130221247 - Someya; Hiroshi ; et al. | 2013-08-29 |
| Extreme ultraviolet light source apparatus Grant 8,507,883 - Endo , et al. August 13, 2 | 2013-08-13 |
| Target Generation Device App 20130186976 - ISHIHARA; Takanobu ; et al. | 2013-07-25 |
| Apparatus for and method of withdrawing ions in EUV light production apparatus Grant 8,492,738 - Ueno , et al. July 23, 2 | 2013-07-23 |
| Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus Grant 8,477,412 - Someya , et al. July 2, 2 | 2013-07-02 |
| Extreme ultraviolet light source apparatus Grant 8,450,706 - Abe , et al. May 28, 2 | 2013-05-28 |
| Extreme ultraviolet light source apparatus Grant 8,445,876 - Suganuma , et al. May 21, 2 | 2013-05-21 |
| Extreme ultraviolet light source apparatus and target supply device Grant 8,445,877 - Someya , et al. May 21, 2 | 2013-05-21 |
| Extreme ultraviolet light source apparatus Grant 8,436,328 - Yanagida , et al. May 7, 2 | 2013-05-07 |
| Extreme ultra violet light source apparatus Grant 8,324,601 - Hoshino , et al. December 4, 2 | 2012-12-04 |
| Method For Cleaning Optical Element Of Euv Light Source Device And Optical Element Cleaning Device App 20120298134 - Moriya; Masato ; et al. | 2012-11-29 |
| Extreme Ultraviolet Light Generation Apparatus App 20120267553 - NAGAI; Shinji ; et al. | 2012-10-25 |
| Extreme ultraviolet light source apparatus Grant 8,294,129 - Moriya , et al. October 23, 2 | 2012-10-23 |
| Apparatus for and method of withdrawing ions in EUV light production apparatus Grant 8,288,743 - Ueno , et al. October 16, 2 | 2012-10-16 |
| Extreme Ultra Violet Light Source Apparatus App 20120228527 - ABE; Tamotsu ; et al. | 2012-09-13 |
| Extreme Ultraviolet Light Generation Apparatus App 20120223257 - NAGAI; Shinji ; et al. | 2012-09-06 |
| Method for cleaning optical element of EUV light source device and optical element cleaning device Grant 8,256,441 - Moriya , et al. September 4, 2 | 2012-09-04 |
| Apparatus For And Method Of Withdrawing Ions In Euv Light Production Apparatus App 20120217414 - UENO; Yoshifumi ; et al. | 2012-08-30 |
| Extreme Ultraviolet Light Generation Apparatus App 20120217422 - YABU; Takayuki ; et al. | 2012-08-30 |
| Extreme ultraviolet light generation apparatus Grant 8,242,474 - Nagai , et al. August 14, 2 | 2012-08-14 |
| Extreme ultra violet light source apparatus Grant 8,212,228 - Abe , et al. July 3, 2 | 2012-07-03 |
| Extreme ultraviolet light source apparatus Grant 8,173,984 - Moriya , et al. May 8, 2 | 2012-05-08 |
| Extreme Ultraviolet Light Source Apparatus App 20120091893 - YANAGIDA; Tatsuya ; et al. | 2012-04-19 |
| Chamber Apparatus And Extreme Ultraviolet Light Generation System App 20110309260 - Nishisaka; Toshihiro ; et al. | 2011-12-22 |
| Extreme Ultraviolet Light Source Apparatus App 20110266467 - NAGAI; Shinji ; et al. | 2011-11-03 |
| Laser System App 20110261844 - ABE; Tamotsu ; et al. | 2011-10-27 |
| Extreme Ultraviolet Light Generation System App 20110226745 - Nagai; Shinji ; et al. | 2011-09-22 |
| Extreme Ultraviolet Light Generation Apparatus App 20110204249 - NAGAI; Shinji ; et al. | 2011-08-25 |
| Extreme ultraviolet light source apparatus and nozzle protection device Grant 8,003,962 - Someya , et al. August 23, 2 | 2011-08-23 |
| Laser system Grant 8,000,361 - Abe , et al. August 16, 2 | 2011-08-16 |
| Extreme ultraviolet light source apparatus Grant 7,999,241 - Nagai , et al. August 16, 2 | 2011-08-16 |
| Extreme Ultraviolet Light Source Apparatus App 20110180734 - MORIYA; Masato ; et al. | 2011-07-28 |
| Extreme Ultraviolet Light Source Apparatus And Nozzle Protection Device App 20110174996 - SOMEYA; Hiroshi ; et al. | 2011-07-21 |
| Extreme ultra violet light source apparatus Grant 7,923,705 - Moriya , et al. April 12, 2 | 2011-04-12 |
| Extreme Ultra Violet Light Source Apparatus App 20110057126 - HOSHINO; HIDEO ; et al. | 2011-03-10 |
| Extreme ultra violet light source apparatus Grant 7,880,153 - Suganuma , et al. February 1, 2 | 2011-02-01 |
| Extreme ultra violet light source apparatus Grant 7,842,937 - Hoshino , et al. November 30, 2 | 2010-11-30 |
| Extreme Ultraviolet Light Source Apparatus App 20100181503 - Yanagida; Tatsuya ; et al. | 2010-07-22 |
| Extreme ultra violet light source apparatus App 20100176310 - Moriya; Masato ; et al. | 2010-07-15 |
| Extreme ultraviolet light source apparatus App 20100171049 - Moriya; Masato ; et al. | 2010-07-08 |
| Extreme Ultraviolet Light Source Apparatus App 20100140513 - Nagai; Shinji ; et al. | 2010-06-10 |
| Extreme Ultraviolet Light Source Apparatus App 20100140512 - SUGANUMA; Takashi ; et al. | 2010-06-10 |
| Extreme ultra violet light source apparatus Grant 7,732,794 - Abe , et al. June 8, 2 | 2010-06-08 |
| Extreme Ultraviolet Light Source Apparatus App 20100090132 - ENDO; Akira ; et al. | 2010-04-15 |
| Extreme ultra violet light source apparatus Grant 7,683,355 - Moriya , et al. March 23, 2 | 2010-03-23 |
| Method for cleaning optical element of EUV light source device and optical element cleaning device App 20100025231 - Moriya; Masato ; et al. | 2010-02-04 |
| Extreme ultraviolet light source apparatus and nozzle protection device App 20100019173 - Someya; Hiroshi ; et al. | 2010-01-28 |
| Extreme Ultra Violet Light Source Apparatus App 20090314967 - MORIYA; Masato ; et al. | 2009-12-24 |
| Method And Apparatus For Cleaning Collector Mirror In Euv Light Generator App 20090301517 - Asayama; Takeshi ; et al. | 2009-12-10 |
| Exreme ultraviolet light source apparatus App 20090272919 - Abe; Tamotsu ; et al. | 2009-11-05 |
| Apparatus For And Method Of Withdrawing Ions In Euv Light Production Apparatus App 20090261242 - UENO; Yoshifumi ; et al. | 2009-10-22 |
| Laser system App 20090232171 - Abe; Tamotsu ; et al. | 2009-09-17 |
| Extreme ultra violet light source apparatus App 20090224181 - Abe; Tamotsu ; et al. | 2009-09-10 |
| Laser Device App 20090103575 - ABE; Tamotsu ; et al. | 2009-04-23 |
| Extreme ultra violet light source apparatus App 20080210889 - Suganuma; Takashi ; et al. | 2008-09-04 |
| Extreme ultra violet light source apparatus App 20080197298 - Abe; Tamotsu ; et al. | 2008-08-21 |
| Extreme ultra violet light source apparatus App 20080197299 - Hoshino; Hideo ; et al. | 2008-08-21 |
| Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus App 20080104828 - Someya; Hiroshi ; et al. | 2008-05-08 |
| Extreme ultra violet light source apparatus App 20080073598 - Moriya; Masato ; et al. | 2008-03-27 |
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