U.S. patent number RE39,466 [Application Number 10/718,511] was granted by the patent office on 2007-01-16 for flow rate sensor implementing a plurality of inner tubes located within a sensor tube.
This patent grant is currently assigned to MKS Instruments, Inc.. Invention is credited to Isao Suzuki.
United States Patent |
RE39,466 |
Suzuki |
January 16, 2007 |
Flow rate sensor implementing a plurality of inner tubes located
within a sensor tube
Abstract
There is provided a flow rate sensor comprising: a pair of
heating resistors operable to heat a sensor tube; a temperature
sensor operable to control respective temperatures of the heating
resistors; and a case operable to hold the heating resistors and
the temperature sensor. The flow rate sensor is adapted to detect a
flow rate of a fluid flowing in the sensor tube based on variations
of voltages applied to the heating resistors, wherein the
variations occur according to the flow rate of the fluid. The flow
rate sensor further comprises a voltage applying device operable to
arbitrarily set an increase in temperature of each of the heating
resistors. The sensor tube has opposite ends thereof thermally
connected to the case. The temperature sensor is positioned to be
equidistant from the opposite ends of the sensor.
Inventors: |
Suzuki; Isao (Akiruno,
JP) |
Assignee: |
MKS Instruments, Inc.
(Wilmington, MA)
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Family
ID: |
37648869 |
Appl.
No.: |
10/718,511 |
Filed: |
November 20, 2003 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
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Reissue of: |
09451927 |
Dec 1, 1999 |
06318171 |
Nov 20, 2001 |
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Foreign Application Priority Data
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Dec 1, 1998 [JP] |
|
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10-341800 |
Jun 18, 1999 [JP] |
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11-172854 |
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Current U.S.
Class: |
73/204.27 |
Current CPC
Class: |
G01F
1/6983 (20130101); G01F 1/68 (20130101) |
Current International
Class: |
G01F
1/68 (20060101) |
Field of
Search: |
;73/204.22,204.27,204.15,204.21,202.5 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Patel; Harshad
Attorney, Agent or Firm: McDermott Will & Emery LLP
Claims
What is claimed is:
1. A flow rate sensor for detecting a flow rate of a fluid, said
flow rate sensor comprising: a sensor tube operable to allow a
fluid to flow therein; a sensor tube guide adapted to cover said
sensor tube and contact said sensor tube; a plurality of narrow
inner tubes provided within said sensor tube; a pair of heating
resistors operable to heat said sensor tube, said pair of heating
resistors provided on said sensor tube guide; a temperature sensor
operable to control temperatures of said pair of heating resistors,
said temperature sensor being positioned equidistant from opposite
ends of said sensor tube; a case adapted to hold said pair of
heating resistors and said temperature sensor; and a voltage
applying device operable to set an increase in temperature of each
of said pair of heating resistors; wherein said sensor tube has
opposite ends thereof thermally connected to said case; and wherein
said flow rate sensor is adapted to detect a flow rate of the fluid
flowing in said sensor tube based on variations of voltages applied
to said pair of heating resistors, the variations occurring
according to the flow rate of the fluid.
2. A flow rate sensor as claimed in claim 1, wherein the increase
in temperature of each of said pair of heating resistors is
5.degree. C. or less than a temperature of said temperature
sensor.
3. A flow rate sensor as claimed in claim 1, wherein said sensor
tube has a U-shaped configuration.
4. A flow rate sensor as claimed in claim 3, wherein said tube
guide comprises an upper case and a lower case, each of said upper
and said lower cases having a U-shaped groove for containing the
U-shaped sensor tube, and said upper and said lower cases being
connected together via screws.
5. A flow rate sensor as claimed in claim 1, wherein said sensor
tube guide is made of a material having a high heat
conductivity.
6. A flow rate sensor as claimed in claim 1, wherein said sensor
tube guide encloses the sensor tube and is removably provided in
said case.
7. A flow rate sensor as claimed in claim 1, wherein said pair of
heating resistors comprise metallic thin films.
8. A flow rate sensor as claimed in claim 1, wherein said case
comprises an upper case and a lower case, wherein said upper case
and said lower case are fixedly connected to each other via
screws.
.Iadd.9. A flow rate sensor for detecting a flow rate of a fluid,
the flow rate sensor comprising: a sensor tube operable to allow a
fluid to flow therein; a plurality of inner tubes provided within
the sensor tube; heating resistors attached to the sensor tube, for
heating the sensor tube; a temperature sensor operable to control
temperatures of the heating resistors; and a voltage applying
device operable to set an increase in temperature of each of the
heating resistors; wherein the flow rate sensor is adapted to
detect a flow rate of the fluid flowing in the sensor tube based on
variations of voltages applied to the heating resistors, the
variations occurring according to the flow rate of the
fluid..Iaddend.
.Iadd.10. A flow rate sensor as claimed in claim 9, wherein the
sensor tube has a U-shaped configuration..Iaddend.
.Iadd.11. A flow rate sensor as claimed in claim 9, wherein the
sensor tube is made of stainless steel..Iaddend.
.Iadd.12. A flow rate sensor as claimed in claim 9, wherein the
sensor tube has an outer diameter of 4 mm and an inner diameter of
3 mm..Iaddend.
.Iadd.13. A flow rate sensor as claimed in claim 9, wherein the
inner tubes are made of stainless steel..Iaddend.
.Iadd.14. A flow rate sensor as claimed in claim 9, wherein the
inner tubes each have an outer diameter of 1.0 mm and an inner
diameter of 0.8 mm..Iaddend.
.Iadd.15. A flow rate sensor as claimed in claim 9, wherein the
inner tubes are provided within the sensor tube, such as that
respective outer wall surfaces of the inner tubes are in contact
with each other..Iaddend.
.Iadd.16. A flow rate sensor as claimed in claim 9, wherein the
inner tubes are provided within the sensor tube, such that
respective outer wall surfaces of the inner tubes are in contact
with the sensor tube..Iaddend.
.Iadd.17. A flow rate sensor as claimed in claim 9, comprising
three of the inner tubes within the sensor tube..Iaddend.
.Iadd.18. A flow rate sensor as claimed in claim 9, wherein the
heating resistors comprise metallic thin films..Iaddend.
.Iadd.19. A flow rate sensor as claimed in claim 9, wherein the
heating resistors comprise a wire having an outer diameter of 30
microns and a resistance of about 0.5 .OMEGA./mm, and the length of
the wire is determined so that each of the heating resistors has a
resistance of about 1,000.OMEGA...Iaddend.
.Iadd.20. A flow rate sensor as claimed in claim 9, and further
including a bypass tube connected in parallel with the sensor
tube..Iaddend.
Description
BACKGROUND OF THE INVENTION
The present invention relates to a flow rate sensor capable of
conducting measurement of a fluid flow rate with high sensitivity,
without the need to heat the fluid to a high temperature.
In a process for manufacturing semiconductors, a flow rate sensor
is used as a flow rate controller for stably supplying a liquid
material, such as TEOS (tetraethyl orthosilicate), a copper (I)
compound, DMAH (dymethyl aluminum hydride) or the like. For use as
such a flow rate sensor, in many cases, a thermal type flow rate
sensor has been conventionally used. A thermal type flow rate
sensor applies heat to a fluid flowing through a sensor tube and
detects a quantity of heat carried away by the flowing fluid.
In a conventional thermal type flow rate sensor, a heating
temperature for the sensor tube is higher than room temperature by
several tens of degrees Celsius. However, some types of liquid
materials for semiconductors are extremely unstable relative to
heat and form reaction products as a result of heat applied to the
sensor tube. Therefore, the sensor tube must be periodically
cleaned. Further, as a result of heat applied to the sensor tube, a
convection current is generated in air outside the sensor tube, so
that a tilt error due to the direction of mounting of the sensor
occurs.
Further, when a liquid flows in the sensor tube, air bubbles are
likely to be formed in the liquid as a result of heat applied to
the sensor tube. The formation of air bubbles can result in large
measurement errors.
As a device for heating the sensor tube of the above-mentioned
thermal type flow rate sensor, a heating resistor in the form of a
wire is wound in a coil around an outer wall surface of the sensor
tube so as to provide a resistance of about 100 to 300.OMEGA., and
a current is supplied to the heating resistor for heating. The
length of the coil is about several mm, and the sensor tube has an
inner diameter of about 0.3 mm and an outer diameter of about 0.4
mm. About 100 mW of power is supplied to the heating resistor, so
as to heat the heating resistor to about 80.degree. C. A fluid is
flowed in the sensor tube in this state, and variation of a
resistance of the heating resistor is detected during flow of the
fluid (reference is made to, for example, U.S. Pat. No.
3,938,384).
Generally, in thermal type flow rate sensors, an output flow rate
from the sensor coincides with an actual flow rate, as long as
laminar flow of the fluid can be maintained in the sensor tube.
When a velocity of the fluid becomes high, turbulent flow is
generated. In this case, the output flow rate becomes lower than
the actual flow rate. To enable accurate measurement of a high flow
rate of the fluid, a sensor tube having a large diameter and a
sufficiently large length should be used. However, such a sensor
tube is too large and is unsuitable for practical use. Therefore,
conventionally a fluid flow has been divided between a sensor
portion in which the flow rate of the fluid is detected in a range
of 1 cc/min. or less and a bypass portion for increasing the flow
rate. In this technique, no detection of the flow rate is conducted
at the bypass portion, so that the bypass can be designed without
restraint. Therefore, various arrangements of a small flow rate
sensor of this type have been developed.
However, in a flow rate sensor of this type, the inner diameter of
the sensor tube is small, so that the flow rate which can be
measured by the sensor is limited. In order to measure a flow rate
exceeding a certain level, it is necessary to provide a bypass
portion in which a fluid flows at a flow rate proportional to that
in the sensor portion. This necessitates use of a complicated
sensor, and errors arising from the use of a divided flow can
result. Further, when the bypass portion is clogged, a large
measurement error is likely to occur.
SUMMARY OF THE INVENTION
In view of the above, the present invention has been made. It is an
object of the present invention to provide a flow rate sensor which
is free from the above-mentioned problems accompanied by
conventional thermal type flow rate sensors and which is capable of
conducting measurement of a fluid flow rate at a low heating
temperature for the sensor tube.
According to the present invention, there is provided a flow rate
sensor comprising: a pair of heating resistors operable to heat a
sensor tube; a temperature sensor operable to control respective
temperatures of the heating resistors; and a case operable to hold
the heating resistors and the temperature sensor.
The flow rate sensor is adapted to detect a flow rate of a fluid
flowing in the sensor tube, based on variations of voltages applied
to the heating resistors, wherein the variations occur according to
the flow rate of the fluid. The sensor further comprises a voltage
applying device operable to arbitrarily set an increase in
temperature of each of the heating resistors. The sensor tube has
opposite ends thereof thermally connected to the case. The
temperature sensor is positioned to be equidistant from the
opposite ends of the sensor tube.
In the present invention, an increase in temperature of the heating
resistors may be 5.degree. C. or less from a temperature of the
temperature sensor.
Further, the sensor tube may have a U-shaped configuration.
The sensor tube may be at least partially covered with a material
having high heat conductivity.
Further, a plurality of narrow inner tubes may be provided within
the sensor tube.
Further, a sensor tube guide made of a material having high heat
conductivity and adapted to cover the sensor tube may be provided
on the sensor tube, the sensor tube guide having the heating
resistors provided thereon.
Further, the sensor tube guide may enclose the sensor tube and may
be removably provided in the case.
Further, the heating resistors may comprise metallic thin
films.
The foregoing and other objects, features and advantages of the
present invention will be apparent from the following detailed
description and appended claims taken in connection with the
accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 shows a relationship between the resistance of and the power
supplied to a heating resistor for explaining the principle of a
flow rate sensor of the present invention.
FIG. 2 is a plan view of the flow rate sensor according to a first
embodiment of the present invention in which an upper case is
removed.
FIG. 3 is a cross-sectional view of the flow rate sensor according
to the first embodiment of the present invention.
FIG. 4 is a circuit diagram of the flow rate sensor of the present
invention.
FIG. 5 is a plan view of the flow rate sensor according to a second
embodiment of the present invention in which an upper case is
removed.
FIG. 6 is a cross-sectional view of the flow rate sensor according
to the second embodiment of the present invention.
FIG. 7 is a longitudinal cross-sectional view of a sensor tube used
for the flow rate sensor according to the second embodiment of the
present invention.
FIG. 8 is a cross-sectional view of the sensor tube of FIG. 7
according to the second embodiment of the present invention taken
along the line X--X.
FIG. 9 is a graph showing output characteristics of the flow rate
sensor according to the second embodiment of the present
invention.
FIG. 10a is a plan view of a lower case of a sensor tube guide used
for the flow rate sensor according to the second embodiment of the
present invention.
FIG. 10b is a bottom view of the lower case of the sensor tube
guide used for the flow rate sensor according to the second
embodiment of the present invention.
FIG. 11a is a plan view of a lower case of the flow rate sensor
according to the second embodiment of the present invention.
FIG. 11b is a bottom view of the lower case of the flow rate sensor
according to the second embodiment of the present invention.
FIG. 12 is a longitudinal cross-sectional view of a sensor tube
used for a flow rate sensor according to a third embodiment of the
present invention.
DETAILED DESCRIPTION OF THE INVENTION
Hereinbelow, a flow rate sensor of the present invention is
described, referring to FIGS. 1 to 12. In FIGS. 1 through 12, the
same parts or portions are designated by the same reference
numerals and characters, and overlapping explanations thereof are
omitted. First, the principle of the flow rate sensor of the
present invention is explained. Generally, in thermal type flow
rate sensors, when the power applied to the heating resistor is
increased to thereby increase the heating temperature, the
sensitivity of the sensor becomes high. Therefore, as a method for
improving the sensitivity of the thermal type flow rate sensor, a
method of increasing the voltage applied to the heating resistor is
generally employed.
However, the above-mentioned method cannot be applied to a fluid
susceptible to heat. Therefore, the inventor of the present
invention has investigated an output sensitivity of the thermal
type flow rate sensor when the power applied to the heating
resistor is maintained at a predetermined level. As a result, a
characteristic curve b such as indicated in a graph shown in FIG. 1
has been obtained. That is, it has been found that when a
resistance R of the heating resistor increases, a detection
sensitivity (relative sensitivity) of the sensor increases in
proportion to the square of the resistance R of the heating
resistor.
On the other hand, when the resistance R of the heating resistor is
increased while maintaining a voltage V applied to the heating
resistor at a predetermined level, a power P supplied to the
heating resistor decreases as indicated by curve a shown in the
graph of FIG. 1. In view of this fact and the above-mentioned
finding that the detection sensitivity becomes high as the
resistance of the heating resistor becomes high, the inventor of
the present invention has found that when a measurement range of
flow rate is appropriately selected, it is possible to obtain a
flow rate sensor having a desired sensitivity. Specifically, the
inventor of the present invention has found from results of
experiments that sufficient sensitivity can be obtained by using
the heating resistor having a resistance of about 600.OMEGA., even
when the power applied to the heating resistor is as low as about
25 mW.
When the power applied to the heating resistor becomes low, the
heating temperature also becomes low, thereby enabling use of the
sensor for the heat-susceptible fluid. On the other hand, when the
heating temperature is low, the sensor is likely to be affected by
room temperature and the like. This can be avoided, however, by
controlling the temperature of the heating resistor by enabling
respective temperatures of opposite ends of the sensor tube to be
the same and controlling a value corresponding to each of the
respective temperatures.
FIGS. 2 and 3 show an arrangement of a flow rate sensor according
to a first embodiment of the present invention. A rectangular upper
case 1A and a rectangular lower case 1B are fixedly connected to
each other via screws, to thereby obtain a case 1. Each of the
upper case 1A and the lower case 1B includes: a U-shaped groove 2
which provides a space for containing a central portion of a
U-shaped sensor tube 32; bore portions 4 for containing circular
flanges 3 to be fitted onto opposite end portions of the sensor
tube 32; and connecting grooves 5 for connecting the groove 2 and
the bore portions 4. The sensor tube 32 is made of stainless steel
(JIS SUS 316) and has an outer diameter of 1.6 mm and an inner
diameter of 0.8 mm.
The connecting grooves 5 are formed so as to provide a diameter
such that the sensor tube 32 and the case 1 make contact with each
other. Therefore, the opposite end portions of the sensor tube 32
are thermally connected to the case 1 through the flanges 3 and are
also thermally connected to the case 1 at the connecting grooves 5.
Threaded bores 6 are formed in each of the upper case 1A and the
lower case 1B for accommodating the screws for fixedly connecting
the upper case 1A and the lower case 1B.
The sensor tube 32 comprises a U-shaped bent portion and straight
portions extending to the U-shaped bent portion. A pair of heating
resistors 35A and 35B are provided at the straight portions of the
sensor tube 32. As each of the heating resistors 35A and 35B, a
wire having an outer diameter of 30 microns and a resistance of
about 0.5.OMEGA./mm (length) is used. The length of the wire is
determined so that each of the heating resistors 35A and 35B has a
resistance of about 1,000.OMEGA.. In the lower case 1B, a space 8
for containing a temperature sensor 7 is formed at a central
position between the right-hand and left-hand connecting grooves 5.
The temperature sensor 7 is used for controlling respective
temperatures of the heating resistors 35A and 35B.
Seven terminals 9 are provided so as to protrude from the lower
case 1B on a back side thereof opposite to a side on which the
groove 2 is formed. Four terminals 9 are connected to opposite ends
of the heating resistor 35A and opposite ends of the heating
resistor 35B. The remaining three terminals 9 are connected to
three leads of the temperature sensor 7.
An example of a circuit diagram of the flow rate sensor of the
present invention is shown in FIG. 4. In this example, a heating
resistor R.sub.1 (corresponding to the heating resistor 35A) and a
heating resistor R.sub.2 (corresponding to the heating resistor
35B) are provided on the sensor tube 32 and a fluid is caused to
flow in a direction indicated by an arrow X. A voltage and a
current are supplied from a power source (not shown) through a
transistor 112 to a bridge circuit including the heating resistor
R.sub.1. The voltage and current from the power source are also
supplied through a transistor 113 to a bridge circuit including the
heating resistor R.sub.2. The current from the transistor 112 flows
into a heating resistor R.sub.3 and a heating resistor R.sub.7. In
this circuit, the heating resistor R.sub.7 is connected to the
earth through a temperature measurement matching resistor R.sub.5
having a temperature coefficient equal to that of the temperature
sensor 7.
The current from the transistor 113 flows into a heating resistor
R.sub.4 and a heating resistor R.sub.8. In this circuit, the
heating resistor R.sub.8 is connected to the earth through a
temperature measurement matching resistor R.sub.6 having a
temperature coefficient equal to that of the temperature sensor 7.
The voltages drawn from the connection between the heating resistor
R.sub.3 and the heating resistor R.sub.1 and the connection between
the heating resistor R.sub.7 and the temperature measurement
matching resistor R.sub.5 (having the temperature coefficient equal
to that of the temperature sensor 7) are supplied to a comparator
114, where the amount of difference between these voltages is
obtained. A base current for the transistor 112 is controlled so
that the bridge circuit including the heating resistor R.sub.1
balances. Further, the voltages drawn from the connection between
the heating resistor R.sub.4 and the heating resistor R.sub.2 and
the connection between the heating resistor R.sub.8 and the
temperature measurement matching resistor R.sub.6 (having the
temperature coefficient equal to that of the temperature sensor 7)
are supplied to a comparator 115, where the amount of difference
between these voltages is obtained. A base current for the
transistor 113 is controlled so that the bridge circuit including
the heating resistor R.sub.2 balances. As the temperature
measurement matching resistor having the temperature coefficient
equal to that of the temperature sensor 7, the resistor described
in Japanese Utility Model Registration No. 2567550 can be used.
In the above-mentioned arrangement, respective temperatures of the
heating resistors R.sub.1 and R.sub.2 are controlled so that they
are higher than those of the temperature measurement matching
resistors R.sub.5 and R.sub.6 by 3.degree. C. Illustratively
stated, the value of resistance of each of the heating resistors
R.sub.7 and R.sub.8 is set to 1,076.OMEGA. and, as each of the
temperature measurement matching resistors R.sub.5 and R.sub.6, a
platinum thin-film resistor having a resistance of 1 k.OMEGA. at
0.degree. C. is used. The temperature measurement matching
resistors R.sub.5 and R.sub.6 have a temperature coefficient of
about 3,800 ppm. Therefore, each of the temperature measurement
matching resistors R.sub.5 and R.sub.6 has a resistance of
1,076.OMEGA. at room temperature (20.degree. C.).
As each of the heating resistors R.sub.1 and R.sub.2, use is made
of a resistor having a temperature coefficient of about 3,800 ppm
which is the same as the temperature coefficient of the temperature
measurement matching resistors R.sub.5 and R.sub.6. As mentioned
above, the temperatures of the heating resistors R.sub.1 and
R.sub.2 are 3.degree. C. higher than those of the temperature
measurement matching resistors R.sub.5 and R.sub.6, that is,
23.degree. C. Therefore, as each of the heating resistors R.sub.3
and R.sub.4, a resistor having a resistance of 1,087.OMEGA. is
used. In this arrangement, a current is supplied to the bridge
circuits until respective temperatures of the heating resistors
R.sub.1 and R.sub.2 become 23.degree. C. and the value of a
resistance of each of the heating resistors R.sub.1 and R.sub.2
becomes 1,087.OMEGA., to thereby conduct heating. In this instance,
the current is also supplied to each of the temperature measurement
matching resistors R.sub.5 and R.sub.6. However, an increase in
temperature of the temperature measurement matching resistors
R.sub.5 and R.sub.6 can be ignored, because the lower case 1B is
made of aluminum having a sufficiently large heat capacity as
compared to the sensor tube 32 and the temperature measurement
matching resistors R.sub.5 and R.sub.6 are adhered to the lower
case 1B by means of an adhesive material. Heating of the
temperature measurement matching resistors R.sub.5 and R.sub.6 can
be easily prevented by setting the value of resistance of each of
the temperature measurement matching resistors R.sub.5 and R.sub.6
and the heating resistors R.sub.7 and R.sub.8 to a high level. In
the flow rate sensor in this embodiment, when ETOH (ethyl alcohol)
was used as the flow fluid in the sensor tube 32, satisfactory
output linearity could be obtained in a measurement range of flow
rate of from 0 cc/min. to 0.1 cc/min. Further, because the
temperature of the sensor tube 32 was maintained at a low level,
stable measurement could be conducted without occurrence of a
problem such as formation of air bubbles in the ETOH, which is
encountered in conventional techniques. In the present invention,
the problem of formation of air bubbles can be avoided in most
fluids by limiting an increase in temperature of the heating
resistors for heating the sensor tube 32 to 5.degree. C. or less.
According to the present invention, it has become possible to
conduct appropriate measurement of a flow rate even when an
increase in temperature of the heating resistors is extremely
small, i.e., 5.degree. C. or less. Thus, in the first embodiment of
the present invention (as well as other embodiments of the present
invention), use is made of a voltage applying device operable to
apply voltages to the heating resistors so that an increase in
temperature of the sensor tube due to the effect of the heating
resistors is several degrees Celsius.
FIGS. 5 and 6 show an arrangement of a flow rate sensor according
to a second embodiment of the present invention. A rectangular
upper case and a lower case 11B in substantially the same form as
the upper case are fixedly connected to each other by means of
screws, to thereby obtain a case. In the upper case and the lower
case 11B, a tube guide 60 is contained. The tube guide 60 is
adapted to contain a U-shaped sensor tube 52 shown in FIG. 7 as a
single unit. The sensor tube 52 is made of stainless steel (JIS SUS
316) and has an outer diameter of 4 mm and an inner diameter of 3
mm. In this embodiment, as shown in FIG. 8, a plurality of inner
tubes 53 made of stainless steel (JIS SUS 316), each having an
outer diameter of 1.0 mm and an inner diameter of 0.8 mm, are
provided within the sensor tube 52, such that respective outer wall
surfaces of the inner tubes 53 are in contact with each other. This
comes from an idea such that it is possible to achieve the same
effect as that of a single large-diameter and long sensor tube by
employing a bundle of narrow sensor tubes each having an inner
diameter of about 1 mm. The circular flanges 3 shown in FIG. 7 are
fitted onto opposite end portions of the sensor tube 52.
In the flow rate sensor arranged as mentioned above, in which the
plurality of inner tubes 53 are provided within the sensor tube 52,
a laminar flow of fluid was obtained and as a result of this, an
improvement of output characteristics was observed. FIG. 9 shows
the improvement of output characteristics of the flow rate sensor
in this embodiment. In FIG. 9, a curve j indicates output
characteristics of the sensor utilizing the sensor tube 52 which
has the inner tubes 53 provided therein. The curve k indicates
output characteristics of the sensor utilizing the sensor tube
having no inner tubes 53. From FIG. 9, it is understood that with
respect to the sensor utilizing the sensor tube 52 (having the
inner tubes 53 provided therein), a flow rate range in which a
linear output is obtained is about three times wider than that of
the sensor utilizing the sensor tube having no inner tubes 53.
The arrangement of the tube guide 60 for covering the sensor tube
52 is shown in FIGS. 10a and 10b. The tube guide 60 comprises an
upper case and a lower case. FIGS. 10a and 10b show only the lower
case of the tube guide 60, but the upper and lower cases of the
tube guide 60 are basically in the same form. Each of the lower
case and the upper case of the tube guide 60 is made of aluminum,
and has a long platy form with one end portion having a
semi-circular form and the other end portion having a pedestal-like
form.
Each of the upper and lower cases of the tube guide 60 includes: a
U-shaped groove 61 for containing the U-shaped sensor tube 52, such
that the U-shaped sensor tube 52 is in contact with the tube guide
60; recesses 62 for containing the circular flanges 3 to be fitted
onto the opposite end portions of the sensor tube 52; and a
threaded bore 63. The threaded bore 63 is used for connecting the
upper case and the lower case via screws, after the upper and lower
cases are fixed to each other by using an adhesive material so as
to cover the sensor tube 52. Each of the upper and lower cases
includes a slot 64 conforming to the shape of the sensor tube
52.
The tube guide 60 is provided from the viewpoint of rapid
transition to heat balance in the sensor tube 52. That is, although
the sensor tube 52 is made of stainless steel (JIS SIJS 316) to
provide high corrosion resistance, corrosion-resistant alloys such
as stainless steel have poor heat conductivity. In addition, the
sensor tube 52 has poor output response time due to its relatively
large diameter. Therefore, as mentioned above, the sensor tube 52
is entirely covered with the tube guide 60 made of a material
having high heat conductivity, such as aluminum. By this
arrangement, the occurrence of heat balance in the sensor tube 52
can be accelerated, leading to a quick output response time.
The tube guide 60 is contained in the upper case and the lower case
11B [shown in FIGS. 11a and 11b] of the rectangular case. The case
is obtained by fixedly connecting the upper case and the lower case
11B via screws. Each of the upper case and the lower case 11B
includes a recess 55 confirming to the contour of the tube guide
60, for accommodating the tube guide 60.
In this embodiment, four heating resistors 70-1 to 70-4 (FIG. 5)
are attached to the tube guide 60. Each of the heating resistors
70-1 to 70-4 comprises a platinum chip resistor including a ceramic
substrate and a platinum resistor deposited on the substrate by
vapor deposition. The value of a resistance of each of the heating
resistors 70-1 to 70-4 is 1 k.OMEGA.. The heating resistors 70-1
and 70-2 are connected in parallel so as to correspond to the
heating resistor 35A in FIG. 4, and the heating resistors 70-3 and
70-4 are connected in parallel so as to correspond to the heating
resistor 35B in FIG. 4.
Thus, two resistors each having a resistance of 1 k.OMEGA. are
connected in parallel and are used as a heating resistor having a
resistance of 500.OMEGA.. By this arrangement, sufficient
sensitivity of the sensor can be obtained by supplying less
current, that is, by generating less heat, as compared to the
conventional wound type heating resistor having a resistance of
about 100.OMEGA. to 300.OMEGA..
As the temperature sensor 7 for measuring a reference temperature
for heating the sensor tube 52, a platinum chip resistor having a
resistance of 1 k.OMEGA. is adhered to the case 1. Further, the
heating resistors 70-1 to 70-4 each comprising the platinum chip
resistor on the tube guide 60 are heated so that respective
temperatures thereof become higher than the above-mentioned
reference temperature by about 2.degree. C.
When the fluid flows in the sensor tube 52, due to the occurrence
of transmission of heat through the fluid, the voltages applied to
maintain the temperature of the heating resistors 70-1 to 70-4 on
the tube guide 60 at a predetermined level vary. By detecting the
variations of the applied voltages, a mass flow rate of the fluid
can be detected. In the embodiment shown in FIG. 5, satisfactory
output linearity could be obtained in the flow rate range of 0 to 6
cc/min. The tube guide 60 is out of a cartridge type. Therefore, to
conduct measurement over different flow rate ranges, the same
sensor can be used simply by replacing the tube guide 60 with
another tube guide suitable for a desired flow rate range. Thus,
the sensor can be applied to measurement over a wide range of flow
rate ranges.
Thus, in the second embodiment, measurement can be conducted over a
wide range of flow rate via a small flow rate sensor without the
need to use the bypass portion. Further, because a material having
high heat conductivity is used for the tube guide 60, a response
time for output can be reduced, leading to a quick response.
Because the tube guide 60 is used, it is possible to replace a
conventional cumbersome operation for winding the heating resistor
around the sensor tube by adhering the chip resistor on the tube
guide. This markedly improves manufacturing efficiency with respect
to the sensor. With regard to the chip resistors used as the
heating resistors on the tube guide 60, a chip resistor which
produces only extremely minor measurement errors at an arbitrary
value of resistance can be easily obtained. Therefore, the sensor
including detection circuits can be designed with a high degree of
freedom. Further, the heating temperature for the sensor tube 52 is
controlled so that it is merely 2.degree. C. higher than the
reference temperature of the case 1, so that the sensor tube can be
applied to the fluid susceptible to heat. Needless to say,
providing narrow tubes in the sensor tube and using the metallic
thin-film chip resistors as the heating resistor in this embodiment
can be applied to other embodiments of the present invention.
Next, referring to FIG. 12, a flow rate sensor according to a third
embodiment of the present invention is explained. In this
embodiment, silver plating 33 is formed on a surface of the sensor
tube 32 so as to improve heat transmission on the sensor tube 32.
The sensor tube 32 having the silver plating 33 formed thereon is
applied to the flow rate sensor in the first embodiment shown in
FIGS. 2 and 3. Therefore, a wound type resistor is applied to the
sensor tube 32. The value of resistance of this wound type resistor
is 1 k.OMEGA. which is higher than that of the conventional wound
type resistor. An amount of change in the value of resistance of
the resistor due to a temperature change is increased so as to
operate the sensor at a low heating temperature.
Because the silver plating having high heat conductivity is formed
on the surface of the sensor tube 32, the occurrence of heat
balance on the sensor tube 32 is accelerated, leading to a quick
response time. In the third embodiment, the sensor tube 32 is a
narrow tube having an inner diameter of 0.8 mm. Therefore, it is
unnecessary to provide narrower tubes in the sensor tube 32.
As has been described above, the flow rate sensor of the present
invention comprises a pair of heating resistors operable to heat a
sensor tube, a temperature sensor operable to control respective
temperatures of the heating resistors and a case operable to hold
the heating resistors and the temperature sensor, wherein the
sensor is adapted to detect a flow rate of a fluid flowing in the
sensor tube based on variations of voltages applied to the heating
resistors, wherein the variations occur according to the flow rate
of the fluid, and voltage applying device operable to arbitrarily
set an increase in temperature of each of the heating resistors.
Therefore, according to the present invention, a flow rate sensor
which has high sensitivity and which produces only extremely minor
measurement errors under the influence of heat can be obtained by
appropriately selecting the values of resistance of the heating
resistors so that an increase in temperature of the sensor tube due
to the effect of the heating resistors in several degrees
Celsius.
* * * * *