U.S. patent number RE37,865 [Application Number 08/528,062] was granted by the patent office on 2002-10-01 for semiconductor electrical interconnection methods.
This patent grant is currently assigned to Micron Technology, Inc.. Invention is credited to Charles H. Dennison.
United States Patent |
RE37,865 |
Dennison |
October 1, 2002 |
Semiconductor electrical interconnection methods
Abstract
A semiconductor metallization processing method for multi-level
electrical interconnection includes: a) providing a base insulating
layer atop a semiconductor wafer; b) etching a groove pathway into
the base layer; c) providing a first contact through the base layer
to the area to which electrical connection is to be made; d) the
groove pathway being etched and the first contact being provided in
a combined manner which has the groove pathway and the first
contact communicating with one another; e) providing metal within
the first contact and within the groove pathway, the metal provided
within the first contact and groove pathway in combination defining
a first metal layer, the first metal layer having an overall
thickness which is sufficient to fill the first contact and groove
pathway; f) planarizing the first metal layer back to the uppermost
region to form a conductive metal runner within the groove pathway;
g) providing an overlying layer of insulating material which is
different in composition from the base layer uppermost region; h)
etching through the overlying layer selectively relative to the
uppermost region to provide a second contact to the conductive
metal runner which overlaps the conductive metal runner and
uppermost region of insulating material of the base layer, the
conductive metal runner being void of surround where the second
contact overlaps the conductive metal runner; and i) depositing and
patterning a second metal layer atop the etched overlying layer of
insulating material.
Inventors: |
Dennison; Charles H. (San Jose,
CA) |
Assignee: |
Micron Technology, Inc. (Boise,
ID)
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Family
ID: |
21872700 |
Appl.
No.: |
08/528,062 |
Filed: |
September 14, 1995 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
Reissue of: |
033830 |
Mar 19, 1993 |
05244837 |
Sep 14, 1993 |
|
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Current U.S.
Class: |
438/622; 438/624;
438/633; 438/637 |
Current CPC
Class: |
H01L
21/76801 (20130101); H01L 21/76802 (20130101); H01L
21/76807 (20130101); H01L 21/76877 (20130101) |
Current International
Class: |
H01L
21/70 (20060101); H01L 21/768 (20060101); H01L
021/476 (); H01L 021/44 () |
Field of
Search: |
;437/192,194,195,228,978
;257/758,759,760 ;156/630,653.1,657.1,644.1
;438/622,623,624,629,631,633,634,637 |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
Kaanta, C., et al., "Dual Damascene: A ULSI Wiring Technology,"
Jun. 11-12, 1991, VMIC Conf. pp. 144-152.* .
Wolf., S., Silicon Processing for the VLSI Era, vol. 2, 1990.
Lattice Press, pp. 189-194, 214-217, 238-256, 257-260, 261-263,
276-287..
|
Primary Examiner: Quach; T. N.
Attorney, Agent or Firm: TraskBritt
Claims
I claim:
1. A semiconductor metallization processing method for multi-level
electrical interconnection, the method comprising the following
steps: providing a first layer of insulating material atop a
semiconductor wafer .Iadd.having an upper surface .Iaddend.over an
area to which electrical connection is to be made.Iadd., the first
layer having a first surface in contact with at least a portion of
the upper surface of the semiconductor wafer.Iaddend.; providing a
second layer of insulating material atop the first layer of
insulating material, the insulating material of the second layer
being different from the insulating material of the first layer,
the second layer of insulating material having an upper surface;
etching a groove pathway into the second layer of insulating
material for definition of a conductive metal runner.Iadd., the
groove pathway having a width.Iaddend.; providing a first contact
through the second and first layers of insulating material to the
area to which electrical connection is to be made.Iadd., the first
contact falling within the groove pathway, the first contact having
a width about the same width as the width of the groove pathway and
extending from at least a portion of the upper surface of the
semiconductor wafer to about the upper surface of the second layer
of insulating material.Iaddend.; the groove pathway being etched
and the first contact being provided in a combined manner which has
the groove pathway and the first contact communicating with one
another; providing metal within the first contact and within the
groove pathway, the metal provided within the first contact and
groove pathway in combination defining a first metal layer, the
first metal layer having an overall thickness which is sufficient
to fill the first contact and groove pathway; planarizing the first
metal layer back to the upper surface of the second insulating
layer to form a conductive metal runner within the groove pathway;
providing a third layer of insulating material atop the second
layer of insulating material and formed conductive metal runner,
the insulating material of the third layer being different in
composition from the insulating material of the second layer with
the insulating material of the third layer being selectively
etchable relative to the insulating material of the second layer
and selectively etchable relative to the first metal layer; etching
through the third layer of insulating material selectively relative
to the second layer of insulating material to provide a second
contact to the conductive metal runner, the second contact
overlapping the conductive metal runner and second layer of
insulating material, the conductive metal runner being void of
surround where the second contact overlaps the conductive metal
runner, the second layer of insulating material functioning as a
contact etch stop during etching of the third layer and thereby
substantially preventing etching of insulating material of the
second layer adjacent the conductive metal runner; and depositing
and patterning a second metal layer atop the etched third layer of
insulating material, the second metal layer lining within the
second contact and contacting the conductive metal runner
therewithin.
2. The semiconductor metallization processing method of claim 1
wherein the second layer of insulating material comprises Si.sub.3
N.sub.4.
3. The semiconductor metallization processing method of claim 1
wherein the first and third layers of insulating material each
comprise an oxide.
4. The semiconductor metallization processing method of claim 1
wherein the second layer of insulating material comprises Si.sub.3
N.sub.4, and the third layer of insulating material comprises an
oxide.
5. The semiconductor metallization processing method of claim 1
wherein the second layer of insulating material comprises Si.sub.3
N.sub.4, and the first and third layers of insulating material each
comprise an oxide.
6. The semiconductor metallization processing method of claim 1
wherein the planarizing step comprises a chemical mechanical
polishing technique.
7. The semiconductor metallization processing method of claim 1
wherein the groove pathway is etched completely through the second
layer of insulating material and only partially into the first
layer of insulating material.
8. The semiconductor metallization processing method of claim 1
further comprising depositing a reference layer of Si.sub.3 N.sub.4
prior to depositing the .[.base.]. .Iadd.first .Iaddend.layer of
insulating material, the step of etching the groove pathway
comprising etching through the first layer of insulating material
to the reference layer.
9. A semiconductor metallization processing method for multi-level
electrical interconnection, the method comprising the following
steps: providing a base layer of insulating material atop a
semiconductor wafer over an area to which electrical connection is
to be made, the base layer of insulating material having an
uppermost region; etching a groove pathway into the base layer of
insulating material for definition of a conductive metal
runner.Iadd., the groove pathway having a width.Iaddend.; providing
a first contact through the base layer to the area to which
electrical connection is to be made.Iadd., the first contact having
a width about the same as the width of the groove pathway and
falling within the width of the groove pathway.Iaddend.; the groove
pathway being etched and the first contact being provided in a
combined manner which has the groove pathway and the first contact
communicating with one another; providing metal within the first
contact and within the groove pathway, the metal provided within
the first contact and groove pathway in combination defining a
first metal layer, the first metal layer having an overall
thickness which is sufficient to fill the first contact and groove
pathway; planarizing the first metal layer back to the uppermost
region of the base insulating layer to form a conductive metal
runner within the groove pathway; providing an overlying layer of
insulating material atop the base layer of insulating material and
formed conductive metal runner, the insulating material of the
overlying layer being different in composition from the insulating
material of the uppermost region of the base layer with the
insulating material of the overlying layer being selectively
etchable relative to the insulating material of the uppermost
region and selectively etchable relative to the first metal layer;
etching through the overlying layer of insulating material
selectively relative to the uppermost region of insulating material
of the base layer to provide a second contact to the conductive
metal runner, the second contact overlapping the conductive metal
runner and uppermost region of insulating material of the base
layer, the conductive metal runner being void of surround where the
second contact overlaps the conductive metal runner, the uppermost
region of the insulating material of the base layer functioning as
a contact etch stop during etching of the overlying layer and
thereby substantially preventing etching of insulating material of
the base layer adjacent the conductive metal runner; and depositing
and patterning a second metal layer atop the etched overlying layer
of insulating material, the second metal layer lining within the
second contact and contacting the conductive metal runner
therewithin.
10. The semiconductor metallization processing method of claim 9
wherein the uppermost region comprises Si.sub.3 N.sub.4.
11. The semiconductor metallization processing method of claim 9
wherein the base layer of insulating material is homogeneous.
12. The semiconductor metallization processing method of claim 9
wherein the planarizing step comprises a chemical mechanical
polishing technique.
13. The semiconductor metallization processing method of claim 9
further comprising depositing a reference layer of Si.sub.3 N.sub.4
prior to depositing the base layer of insulating material, the step
of etching the groove pathway comprising etching through the first
layer of insulating material to the reference layer.
14. A semiconductor metallization processing method for multi-level
electrical interconnection, the method comprising the following
steps: providing a base layer of insulating material atop a
semiconductor wafer over an area to which electrical connection is
to be made, the base layer of insulating material having an
uppermost region; etching a groove pathway into the base layer of
insulating material for definition of a conductive metal
runner.Iadd., the groove pathway having a width.Iaddend.; providing
a first contact through the base layer to the area to which
electrical connection is to be made.Iadd., the first contact having
a width about the same as the width of the groove pathway and
falling within the groove pathway.Iaddend.; the groove pathway
being etched and the first contact being provided in a combined
manner which has the groove pathway and the first contact
communicating with one another; providing metal within the first
contact and within the groove pathway, the metal provided within
the first contact and groove pathway in combination defining a
first metal layer, the first metal layer having an overall
thickness which is sufficient to fill the first contact and groove
pathway; planarizing the first metal layer back to the uppermost
region of the base insulating layer to form a conductive metal
runner within the groove pathway; selectively etching first metal
of the conductive metal runner within the groove pathway relative
to the base insulating layer uppermost region to recess the
conductive metal runner within the base layer of insulating
material; providing an overlying layer of insulating material atop
the base layer of insulating material and formed conductive metal
runner, the insulating material of the overlying layer being
different in composition from the insulating material of the
uppermost region of the base layer with the insulating material of
the overlying layer being selectively etchable relative to the
insulating material of the uppermost region and selectively
etchable relative to the first metal layer; etching through the
overlying layer of insulating material selectively relative to the
uppermost region of insulating material of the base layer to
provide a second contact to the conductive metal runner, the second
contact overlapping the conductive metal runner and uppermost
region of insulating material of the base layer, the conductive
metal runner being void of surround where the second contact
overlaps the conductive metal runner, the uppermost region of the
insulating material of the base layer functioning as a contact etch
stop during etching of the overlying layer and thereby
substantially preventing etching of insulating material of the base
layer adjacent the conductive metal runner; and depositing and
patterning a second metal layer atop the etched overlying layer of
insulating material, the second metal layer lining within the
second contact and contacting the conductive metal runner
therewithin.
15. The semiconductor metallization processing method of claim 14
wherein the base layer of insulating material is homogeneous.
16. The semiconductor metallization processing method of claim 14
wherein the base layer of insulating material is not homogeneous,
the uppermost region of the base layer being formed of a different
material from remaining portions of the base layer.
17. The semiconductor metallization processing method of claim 14
wherein the uppermost region comprises Si.sub.3 N.sub.4.
18. The semiconductor metallization processing method of claim 14
wherein the planarizing step comprises a chemical mechanical
polishing technique.
19. A semiconductor metallization processing method for multi-level
electrical interconnection, the method comprising the following
steps: providing a base layer of insulating material atop a
semiconductor wafer over an area to which electrical connection is
to be made, the base layer of insulating material having an
uppermost region; etching a groove pathway into the base layer of
insulating material for definition of a conductive metal
runner.Iadd., the groove pathway having a width.Iaddend.; providing
a first contact through the base layer to the area to which
electrical connection is to be made.Iadd., the first contact having
a width about the same as the width of the groove pathway and
falling within the groove pathway.Iaddend.; the groove pathway
being etched and the first contact being provided in a combined
manner which has the groove pathway and the first contact
communicating with one another; providing metal within the first
contact and within the groove pathway, the metal provided within
the first contact and groove pathway in combination defining a
first metal layer, the first metal layer having an overall
thickness which is sufficient to fill the first contact and groove
pathway; planarizing the first metal layer back to the uppermost
region of the base insulating layer to form a conductive metal
runner within the groove pathway; providing an overlying layer of
insulating material atop the base layer of insulating material and
formed conductive metal runner, the insulating material of the
overlying layer being different in composition from the insulating
material of the uppermost region of the base layer with the
insulating material of the overlying layer being selectively
etchable relative to the insulating material of the uppermost
region and selectively etchable relative to the first metal layer;
etching through the overlying layer of insulating material
selectively relative to the uppermost region of insulating material
of the base layer to provide a second contact to the conductive
metal runner, the second contact overlapping the conductive metal
runner and uppermost region of insulating material of the base
layer, the conductive metal runner being void of surround where the
second contact overlaps the conductive metal runner, the uppermost
region of the insulating material of the base layer functioning as
a contact etch stop during etching of the overlying layer and
thereby substantially preventing etching of insulating material of
the base layer adjacent the conductive metal runner; and sputter
depositing a predominately aluminum layer atop the etched layer of
insulating material, the predominately aluminum layer lining within
the second contact and contacting the conductive metal runner
therewithin.
20. The semiconductor metallization processing method of claim 19
wherein the base layer of insulating material is homogeneous.
21. The semiconductor metallization processing method of claim 19
wherein the base layer of insulating material is not homogeneous,
the uppermost region comprising a different material from remaining
portions of the base layer.
22. The semiconductor metallization processing method of claim 19
wherein the uppermost region comprises Si.sub.3 N.sub.4.
23. The semiconductor metallization processing method of claim 19
wherein the planarizing step comprises a chemical mechanical
polishing technique.
24. A semiconductor metallization processing method for multi-level
electrical interconnection, the method comprising the following
steps: providing a primary layer of insulating material atop a
semiconductor wafer over an area to which electrical connection is
to be made, the primary layer having an upper surface; providing a
first contact through the primary layer of insulating material to
the area to which electrical connection is to be made.Iadd., the
first contact having a width.Iaddend.; depositing a plugging metal
layer atop the wafer over the primary layer and to within the first
contact to a thickness sufficient to fill the first contact;
planarizing the plugging metal layer back to the upper surface of
the primary insulating layer to form a conductive metal plug within
the first contact; providing a foundation layer of insulating
material atop the primary layer of insulating material and
conductive metal plug, the foundation layer of insulating material
having an uppermost region; etching a groove pathway into the
foundation layer of insulating material for definition of a
conductive metal runner, the groove pathway outwardly exposing the
conductive metal plug.Iadd., the groove pathway having a width
about the same as the width of the conductive metal plug, the
conductive metal plug falling within the groove pathway.Iaddend.;
providing groove filling metal atop the wafer and within the groove
pathway to contact the conductive metal plug, the groove filling
metal and the conductive metal plug in combination defining a first
metal layer; planarizing the first metal layer back to the
uppermost region of the foundation insulating layer to form a
conductive metal runner within the groove pathway; providing an
overlying layer of insulating material atop the foundation layer of
insulating material and formed conductive metal runner, the
insulating material of the overlying layer being different in
composition from the insulating material of the uppermost region of
the foundation layer with the insulating material of the overlying
layer being selectively etchable relative to the insulating
material of the uppermost region and selectively etchable relative
to the first metal layer; etching through the overlying layer of
insulating material selectively relative to the uppermost region of
insulating material of the foundation layer to provide a second
contact to the conductive metal runner, the second contact
overlapping the conductive metal runner and second layer of
insulating material, the conductive metal runner being void of
surround where the second contact overlaps the conductive metal
runner, the uppermost region of the insulating material of the
foundation layer functioning as a contact etch stop during etching
of the overlying layer and thereby substantially preventing etching
of insulating material of the foundation layer adjacent the
conductive metal runner; and depositing and patterning a second
metal layer atop the etched overlying layer of insulating material,
the second metal layer lining within the second contact and
contacting the conductive metal runner therewithin.
25. The semiconductor metallization processing method of claim 24
wherein the plugging metal is predominately aluminum.
26. The semiconductor metallization processing method of claim 24
wherein the plugging metal comprises tungsten, and the groove
filling metal is predominately tungsten..Iadd.
27. A semiconductor metallization processing method for multi-level
electrical interconnection, the method comprising the following
steps: providing a first layer of insulating material atop a
semiconductor wafer; providing a second layer of insulating
material atop the first layer of insulating material, the
insulating material of the second layer being different from the
insulating material of the first layer, the second layer of
insulating material having an upper surface; etching a groove
pathway into at least the second layer of insulating material for
definition of a conductive metal runner, the groove pathway having
a width; providing metal within the groove pathway, the metal
provided within the groove pathway defining a first metal layer,
the metal deposited by sputter deposition of aluminum; removing the
first metal layer back to the upper surface of the second
insulating layer to form a conductive metal runner within the
groove pathway; providing a third layer of insulating material atop
the second layer of insulating material and formed conductive metal
runner, the insulating material of the third layer being different
in composition from the insulating material of the second layer
with the insulating material of the third layer being selectively
etchable relative to the insulating material of the second layer
and selectively etchable relative to the first metal layer; etching
through the third layer of insulating material selectively relative
to the second layer of insulating material to provide a contact
having a width about the same as the width of the groove pathway to
the conductive metal runner, the conductive metal runner being
devoid of surround where the contact overlaps the conductive metal
runner, the second layer of insulating material functioning as a
contact etch stop during etching of the third layer; and depositing
and patterning a second metal layer atop the etched third layer of
insulating material, the second metal layer contacting the
conductive metal runner, the second metal layer deposited by
sputter deposition. .Iaddend..Iadd.
28. The semiconductor metallization processing method of claim 27
wherein the second layer of insulating material comprises Si.sub.3
N.sub.4. .Iaddend..Iadd.
29. The semiconductor metallization processing method of claim 27
wherein the first and third layers of insulating material each
comprise an oxide. .Iaddend..Iadd.
30. The semiconductor metallization processing method of claim 27
wherein the second layer of insulating material comprises Si.sub.3
N.sub.4, and the third layer of insulating material comprises an
oxide. .Iaddend..Iadd.
31. The semiconductor metallization processing method of claim 27
wherein the second layer of insulating material comprises Si.sub.3
N.sub.4, and the first and third layers of insulating material each
comprise an oxide. .Iaddend..Iadd.
32. The semiconductor metallization processing method of claim 27
wherein the removing step comprises a chemical mechanical polishing
technique. .Iaddend..Iadd.
33. The semiconductor metallization processing method of claim 27
wherein the groove pathway is etched completely through the second
layer of insulating material and partially into the first layer of
insulating material. .Iaddend..Iadd.
34. The semiconductor metallization processing method of claim 27,
wherein said second insulating layer comprises oxide, and wherein
said third insulating layer comprises polyimide.
.Iaddend..Iadd.
35. A semiconductor metallization processing method for multi-level
electrical interconnection, the method comprising: providing a base
layer of insulating material atop a semiconductor wafer, the base
layer of insulating material having an uppermost region; etching a
groove pathway into the base layer of insulating material for
definition of a conductive metal runner, the groove pathway having
a width; providing metal within the groove pathway, the metal
provided within the groove pathway forming a first metal layer, the
first metal layer having an overall thickness which is sufficient
to fill the groove pathway, the metal deposited by sputter
deposition of aluminum; planarizing the first metal layer back to
the uppermost region of the base insulating layer to form a
conductive metal runner within the groove pathway; providing an
overlying layer of insulating material atop the base layer of
insulating material and formed conductive metal runner, the
insulating material of the overlying layer being different in
composition from the insulating material of the uppermost region of
the base layer with the insulating material of the overlying layer
being selectively etchable relative to the insulating material of
the uppermost region and selectively etchable relative to the first
metal layer; etching through the overlying layer of insulating
material selectively relative to the uppermost region of insulating
material of the base layer to provide a contact to the conductive
metal runner, the contact falling within the confines of the
conductive metal runner and uppermost region of insulating material
of the base layer, the uppermost region of the insulating material
of the base layer functioning as a contact etch stop during etching
of the overlying layer and thereby substantially preventing etching
of insulating material of the base layer adjacent the conductive
metal runner, the contact having a width about the same as the
width of the groove pathway of the conductive metal runner; and
sputter depositing an aluminum layer atop the etched layer of
insulating material, the aluminum layer lining within the contact
and contacting the conductive metal runner. .Iaddend..Iadd.
36. The semiconductor metallization processing method of claim 35
wherein the base layer of insulating material is homogeneous.
.Iaddend..Iadd.
37. The semiconductor metallization processing method of claim 35
wherein the base layer of insulating material is not homogeneous,
the uppermost region comprising a different material from remaining
portions of the base layer. .Iaddend..Iadd.
38. The semiconductor metallization processing method of claim 35
wherein the uppermost region comprises Si.sub.3 N.sub.4.
.Iaddend..Iadd.
39. The semiconductor metallization processing method of claim 35,
wherein the planarizing step comprises a chemical mechanical
polishing technique. .Iaddend..Iadd.
40. The semiconductor metallization processing method of claim 35,
wherein said insulating material of said uppermost region of said
base layer comprises oxide and wherein said overlying layer of
insulating material comprises polyimide. .Iaddend..Iadd.
41. A semiconductor metallization processing method for multi-level
electrical interconnection, the method comprising: providing a
layer of insulating material on a semiconductor wafer, the layer of
insulating material having an uppermost region; etching a groove
pathway into the layer of insulating material for definition of a
conductive metal runner, the groove pathway having a width;
providing groove filling metal atop the wafer and within the groove
pathway, the groove filling metal defining a first metal layer, the
metal comprising aluminum deposited by sputter deposition; removing
the first metal layer back to the uppermost region of the
foundation insulating layer to form a conductive metal runner
within the groove pathway; providing an overlying layer of
insulating material atop the layer of insulating material and
formed conductive metal runner, the insulating material of the
overlying layer being different in composition from the insulating
material of the uppermost region of the foundation layer with the
insulating material of the overlying layer being selectively
etchable relative to the insulating material of the uppermost
region and selectively etchable relative to the first metal layer;
etching through the overlying layer of insulating material
selectively relative to the uppermost region of insulating material
of the foundation layer to provide a contact having a width about
the same as the width of the groove pathway of the conductive metal
runner, the contact overlapping the conductive metal runner and
second layer of insulating material, the uppermost region of the
insulating material of the foundation layer functioning as a
contact etch stop during etching of the overlying layer and thereby
substantially preventing etching of insulating material of the
foundation layer adjacent the conductive metal runner; and
depositing and patterning a second metal layer atop the etched
overlying layer of insulating material, the second metal layer
lining within the contact and contacting the conductive metal
runner, the second metal layer comprising a metal deposited by
sputter deposition. .Iaddend..Iadd.
42. The semiconductor metallization processing method of claim 41
wherein the second metal layer comprises aluminum.
.Iaddend..Iadd.
43. The semiconductor metallization processing method of claim 41,
wherein said insulating material of said uppermost region of said
base layer comprises oxide and wherein said overlying layer of
insulating material comprises polyimide. .Iaddend.
Description
TECHNICAL FIELD
This invention relates generally to semiconductor metallization
processing methods for imparting multi-level electrical
interconnection.
BACKGROUND OF THE INVENTION
Multi-level metallization is a critical area of concern in advanced
semiconductor fabrication where designers continue to strive for
circuit density maximization. Metallization interconnect techniques
typically require electrical connection between metal layers or
runners occurring at different elevations within a semiconductor
substrate. Such is typically conducted, in part, by etching a
contact opening through insulating material to the lower elevation
metal layer. Increased circuit density has resulted in narrower and
deeper electrical contact openings between layers within the
substrate. Adequate contact coverage within these deep and narrow
contacts continues to challenge the designer.
Aluminum and aluminum alloys remain the principle metallization
materials of choice due to their high conductivities. However, deep
and narrow contact openings are very difficult to fill by
conventional aluminum deposition techniques. Such techniques are
principally limited to sputter deposition.
One way of overcoming this problem is to chemical vapor deposit
(CVD) another more conformal metal, such as tungsten, which enables
complete contact filling. CVD tungsten would typically completely
fill a contact opening, where sputter deposition of aluminum would
not. Techniques for CVD of aluminum have yet to be developed. Use
of tungsten is not without drawbacks. For example, tungsten has
three times the resistivity of aluminum, which can result in parts
with lower speed or increased die size to provide for wider
tungsten lines for obtaining desired current flow. In addition to
resistivity problems, tungsten does not bond readily to other
commonly used semiconductor metals, such as gold or aluminum.
One technique for making multi-level metal electrical
interconnection in ULSI processing involves groove and fill
techniques, such as is described in Kaanta, et al., "Dual
damascene: A ULSI Wiring Technology", a paper submitted at the Jun.
11-12, 1991 VMIC Conference sponsored by the IEEE. Such reference
describes a technique whereby a combination of contact openings is
provided through an insulating layer to active areas, and a groove
pathway is as well etched at the top of the insulating layer.
Thereafter, a single layer of tungsten metal is deposited to
completely fill the contact openings and pathway. A subsequent
planarization is conducted to the upper level of the insulating
layer to define isolated finished conductive lines or runners.
Improvements still need to be made to such techniques for further
maximization of circuit density and to accommodate or allow use of
sputtered aluminum for second or upper level metallization. One
prior art drawback is described with reference to FIGS. 1-3. FIG. 1
illustrates a semiconductor wafer fragment 10 comprised of a bulk
substrate 12 having a planarized insulating layer 14, such as
SiO.sub.2. Another planarized insulating layer 16 is provided atop
layer 14, and provided with a pair of etched groove pathways 18, 20
(see also FIG. 3). A metal layer 22, preferably predominantly
aluminum such as sputtered deposited aluminum, is provided atop
layer 16 and completely fills within groove pathways 18, 20.
Referring to FIGS. 2 and 3, layer 22 is planarized by
chemical-mechanical polishing techniques back to at least the upper
surface of insulator layer 16 to define electrically isolated
conductive first level metal runners 24 and 26. Another layer of
insulating material 28 is provided atop the wafer. A masking and
etch of layer 28 are then provided to produce contact openings 30,
32 for ultimately connecting a higher metal layer to runners 24 and
26. It is important to conduct such etching for a time sufficient
to insure complete passage through material 28 to reach the upper
surface of the runners 24 and 26. Accordingly, if the photomask
alignment were not precise such that openings 30 and 32 were to
overlap with portions of runners 24 and 26 and with layer 16,
undesired over etch into layer 16 would occur.
To prevent or allow for such misalignment, enlarged surround areas
34, 36 are provided when etching layer 16 to form groove pathways
18, 20. It will be appreciated that such enlarged areas necessitate
positioning conductive lines 18 and 20 farther apart than were such
surround areas 34 and 36 not provided. Accordingly, providing such
surround areas works against maximizing circuit density.
FIG. 4 illustrates the problem associated with overetch where a
metal 2 to metal 1 contact opening is misaligned. There illustrated
is a wafer fragment 10a having a misaligned metal 2 to metal 1
contact opening 30a, with there being no surround area to
accommodate such eventual mask misalignment. The etch of layer 28
causes a recess or pocket 38 to form externally adjacent runner 26.
Again, the desired material for second or higher level
metallization is predominantly aluminum which is typically
deposited by sputter deposition. FIG. 4 illustrates a sputter
deposited aluminum layer 40 which, because of recess or pocket 38,
does not adequately fill contact opening 30a. Such creates the
illustrated discontinuity in layer 40.
FIG. 5 illustrates a technique for overcoming problems associated
with the potential above-described metal 2 to metal 1
discontinuity. Here, a wafer fragment 10b having misaligned metal 2
to metal 1 contact opening 30a acquires a highly conformal chemical
vapor deposited layer of tungsten 42. Such layer is planarized back
to define a conductive plug or via 42 of tungsten. Thereafter, a
layer 44 of aluminum can be provided and patterned as illustrated.
While overcoming the discontinuity problem referred to above, the
FIG. 5 technique adds the additional processing steps of adding a
CVD tungsten deposition, requiring an associated "glue" layer, and
subsequent etchback. These additional processing steps increase
wafer processing cost and lowers yield by adding defects.
It would be preferable if all or the metal 2 layer were
predominately comprised of aluminum. Further, it would be desirable
to develop improved interlevel metallization interconnection
schemes involving groove and fill, or damascene, processes of a
first or lower level metal followed by the utilization of a
sputtered aluminum for the upper level metal, and which do not
fundamentally require formation of space-consuming surround of a
via by the lower level metal.
BRIEF DESCRIPTION OF THE DRAWINGS
Preferred embodiments of the invention are described below with
reference to the following accompanying drawings.
FIG. 1 is a diagrammatic view of a semiconductor wafer fragment
processed in accordance with prior art techniques, and is discussed
in the "Background" section above.
FIG. 2 is a sectional view of the FIG. 1 wafer fragment at a prior
art processing step subsequent to that shown by FIG. 1.
FIG. 3 is a top plan view of the FIG. 2 semiconductor wafer
fragment.
FIG. 4 is a diagrammatic view of an alternate semiconductor wafer
fragment process in accordance with prior art techniques, and is
discussed in the "Background" section above.
FIG. 5 is a diagrammatic view of another semiconductor wafer
fragment processed in accordance with prior art techniques, and is
discussed in the "Background" section above.
FIG. 6 is a diagrammatic top view of a semiconductor wafer fragment
processed in accordance with the invention.
FIG. 7 is sectional view of the FIG. 6 wafer.
FIG. 8 is a diagrammatic view of an alternate semiconductor wafer
fragment processed in accordance with the invention.
FIG. 9 is a diagrammatic sectional view of yet another
semiconductor wafer fragment processed in accordance with the
invention.
FIG. 10 is a diagrammatic sectional view of still a further
semiconductor wafer fragment processed in accordance with the
invention.
FIG. 11 is a view of the FIG. 10 wafer shown at a processing step
subsequent to that shown by FIG. 10.
FIG. 12 is a view of the FIG. 10 wafer shown at a processing step
subsequent to that shown by FIG. 11.
FIG. 13 is a view of the FIG. 10 wafer shown at a processing step
subsequent to that shown by FIG. 12.
FIG. 14 is a view of the FIG. 10 wafer shown at a processing step
subsequent to that shown by FIG. 13.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
This disclosure of the invention is submitted in furtherance of the
constitutional purposes of the U.S. Patent Laws "to promote the
progress of science and useful arts" (Article 1, Section 8).
In accordance with one aspect of the invention, a semiconductor
metallization processing method for multi-level electrical
interconnection comprises the following steps:
providing a base layer of insulating material atop a semiconductor
wafer over an area to which electrical connection is to be made,
the base layer of insulating material having an uppermost
region;
etching a groove pathway into the base layer of insulating material
for definition of a conductive metal runner;
providing a first contact through the base layer to the area to
which electrical connection is to be made;
the groove pathway being etched and the first contact being
provided in a combined manner which has the groove pathway and the
first contact communicating with one another;
providing metal within the first contact and within the groove
pathway, the metal provided within the first contact and groove
pathway in combination defining a first metal layer, the first
metal layer having an overall thickness which is sufficient to fill
the first contact and groove pathway;
planarizing the first metal layer back to the uppermost region of
the base insulating layer to form a conductive metal runner within
the groove pathway;
providing an overlying layer of insulating material atop the base
layer of insulating material and formed conductive metal runner,
the insulating material of the overlying layer being different in
composition from the insulating material of the uppermost region of
the base layer with the insulating material of the overlying layer
being selectively etchable relative to the insulating material of
the uppermost region and selectively etchable relative to the first
metal layer;
etching through the overlying layer of insulating material
selectively relative to the uppermost region of insulating material
of the base layer to provide a second contact to the conductive
metal runner, the second contact overlapping the conductive metal
runner and uppermost region of insulating material of the base
layer, the conductive metal runner being void of surround where the
second contact overlaps the conductive metal runner, the uppermost
region of the insulating material of the base layer functioning as
a contact etch stop during etching of the overlying layer and
thereby substantially preventing etching of insulating material of
the base layer adjacent the conductive metal runner; and
depositing and patterning a second metal layer atop the etched
overlying layer of insulating material, the second metal layer
lining within the second contact and contacting the conductive
metal runner therewithin.
More particularly and first with reference to FIGS. 6 and 7, a
wafer fragment 50 comprises a bulk substrate region 52 and a first
layer 54 of insulating material provided over an area to which
electrical connection is to be made. A principal purpose of layer
54 is for the formation of grooves to be filled with metal. An
example material for layer 54 would be borophosphosilicate glass
(BPSG), phosphosilicate glass (PSG), SiO.sub.2 provided by plasma
TEOS deposition, SiO.sub.2 provided by ozone TEOS deposition, and
other oxides or other insulators.
A second layer 56 of insulating material is provided atop first
layer 54, with the insulating material of the second layer being
different from the insulating material of the first layer. An
example preferred material for the second layer would be an
insulative nitride, such as Si.sub.3 N.sub.4. The thickness of
layer 56 is preferably from about 500 Angstroms to about 2000
Angstroms. Second layer 56 has an upper surface 58. Alternately
considered, the composite insulating layers 54 and 56 can be
considered as a base layer of insulating material 60 having an
uppermost region defined by layer 56.
Groove pathways 62, 64 are etched into base layer 60 for definition
of conductive metal runners, as will be apparent from the
continuing discussion. Groove pathways 62, 64 are etched completely
through uppermost region/second insulating layer 56 and partially
into first insulating layer 54.
A first contact 66 (FIG. 6) is provided through base layer 60 to
the area on the substrate to which electrical connection is to be
made. First contact 66 and groove pathway 62 communicate with one
another. In the illustrated embodiment, contact 66 falls entirely
within the confines of groove pathway 62. Of course, either of
contact 66 or groove pathway 62 could be formed before the other.
Alternatively, contact 66 could be first defined and filled with
metal prior to formation of grooves 62, 64, as will be discussed
below.
A first metal layer 68 is deposited atop the wafer and to within
groove pathways 62, 64 and the illustrated contact 66 to a
thickness sufficient to fill first contact 66 and groove pathways
62, 64. In this manner for this embodiment, metal is thus provided
within the first contact and within the groove pathway, with the
metal provided within the first contact and groove pathway in
combination defining a first metal layer, with the first metal
layer having an overall thickness which is sufficient to fill the
first contact and groove pathway. An example and preferred metal
would be sputter deposited aluminum to provide a predominantly
aluminum layer, although other metals such as tungsten could also
be employed. Such layer is planarized back at least to uppermost
region 56 to form electrically isolated conductive metal runners
70, 72. The preferred technique for such planarizing is a
chemical-mechanical polishing technique. Less preferred would be a
plasma etchback process.
A third or overlying layer 74 of insulating material is provided
atop base layer 60 and formed conductive metal runners 70, 72. The
insulating material of third or overlying insulating layer 74 is
different in composition from the insulating material of the second
layer/uppermost region 56, with the insulating material of the
third or overlying layer being selectively etchable relative to the
insulating material of uppermost region 56 and selectively etchable
relative to the metal of runner 70. Where uppermost region/second
layer 56 comprises Si.sub.3 N.sub.4, layer 74 could be an oxide,
such as the same material described for first insulating layer 54.
Under such conditions, a dry plasma etch employing for example
CHF.sub.3 and O.sub.2 would enable selective etching of layer 74
relative to uppermost region 56 and most all metals, including
tungsten and aluminum. Other materials could of course be selected
for uppermost region 56 and layer 74. For example, uppermost region
56 might comprise an oxide, while region 74 might comprise
polyimide.
Overlying or third layer of insulating material 74 is patterned and
selectively etched relative to layer/region 56 to provide a second
contact 76 to conductive metal runner 70. Second contact 76 will at
some locations overlap conductive metal runner 70 and uppermost
region/second layer 56 due to inevitable mask misalignment. During
such etch, uppermost region/second layer 56 functions as a contact
etch stop and thereby substantially prevents etching of insulating
material of layers 56 and 54 adjacent conductive metal runner 70.
Such avoids formation of a recess, as described with respect to the
prior art of FIGS. 4 and 5. Such also enables conductive metal
runner 70 to be formed void of surround where second contact 76
overlaps conductive metal runner 70, unlike the prior art described
with reference to FIGS. 1-3.
A second metal layer 78 is deposited atop etched third/overlying
layer 74, and lines within second contact 76 and contacts
conductive metal runner 70 therewithin. The preferred metal and
deposition technique is sputtered aluminum or one of its alloys.
Application of such layer might completely fill second contact 76
or only partially fill contact 76, as shown. Such layer would be
patterned to define second, higher elevation, metal runners.
FIG. 8 illustrates a wafer 50a evidencing an additional processing
step in accordance with the invention. Specifically, metal layer 68
prior to deposition of overlying layer 74 is selectively etched
within groove pathway 62 relative to base insulating
layer/uppermost region 56 to form a slightly recessed conductive
metal runner 70a within the base layer of insulating material. Such
provides an added benefit of assuring no pocket or recess etching
adjacent the metal runner in the event slight overetch of second
layer/uppermost region 56 were to occur during the contact 76 etch.
An etchant would be selected by the artisan which would etch metal
68 selectively relative to region 56. An example would be CCl.sub.4
and Cl.sub.2 or BCl.sub.3 chemistry. Alternately, a CMP slurry
could be selected for the polish of material 68 which has a
significant chemical effect on material 68. An example CMP slurry
where metal 68 is comprised predominately of aluminum and region 56
is predominately comprised of nitride would be KOH based.
As will be apparent, the embodiments described with reference to
FIGS. 6-8 have a base layer of insulating material which is other
than homogeneous. That is, base layer 60 is comprised of a
composite of two layers 54 and 56 of different material.
Alternately, base layer of insulating material 60 could be formed
to be homogeneous, with the proviso that region 74 be of a material
which is selectively etchable relative to the material of region 60
and selectively etchable relative to the first metal layer.
FIG. 9 illustrates this alternate aspect of the invention as well
as another enhancement. Note that wafer 50b has a homogeneous base
layer 60b. Additionally, a reference layer 90 has been deposited
prior to deposition of homogeneous layer 60b. Reference layer 90
would be formed of some material different from the material of
layer 60b. The etch to form groove pathways 62, 64 would then be
conducted in such a manner to be selective to reference layer 90,
thus providing a more accurately and precisely controlled etch stop
for formation of groove pathway 62. Such would result in more
controllability as to the preciseness of the uppermost elevation
the metal runners 70 and 72 to be formed.
An alternative embodiment of the invention is described with
respect to FIGS. 10-14. FIGS. 10-13 are sectional views taken
through an alternate wafer fragment 50c and would correspond in
position to a line parallel to line 7--7 in FIG. 6 as drawn through
contact 66. Such contact in the ensuing figures and description is
designated 66a. FIG. 14 is a cross sectional view of the 50c wafer
as would be taken through a line positionally the same as line 7--7
in FIG. 6.
Referring first to FIG. 10, a wafer fragment 50c is provided with a
primary layer 54a of insulating material over an area 95 to which
electrical connection is to be made. Primary layer 54a includes an
upper surface 55. A first contact 66a is provided through primary
layer 54a to area 95. A layer of plugging metal 65 was deposited
atop the wafer over primary layer 54a and to within first contact
66a to a thickness sufficient to fill first contact 66a. Such
plugging metal was planarized back to upper surface 55 of primary
insulating layer 54a to form a conductive layer plug 65 within
first contact 66a.
A secondary layer 54b of insulating material is provided atop
primary layer 54a and conductive metal plug 65. Subsequently, a
tertiary layer of insulating material 54c is provided atop
secondary layer 54b. Alternately considered, layers 54c and 54b in
combination can be considered as a foundation layer 61 of
insulating material, with layer 54c constituting an uppermost
region thereof. Further alternately considered, layers 54b and 54c
in combination can be considered as a base insulating layer, with
layer 54c constituting an uppermost region thereof. Even further
alternately considered, layers 54a, 54b and 54c in combination can
be considered as a base layer 63 of insulating material, with layer
54c constituting an uppermost region thereof.
Referring to FIG. 11, groove pathways 62, 64 are etched into
foundation layer 61 for definition of a conductive metal runner.
Groove pathway 62 outwardly exposes conductive metal plug 65 as
indicated. It would be the intent to align groove 62b entirely over
plug 65. Offset is shown, and corresponding undesired over-etch
into layer 54a. Layer 54a and 54b would preferably be provided of
different insulating materials with different etch characteristics,
such that layer 54b could be etched selectively relative to 54a and
preferable desirably prevent the illustrated overetch. Examples
would be two different oxides, for layers 54b and 54a, having
different dopants or dopant concentrations to enable 54a to
preferably function to a significant degree as an etch stop for the
etch of grooves 62, 64.
Referring to FIG. 12, a groove filling metal layer 69 is provided
atop the wafer and within groove pathways 62, 64 and contacts and
thereby electrically connects with conductive metal plug 65. Layer
69 could be sputtered aluminum, or some other metal, with chemical
vapor deposited tungsten being preferred to assure adequate and
complete filling of any over etch adjacent conductive plug 65 into
primary layer 54a. The material of conductive plug 65 preferably is
comprised predominately of aluminum, but could likewise comprise
other metals such as chemical vapor deposited tungsten. Groove
filling metal 69 and conductive metal plug 65 in combination define
a first metal layer 71.
Referring to FIG. 13, first metal layer 71 is planarized back to
uppermost region 54a of foundation insulating layer 61 to form
conductive metal runners within grooved pathway 62, 64.
The process would then proceed largely as described above. For
example and referring to FIG. 14, an overlying layer 74 of
insulating material would be provided atop a foundation layer 61
and the previously formed conductive metal runners. The insulating
material of overlying layer 74 would again be different in
composition from the insulation material of uppermost region
.[.54a.]. .Iadd.54c .Iaddend.of foundation layer 61, essentially as
described above. Overlying layer 74 would be selectively etched to
provide a second contact 76 within grooved pathway 62 with
uppermost region .[.74.]. .Iadd.54c .Iaddend.of insulating material
of foundation layer 61 functioning as a contact etch stop of
overlying layer 74, and thereby substantially preventing etching of
insulating material of foundation layer 61 adjacent the conductive
metal runners formed within groove pathway 62. A subsequent metal
layer 78 would be deposited and patterned. Analogously as described
above, region 61 in this described embodiment is shown to not be
homogenous. Alternately, layer 61 could be formed to be homogenous.
Materials for the various layers 74 and 54a, or a homogenous layer
61, would be described as above for the same stated purposes.
In compliance with the statute, the invention has been described in
language more or less specific as to structural and methodical
features. It is to be understood, however, that the invention is
not limited to the specific features shown and described, since the
means herein disclosed comprise preferred forms of putting the
invention into effect. The invention is, therefore, claimed in any
of its forms or modifications within the proper scope of the
appended claims appropriately interpreted in accordance with the
doctrine of equivalents.
* * * * *