Seal member for semiconductor production apparatus
Kang , et al. Sep
U.S. patent number D895,075 [Application Number 35/506,444] was granted by the patent office on 2020-09-01 for seal member for semiconductor production apparatus. This patent grant is currently assigned to Valqua, Ltd.. The grantee listed for this patent is Valqua, Ltd.. Invention is credited to Yong-Gu Kang, Sangho Kim.
| United States Patent | D895,075 |
| Kang , et al. | September 1, 2020 |
Seal member for semiconductor production apparatus
Claims
CLAIM The ornamental design for a seal member for semiconductor production apparatus, as shown and described.
| Inventors: | Kang; Yong-Gu (Gojo, JP), Kim; Sangho (Gojo, JP) | ||||||||||
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| Applicant: |
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| Assignee: | Valqua, Ltd. (Tokyo,
JP) |
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| Appl. No.: | 35/506,444 | ||||||||||
| Filed: | August 3, 2018 |
International Registration
| Int'l Reg. No. | Int'l Reg. Date | Int'l Reg. Publication Date |
Hague Int'l Filing Date |
|---|---|---|---|
| DM/102524 | Aug 3, 2018 | Feb 8, 2019 | Aug 3, 2018 |
Foreign Application Priority Data
| Feb 8, 2018 [JP] | 2018-002527 | |||
| Current U.S. Class: | D23/269 |
| Current International Class: | 2301 |
| Field of Search: | ;D23/269 ;D8/382 |
References Cited [Referenced By]
U.S. Patent Documents
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| 2015/0362075 | December 2015 | Kubota |
| D1612684 | Sep 2017 | JP | |||
| D1589474 | Oct 2017 | JP | |||
| D1612685 | Sep 2018 | JP | |||
| D150427 | Nov 2012 | TW | |||
| D163769 | Oct 2014 | TW | |||
| D183446 | Jun 2017 | TW | |||
Attorney, Agent or Firm: The Webb Law Firm
Description
1.1 : Perspective
1.2 : Front
1.3 : Back
1.4 : Left
1.5 : Right
1.6 : Top
1.7 : Bottom
1.8 : Cross-sectional
1.9 : Partial enlargement of cross-sectional view 1.8
1.10 : Reference
The present article is a seal member for semiconductor production apparatuses, such as chemical vapor deposition apparatuses and dry etching apparatuses; as illustrated in the reproduction 1.10, the article is to be inserted into the groove of a semiconductor production apparatus; the semiconductor production apparatus itself forms no part of the claimed design; the reproduction 1.8 shows a transverse cross-sectional front view taken along the horizontal center of the reproduction 1.6; and the reproduction 1.9 is an enlarged view showing a left end portion of the cross-sectional view 1.8.
The broken lines shown in Reproduction 1.10 are for the purposes of illustrating environmental structure and form no part of the claimed design.
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