Substrate cleaning tool

Description

FIG. 1 is a front, left and top perspective view of the substrate cleaning tool showing the new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a top plan view thereof; and,

FIG. 6 is a cross-sectional view taken along line 6-6 in FIG. 2.

The right side elevation view is a mirror image of the left side, and the bottom view is a mirror image of the top plan view.

The broken lines illustrate portions of the substrate cleaning tool that form no part of the claimed design.

Claims

CLAIM The ornamental design for a substrate cleaning tool, as shown and described.

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Inventors:	Kurusu; Kento (Kumamoto, JP)
Applicant:	Name City State Country Type Tokyo Electron Limited Tokyo N/A JP
Assignee:	Tokyo Electron Limited (Tokyo, JP)
Appl. No.:	D/466,453
Filed:	September 9, 2013

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Foreign Application Priority Data

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Apr 17, 2013 [JP]			2013-008651

Current U.S. Class:	D15/138
Current International Class:	1509
Field of Search:	;D8/70,71 ;D15/138,139,144,144.1,144.2 ;15/77,88.2,320 ;134/60,94.1,95.1,95.2,99.1

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References Cited [Referenced By]

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U.S. Patent Documents

5647083	July 1997	Sugimoto et al.
6412134	July 2002	Oikawa
6554010	April 2003	Hirose et al.
D563186	March 2008	Ahn
D619152	July 2010	Evatt et al.
D623034	September 2010	Evatt et al.
D630656	January 2011	Lambert et al.
D633769	March 2011	Evatt et al.
D646542	October 2011	Wackwitz
D648762	November 2011	Mack
8522799	September 2013	Freer et al.
2002/0035763	March 2002	Hirose et al.

Primary Examiner: Palasik; Patricia
Attorney, Agent or Firm: Abelman, Frayne & Schwab