U.S. patent number D647,549 [Application Number D/323,537] was granted by the patent office on 2011-10-25 for shaft portion of an apparatus for holding and heating semiconductor wafers or the like.
This patent grant is currently assigned to NGK Insulators, Ltd.. Invention is credited to Taichi Nakamura.
United States Patent |
D647,549 |
Nakamura |
October 25, 2011 |
Shaft portion of an apparatus for holding and heating semiconductor
wafers or the like
Claims
CLAIM The ornamental design for a shaft portion of an apparatus for
holding and heating semiconductor wafers or the like, as shown and
described.
Inventors: |
Nakamura; Taichi (Nagoya,
JP) |
Assignee: |
NGK Insulators, Ltd. (Nagoya,
JP)
|
Appl.
No.: |
D/323,537 |
Filed: |
August 27, 2008 |
Foreign Application Priority Data
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Feb 29, 2008 [JP] |
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2008-004939 |
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Current U.S.
Class: |
D15/144.1 |
Current International
Class: |
1509 |
Field of
Search: |
;D15/138,140,144.1,199
;438/584,689,692 ;451/288,289,388 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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2005-268624 |
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Sep 2005 |
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JP |
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D1345656 |
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Oct 2008 |
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JP |
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M298774 |
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Oct 2006 |
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TW |
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D118408 |
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Aug 2007 |
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TW |
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Primary Examiner: Palasik; Patricia
Attorney, Agent or Firm: Burr & Brown
Description
FIG. 1 is a perspective view of a shaft portion of an apparatus for
holding and heating semiconductor wafers or the like;
FIG. 2 is a front view thereof, a rear view being the same image of
a front view;
FIG. 3 is a right side view thereof, a left side view being the
same image of a right side view;
FIG. 4 is a bottom plan view thereof; and,
FIG. 5 is a sectional view taken vertically at the center of the
portion shown by 5--5 in FIG. 2.
The broken lines showing on the drawing disclosure are for
illustrative purposes only and form no part of the claimed design.
The lines consisting of long lines and dots indicate conceptual
border lines between the claimed portions and the disclaimed
portions.
* * * * *