Shaft portion of an apparatus for holding and heating semiconductor wafers or the like

Description

FIG. 1 is a perspective view of a shaft portion of an apparatus for holding and heating semiconductor wafers or the like;

FIG. 2 is a front view thereof, a rear view being the same image of a front view;

FIG. 3 is a right side view thereof, a left side view being the same image of a right side view;

FIG. 4 is a bottom plan view thereof; and,

FIG. 5 is a sectional view taken vertically at the center of the portion shown by 5-5 in FIG. 2.

The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines and dots indicate conceptual border lines between the claimed portions and the disclaimed portions.

Claims

CLAIM The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.

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Inventors:	Nakamura; Taichi (Nagoya, JP)
Assignee:	NGK Insulators, Ltd. (Nagoya, JP)
Appl. No.:	D/323,536
Filed:	August 27, 2008

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Foreign Application Priority Data

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Feb 29, 2008 [JP]			2008-004938

Current U.S. Class:	D15/144.1
Current International Class:	1509
Field of Search:	;D15/138,140,144.1,199 ;438/584,689,692 ;451/288,289,388

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References Cited [Referenced By]

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Foreign Patent Documents

	D1345656		Oct 2008		JP
	M298774		Oct 2006		TW
	D118408		Aug 2007		TW

Primary Examiner: Palasik; Patricia
Attorney, Agent or Firm: Burr & Brown