Top panel for microwave introduction window of a plasma processing apparatus

Description

FIG. 1 is a front view of a top panel for microwave introduction window of a plasma processing apparatus showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a sectional view taken along line 7--7 of FIG. 5;

FIG. 8 is an enlarged view taken along line 8--8 of FIG. 7;

FIG. 9 is an enlarged view taken along line 9--9 of FIG. 7; and,

FIG. 10 is a perspective view thereof.

Claims

CLAIM The ornamental design for a top panel for microwave introduction window of a plasma processing apparatus, as shown and described.

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Inventors:	Ota; Kinya (Amagasaki, JP), Tian; Cai Zhong (Amagasaki, JP), Kitagawa; Junichi (Amagasaki, JP)
Assignee:	Tokyo Electron Limited (Tokyo, JP)
Appl. No.:	D/252,839
Filed:	January 30, 2006

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Foreign Application Priority Data

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Jul 29, 2005 [JP]			2005-022103

Current U.S. Class:	D15/138
Current International Class:	1509
Field of Search:	;D7/586,587,501,553.6,600.4 ;D8/70,74 ;D9/445,454,456 ;D15/133,144.1,199,122,138,139 ;117/103 ;118/723AN,723ME,723MP,723MW,723E,723ER ;216/69,67 ;219/420-424,523,530,541,544 ;257/E21.252,252,629,631,E39.001 ;427/562,571,575 ;D1/126,128 ;D6/455 ;D13/122,138,139,158-177,182 ;D18/17 ;156/242,345 ;175/374,434 ;204/298.38 ;264/328.14,328.15,328.16 ;313/231.31 ;315/111.21 ;407/113-118 ;408/145 ;425/547-550,564,566,570 ;451/540-548 ;700/121,123

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References Cited [Referenced By]

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U.S. Patent Documents

3700938	October 1972	Bryant
4213537	July 1980	Caccavale
4858590	August 1989	Bailey
5335801	August 1994	Lee
5486131	January 1996	Cesna et al.
D386792	November 1997	Miller
6108190	August 2000	Nagasaki
6403933	June 2002	Strodtbeck et al.
6578853	June 2003	Treur et al.
7153199	December 2006	Decker
2005/0194337	September 2005	McDaniel
2005/0199159	September 2005	Searer

Foreign Patent Documents

	0592017		Apr 1994		EP

Other References

Asian Sources Hardwares for World Markets, High Quality Ductile and Grey Iron OEM Products From One of Taiwan's Leading Manufacturers, Nov. 1990, 1 cover Page and p. 251. cited by other.

Primary Examiner: Snapp; Sandra
Assistant Examiner: Palasik; Patricia
Attorney, Agent or Firm: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.