Quartz process tube

Hanagata , et al. April 25, 2

Patent Grant D423463

U.S. patent number D423,463 [Application Number D/074,280] was granted by the patent office on 2000-04-25 for quartz process tube. This patent grant is currently assigned to Tokyo Electron Limited. Invention is credited to Testuya Hanagata, Shingo Watanabe.


United States Patent D423,463
Hanagata ,   et al. April 25, 2000

Quartz process tube

Claims

The ornamental design for a quartz process tube, as shown.
Inventors: Hanagata; Testuya (Tokyo, JP), Watanabe; Shingo (Kanagawa, JP)
Assignee: Tokyo Electron Limited (Tokyo-To, JP)
Appl. No.: D/074,280
Filed: July 24, 1997

Foreign Application Priority Data

Jan 31, 1997 [JP] 9-2643
Current U.S. Class: D13/182
Current International Class: 1303
Field of Search: ;D23/340 ;D13/182 ;D15/144,144.1,199 ;392/416,418 ;118/724,725,500

References Cited [Referenced By]

U.S. Patent Documents
5303671 April 1994 Fondo et al.
5458685 October 1995 Hasebe et al.
5520742 May 1996 Ohkase
5536918 July 1996 Ohkase et al.
Primary Examiner: Lichtenstein; Lisa
Attorney, Agent or Firm: Ladas & Parry

Description



FIG. 1 a perspective view of a quartz process tube.

FIG. 2 a front elevational view thereof.

FIG. 3 a top plan view thereof.

FIG. 4 a bottom plan view thereof.

FIG. 5 a cross sectional view thereof taken along line 5--5 in FIG. 2.

FIG. 6 a rear elevational view thereof.

FIG. 7 a left side view thereof.

FIG. 8 a right side view thereof.

FIG. 9 a cross sectional view thereof taken along line 9--9 in FIG. 3; and,

FIG. 10 a cross sectional view thereof taken along line 10--10 in FIG. 3.

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