U.S. patent number 7,058,627 [Application Number 09/842,370] was granted by the patent office on 2006-06-06 for reticle management system.
This patent grant is currently assigned to Brooks Automation, Inc.. Invention is credited to Thomas Mariano, Oren Wiesler.
United States Patent |
7,058,627 |
Wiesler , et al. |
June 6, 2006 |
**Please see images for:
( Certificate of Correction ) ** |
Reticle management system
Abstract
A reticle management system is disclosed that provides data
storage and retrieval of data associated with each reticle, reticle
carrier, and certain system attributes and also for the efficient
movement and storage of reticles and reticle carriers. The reticle
management system includes a reticle management controller, a
central reticle database, and one or more reticle stockers that
include a stocker controller, a stocker database, and a stocker
unit. The reticle management controller is coupled to the central
reticle database and each of the stocker controllers. Each stocker
controller collects data on the reticles, reticle carriers, or
both, that are stored within the associated stocker unit and stores
this data in the stocker database. The reticle management
controller retrieves the data in each stocker database via the
associated stocker controller and stores this data in central
reticle database. In addition, data attributes for the system, and
the reticle carriers within the system may also be stored in the
central reticle database.
Inventors: |
Wiesler; Oren (Wayland, MA),
Mariano; Thomas (Londonderry, NH) |
Assignee: |
Brooks Automation, Inc.
(Chelmsford, MA)
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Family
ID: |
22737567 |
Appl.
No.: |
09/842,370 |
Filed: |
April 25, 2001 |
Prior Publication Data
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Document
Identifier |
Publication Date |
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US 20010047222 A1 |
Nov 29, 2001 |
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Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
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60199453 |
Apr 25, 2000 |
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Current U.S.
Class: |
1/1; 707/999.005;
707/999.01; 707/999.102 |
Current CPC
Class: |
G03F
7/70541 (20130101); G03F 7/70741 (20130101); H01L
21/67276 (20130101); Y10S 707/99943 (20130101); Y10S
707/99935 (20130101) |
Current International
Class: |
G06F
17/00 (20060101) |
Field of
Search: |
;707/1,5,104.1,100
;700/90 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Other References
Lambson, Chuck; Choudhury, Marcel; Davis, Robert; "Automated
reticle transport and stepper loading" , Solid State Technolog, V.
39, N. 10, p. 97, Oct. 1996, ISSN: 0038-111X. cited by examiner
.
"PRI Automation Automation Announces New Combination Reticle
Stocker", PR Newswire, p. 9143, Oct. 26, 1999. cited by examiner
.
Assessment of the performance of a reticle stocker with integrated
database and the productivity gain obtained in a submicron ASIC
watertab,
http://www.sea.rl.ac.uk/OldSEA/oldpubs/Retimatic/.quadrature..quadrature.-
. cited by examiner .
Denise Dillon Harris, Automated Reticle Management Increases
Efficiency, Throughput, and Capital Investment Utilization,
http://www.semiconductorfabtech.com/features/lithography/articles/body3.1-
95.php3. cited by examiner .
Anne M. Murray, "Automated reticle handling: A comparison of
distributed and centralized reticle storage and transport" , ACM,
pp. 1360-1365. cited by examiner.
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Primary Examiner: Corrielus; Jean M.
Attorney, Agent or Firm: Weingarten, Schurgin, Gagnebin
& Lebovici LLP
Parent Case Text
CROSS REFERENCE TO RELATED APPLICATIONS
This application claims priority of Provisional Application No.
60/199,453 filed Apr. 25, 2000 entitled RETICLE MANAGEMENT SYSTEM
and incorporated herein by reference.
Claims
What is claimed is:
1. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database; and at least one stocker
including a stocker database, a stocker controller communicably
coupled to the stocker database and communicably coupled to the
reticle management controller, and a plurality of storage locations
configured and arranged to store the plurality of reticles, the
stocker controller being configured and arranged to store data
corresponding to the plurality of reticles stored within the
plurality of storage locations within the stocker database, wherein
the data associated with the plurality of reticles stored in the
central reticle database includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle stored in the at least one stocker, and each portion of the
second data corresponding to at least one predetermined data
constant associated with the plurality of reticles stored in the at
least one stocker, wherein the reticle management controller is
configured and arranged to retrieve at least a portion of the data
corresponding to the plurality of reticles stored within the
stocker database, and to store the retrieved data portion within
the central reticle database, wherein the reticle management
controller is further configured and arranged to manipulate and to
maintain the plurality of reticles based on one or more portions of
the first data associated with the respective reticles stored in
the at least one stocker, and one or more portions of the second
data corresponding to the predetermined data constants associated
with the plurality of reticles stored in the at least one stocker,
wherein the portions of the first data corresponding to each of the
plurality of reticles stored in the central reticle database
includes a plurality of reticle identifying data, wherein the
plurality of reticle identifying data includes an attribute
identifying the reticle, and an attribute identifying the location
of the reticle, and wherein the plurality of reticle identifying
data further includes: an attribute identifying a reticle carrier
housing the reticle; an attribute identifying a date and time the
reticle was entered into use; and an attribute identifying a user
identifier who created the reticle.
2. The apparatus of claim 1 wherein the portions of the first data
corresponding to each of the plurality of reticles stored in the
central reticle database includes a plurality of reticle history
data.
3. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database; and at least one stocker
including a stocker database, a stocker controller communicably
coupled to the stocker database and communicably coupled to the
reticle management controller, and a plurality of storage locations
configured and arranged to store the plurality of reticles, the
stocker controller being configured and arranged to store data
corresponding to the plurality of reticles stored within the
plurality of storage locations within the stocker database, wherein
the data associated with the plurality of reticles stored in the
central reticle database includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle stored in the at least one stocker, and each portion of the
second data corresponding to at least one predetermined data
constant associated with the plurality of reticles stored in the at
least one stocker, wherein the reticle management controller is
configured and arranged to retrieve at least a portion of the data
corresponding to the plurality of reticles stored within the
stocker database, and to store the retrieved data portion within
the central reticle database, wherein the reticle management
controller is further configured and arranged to manipulate and to
maintain the plurality of reticles based on one or more portions of
the first data associated with the respective reticles stored in
the at least one stocker, and one or more portions of the second
data corresponding to the predetermined data constants associated
with the plurality of reticles stored in the at least one stocker,
and wherein the portions of the first data corresponding to each of
the plurality of reticles stored in the central reticle database
includes a plurality of reticle history data including: an
attribute identifying the number of times the reticle has been
retrieved; an attribute identifying the date the reticle was last
retrieved; an attribute identifying the number of times the reticle
has been stored; and an attribute identifying the date the reticle
was last stored.
4. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database; and at least one stocker
including a stocker database, a stocker controller communicably
coupled to the stocker database and communicably coupled to the
reticle management controller, and a plurality of storage locations
configured and arranged to store the plurality of reticles, the
stocker controller being configured and arranged to store data
corresponding to the plurality of reticles stored within the
plurality of storage locations within the stocker database, wherein
the data associated with the plurality of reticles stored in the
central reticle database includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle stored in the at least one stocker, and each portion of the
second data corresponding to at least one predetermined data
constant associated with the plurality of reticles stored in the at
least one stocker, wherein the reticle management controller is
configured and arranged to retrieve at least a portion of the data
corresponding to the plurality of reticles stored within the
stocker database, and to store the retrieved data portion within
the central reticle database, wherein the reticle management
controller is further configured and arranged to manipulate and to
maintain the plurality of reticles based on one or more portions of
the first data associated with the respective reticles stored in
the at least one stocker, and one or more portions of the second
data corresponding to the predetermined data constants associated
with the plurality of reticles stored in the at least one stocker,
and wherein the portions of the first data corresponding to each of
the plurality of reticles stored in the central reticle database
includes a plurality of reticle history data including: an
attribute identifying a user identifier who last selected the
reticle; and an attribute identifying a user identifier who last
stored the reticle.
5. The apparatus of claim 4 wherein the portions of the first data
corresponding to each of the plurality of reticles stored in the
central reticle database includes a plurality of reticle
maintenance data.
6. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database; and at least one stocker
including a stocker database, a stocker controller communicably
coupled to the stocker database and communicably coupled to the
reticle management controller, and a plurality of storage locations
configured and arranged to store the plurality of reticles, the
stocker controller being configured and arranged to store data
corresponding to the plurality of reticles stored within the
plurality of storage locations within the stocker database, wherein
the data associated with the plurality of reticles stored in the
central reticle database includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle stored in the at least one stocker, and each portion of the
second data corresponding to at least one predetermined data
constant associated with the plurality of reticles stored in the at
least one stocker, wherein the reticle management controller is
configured and arranged to retrieve at least a portion of the data
corresponding to the plurality of reticles stored within the
stocker database, and to store the retrieved data portion within
the central reticle database, wherein the reticle management
controller is further configured and arranged to manipulate and to
maintain the plurality of reticles based on one or more portions of
the first data associated with the respective reticles stored in
the at least one stocker, and one or more portions of the second
data corresponding to the predetermined data constants associated
with the plurality of reticles stored in the at least one stocker,
wherein the portions of the first data corresponding to each of the
plurality of reticles stored in the central reticle database
includes a plurality of reticle maintenance data, and wherein the
portions of the first data corresponding to each of the plurality
of reticles stored in the central reticle database includes the
plurality of reticle maintenance data including: an attribute
identifying the number of times the reticle has been cleaned; an
attribute identifying the date on which the reticle was last
cleaned; an attribute identifying the number of times the reticle
was inspected; and an attribute identifying the date on which the
reticle was last inspected.
7. The apparatus of claim 6 wherein the plurality of reticle
maintenance data further includes: an attribute identifying a user
identifier who last cleaned the reticle; an attribute identifying a
location where the reticle was last cleaned; an attribute
identifying a user identifier who last inspected the reticle; and
an attribute identifying a location where the reticle was last
inspected.
8. The apparatus of claim 6 further including: a central system
database configured and arranged to store portions of the second
data corresponding to system requirements of the plurality of
reticles, wherein the reticle management controller is communicably
coupled to the central system database, the reticle management
controller being configured and arranged to store and to retrieve
the system data from the central system database.
9. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database; and at least one stocker
including a stocker database, a stocker controller communicably
coupled to the stocker database and communicably coupled to the
reticle management controller, and a plurality of storage locations
configured and arranged to store the plurality of reticles, the
stocker controller being configured and arranged to store data
corresponding to the plurality of reticles stored within the
plurality of storage locations within the stocker database, wherein
the data associated with the plurality of reticles stored in the
central reticle database includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle stored in the at least one stocker, and each portion of the
second data corresponding to at least one predetermined data
constant associated with the plurality of reticles stored in the at
least one stocker, wherein the reticle management controller is
configured and arranged to retrieve at least a portion of the data
corresponding to the plurality of reticles stored within the
stocker database, and to store the retrieved data portion within
the central reticle database, wherein the reticle management
controller is further configured and arranged to manipulate and to
maintain the plurality of reticles based on one or more portions of
the first data associated with the respective reticles stored in
the at least one stocker, and one or more portions of the second
data corresponding to the predetermined data constants associated
with the plurality of reticles stored in the at least one stocker,
further including: a central system database configured and
arranged to store portions of the second data corresponding to
system requirements of the plurality of reticles, wherein the
reticle management controller is communicably coupled to the
central system database, the reticle management controller being
configured and arranged to store and to retrieve the system data
from the central system database, and wherein the portions of the
second data corresponding to the system requirements of the
plurality of reticles includes: an attribute identifying the
maximum number of cleanings of a reticle; an attribute identifying
the maximum number of inspections of a reticle; an attribute
identifying the maximum number of uses of a reticle between
inspections; and an attribute identifying the maximum number of
uses of a reticle between cleaning.
10. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database; and at least one stocker
including a stocker database, a stocker controller communicably
coupled to the stocker database and communicably coupled to the
reticle management controller, and a plurality of storage locations
configured and arranged to store the plurality of reticles, the
stocker controller being configured and arranged to store data
corresponding to the plurality of reticles stored within the
plurality of storage locations within the stocker database, wherein
the data associated with the plurality of reticles stored in the
central reticle database includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle stored in the at least one stocker, and each portion of the
second data corresponding to at least one predetermined data
constant associated with the plurality of reticles stored in the at
least one stocker, wherein the reticle management controller is
configured and arranged to retrieve at least a portion of the data
corresponding to the plurality of reticles stored within the
stocker database, and to store the retrieved data portion within
the central reticle database, wherein the reticle management
controller is further configured and arranged to manipulate and to
maintain the plurality of reticles based on one or more portions of
the first data associated with the respective reticles stored in
the at least one stocker, and one or more portions of the second
data corresponding to the predetermined data constants associated
with the plurality of reticles stored in the at least one stocker,
further including: a central system database configured and
arranged to store portions of the second data corresponding to
system requirements of the plurality of reticles, wherein the
reticle management controller is communicably coupled to the
central system database, the reticle management controller being
configured and arranged to store and to retrieve the system data
from the central system database, and wherein the portions of the
second data corresponding to the system requirements of the
plurality of reticles includes: an attribute identifying the
maximum time between inspections of a bare reticle; and an
attribute identifying the maximum time between cleanings of a bare
reticle.
11. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program: out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database; and at least one stocker
including a stocker database, a stocker controller communicably
coupled to the stocker database and communicably coupled to the
reticle management controller, and a plurality of storage locations
configured and arranged to store the plurality of reticles, the
stocker controller being configured and arranged to store data
corresponding to the plurality of reticles stored within the
plurality of storage locations within the stocker database, wherein
the data associated with the plurality of reticles stored in the
central reticle database includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle stored in the at least one stocker, and each portion of the
second data corresponding to at least one predetermined data
constant associated with the plurality of reticles stored in the at
least one stocker, wherein the reticle management controller is
configured and arranged to retrieve at least a portion of the data
corresponding to the plurality of reticles stored within the
stocker database, and to store the retrieved data portion within
the central reticle database, wherein the reticle management
controller is further configured and arranged to manipulate and to
maintain the plurality of reticles based on one or more portions of
the first data associated with the respective reticles stored in
the at least one stocker, and one or more portions of the second
data corresponding to the predetermined data constants associated
with the plurality of reticles stored in the at least one stocker,
further including: a central system database configured and
arranged to store portions of the second data corresponding to
system requirements of the plurality of reticles, wherein the
reticle management controller is communicably coupled to the
central system database, the reticle management controller being
configured and arranged to store and to retrieve the system data
from the central system database, and wherein the portions of the
second data corresponding to the system requirements of the
plurality of reticles includes: an attribute identifying the
maximum time between inspections of a kitted reticle; and an
attribute identifying the maximum time between cleanings of a
kitted reticle.
12. The apparatus of claim 11 further including a plurality of
stockers, each of the plurality of stockers including a stocker
controller communicably coupled to the reticle management
controller, a stocker database, and a plurality of storage
locations configured and arranged to store at least one of the
plurality of reticles, the stocker controller configured and
arranged to collect at least a portion of the first and second
data, and to store the at least a portion of the first and second
data within the stocker database, wherein the reticle management
controller is configured and arranged to receive at least apportion
of the first and second data from each of the plurality of stocker
controllers, and to provide at least a portion of the first and
second data to each of the plurality of stocker controllers.
13. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; and a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database, wherein the data associated with
the plurality of reticles includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle, and each portion of the second data corresponding to at
least one predetermined data constant associated with the plurality
of reticles, wherein the portions of the first data associated with
the respective ones of the plurality of reticles includes a
plurality of reticle identifying data, wherein the plurality of
reticle identifying data includes: an attribute identifying the
reticle; and an attribute identifying the location of the reticle,
and wherein the plurality of reticle identifying data further
includes: an attribute identifying a reticle carrier housing the
reticle; an attribute identifying a date and time the reticle was
entered into use; and an attribute identifying a user identifier
who created the reticle.
14. The apparatus of claim 13 wherein the portions of the first
data associated with the respective ones of the plurality of
reticles includes a plurality of reticle history data.
15. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; and a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database, wherein the data associated with
the plurality of reticles includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle, and each portion of the second data corresponding to at
least one predetermined data constant associated with the plurality
of reticles, and wherein the portions of the first data associated
with the respective ones of the plurality of reticles includes a
plurality of reticle history data including: an attribute
identifying the number of times the reticle has been retrieved; an
attribute identifying the date the reticle was last retrieved; an
attribute identifying the number of times the reticle has been
stored; and an attribute identifying the date the reticle was last
stored.
16. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; and a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database, wherein the data associated with
the plurality of reticles includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle, and each portion of the second data corresponding to at
least one predetermined data constant associated with the plurality
of reticles, and wherein the portions of the first data associated
with the respective ones of the plurality of reticles includes a
plurality of reticle history data including: an attribute
identifying a user identifier who last selected the reticle; and an
attribute identifying a user identifier who last stored the
reticle.
17. The apparatus of claim 16 wherein the portions of the first
data associated with the respective ones of the plurality of
reticles includes a plurality of reticle maintenance data.
18. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; and a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database, wherein the data associated with
the plurality of reticles includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle, and each portion of the second data corresponding to at
least one predetermined data constant associated with the plurality
of reticles, wherein the portions of the first data associated with
the respective ones of the plurality of reticles includes a
plurality of reticle maintenance data, and wherein the plurality of
reticle maintenance data includes: an attribute identifying the
number of times the reticle has been cleaned; an attribute
identifying the date on which the reticle was last cleaned; an
attribute identifying the number of times the reticle was
inspected; and an attribute identifying the date on which the
reticle was last inspected.
19. The apparatus of claim 18 wherein the plurality of reticle
maintenance data further includes: an attribute identifying a user
identifier who last cleaned the reticle; an attribute identifying a
location where the reticle was last cleaned; an attribute
identifying a user identifier who last inspected the reticle; and
an attribute identifying a location where the reticle was last
inspected.
20. The apparatus of claim 18 further including: a central system
database configured and arranged to store portions of the second
data corresponding to system requirements of the plurality of
reticles, wherein the reticle management controller is communicably
coupled to the central system database, the reticle management
controller being configured and arranged to store and to retrieve
the system data from the central system database.
21. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; and a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database, wherein the data associated with
the plurality of reticles includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle, and each portion of the second data corresponding to at
least one predetermined data constant associated with the plurality
of reticles, further including: a central system database
configured and arranged to store portions of the second data
corresponding to system requirements of the plurality of reticles,
wherein the reticle management controller is communicably coupled
to the central system database, the reticle management controller
being configured and arranged to store and to retrieve the system
data from the central system database, and wherein the portions of
the second data corresponding to the system requirements of the
plurality of reticles includes: an attribute identifying the
maximum number of cleanings of a reticle; an attribute identifying
the maximum number of inspections of a reticle; an attribute
identifying the maximum number of uses of a reticle between
inspections; and an attribute identifying the maximum number of
uses of a reticle between cleaning.
22. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; and a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database, wherein the data associated with
the plurality of reticles includes first and second data, each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle, and each portion of the second data corresponding to at
least one predetermined data constant associated with the plurality
of reticles, further including: a central system database
configured and arranged to store portions of the second data
corresponding to system requirements of the plurality of reticles,
wherein the reticle management controller is communicably coupled
to the central system database, the reticle management controller
being configured and arranged to store and to retrieve the system
data from the central system database, and wherein the portions of
the second data corresponding to the system requirements of the
plurality of reticles includes: an attribute identifying the
maximum time between inspections of a bare reticle; and an
attribute identifying the maximum time between cleanings of a bare
reticle.
23. An apparatus including at least one processor and at least one
memory, the processor being operative to execute at least one
program out of the memory for managing data corresponding to a
plurality of reticles in a semiconductor manufacturing system,
comprising: a central reticle database configured and arranged to
store data associated with the plurality of reticles; and a reticle
management controller communicably coupled to the central reticle
database, the reticle management controller configured and arranged
to store data in the central reticle database, and to retrieve data
from the central reticle database, wherein the data associated with
the plurality of reticles includes first and second data, Each of
the first and second data including a plurality of data portions,
each portion of the first data being associated with a respective
reticle, and each portion of the second data corresponding to at
least one predetermined data constant associated with the plurality
of reticles, further including: a central system database
configured and arranged to store portions of the second data
corresponding to system requirements of the plurality of reticles,
wherein the reticle management controller is communicably coupled
to the central system database, the reticle management controller
being configured and arranged to store and to retrieve the system
data from the central system database, and wherein the portions of
the second data corresponding to the system requirements of the
plurality of reticles includes: an attribute identifying the
maximum time between inspections of a kitted reticle; and an
attribute identifying the maximum time between cleanings of a
kitted reticle.
Description
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
N/A
BACKGROUND OF THE INVENTION
Lithography represents over 35% of the cost of manufacturing
integrated circuits. Because this is a significant portion of the
cost of an integrated circuit, reducing the costs associated with
lithography and increasing the efficiency of the lithography
process are important to lowering the overall costs associated with
the manufacture of integrated circuits.
Presently, reticles that are used as masks in the lithography
process are manually handled during storage and transport and data
related to each reticle is stored on an ad-hoc basis. This leads to
inefficient reticle utilization due to missing or lost reticles,
over or under inspection of reticles, and over or under cleaning of
reticles, or a combination of these or other problems such as
reticles being in the wrong locations when needed for
processing.
It would therefore be advantageous to have a reticle management
system that allows a user to assess current data corresponding to
various reticles and to manage the various reticles
accordingly.
BRIEF SUMMARY OF THE INVENTION
A reticle management system is disclosed that provides data storage
and retrieval of data associated with each reticle, reticle
carrier, and certain system attributes and also for the efficient
movement and storage of reticles and reticle carriers. The reticle
management system includes a reticle management controller, a
central reticle database, and one or more reticle stockers that
include a stocker controller, a stocker database, and a stocker
unit. The reticle management controller is coupled to the central
reticle database and each of the stocker controllers. Each stocker
controller collects data on the reticles, reticle carriers, or
both, that are stored within the associated stocker unit and stores
this data in the stocker database. The reticle management
controller retrieves the data in each stocker database via the
associated stocker controller and stores this data in central
reticle database. In addition, data attributes for the system, and
the reticle carriers within the system may also be stored in the
central reticle database.
The reticle management system may be coupled to a reticle movement
system and can allow both user input move commands and automatic
move command generation. A user may store reticles, retrieve
reticles, move reticles, or provide an alternative use of the
reticles such as inspection, cleaning, repair, re-pelliclization,
or place a use hold on a reticle.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING
The invention will be more fully understood by reference to the
following Detailed Description of the Invention in conjunction with
the drawings of which:
FIG. 1 is a schematic representation of a semiconductor wafer
processing facility;
FIG. 2 is a block diagram of a reticle management system in
accordance with the present invention;
FIGS. 3A 3E is a table depicting various attributes of the
reticles, reticle carriers, and the system stored in the central
database in FIG. 2;
FIG. 4 is a flow chart of a method of empty reticle carrier
management in accordance with the present invention;
FIG. 5 is a flow chart of a method of carrier aging in accordance
with the present invention; and
FIG. 6 is a flow chart of a method of empty shelf management in
accordance with the present invention.
DETAILED DESCRIPTION OF THE INVENTION
As used herein, a reticle is a photo mask or negative used in
lithographic processing of semiconductor wafers. A reticle carrier
is a material transport vehicle or device that is designed to
transport reticles. Kitted refers to a reticle loaded onto a
reticle carrier.
FIG. 1 depicts an exemplary schematic view of a semiconductor
manufacturing facility 100. The facility 100 includes a plurality
of bays 101, 103, 105, and 107, which typically are clean rooms
that may contain various process stations, stockers, and material
handling systems. Typically each of the plurality of bays 101 107
has at least one stocker 102, 104, 106, and 108, respectively, that
contains lithographic reticles, semiconductor wafers, or both. In
addition, each of the plurality of bays 101, 103, 105, and 107 also
have one or more processing stations 120 126, 128 134, 136 142, and
144 150, respectively, that are used to process the wafers in the
semiconductor manufacturing process. It should be understood that
the schematic representation depicted in FIG. 1 is for illustrative
purposes only and should only be considered an exemplary
system.
Each of the plurality of bays are linked together by an interbay
material transport system 110 that allows the automatic transport
of wafers, reticles, and other materials between each of the
plurality of bays. Each bay 101 107 typically includes an intrabay
material transport system 112, 114, 116, and 118, respectively,
that is used to transport wafers and reticles from the stockers to
the various processing stations within the particular bay. In
general the intrabay transport systems 112, 114, 116, and 118 are
connected by one or more connections to the interbay transport
system 110.
FIG. 2 depicts a system that is used to control the intrabay and
interbay material transport systems to ensure that material is
appropriately located and any material movements are performed
efficiently. In particular the system depicted in FIG. 2 is used to
ensure that the reticles used within the system are stored,
retrieved, moved, and maintained in an efficient manner. A host 202
issues commands to the reticle management system (RMS) 200, which
is comprised of a RMS controller 204 and a central database 206.
The RMS controller 204 communicates with the reticle transport
system (RTS) 205. The RMS controller 204 also issues reticle move
requests to the RTS 205.
Each stocker 212 and 214 in the system includes a stocker
controller and stocker unit, 213 and 215 respectively. The stocker
unit includes the hardware controller, the actual stocker hardware
itself, and the plurality of storage locations or shelves. A
stocker may come in two varieties a bare reticle stocker that is
able to store reticles that are not in carriers ("unkitted
reticles"), and a reticle carrier stocker that is capable of
storing carriers that have reticles within them ("kitted
reticles"). A suitable bare reticle robotic stocker is available
from PRI Automation, Billerica Mass. A suitable computer that is
used as a stocker controller is a Pentium class microprocessor,
having a minimum of 64 KB ram, and a minimum of a 1.2 Gbyte hard
drive.
Each stocker 212 and 214 also maintains a database 217 and 219 of
the data attributes associated with the particular reticles,
carriers, or both that are stored in that particular stocker. The
RMS controller 204 interrogates each stocker controller for the
data associated with each reticle or carrier stored within the
corresponding stocker. The RMS controller 204 stores these data
attributes associated with each reticle and reticle carrier in the
system in a central database 206. The central database 206 stores
not only the data associated with a corresponding reticle and
reticle carrier, but also stores system wide data constants as
well. FIG. 3 depicts three sets of attributes in which column 302
includes the attributes identifier, column 303 includes an
attribute type, and column 304 includes the attribute definition.
The first set of attributes 306 include those attributes associated
with each reticle stored in the system. The second set of
attributes 308 include those attributes associated with each
reticle carrier, and the third set of attributes 310 include those
attributes associated with the system wide data constants.
As discussed above, the RMS central database 206 stores a plurality
of attributes associated with each of the reticles and reticle
carriers within the RMS system. In addition to operational data
associated with a particular reticle, other data must be maintained
as well. During the lifetime of a reticle, each reticle is
periodically inspected. Data 312 includes the data associated with
the inspections of each reticle. Similarly, each reticle is
periodically cleaned. Data 314 tracks the data associated with the
cleaning data associated with a particular reticle. In some
circumstances, a reticle may need to be repaired after being
inspected, data 316 tracks the data associated with reticle repair.
Reticles may be re-pelliclized as well. Data 318 tracks the
re-pelliclization data for each reticle. During the lifetime of a
reticle, a reticle may be placed on hold. During this time no
retrieve operations may be performed on this reticle. Data 320
tracks data associated with hold operations associated with any
reticle.
The reticle controller can provide this data to a user 209 via a
client machine 207 coupled to the RMS controller 204. The user
determines the appropriate actions regarding the use of the
reticles based on the stored data. Alternatively, the controller
can use this data to make autonomous decisions regarding the use of
the reticles. As will be explained below, various operations are
allowed in terms of manipulating the reticles, and other operations
are allowed in terms of maintaining the reticles.
In one embodiment, the RMS controller can include various security
levels, such as a system administrator level, which is the highest
security level, level 1; a supervisor level, which is a mid
security level, level 2; and an operator level, which is the lowest
security level, level 3. Level 1 security access should only be
granted to qualified personnel and allows those selected personnel
to perform system level diagnostics and debugging. Level 2 security
is limited to system maintenance personnel. Level 2 security allows
a user to recover from a device or hard error, administer
operators, and alter some information. Level 3 security is provided
to operators and allows them to perform normal operational system
functions including recovering from low-level non-destructive
system errors. The basic operations that may be performed on a
reticle can be grouped according to function and personnel grouped
accordingly. The functions can include process oriented actions,
inspection oriented actions, cleaning oriented actions, repair
oriented actions, re-pellicle oriented actions, and the withdraw
from service of the reticle either by holding the reticle from
operations or by discontinuing the reticle from any service
operation.
The RMS system will allow operators with the means to store,
retrieve, move, scan, and to process reticles as needed. The user
store command encompasses several options. Upon placement of the
payload, which may be bare reticles or a kitted reticle carrier at
an operator I/O of a stocker, the RMS system will automatically
store the reticle on a local shelf within the stocker. Prior to
placing the payload, the user may select additional storage
options. For example, a user may direct the RMS to map the reticle
carrier, i.e., determine what reticles are contained within the
reticle carrier and return to the user, or store the reticle
carrier to a local shelf. The user may wish to empty the reticle
carrier and store both the reticle and the carrier, or store the
reticle and return the reticle carrier to the user. If the current
location is a reticle stocker, i.e., a stocker that stores both
reticle carriers and reticles, and the destination stocker is a
bare reticle stocker, i.e., a stocker that stores only reticles,
the RMS will coordinate the commands necessary to move the reticle
payload from the source location to the destination location and
unload the reticle carrier. If an empty reticle carrier results
then, as will be explained in more detail below, an empty reticle
carrier management criteria is applied. As will be explained in
more detail below, if the reticle was retrieved for any purpose
other than process usage, upon storage an entry will be entered in
the validation queue. Reticles that are entered in the validation
queue require some level of servicing by a qualified persons prior
to being retrieved again for any other purpose than the required
servicing.
The user retrieve command allows a user to identify a desired
reticle. The user selects the desired reticle and a retrieve
command is issued. The desired reticle will be retrieved from a
shelf in a stocker and placed in the first available output port
closest to the physical location of the user. As mentioned above,
when a reticle is retrieved the user must declare the intended
usage of the reticle. For example in addition to use in processing,
a reticle may be retrieved for inspection, cleaning,
re-pelliclization, repair, and to be discontinued from service, or
a combination of these uses.
A user move command may be selected instead of retrieve in order to
move the reticle to another stocker. The RMS provides the user with
a listing of available stockers the reticle or reticle carrier may
be moved to. The RMS will issue the necessary commands to move the
reticle when the user has selected the destination stocker. If the
stocker selected is the stocker currently storing the reticle or
carrier, the RMS will query the user as to the exact location to
move the reticle or carrier to. If the stocker selected is not the
current one, then the RMS will generate the commands to move the
reticle or carrier to the new destination.
Each stocker has the capability to scan the storage locations
contained therein and verify the contents stored thereon. Reticle
carrier stockers typically only have the ability to validate a
carrier stored in a storage location, but are not able to verify
the contents of the reticle carrier. A bare reticle stocker have
the capability to validate a reticle stored in a storage location,
but also to validate the identity of the reticle as well. In one
embodiment, if a reticle carrier is scanned for identity on a
system that includes an automated material handling system, the RMS
will send the reticle carrier to a bare reticle stocker, complete a
scan of the contents of the carrier, and return the carrier to the
original stocker upon completion. Thus, a user may direct a stocker
to scan the storage locations to validate and identify the material
stored therein.
During system startup, all stockers are directed by the RMS
controller to scan their storage locations and take an inventory of
all reticles and carriers stored therein. It is assumed that the
all reticles are out of the system at startup and it is the local
information provided by the stocker to the RMS server that is used
to populate the RMS database. As new reticles or carriers are added
to the system, the stocker containing the new reticle or carrier
will provide the necessary data to the RMS controller for storage
in the RMS database.
The user may also cancel any user initiated command prior the
beginning of execution of that command.
It is a main function of the RMS to maintain an inventory of empty
reticle carriers that are available for kitting operations. The RMS
maintains a count of the number of empty reticle carriers at each
stocker within the system. Two limits are provided for each stocker
and the supply of empty reticle carriers contained there. The first
limit is the upper empty carrier limit. The second limit is the
lower empty carrier limit. The sum of the upper empty carrier limit
for each stocker provides the maximum number of empty carriers that
should be kept in the system at any given time. The sum of the
lower empty carrier limit for each stocker provides the minimum
number of empty carriers that should be kept in the system at any
given time. Thus, the minimum number of free reticle carriers
serves to prevent the system from being emptied of empty reticle
carriers at any given time. FIG. 4 illustrates a method of managing
the number of empty reticle carriers within the system. The value
of the upper empty carrier limit is determined for each stocker,
step 402. The value of the lower empty carrier limit is determined
for each stocker, step 504. Each stocker is scanned for empty
carriers, step 406, and if the number of free reticle carriers is
greater than the upper empty carrier limit for that stocker the RMS
controller 204 will search for an available stocker having a number
of empty carriers less than the value of the upper empty carrier
limit, step 410. If an available stocker exists, then one or more
empty reticle carriers are moved to the available stocker, step
412. If no available stocker exists, the empty carrier remains in
the stocker. This can only happen if all the stockers have reached
the value of the maximum number of free reticle carriers. If the
number of reticle carriers is less than the lower empty carrier
limit, the RMS controller 204 will request an empty carrier from
another stocker, step 416. If no empty reticle carriers exist, the
stocker will request carrier aging, step 422. This can only happen
if all the stockers have reached the value of the minimum number of
free reticle carriers. The next stocker is then checked, step 524.
If an empty carrier exists the RMS controller 204 requests that an
empty reticle carrier be delivered to the stocker, step 420.
It is also a function of the RMS to maintain sufficient empty
storage locations for each stocker. A number of empty shelves is
reserved for each stocker in order to provide sufficient storage.
FIG. 6 depicts a method for managing the number of empty shelves
within a stocker. The empty shelf limit for each stocker is
determined, step 602, by taking the difference between the capacity
of the stocker and the value of the upper empty carrier limit for
that stocker. The stockers are scanned, step 604, and if a stocker
has a number of empty shelves that is less than or equal to the
empty shelf limit, a carrier is moved to a stocker with an empty
shelf limit that is greater than the empty shelf limit, step 608.
If no stockers are available, the RMS controller 204 is notified
and carrier aging requested.
In order to provide available empty reticle carriers a method is
provided to determine when a carrier reticle can be reused in a
process referred to as carrier againg. Carrier aging allows
frequently used reticles to be kept kitted, i.e., stored in reticle
carriers and less frequently used reticles kept un-kitted, i.e.,
not stored in a reticle carrier. Carrier aging requests occur under
three conditions. The first condition is when a request for an
empty reticle carrier is made that can not be filled. A second
condition is the RMS controller 204 increasing the age of reticle
carriers periodically during the time they are idle. This period of
time when the RMS controller 204 ages carriers is a system wide
constant. The third condition is when the lower empty carrier limit
of the RMS system has been reached.
When a certain age limit is reached by one or more reticle carriers
within a given time period, one or more of the aged reticle
carriers will undergo tier level reduction. Tier level reduction
can occur in two ways. In the first way, the reticle carrier is
un-kitted and any reticles stored therein are unloaded and stored
in a stocker. The second way is to move the kitted reticle carrier
to another stocker.
FIG. 5 illustrates reticle carrier aging by the RMS controller 204.
Each stocker is assigned an age tier level and an age limit, step
502, and an age tier time, step 504. The RMS controller 204 then
monitors for one of the three occurrence to occur to age the idle
carriers. If the RMS controller 204 receives a request to age the
carriers 506, then control is passed to step 514. If no request to
age the carriers is received, the RMS controller 204 scans the RMS
system for empty carriers, step 508 and determines if the upper
empty carrier limit has been reached, step 510. If the upper empty
carrier limit has been reached, control is passed to step 514. If
the upper empty carrier limit has not been reached, the RMS
controller 204 determines if the system is to be periodically aged
according to system wide parameters, step 512. If the system is to
be aged, then control passes to step 514.
The RMS controller 204 increments the age of each carrier within
the RMS system, step 514. The RMS controller 204 scans the reticle
carriers in the RMS system, step 516, and determines if any
carriers have an age that is greater than the age level for the
current stocker, step 518. If carriers are found that exceed the
age level for the current stocker, age tier level degradation is
performed, step 520. If the carrier can be moved to another stocker
having a age tier level less than the current stocker, step 522,
the carrier is then moved, step 524. If there is no other available
stocker, the carrier is unloaded and the reticles stored, step
526
Each type of system move request, whether made by a user or the RMS
can be prioritized relative to other move commands and other
commands in general by the RMS. In one embodiment, priorities from
0 to 9 are used, 9 being the highest priority. In this embodiment,
moves caused by reticle carrier aging are assigned a priority of
three (3), and moves caused by tier degradation, empty reticle
carrier moves and empty shelf moves are given a priority of five
(5).
The RMS is also capable of planning and executing moves so as to
optimize and improve delivery times to the operators or to specific
processing equipment. To accomplish this, the RMS needs to know
which reticles are to be used in the near-term and where these
reticles are needed to be. This type of information is typically
provided by the host 202. The RMS creates a set of data consisting
of 4 pieces of data. The move plan data set includes a particular
reticle, identified by the reticle ID, to be transported in a
specific reticle carrier, to a storage location within a specified
stocker, at a particular date and time. Typically move plans can
include a plurality of data sets, and a data plan is executed
entirety. Also typically, only one move plan can be executed at one
time, and subsequent plans are assumed to update or remove the
existing plan. During execution of the move plan, the data sets
comprising the move plan are ordered according to the desired
execution time. Once ordered, the RMS issues commands to move the
specified reticles to the specified locations. The RMS ensures that
reticles moved as a part of the execution of a move plan will not
be bumped out of the desired location as a result of carrier aging
or empty carrier management criteria.
Those of ordinary skill in the art should further appreciate that
variations to and modification of the above-described methods and
apparatus for a folding amplifier may be made without departing
from the inventive concepts disclosed herein. Accordingly, the
invention should be viewed as limited solely by the scope and
spirit of the appended claims.
* * * * *
References