U.S. patent number 6,547,473 [Application Number 09/809,188] was granted by the patent office on 2003-04-15 for fastening device for conveying cart.
This patent grant is currently assigned to Fujitsu Limited. Invention is credited to Tsukasa Adachi, Yukio Takayama, Akihiro Yasuda.
United States Patent |
6,547,473 |
Takayama , et al. |
April 15, 2003 |
Fastening device for conveying cart
Abstract
A fastening device for a conveying cart is used for fastening
the conveying cart to a to-be-fastened apparatus. The device
includes a flange provided on a side of the to-be-fastened
apparatus, and having a pin standing therefrom, and a recess formed
therein; and a fastening mechanism provided on a side of the
conveying cart, and having a first hook member engaging with the
pin of the flange so as to position the conveying cart with respect
to the to-be-fastened apparatus, and a second hook member engaging
with the recess of the flange so the to fasten the conveying cart
to the to-be-fastened apparatus.
Inventors: |
Takayama; Yukio (Kasugai,
JP), Yasuda; Akihiro (Kasugai, JP), Adachi;
Tsukasa (Kasugai, JP) |
Assignee: |
Fujitsu Limited (Kawasaki,
JP)
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Family
ID: |
18738738 |
Appl.
No.: |
09/809,188 |
Filed: |
March 16, 2001 |
Foreign Application Priority Data
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Aug 18, 2000 [JP] |
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2000-248926 |
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Current U.S.
Class: |
403/25; 414/401;
414/584 |
Current CPC
Class: |
H01L
21/67724 (20130101); H01L 21/67775 (20130101); Y10T
403/185 (20150115) |
Current International
Class: |
H01L
21/67 (20060101); H01L 21/677 (20060101); B65G
067/02 () |
Field of
Search: |
;414/401,396,584,940
;403/25 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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7-7005 |
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Feb 1995 |
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JP |
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2000-72226 |
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Mar 2000 |
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JP |
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Primary Examiner: Browne; Lynne H.
Assistant Examiner: Thompson; Kenneth
Attorney, Agent or Firm: Armstrong, Westerman & Hattori,
LLP
Claims
What is claimed is:
1. A fastening device for a conveying cart, used for fastening the
conveying cart to a to-be-fastened apparatus, comprising: a flange
provided on a side of said to-be-fastened apparatus of said device,
and having a pin standing therefrom, and a recess formed therein;
and a fastening mechanism provided on a side of said conveying cart
of said device, and having a first hook member engaging with said
pin of said flange so as to position said conveying cart with
respect to said to-be-fastened apparatus, and a second hook member
engaging with said recess of said flange so as to fasten said
conveying cart to said to-be-fastened apparatus.
2. The device as claimed in claim 1, wherein: said pin stands at a
central position of said flange with respect to a longitudinal
direction thereof; and said flange further comprises a low rib and
a high rib each standing and extending along the longitudinal
direction.
3. The device as claimed in claim 1, further comprising an
engagement canceling mechanism for canceling engagement between
said second hook member and recess.
4. The device as claimed in claim 1, further comprising a roller in
said fastening mechanism for positioning said conveying cart with
respect to said to-be-fastened apparatus as a result of said roller
coming into contact with a side surface of said flange.
5. The device as claimed in claim 1, further comprising a biasing
force generating mechanism in said fastening mechanism generating a
biasing force between said to-be-fastened apparatus and fastening
mechanism, the biasing force functioning as an engagement force
therebetween by pressing a side surface of said flange.
6. A fastening device for a conveying cart, used for fastening the
conveying cart to a to-be-fastened apparatus, comprising: a flange
provided on a side of said to-be-fastened apparatus of said device,
and having a pin standing therefrom, and a recess formed therein; a
fastening mechanism provided on a side of said conveying cart of
said device, and having a first hook member engaging with said pin
of said flange so as to position said conveying cart with respect
to said to-be-fastened apparatus, and a second hook member engaging
with said recess of said flange so as to fasten said conveying cart
to said to-be-fastened apparatus; and a power supply unit in said
recess and a power receiving unit on said second hook member, said
power supply unit and power receiving unit being electrically
connected as a result of said second hook member engaging with said
recess.
7. The device as claimed in claim 6, wherein: a control device is
provided in at least one of said conveying cart and to-be-fastened
apparatus, and, also, a sensor part for detecting electrical
connection between said power supply unit and power receiving unit
is provided; and said control device supplies power from said power
supply unit to said power receiving unit after the electrical
connection between said power supply unit and power receiving unit
is detected based on a signal obtained from said sensor part.
8. A fastening device for a conveying cart, used for fastening the
conveying cart to a to-be-fastened apparatus, comprising: a flange
provided on a side of said to-be-fastened apparatus of said device,
and having a pin standing therefrom, and a recess formed therein; a
fastening mechanism provided on a side of said conveying cart of
said device, and having a first hook member engaging with said pin
of said flange so as to position said conveying cart with respect
to said to-be-fastened apparatus, and a second hook member engaging
with said recess of said flange so as to fasten said conveying cart
to said to-be-fastened apparatus; and an engagement canceling
mechanism for canceling engagement between said second hook member
and recess, wherein said engagement canceling mechanism comprises
an operation lever operated by an operator and a wire connecting
between said operating lever and second hook member, engagement
between said second hook member and recess being cancelled as a
result of said operating lever being operated by the operator.
9. A conveying cart for conveying components/parts to a
manufacturing apparatus, comprising a fastening mechanism of a
fastening device used for fastening said conveying cart to the
manufacturing apparatus, said fastening device comprising: a flange
provided on a side of said manufacturing apparatus of said device,
and having a pin standing therefrom, and a recess formed therein;
and said fastening mechanism provided on a side of said conveying
cart of said device, and having a first hook member engaging with
said pin of said flange so as to position said conveying cart with
respect to said manufacturing apparatus, and a second hook member
engaging with said recess of said flange so said to fasten said
conveying cart to said manufacturing apparatus.
10. A fastening mechanism of a fastening device used for fastening
a conveying cart to a to-be-fastened apparatus, said fastening
device comprising: a flange provided on a side of said
to-be-fastened apparatus of said device, and having a pin standing
therefrom, and a recess formed therein; and said fastening
mechanism provided on a side of said conveying cart of said device,
and having a first hook member engaging with said pin of said
flange so as to position said conveying cart with respect to said
to-be-fastened apparatus, and a second hook member engaging with
said recess of said flange so said to fasten said conveying cart to
said to-be-fastened apparatus.
11. A flange of a fastening device used for fastening a conveying
cart to a to-be-fastened apparatus, said fastening device
comprising: said flange provided on a side of said to-be-fastened
apparatus of said device, and having a pin standing therefrom, and
a recess formed therein; and a fastening mechanism provided on a
side of said conveying cart of said device, and having a first hook
member engaging with said pin of said flange so as to position said
conveying cart with respect to said to-be-fastened apparatus, and a
second hook member engaging with said recess of said flange so said
to fasten said conveying cart to said to-be-fastened apparatus.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a fastening device for a conveying
cart, and, in particular, a fastening device for fastening a
conveying cart used for conveying semiconductor substrates between
processing apparatuses, onto a processing apparatus used as a
to-be-fastened apparatus.
Generally, many semiconductor manufacturing apparatuses are set in
a semiconductor manufacturing factory, and, semiconductor devices
are manufactured in which semiconductor substrates are conveyed
between these semiconductor manufacturing apparatuses. The
conveyance of semiconductor substrates is performed almost
automatically. However, there are cases where it is difficult to
perform conveyance of semiconductor substrates automatically due to
reasons concerning the equipment of the factory. In such a case, a
person performs conveyance of semiconductor substrates manually in
a condition in which the semiconductor substrates are mounted on a
conveying cart.
Further, when the semiconductor substrates are conveyed into a
predetermined position of a semiconductor manufacturing apparatus,
the conveying cart is fastened to the semiconductor manufacturing
apparatus. Then, the semiconductor substrate mounted on the
conveying cart is received by the semiconductor manufacturing
apparatus by using an actuator provided on the semiconductor
manufacturing apparatus or the conveying cart.
At this time, when the conveying cart is not precisely fastened to
the semiconductor manufacturing apparatus which is regarded as a
to-be-fastened apparatus, reception of the semiconductor substrate
by the semiconductor manufacturing apparatus using the actuator may
not be performed properly. Further, when a long time is required
for fastening the conveying cart to the semiconductor manufacturing
apparatus, an efficiency in manufacturing semiconductor devices is
degraded. Accordingly, it is demanded that the conveying cart is
fastened to the to-be-fastened apparatus easily and positively.
2. Description of the Related Art
In the related art, there is no specific standard for the fastening
device for the conveying cart. Therefore, an original fastening
device is used for each semiconductor manufacturing equipment.
Japanese Laid-Open Patent Application No. 2000-72226 discloses one
example thereof.
The fastening device disclosed in this publication is such that, a
plate having a V-shape guiding block, a positioning block, and a
pin provided thereon is provided on the side of the to-be-fastened
apparatus thereof, and first and second rollers and hook are
provided on the side of the conveying cart thereof.
Then, when the conveying cart is fastened to the to-be-fastened
apparatus, the first roller is positioned and is caused to engage
with the V-shaped guiding block, the conveying cart is rotated
toward the to-be-fastened apparatus around the position at which
the first roller and V-shape guiding block are engaged, and the
hook is caused to engage with the pin.
In this state, the second roller is caused to engage with the
positioning block, and the first roller is pressed toward the
V-shape guiding block. Thereby, the conveying cart is fastened to
the to-be-fastened apparatus.
However, in the above-described configuration, the plate having
such a complicated configuration as having the V-shape guiding
block, positioning block and pin provided thereto is provided on
the side of the to-be-fastened apparatus. Accordingly, the
configuration of the fastening device is complicated.
Further, in the above-described fastening device, the first roller
should be positioned to the V-shape guiding block, and, then, the
first roller should be caused to engage with the V-shape guiding
block. Normally, the first roller is provided on the bottom surface
of the conveying cart, and may not be easily viewed by an operator.
Accordingly, it is troublesome for the operator to position and
cause the first roller to engage with the V-shape guiding
block.
Further, because an original fastening device is applied for each
semiconductor manufacturing equipment as mentioned above, the
conveying cart and fastening device are not compatible with other
manufacturing equipment. Thereby, costs of the equipment increase,
and, also, because the conveying cart cannot be used for a
plurality of equipment in common, inconvenience occurs.
Further, in a case where an actuator or the like which is driven by
electric power is provided on the conveying cart, it is necessary
to provide, in addition to the fastening device, a power supply
unit for supplying power to the actuator from the to-be-fastened
apparatus. Thereby, a configuration of the conveying cart and
to-be-fastened apparatus at the fastening position are
complicated.
Further, at a time of fastening, it is necessary to perform the
operation of mechanically fastening the conveying cart to the
to-be-fastened apparatus and the operation of electrically
connecting the conveying cart to the to-be-fastened apparatus.
Thereby, the operation at a time of fastening is totally
complicated.
SUMMARY OF THE INVENTION
The present invention has been devised in consideration to these
problems, and an object of the present invention is to provide the
fastening device for the conveying cart by which the conveying cart
can be fastened to the to-be-fastened apparatus easily and
positively.
A fastening device for a conveying cart, according to the present
invention, used for fastening the conveying cart to a
to-be-fastened apparatus, comprising:
a flange provided on a side of the to-be-fastened apparatus of the
device, and having a pin standing therefrom, and a recess formed
therein; and
a fastening mechanism provided on a side of the conveying cart of
the device, and having a first hook member engaging with the pin of
the flange so as to position the conveying cart with respect to the
to-be-fastened apparatus, and a second hook member engaging with
the recess of the flange so as to fasten the conveying cart to the
to-be-fastened apparatus.
Thereby, as an operator merely pushes the conveying cart, the first
hook member of the fastening mechanism engages with the pin of the
flange, and, also, the second hook member of the fastening
mechanism engages with the recess of the flange. Thereby, the
conveying cart is fastened to the to-be-fastened apparatus. Thus,
it is possible to easily and positively fasten the conveying cart
to the to-be-fastened apparatus with the simple configuration.
Other objects and further features of the present invention will
become more apparent from the following detailed description when
read in conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 shows a state in which a conveying cart is fastened to a
semiconductor manufacturing apparatus by means of a fastening
device in one embodiment of the present invention;
FIG. 2 shows the conveying cart shown in FIG. 1;
FIGS. 3A and 3B show a flange of the fastening device in the
embodiment of the present invention;
FIG. 4 illustrates a fastening mechanism of the fastening device in
the embodiment of the present invention;
FIG. 5 shows a sectional view taken along a line A--A shown in FIG.
4;
FIG. 6 shows, after magnifying, a fastening hook of the fastening
mechanism shown in FIG. 4;
FIG. 7 shows an electric circuit configuration of the fastening
device in the embodiment of the present invention; and
FIGS. 8, 9 and 10 illustrate operation/functions of the fastening
device in the embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
FIGS. 1 and 2 show a conveying cart 11 which has a fastening
mechanism 15 of a fastening device 10 in one embodiment of the
present invention. FIG. 1 shows a state in which the conveying cart
11 is fastened to a semiconductor manufacturing apparatus 12.
In the conveying cart 11, wheels 14 and the fastening mechanism 15
of the fastening device 10 are provided at a bottom part of a cart
body 13. As a result of the wheels 14 being provided at the bottom
part of the cart body 13, a person can easily move the conveying
cart 11. Further, an actuator part 17 is provided at a top part of
the cart body 13, and, a work 19 is detachably mounted at an
extending end of an actuator arm 18 extending from the actuator
part 17.
The actuator arm 18 can be moved three-dimensionally by the
actuator part 17. Further, a plurality of semiconductor substrates
(wafers of 300 mm, for example) are contained in the work 19
mounted on the actuator arm 18. Accordingly, the work 19 can be
moved three-dimensionally by the actuator part 17.
As mentioned above, there are cases where semiconductor substrates
should be conveyed manually between respective semiconductor
manufacturing apparatuses. In such a case, the conveying cart 11
shown in FIGS. 1 and 2 is used, and, the semiconductor substrates
are conveyed in a condition in which the semiconductor substrates
are loaded in the work 19 of the conveying cart 11, by a
person.
When the semiconductor substrates are thus conveyed to the
semiconductor manufacturing apparatus 12, the conveying cart 11 is
fastened to the semiconductor manufacturing apparatus 12 by using
the fastening device 10. Then, when the conveying cart 11 is
fastened to the semiconductor manufacturing apparatus 12, the work
19 mounted on the conveying cart 11 is then loaded to the
semiconductor manufacturing apparatus 12.
The semiconductor manufacturing apparatus 12 shown in FIG. 1 has a
work loading room 20 into which the work 19 is thus loaded. When
the conveying cart 11 is fastened to the semiconductor
manufacturing apparatus 12, the work 19 is located in the work
loading room 20. Then, in this state, the actuator part 17 is
driven, thereby, the actuator arm 18 is moved, and, thereby, the
work 19 is loaded at a predetermined position in the work loading
room 20.
Further, a handling device not shown in the figures is provided in
the semiconductor manufacturing apparatus 12, and, thereby, the
semiconductor substrate (300-mm wafer) loaded in the work 19 is
conveyed to a predetermined processing part in the semiconductor
manufacturing apparatus 12. Then, after a process is performed on
the semiconductor substrate by this semiconductor manufacturing
apparatus 12, the handling device loads the semiconductor
substrates into the work 19 again.
Then, after the process is performed on all the semiconductor
substrates contained in the work 19 by the semiconductor
manufacturing apparatus 12, the actuator part 17 loads the work 19
into the conveying cart 11 again. Then, when the work 19 is loaded
into the conveying cart 11, the operator cancels the fastening by
the fastening device 10, and conveys the conveying cart 11 to the
other semiconductor manufacturing apparatus which then performs a
subsequent process on the semiconductor substrates.
The above-mentioned fastening device 10 for fastening the conveying
cart 11 to the semiconductor manufacturing apparatus 12 will now be
described in detail.
The fastening device 10 includes the fastening mechanism 15 and a
flange 25, generally. As mentioned above, the fastening mechanism
15 is provided at the bottom part of the cart body 13 of the
conveying cart 11. The flange 25 is fixed onto a floor 22 in a
bottom step part 21 provided at the bottom of the semiconductor
manufacturing apparatus 12, as shown in FIG. 1.
The flange 25 is one to which the conveying cart 11 is fastened,
and, has a configuration in accordance with SEMI (Semiconductor
Equipment and Materials International) standard, E83. Specifically,
as shown in FIGS. 3A and 3B, the flange 25 has a pin 27 standing at
a center of a body part 26 thereof with respect to a longitudinal
direction, and, also, has a low rib 30 and a high rib 31 also
standing from the body part 26.
Recently, a semiconductor wafer is enlarged, and, as mentioned
above, a 300-mm wafer is used. Accordingly, it is necessary to
configure the semiconductor manufacturing equipment using the
300-mm wafers to be in accordance with the SEMI standard.
In the embodiment of the present invention, the flange 25 is
configured to be in accordance with the SEMI standard, E83, and the
conveying cart 11 is fastened thereto. Accordingly, it is possible
to use the conveying cart 11 in the semiconductor manufacturing
equipment following the SEMI standard, and to use the conveying
cart 11 in the manufacturing equipment for the 300-mm wafers.
Further, an engagement hole 28 (recess) is formed in the body part
26 of the flange 25. This engagement hole 28 is provided on one
side of the pin 27, and, a power supply unit 29 is provided
therein. As the power supply unit 29 is connected to a power
receiving unit 42 provided in the conveying cart 11, the power
supply unit 29 supplies power to the conveying cart 11. For this
purpose, as shown in FIG. 7, the power supply unit 29 is connected
with a power source 55.
Operation of a control circuit 52 provided between the power supply
unit 29 and power source 55, shown in FIG. 7, will be described
later.
With reference to FIGS. 4, 5 and 6, the above-mentioned fastening
mechanism 15 will now be described.
The fastening mechanism 15 generally includes a positioning roller
35, a positioning hook (first hook member) 36, a fastening hook
(second hook member) 37, a pressing roller 38, and so forth.
The positioning roller 35 is provided on a side part of the
conveying cart 11, and comes into contact with a side surface 32 of
the flange 25 when the conveying cart 11 is fastened to the flange
25.
The positioning hook 36 is provided to the right (in an arrow Y2
direction shown in FIGS. 4 and 5) of the positioning roller 35.
When the conveying cart 11 is fastened to the flange 25, the
positioning hook 36 engages with the pin 27 of the flange 25, and,
thereby, positions the conveying cart 11 with respect to the flange
25. For this purpose, an extending end of the positioning hook 36
has a hook shape such as to render an improved performance in
engagement with the pin 27.
This positioning hook 36 is mounted on a base member 45 provided in
the conveying cart 11, rotatably. Specifically, a shaft 39 stands
from the base member 45, and the positioning hook 36 is supported
on the shaft 39 rotatably around the shaft 39.
A spring 40 is provided between the positioning hook 36 and base
member 45, and, thereby, the positioning hook 36 is pressed so as
to rotate clockwise in FIG. 4. Thereby, during a time other than a
time at which the conveying cart 11 is fastened to the flange 25,
the positioning hook 36 projects obliquely from a side part of the
conveying cart 11, as shown by a broken line in FIG. 4.
The fastening hook 37 engages with the engagement hole 28 of the
flange 25, and, thereby, fastens the conveying cart 11 to the
flange 25. As shown in FIG. 6 in a magnified view, this fastening
hook 37 has an approximately L-shape in a side view. Further, the
fastening hook 37 has engagement claws 41, the power receiving unit
42, a sliding part 47, a rotating arm 48, a wire 51 and so forth
provided thereto.
The engagement claws 41 are provided so as to sandwich the power
receiving unit 42 at an extending end part of the fastening hook
37. The engagement claws 41 engage with the engagement hole 28 of
the flange 25, and, thereby, fasten the conveying cart 11 to the
flange 25 (semiconductor manufacturing apparatus 12). When engaging
with the engagement hole 28, the engagement claws 41 make the
engagement after climbing over the body part 26 of the flange 25.
Therefore, tapers are formed at the outside of the bottom part of
the engagement claws 41.
The power receiving unit 42 is electrically connected with the
power supply unit 29 provided in the engagement hole 28 of the
flange 25, when the conveying cart 11 is fastened to the
semiconductor manufacturing apparatus 12. Specifically, terminals
43 are provided in the power receiving unit 42, come into
electrically contact with contact parts (not shown in the figures)
of the power supply unit 29, and, thereby, the power supply unit 29
and power receiving unit 42 are electrically connected.
As shown in FIG. 7, the power supply unit 29 and power receiving
unit 42 cooperatively configure a sensor part 53 and a connector
part 54. The sensor part 53 is used for detecting a connection
condition between the power supply unit 29 and the sensor part 53,
and the detection signal therefrom is transmitted to the control
circuit 52. The connector part 54 is used for electrically
connecting the power source 55 provided in the semiconductor
manufacturing apparatus 12 to the actuator part 17 provided in the
conveying cart 11.
Thus, as a result of the conveying cart 11 being fastened to the
flange 25 (semiconductor manufacturing apparatus 12), and the power
supply unit 29 being connected with the power receiving unit 42 in
the connector part 54, the actuator part 17 is connected with the
power source 55 via the power receiving unit 42, power supply unit
29 and control circuit 52. At this time, power supplied to the
actuator part 17 is controlled by the control circuit 52.
Accordingly, the driving of the actuator part 17 is controlled by
the control circuit 52.
Operation of the control circuit 52 and a function of the sensor
part 53 performed when the fastening hook 37 engages with the
engagement hole 28 will now be described.
In the embodiment of the present invention, at a time the fastening
hook 37 engages with the engagement hole 28, power is not
immediately supplied to the actuator part 17 from the power source
55. Power is supplied to the actuator part 17 from the power source
55 based on a signal obtained through the sensor part 53. That is,
after a signal indicating that the power supply unit 29 is
electrically connected with the power receiving unit 42 is obtained
from the sensor part 53, the control circuit 52 supplies the power
of the power source 55 to the power receiving unit 42 from the
power supply unit 29.
Accordingly, no power supply is performed from the power source 55
to the actuator part 17 while the power supply unit 29 is not yet
electrically connected with the power receiving unit 42. After the
control circuit 52 determines based on the signal obtained from the
sensor part 53 that the power supply unit 29 is electrically
connected with the power receiving unit 42, the control circuit 52
supplies power from the power supply unit 29 to the power receiving
unit 42. Thereby, it is possible to prevent power supply from being
started from the power source 55 in a connection condition in which
electrical connection between the power supply unit 29 and power
receiving unit 42 is incomplete. Thus, safe operation can be
secured.
With reference to FIGS. 4, 5 and 6, description of the fastening
mechanism 15 will now be continued.
The sliding part 47 is provided at a standing part of the fastening
hook 37. This sliding part 47 is slidably mounted onto a guiding
part 46 provided on the base member 45.
Thereby, the fastening hook 37 is movable in vertical directions in
FIG. 6 along the guiding part 46. Further, the fastening hook 37 is
always pressed by an elasticity part, not shown in the figure, so
as to move downward in FIG. 6 (in an arrow Z2 direction in the
figure).
An engagement pin 50 stands at a top end part (at an end in an
arrow Z1 direction in FIG. 6) of the fastening hook 37. This
engagement pin 50 engages with one end part of the rotating arm 48.
Further, the rotating arm 48 is rotatably supported onto the shaft
49 provided onto the base member 45. Accordingly, as the rotating
arm 48 rotates around the shaft 49, the fastening hook 37 moves in
the arrow Z1 and Z2 directions in FIG. 6 along the guiding part
46.
Further, the rotating arm 48 is pulled by the wire 51 so as to
rotate. The bottom end of the wire 51 is fixed to the rotating arm
48, and, also, the top end thereof is connected to an operating
lever 60, shown in FIG. 1. This operating lever 60 is provided at a
position on the conveying cart 11 such that an operator can easily
operate the operating lever 60. As the operator operates the
operating lever 60, the operating lever 60 pulls the wire 51.
Thus, when the operator operates the operating lever 60, which
thereby pulls the wire 51, the rotating arm 48 connected with the
wire 51 is then pulled by the wire 51, and thereby rotates toward a
position shown by a broken line from a position shown by a solid
line, against an elastic force of the above-mentioned elasticity
part, not shown in the figures. Thereby, the fastening hook 37
moves in the arrow Z1 direction in FIG. 6, the engagement claws 41
are separated from the engagement hole 28 and the engagement
therebetween is canceled. Also, simultaneously, the power receiving
unit 42 is separated from the power supply unit 29 and the electric
connection therebetween is canceled.
As the fastening hook 37 is thus separated from the engagement hole
28, the fastening of the conveying cart 11 to the flange 25 is
canceled. Thus, the operator can cancel the fastening of the
conveying cart 11 to the flange 25 only by operating the operating
lever 60. Accordingly, it is easy for the operator to cancel the
fastened state. The above-mentioned rotating arm 48, wire 51 and
operating lever 60 form an engagement canceling mechanism.
The pressing roller 38 is provided to the right (in an arrow Y2
direction in FIG. 4) of the fastening hook 37, as shown in FIGS. 4
and 5. This pressing roller 38 projects outward from the side part
of the conveying cart 11, and is pressed outward by the spring
44.
Further, the pressing roller 38 comes into contact with the side
surface 32 of the flange 25 in a condition in which the conveying
cart 11 is fastened to the flange 25. Because the pressing roller
38 is elastically pressed by the spring 44 as mentioned above, the
pressing roller 38 presses the side surface 32 in the condition in
which the pressing roller 38 is in contact with the side surface 32
of the flange 25. The pressing roller 38 and spring 44 form a
biasing force generating mechanism.
Operation by the above-described fastening device 10 of fastening
the conveying cart 11 to the semiconductor manufacturing apparatus
12 (flange 25) will now be described. FIGS. 8, 9 and 10 show
operating steps thereof in sequence.
In order to fasten the conveying cart 11 to the semiconductor
manufacturing apparatus 12 (flange 25), first, an operator causes
the positioning roller 35 provided onto the side part of the
conveying cart 11 to come into contact with the side surface 32 of
the flange 25, as shown in FIG. 8. At this time, the positioning
hook 36 is caused to be located backward with respect to the pin 27
provided onto the flange 25 with respect to a direction in which
the conveying cart 11 is thus moved (an arrow Y1 direction in FIG.
8).
Thereby, the position at which the positioning roller 35 is
provided on the conveying cart 11 is positioned as a result of
being guided by the flange 25. However, the positioning at this
time is not one fixing the position of the conveying cart 11, and,
the conveying cart 11 can move in arrow Y1, Y2 directions in the
figure along the side surface 32 of the flange 25.
Then, the operator further moves the conveying cart 11 toward the
semiconductor manufacturing apparatus 12 (flange 25) while moving
it in the arrow Y1 direction. As mentioned above, the positioning
hook 36 extends obliquely backward on the side part of the
conveying cart 11. Thereby, as the conveying cart 11 is moved
toward the flange 25, the positioning hook 36 comes into contact
with the low rib 30 formed on the flange 25. Then, as the conveying
cart 11 is moved in the arrow Y1 direction in the figure, the
positioning hook 36 moves in the arrow Y1 direction along the low
rib 30.
Then, as the hook-shape part at the extending end of the
positioning hook 36 reaches the position at which the pin 27 is
formed on the flange 25, as shown in FIG. 9, the positioning hook
36 engages with the pin 27. Thereby, the conveying cart 11 and
flange 25 are prevented from moving with respect to each other, by
the positioning hook 36.
In this state, as the conveying cart 11 is further moved in the
arrow Y1 direction, the positioning hook 36 rotates so that the
conveying cart 11 approaches the flange 25. Thereby, also the
fastening hook 37 provided on the conveying cart 11 approaches the
engagement hole 28 formed in the flange 25.
At this time, guidance of movement (that is, positioning) of the
conveying cart 11 with respect to the flange 25 is made both at the
position at which the positioning roller 35 is in contact with the
side surface 32 and at the position at which the positioning hook
36 engages with the pin 27. Accordingly, in comparison to a case
where the guidance is made only by the positioning hook 36, it is
possible to easily and precisely perform the guidance of movement
of the conveying cart 11 with respect to the flange 25.
Then, as the conveying cart 11 is further caused to approach the
flange 25, the fastening hook 37 climbs over the body part 26 of
the flange 25, and, the engagement claws 41 formed at the extending
end of the fastening hook 37 are inserted into the engagement hole
28. Thereby, as shown in FIG. 10, the fastening hook 37 engages
with the engagement hole 28.
At this time, as mentioned above, the fastening hook 37 is pressed
downward (in the arrow Z2 direction in FIG. 6) by the elasticity
part, not shown in the figures. Thereby, the fastening hook 37 is
positively engages with the engagement hole 28. As a result, the
conveying cart 11 is fastened to the semiconductor manufacturing
apparatus 12 (flange 25).
When this fastening operation is performed, the operator should not
check by his or her eyes the condition of engagement between the
fastening mechanism 15 and flange 25. The operator merely moves the
conveying cart 11 in the arrow Y1 direction while causing the
positioning roller 35 to be in contact with the side surface 32 of
the flange 25, and, after the positioning hook 36 engages with the
pin 27 of the flange 25, moves the conveying cart 11 so as to cause
it to approach the flange 25. Only thereby, it is possible for the
operator to fasten the conveying cart 11 to the semiconductor
manufacturing apparatus 12 (flange 25). Accordingly, by the
fastening device 10 in the embodiment of the present invention, it
is possible to easily fasten the conveying cart 11 to the
semiconductor manufacturing apparatus 12 (flange 25).
Further, as mentioned above, the power supply unit 29 is provided
in the engagement hole 28, and the power receiving unit 42 is
provided at the extending end of the fastening hook 37. Then, as
the fastening hook 37 engages with the engagement hole 28, the
power receiving unit 42 is connected with the power supply unit
29.
Accordingly, by the configuration according to the present
invention, it is possible to perform both the operation of
fastening the conveying cart 11 to the semiconductor manufacturing
apparatus 12 (flange 25) and the operation of electrically
connecting the conveying cart 11 with the semiconductor
manufacturing apparatus 12 simultaneously. Thereby, it is possible
to simplify the operation performed at the time of fastening in
total. Further, because power is supplied from the semiconductor
manufacturing apparatus 12 to the conveying cart 11, it is not
necessary to provide a power source in the conveying cart 11.
Accordingly, it is possible to simplify the configuration of the
conveying cart 11.
Further, in the condition in which the conveying cart 11 is
fastened to the semiconductor manufacturing apparatus 12 (flange
25), the pressing roller 38 comes into contact with the side
surface 32 of the flange 25. At this time, because the pressing
roller 38 is pressed by the spring 44 outward, the pressing roller
38 presses the side surface 32 of the flange 25.
As the pressing roller 38 thus presses the side surface 32 of the
flange 25, a force is applied to the conveying cart 11 such that
the conveying cart 11 will be separated from the flange 25 (this
force being referred to as a biasing force, hereinafter). This
biasing force is also applied at the position at which the
engagement hole 28 engages with fastening hook 37.
The direction in which this biasing force is applied at the
engagement position between the engagement hole 28 and fastening
hook 37 is such that this biasing force functions to press the
engagement claws 41 of the fastening hook 37 against an inner wall
of the engagement hole 28.
Thus, this biasing force functions to increase the engagement force
between fastening hook 37 and engagement hole 28. Accordingly, by
providing the pressing roller 38, it is possible to perform
fastening between the conveying cart 11 and semiconductor
manufacturing apparatus 12 (flange 25) more positively.
In order to cancel the fastened state between the conveying cart 11
and semiconductor manufacturing apparatus 12 (flange 25), the
operator merely should operate the operating lever 60 provided on
the conveying cart 11 mentioned above. Thereby, the fastening hook
37 is separated from the engagement hole 28, and, thus, it is
possible to cancel the fastened state easily.
Further, in the above-described embodiment, the configuration of
conveying the 300-mm wafers by the conveying cart 11 has been
described, for example. However, the present invention is not
limited to being applied to the conveying cart 11 conveying
semiconductor substrates, and, may also be applied to a conveying
cart which conveys components/parts such as liquid crystal
substrates or the like, for example, other than semiconductor
substrates.
As described above, in the fastening device according to the
present invention, the pin (27) stands at a central position of the
flange (25) with respect to a longitudinal direction thereof, and
the flange further includes the low rib (30) and high rib (31) each
standing and extending along the longitudinal direction.
The above-described flange is based on SEMI (Semiconductor
Equipment and Materials International) standard. Accordingly,
according to the present invention, it is possible to positively
fasten the conveying cart to the to-be-fastened apparatus in a
semiconductor manufacturing equipment dealing with 300-mm
wafers.
That is, recently, a semiconductor wafer is enlarged, and, the
300-mm wafer is used. Accordingly, it is necessary to configure the
semiconductor manufacturing equipment using the 300-mm wafers to be
in accordance with the SEMI standard.
The SEMI standard concerning the flange is prescribed in E83.
Accordingly, by causing the flange to follow the E83 of SEMI
standard, and, providing a configuration such that the conveying
cart 11 is fastened thereto, it is possible to use the conveying
cart in the semiconductor manufacturing equipment following the
SEMI standard, and, thereby, to use the conveying cart for
conveying the 300-mm wafers.
The fastening device further includes the power supply unit (29) in
the recess (28) and the power receiving unit (42) on the second
hook member (37), the power supply unit and power receiving unit
being electrically connected as a result of the second hook member
engaging with the recess.
Thereby, the power supply unit is electrically connected with the
power receiving unit when the conveying cart is fastened to the
to-be-fastened apparatus. Accordingly, it is possible to perform
both the operation of fastening the conveying cart to the
to-be-fastened apparatus and the operation of electrically
connecting the power supply unit with the power receiving unit,
simultaneously. Thus, it is possible to simplify the operation of
fastening totally. Further, because the conveying cart receives
power from the to-be-fastened apparatus, it is not necessary to
provide a power source in the conveying cart, and it is possible to
simplify the configuration of the conveying cart.
The control device is provided in at least one of the conveying
cart (11) and to-be-fastened apparatus (12), and, also, the sensor
part (53) for detecting electrical connection between the power
supply unit and power receiving unit is provided, and the control
device supplies power from the power supply unit to the power
receiving unit after the electrical connection between the power
supply unit and power receiving unit is detected based on a signal
obtained from the sensor part.
Thereby, unless the power supply unit and power receiving unit are
electrically connected, no power supply is made therebetween.
Accordingly, it is possible to prevent power supply from being
started in a condition in which electrical connection between the
power supply unit and power receiving unit is incomplete. Thereby,
it is possible to secure safety.
The fastening device further includes the engagement canceling
mechanism (48, 51 and 60) for canceling engagement between the
second hook member and recess.
By using the engagement canceling mechanism, it is easy for an
operator to cancel the engagement between the second hook member
and recess.
The engagement canceling mechanism includes the operation lever
(60) operated by the operator and the wire (51) connecting between
the operating lever and second hook member, engagement between the
second hook member and recess being cancelled as a result of the
operating lever being operated by the operator.
Thereby, when the operator operates the operating lever, the wire
is pulled thereby, and, as a result, the second hook member is
separated from the recess. Accordingly, only operation of the
operating lever by the operator can cancel the engagement between
the conveying cart and to-be-fastened apparatus, and, as a result,
the operation performed by the operator for the engagement
cancellation is simplified.
The fastening device further includes the roller (38) on the
fastening mechanism (15) for positioning the conveying cart with
respect to the to-be-fastened apparatus as a result of the roller
coming into contact with a side surface of the flange.
Thereby, positioning of the conveying cart with respect to the
to-be-fastened apparatus is performed not only through the first
hook member but also through the contact of the roller with the
side surface of the flange. Accordingly, positioning of the
conveying cart with respect to the to-be-fastened apparatus at the
time of fastening can be performed easily.
The fastening device further includes the biasing force generating
mechanism (38, 44) on the fastening mechanism generating the
biasing force between the to-be-fastened apparatus and fastening
mechanism, the biasing force functioning as an engagement force by
pressing a side surface of the flange.
Thereby, while the conveying cart is fastened to the to-be-fastened
apparatus, the biasing force generating mechanism presses the side
surface of the flange. Accordingly, the biasing force occurs
between the to-be-fastened apparatus and fastening mechanism,
specifically, between the second hook member and recess. This
biasing force functions as a force preventing the second hook
member being separated from the recess. As a result, the fastening
between the conveying cart and to-be-fastened apparatus can be made
positively.
The present invention is not limited to the above-described
embodiment, and variations and modifications may be made without
departing from the scope of the present invention.
The present application is based on Japanese priority application
No. 2000-248926, filed on Aug. 18, 2000, the entire contents of
which are hereby incorporated by reference.
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