U.S. patent number 3,920,990 [Application Number 05/466,220] was granted by the patent office on 1975-11-18 for device for analysing a surface layer by means of ion scattering.
This patent grant is currently assigned to U.S. Philips Corporation. Invention is credited to Nicolaas Hazewindus, Adrianus Martinus Maria Otten, Jacob Maria Van Nieuwland.
United States Patent |
3,920,990 |
Van Nieuwland , et
al. |
November 18, 1975 |
Device for analysing a surface layer by means of ion scattering
Abstract
A device for analysing a surface layer by means of ion
scattering. The device comprises an energy analyzer having two
coaxial cylindrical electrodes. The axis of the primary
monoenergetic ion beam coincides with the axis of the cylindrical
electrodes. The back-scattered ions the path of which lie at a
conical surface having half an apex of 180.degree. reduced by the
back scattering angle are selected and detected for energy. The
detector is annular. The primary ion beam is injected via the
aperture in the center of the annular detector.
Inventors: |
Van Nieuwland; Jacob Maria
(Eindhoven, NL), Hazewindus; Nicolaas (Eindhoven,
NL), Otten; Adrianus Martinus Maria (Eindhoven,
NL) |
Assignee: |
U.S. Philips Corporation (New
York, NY)
|
Family
ID: |
19818814 |
Appl.
No.: |
05/466,220 |
Filed: |
May 2, 1974 |
Foreign Application Priority Data
Current U.S.
Class: |
850/9; 250/294;
250/283; 250/310 |
Current CPC
Class: |
H01J
37/252 (20130101); H01J 49/482 (20130101) |
Current International
Class: |
H01J
37/252 (20060101); H01J 49/48 (20060101); H01J
49/00 (20060101); G01M 023/00 () |
Field of
Search: |
;250/283,294,309,310 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Dixon; Harold A.
Attorney, Agent or Firm: Trifari; Frank R. Nigohosian;
Leon
Claims
What is claimed is:
1. A device for analyzing a surface layer by means of ion
scattering, comprising:
a. means for producing a substantially mono-energetic primary ion
beam and comprising an ion source;
b. a substantially annular diaphragm aperture adapted to pass said
ions scattered at said surface layer at a predetermined angle with
respect to the axis of said ion beam, said angle exceeding
90.degree. with respect to the original direction of said primary
ion beam;
c. an electrostatic analyzer comprising two substantially
cylindrical hollow electrodes coaxially disposed with respect to
each other, said analyzer having an axis substantially coincident
with said primary ion beam axis and being substantially coaxial
with said diaphragm aperture, said ion source being disposed at a
first end of said analyzer and said surface layer being disposed at
the opposite second end of said analyzer; and
d. detector means for determining the kinetic energy of those of
said scattered ions passing through said diaphragm aperture, said
detector means comprising a substantially annular detector element
that is coaxial with said analyzer and extends around said primary
ion beam axis, said detector being removed from said surface layer
in the direction of said ion source.
2. A device as in claim 1, wherein the average value of said angle
is about between 137.degree. and 150.degree..
Description
The invention relates to a device for analysing a surface layer by
means of ion scattering and comprising: means to produce a primary
substantially monoenergetic ion beam, a diaphragm aperture for
passing ions which are scattered at the surface layer at a
previously determined angle with respect to the axis of the primary
ion beam, and an electrostatic analyser and a detector to determine
the kinetic energy of the scattered ions passed through the
diaphragm.
Such a device is known from the U.S. Pat. Specification No.
3,480,774. In such an ion scattering spectrometer the surface layer
to be examined is bombarded with a primary ion beam. The ions of
said beam collide with the atoms of the surface layer, which
collisions may in certain conditions be considered as being
elastic. This means that the kinetic energy of an ion after the
collision may be calculated by means of the laws of conservation of
energy and momentum. If
E.sub.1 = kinetic energy of an ion prior to collision
E.sub.2 = kinetic energy of an ion after collision
M.sub.1 = MASS OF THE ION
M.sub.2 = MASS OF THE ATOM IN THE SURFACE LAYER AGAINST WHICH THE
ION COLLIDES
.gamma. = M.sub.2 /M.sub. 1
.theta. = the angle of scattering, that is the angle between the
velocity vectors of the ion prior to and after collision, then it
holds if .gamma. > 1 as is known that
E.sub.2 = [ cos .theta. + (.gamma..sup.2 - sin.sup.2
.theta.).sup.1/2 /(1 + .gamma.)].sup.2 E.sub.1 From this it follows
that m.sub.2 can be determined by measuring E.sub.2 if m.sub.1,
E.sub.1 and .theta. are known and if it may be assumed that only
single collisions take place. In an ion scattering spectrometer
this is done as follows. A beam of ions, usually rare gas ions, of
known mass m.sub.1 and known energy E.sub.1 is directed on the
surface layer to be examine. A diaphragm is arranged so that the
direction of scattered ions which pass through the gap enclose a
known angle .theta. with the direction of the primary beam. The
energy of the passed ions is measured in an energy analyser. At a
given voltage at the electrodes of the energy analyser only
scattered ions of a given energy E.sub.2 can pass the analyser.
Given m.sub.1, E.sub.1 and .theta., said energy is therewith
characteristic of the mass m.sub.2 of atoms in the surface layer
which are hit by the primary beam. By varying the voltage at the
electrodes of the analyser, a spectrum can be obtained of the types
of atoms occurring in the surface layer. With given voltages on the
analyser a peak in the signal is obtained which the detector
supplies. The values of the peak is a measure of the relative
quantity of the relevant atoms and the voltage on the analyser
associated with the peak is a measure of the mass of the relevant
atoms.
It is obvious that the angle .theta. must be accurately determined
and the aperture in the diaphragm should therefore be so small that
only few scattered ions are passed. In practice, .theta. should be
determined to an accuracy of 1.degree. to 2.degree. by the
diaphragm, which has for its result for the known device that only
scattered ions within a space angle of 2.degree. .times. 2.degree.
can be accepted so that only a very small signal is formed.
From the article "Zur Energieverteilung der von Protonen in Gasen
ausgelosten Sekundarelektronen" in "Zeitschrift fur Physik" volume
147, pp. 228-240, 1957, an energy analyser is known having two
coaxial cylindrical electrodes. Such an analyser has the advantage
that the paths of the scattered ions which enclose a given angle
with the axis of the analyser, with which axis the axis of the
primary beam coincides, lie on a conical surface. By using an
annular diaphragm having a gap which is 2.degree. wide and has a
circumference of 360.degree., 180 times as many ions are accepted
by the analyser as by the analyser which is used in the device
described in the U.S. Pat. Specification No. 3,480,774. However,
such an analyser could not be used so far in an ion scattering
spectrometer because the primary ion beam must extend along the
axis of the analyser and hence either the surface layer to be
examined or the detector forms an obstruction for the primary ion
beam.
It is the object of the invention to provide an ion scattering
spectrometer in which an energy analyser can be used having two
coaxial cylindrical electrodes. Another object of the invention is
to provide an ion scattering spectrometer which gives a
considerably improved mass separation between the atoms present in
the surface layer and produces a considerably larger signal.
According to the invention, a device of the type mentioned in the
first paragraph is characterized in that the electrostatic analyser
comprises two substantially cylindrical hollow coaxial electrodes,
that the axis of the primary ion beam coincides substantially with
the axis of the analyser, that the diaphragm aperture is
substantially annular and is coaxial with the analyser and has a
position to pass ions which are scattered over an angle exeeding
90.degree., and that the detector is substantially annular and
coaxial with the analyser and surrounds the primary ion beam.
The ions are preferably detected at an average angle of scattering
between 137.degree. and 150.degree.. With said angles of scattering
it is possible to make a second order focus of the scattered ions
on the detector without the scattered ions first passing the axis
of the analyser. A second order focus has the advantage that ions
from a comparatively wide region around the average angle of
scattering are focused on the detector.
The invention will be described in greater detail with reference to
the accompanying drawing, of which
FIG. 1 is a perspective view, partially broken away, of a
cylindrical analyser for a device according to the invention,
and
FIG. 2 is a diagrammatic sectional view of a device according to
the invention.
In FIG. 1, a primary, substantially monoenergetic ion beam 1
impinges upon a target 2 with an energy of, for example, a few
hundred eV. The ions should be selected for mass, charge and
energy, which may be carried out with means which are known from
the prior art and which need no further explanation. Rare gas ions,
for example helium or neon ions, are preferably used. An advantage
of said ions is their large ionisation energy; this results in a
fair chance of their charge being neutralised during the collision,
which, it is true, results in a small number of scattering ions but
also reduces the possibility of detection of multiple collisions
which spoil the measurement. A device according to the invention
has just the property that also in the case of a small number of
scattered ions sufficient signal is still produced by the
detector.
The axis of the primary ion beam 1 coincides with the axis of an
energy analyser 3. The energy analyser 3 comprises two coaxial
cylindrical electrodes 4 and 5. The ions of the beam 1 collide
against atoms in the surface layer of the target 2 and are
scattered. They lose a certain quantity of energy which depends
upon the angle of scattering and the mass of the atom in the
surface layer. The energy analyser 3 measures said loss of energy
for a given angle .theta. (FIG. 2) which exceeds 90.degree.. So
here we have to do with back scattering. The angle .theta. may be,
for example, 141.degree. so that the ions accepted by the energy
analyser describe paths over the surface of a cone with an apex of
78.degree.. The angle .theta. is determined by the position of the
diaphragm aperture 6 in the cylindrical electrode 4 relative to the
target 2. In the radial electric field between the electrodes 4 and
5 the scattered ions describe quasi-parabolic paths, a few of which
are denoted by 7, 8, 9 and 10, and can pass through the second
diaphragm aperture 11 only at a given potential difference between
the elctrodes 4 and 5 which is a measure of their energy. The
energy analyser 3 focuses ion paths which start in the point 12 on
the target 2 in an annular focus behind the diaphragm aperture 11.
At this area an annular detector 13 is arranged to detect the
scattered ions. Said annular detector 13 surrounds the primary ion
beam 1 so that same can reach the target 2 without hindrance.
FIG. 2 shows for further explanation a sectional view of a device
according to the invention namely along a plane through the axis of
the primary ion beam 1. The beam 1 is produced by an ion source 14
extracted by an extraction electrode 15, focused by focusing
electrodes 16 and 17 and selected for mass by a mass filter 18. The
energy analyser 3 has the same reference numerals as in FIG. 1.
For a good operation of the energy analyser, the electric field
between the electrodes 6 and 7 should be everywhere equal to the
field between two infinitely long coaxial cylinders. Since the
cylinders in practice have a restricted length, electrodes should
be provided so as to establish the boundary conditions for the
field and possibly slightly correct the field. For that purpose the
cylinders 4 and 5 are closed by means of the plates 19 and 20 which
are not shown in FIG. 1 for clarity. The plates 19 and 20 introduce
an average potential between that of the cylinders 4 and 5. It is
also possible to divide the plates 19 and 20 into several
electrodes having different potentials so as to obtain a better
approximation of the required electric field. The plates may also
be manufactured from a material having a large electric resistance
and be connected to the cylinders 4 and 5 so as to obtain a
uniformly varying potential.
As already noted, a device according to the invention operates with
back scattering. Although fewer ions are scattered in the backward
direction than in the forward direction, the device according to
the invention is just very suitable to detect small quantities of
ions. The described back scattering on the contrary has important
advantages. First, when the primary beam impinges upon the target
approximately perpendicularly, the possibility of sputtering is so
much smaller so that the surface layer of the sample is less
damaged by the primary beam. At an angle of incidence of
90.degree., sputtering often occurs only at 60 eV, while at an
angle of incidence of 45.degree. 10 eV is already sufficient.
Second, the possibility of multiple collisions which spoil the
measured result is much smaller with an approximately perpendicular
incidence of the primary beam on the target than with angles of
incidence smaller than 90.degree..
In the derivation of the collision formula used, the movement of
the atoms of the target has been neglected. This movement gives a
widening of the peak in the signal of the detector. Cooling of the
target may thus be of advantage so as to be able to distinguish
from each other peaks of the spectrum which are situated
immediately beside each other.
A low-energy electron gun or a filament may be arranged near the
target so as to ensure in known manner for space charge
compensation. It is furthermore possible to slowly peel the target
layer by layer by means of a separate ion beam or by means of the
primary beam with increased intensity, so as to be able to thus
analyse deeper situated layers also.
The inner diameter of the electrode 5 in the device shown in the
drawing is 125 mm and the outer diameter of the electrode 4 is 50
mm. The distance between the point 12 on the target 2 and the
centre of the annular detector 13 is 90 mm. The angle .theta. is
141.degree.. The electrode 4 is earthed in connection with the
transport of the primary ion beam 1. For selecting ions with an
energy of V electron volt the potential of the electrode 5
(relative to the electrode 4) should then be V volt.
The ion source 14 supplies a flow of ions of the order of magnitude
of a few nanoamperes to a few microamperes with an energy which is
adjustable from a few tens of volts to a few kilovolts. As already
noted, rather high requirements are imposed upon the energy
spreading of the ions which emerge from the ion source. In practice
this should be between 0.1 and 1.0 eV, which is possible with ion
sources known from the prior art.
The mass filter 18 preferably consists of the known Wien filter. In
this filter the beam is subjected to the influence of an electric
and a magnetic field the directions of which extend perpendicular
to each other and to the axis of the beam. This has for its result
that of the substantially mono-energetic ion beam only ions having
one given mass are not deflected and can pass the filter. The other
ions are deflected indeed and are intercepted at some distance from
the mass filter by means of a diaphragm.
The detector 13 must detect such a small ion flow that direct
current measurement is not possible with sufficient accuracy. In
the embodiment a so-called channel plate is used as a detector
which consists of a plate having a very large number of extremely
thin secondary emitting channels. Per incident ion, which after
passing the diaphragm aperture 11 is post-accelerated to an energy
of a few kilovolts by giving the detector a suitable potential
relative to the electrode 4, such a channel plate supplies 10.sup.4
to 10.sup.8 electrons at the output. Per ion said electrons form an
electron pulse. The pulse frequency is measured with known electric
means and thus forms a measure of the number of ions entering the
detector per second and hence of the ion flow.
* * * * *